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    • 10. 发明专利
    • Device and method for controlling meandering of pattern of patterned film
    • 用于控制图形图案的装置和方法
    • JP2012230380A
    • 2012-11-22
    • JP2012096419
    • 2012-04-20
    • Dongwoo Fine-Chem Co Ltd東友ファインケム株式会社
    • YONG GUN YOONPARK IL-WOOKIM YONG-HWANCHOI BONG JIN
    • G09F9/00B29C59/04B65H26/02
    • G03F9/7088B41P2233/52B65H23/0216B65H2301/5111B65H2553/42B65H2801/61
    • PROBLEM TO BE SOLVED: To provide a device capable of accurately controlling meandering of a pattern of a film.SOLUTION: A control device comprises a film transferring device and a pattern forming device and controls meandering of patterns for use in a patterned film manufacturing device. The control device comprises: a marking unit that forms markings at predetermined reference positions being positioned using the film transferring device as a reference, on the film; a recognizing unit that is located at the rear of the marking unit and recognizes positions of the markings on the film; a computing unit that computes an amount of meandering on the basis of the reference position of the marking unit and differences in length between the positions of markings recognized by the recognizing unit; a control unit that generates a correction signal for correcting positions of the marking unit and the pattern forming device correspondingly to the amount of meandering computed by the computing unit; and a correction unit that receives the correction signal generated by the control unit and corrects positions of the marking unit and the pattern forming device before pattern formation.
    • 要解决的问题:提供能够精确地控制胶片图案的曲折的装置。 解决方案:控制装置包括胶片转印装置和图案形成装置,并控制在图案化胶片制造装置中使用的图案的曲折。 所述控制装置包括:标记单元,其在所述胶片上使用所述胶片转印装置作为基准定位在预定参考位置处的标记; 识别单元,其位于所述标记单元的后部,并识别所述胶片上的所述标记的位置; 计算单元,其基于所述标记单元的参考位置计算曲折量,并且由所述识别单元识别的标记的位置之间的长度差; 控制单元,根据由计算单元计算出的曲折量,生成用于校正标记单元和图案形成装置的位置的校正信号; 以及校正单元,其接收由所述控制单元生成的校正信号,并且在图案形成之前校正所述标记单元和所述图案形成装置的位置。 版权所有(C)2013,JPO&INPIT