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    • 4. 发明专利
    • Device for removing adhered substance
    • 用于去除附着物质的装置
    • JP2011235259A
    • 2011-11-24
    • JP2010110954
    • 2010-05-13
    • Sawa Corporation株式会社サワーコーポレーション
    • OKAMOTO YOSHIHIROTAKEDA MITSUHIROKAWAMOTO SUGURU
    • B08B11/00B08B1/02B08B3/02B08B7/04
    • B08B7/0028B08B1/007B08B3/12B23K1/0016B23K1/018B23K3/0607B23K3/08B23K2201/42H05K3/3478
    • PROBLEM TO BE SOLVED: To provide an adhered substance-removing device in which adhered substances are removed from a wiping sheet used for wiping off the adhered substances such as solder, which spread over a surface of a metal mask plate, and the wiping sheet is reused several times.SOLUTION: The adhered substance-removing device includes a suction removal unit 50 configured to suck and remove a liquid medium with which a wiping sheet S is impregnated and adhered substances which is separated from the wiping sheet by an oscillation unit 40 and re-adhered to the surface of the wiping sheet S. The suction removal unit 50 includes a cylindrical suction nozzle 51 having suction holes 51a on the surface wound around by the wiping sheet S, and a suction pump 52 for sucking air in the suction nozzle 51. The suction pump 52 is connected to the suction nozzle 51, and a lid member is detachably attached to an opening of the suction nozzle.
    • 要解决的问题:提供一种粘附物质除去装置,其中从用于擦拭在金属掩模板的表面上扩散的诸如焊料的附着物质的擦拭片除去附着物质, 擦拭纸被重复使用几次。 粘附物质除去装置包括吸引除去单元50,该抽吸去除单元50吸收和除去通过振动单元40从擦拭片中分离出的擦拭纸S浸渍的液体介质和附着物质,并且重新 吸附除去单元50包括:在由擦拭片S卷绕的表面上具有吸孔51a的圆筒形吸嘴51和用于吸入吸嘴51中的空气的抽吸泵52 抽吸泵52连接到吸嘴51,并且盖构件可拆卸地附接到吸嘴的开口。 版权所有(C)2012,JPO&INPIT
    • 9. 发明专利
    • Polishing device and polishing method of semiconductor wafer
    • 抛光装置和抛光方法的SEMICONDUCTOR WAFER
    • JP2006080138A
    • 2006-03-23
    • JP2004259692
    • 2004-09-07
    • Matsushita Electric Ind Co Ltd松下電器産業株式会社
    • ITOU FUMITAKA
    • H01L21/304B24B37/04
    • B08B1/007B08B3/02
    • PROBLEM TO BE SOLVED: To improve wafer yield by removing almost thoroughly the adhesive foreign matter in the wafer holder of a polishing head in CMP. SOLUTION: A polishing device is provided with a wafer holding fixture 4 for attaching a wafer, a polishing unit for polishing the wafer by supplying polishing slurry to the wafer, a wafer put-in/out unit for attaching/detaching the wafer to/from the wafer holding fixture 4, and a washing unit 7 for washing the wafer holding fixture 4. The wafer holding fixture 4 comprises a wafer contact surface 5 coming into contact with the rear face of the wafer, and a supporter 8 which prevents the wafer from running out. The washing unit 7 has a nozzle 9 for supplying washings to the wafer contact surface 5 and the supporter 8. The nozzle 9 consists of two or more discharge ports which supply at least two or more different fluids. Consequently, the adhesive foreign matter in the wafer holding fixture 4 is removed almost thoroughly so that it is always kept clean. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:通过在CMP中抛光头的晶片保持器中几乎完全去除粘合剂异物来提高晶片产量。 解决方案:抛光装置设置有用于附接晶片的晶片保持固定装置4,用于通过向晶片供给抛光浆料来抛光晶片的抛光单元,用于附接/分离晶片的晶片放入/取出单元 与晶片保持固定装置4连接的晶片保持固定装置4以及用于清洗晶片保持固定装置4的清洗单元7.晶片保持固定装置4包括与晶片的背面接触的晶片接触表面5和防止 晶圆从跑出来。 洗涤单元7具有用于向晶片接触表面5和支撑件8供应洗涤物的喷嘴9.喷嘴9由两个或更多个供应至少两种或更多种不同流体的排出口组成。 因此,晶片保持固定装置4中的粘合剂异物几乎彻底地被去除,从而始终保持清洁。 版权所有(C)2006,JPO&NCIPI