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JP2005091237A Sensor, and method of taking out electrode of sensor 有权
标题翻译：传感器和传感器电极的方法
公开(公告)号：JP2005091237A
公开(公告)日：2005-04-07
申请号：JP2003326921
申请日：2003-09-18
申请人： Yamatake Corp , 株式会社山武
发明人： SANAMI NOBUO , MASUDA HOMARE , KOIZUMI KOICHI , HAMANO HIROYUKI
IPC分类号： G01P15/125 , G01L9/00 , G01L9/12 , G01R27/26 , H01L29/84 , H05H1/24
CPC分类号： G01L9/0075
摘要： PROBLEM TO BE SOLVED: To provide a sensor capable of reducing a macro thermal influence in formation and capable of enhancing measuring precision, by constituting electrode taking-out structure by a wiring member formed by a flame spraying method, and a method for taking out an electrode of the sensor. SOLUTION: Metal powder 30 comprising a fine conductive material fused by a plasma spraying device 45 is plasma-sprayed toward an electrode taking-out hole 7b to form the second wiring member 24. The second wiring member 24 is formed of an accumulation layer of the metal powder 30 accumulated serially continuously on an outer face of the first substrate 2, on an inner face of the electrode taking-out hole 7b, on a cavity space between the electrode taking-out hole 7b and a movable electrode 6, and on a surface of the movable electrode 6, and the movable electrode 6 is thereby drawn out on the outer face of the first substrate 2. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：解决的问题：提供一种传感器，其能够通过由通过火焰喷涂法形成的布线构件构成电极取出结构，能够减少形成中的宏观热影响并提高测量精度，以及用于取出传感器的电极。解决方案：包括由等离子喷涂装置45熔化的导电材料的金属粉末30被等离子体喷射到电极取出孔7b以形成第二配线构件24.第二配线构件24由积累在电极取出孔7b和可动电极6之间的空腔上，在电极取出孔7b的内表面上，在第一基板2的外表面上连续地积累的金属粉末30的层，并且在可动电极6的表面上，并且可动电极6因此在第一基板2的外表面上被拉出。（C）2005年，JPO和NCIPI

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