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    • 3. 发明专利
    • ION GENERATOR
    • JP2002190258A
    • 2002-07-05
    • JP2000387038
    • 2000-12-20
    • RIKAGAKU KENKYUSHONIPPON API CORP
    • ORII TAKAAKIOKADA YOSHIKITAKEUCHI KAZUOMIZOGAMI KAZUAKIHOSHINO KUNIO
    • H01J27/20H01J37/08H01J49/14
    • PROBLEM TO BE SOLVED: To provide a low cost and compact ion generator which can produce efficiently high intensity and stable high meeting point cluster ions or the like. SOLUTION: A high meeting point cluster ion source 1 as an ion generator comprises, a corona discharge chamber 4 which generates charged rare gas by ionizing a rare gas, a cluster growth chamber 6 which generates high melting point cluster ions by letting the vapor of high melting point material with the charged rare gas generated in the corona discharge chamber 4, and a nozzle 8 through which the cluster ions of the material having high melting point generated inside the cluster generation chamber 6 are discharged to the outside. A container 18 which contains the high melting point material is connected to the cluster generation chamber 6 and a laser beam which is emitted from a laser device 20 is guided to the container 18 via a laser beam irradiation window 19 which is formed at the tip of a cylindrical projection 24. The high melting point material which is contained inside the container 18 is irradiated with the laser beam, thereby the vapor of the high melting point material is generated in the same atmosphere as that of the cluster generation chamber 6.
    • 6. 发明专利
    • FINE PARTICLE MEASURING DEVICE, FINE PARTICLE COLLECTING DEVICE, AND FINE PARTICLE ANALYZING DEVICE
    • JP2001208673A
    • 2001-08-03
    • JP2000020722
    • 2000-01-28
    • RIKAGAKU KENKYUSHO
    • SETSU KOSHUOKADA YOSHIKITAKEUCHI KAZUO
    • G01N15/02
    • PROBLEM TO BE SOLVED: To provide a fine particle measuring device for measuring the density (number) or the like of fine particles for each particle diameter at high sensitivity, a fine particle collecting device for collecting the monodisperse fine particles classified according to particle diameter onto a substrate or the like with efficiency in a uniform distribution of fine particle densities, and a fine particle analyzing device for analyzing with high accuracy the composition, structure, physical properties and the like of the fine particles collected on the substrate or the like. SOLUTION: In DMA 2, fine particles contained in an aerosol are classified according to particle diameter based on their electric mobility. After classification the aerosol is introduced into an aerodynamic lens 3 through a valve 13 and the fine particles contained in the aerosol are concentrated into a fine-particle beam B, which is then introduced into a vacuum chamber 5 through a nozzle 4. Thus, only the fine particles focused by the nozzle 4 propagate downward in the form of the fine-particle beam B. The fine particles (fine-particle beam B) separated by the aerodynamic lens 3 and the nozzle 4 are introduced into a high vacuum chamber 12 through the vacuum chamber 5 or the like to perform measurement, collection, analysis and the like of the fine particles inside the high vacuum chamber 12.