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1. 发明专利

JP2002190258A ION GENERATOR 失效
公开(公告)号：JP2002190258A
公开(公告)日：2002-07-05
申请号：JP2000387038
申请日：2000-12-20
申请人： RIKAGAKU KENKYUSHO , NIPPON API CORP
发明人： ORII TAKAAKI , OKADA YOSHIKI , TAKEUCHI KAZUO , MIZOGAMI KAZUAKI , HOSHINO KUNIO
IPC分类号： H01J27/20 , H01J37/08 , H01J49/14
摘要： PROBLEM TO BE SOLVED: To provide a low cost and compact ion generator which can produce efficiently high intensity and stable high meeting point cluster ions or the like. SOLUTION: A high meeting point cluster ion source 1 as an ion generator comprises, a corona discharge chamber 4 which generates charged rare gas by ionizing a rare gas, a cluster growth chamber 6 which generates high melting point cluster ions by letting the vapor of high melting point material with the charged rare gas generated in the corona discharge chamber 4, and a nozzle 8 through which the cluster ions of the material having high melting point generated inside the cluster generation chamber 6 are discharged to the outside. A container 18 which contains the high melting point material is connected to the cluster generation chamber 6 and a laser beam which is emitted from a laser device 20 is guided to the container 18 via a laser beam irradiation window 19 which is formed at the tip of a cylindrical projection 24. The high melting point material which is contained inside the container 18 is irradiated with the laser beam, thereby the vapor of the high melting point material is generated in the same atmosphere as that of the cluster generation chamber 6.

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