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    • 9. 发明专利
    • OPTICAL COORDINATE INPUT ELEMENT
    • JPH01296331A
    • 1989-11-29
    • JP12733888
    • 1988-05-25
    • TOYO BOSEKI
    • YOKOYAMA SEIICHIROSUZUKI TSUNEYUKIIMAGAWA HIROSHISHIMOMURA TETSUO
    • G06F3/042G06F3/03G06K11/06
    • PURPOSE:To make intervals of the linear bodies of electrodes of coordinate input elements at the positions where the linear bodies cross the X- and Y-central axes of a base plate shorter than a prescribed value and to form the electrodes of a minute pattern in a high-resolution and large-area state by an etching and resist technology by forming the electrodes on one surface of the base plate in such a way that the numerous lines of the electrodes cross the center axes of the base plate. CONSTITUTION:The linear electrodes 1 of coordinate input elements used for a coordi nate input device are formed in such a way that a photodetecting thin film is formed by depositing amorphous silicon on a base plate 2 of glass, etc., by a CVD method and A is vapor-deposited on the thin film. Then the minute pattern is formed by etching the A film in such a way that the linear electrodes 1 of the pattern cross the X- and Y-center axes on one surface of the base plate 2 and the electrodes are formed to linear bodies of one or several electrodes. Then the line intervals among the linear bodies at the positions where the linear bodies cross the X- and Y-center axes of the base plate 2 are set to 500mum and electrode terminal sections 3 are formed on both end sections of the linear electrodes 1. Thus the linear electrodes 1 are easily formed in a high-resolution and large-area state.