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    • 2. 发明专利
    • Drawing data generating system, drawing data generating method, drawing data generating program, method for producing reticle and method for fabricating semiconductor device
    • 绘制数据生成系统,绘制数据生成方法,绘制数据生成程序,生产方法和制造半导体器件的方法
    • JP2003022952A
    • 2003-01-24
    • JP2001206541
    • 2001-07-06
    • Toshiba Corp株式会社東芝
    • WATANABE SUSUMUYANO MITSUHIRO
    • G03F1/68G03F1/70G03F7/20H01L21/027G03F1/08
    • G03F1/00
    • PROBLEM TO BE SOLVED: To generate mask drawing data in which the number of master masks to be generated can be minimized.
      SOLUTION: The method for generating drawing data comprises a step (S101) for generating chip division information by dividing a chip pattern such that pattern data obtained by enlarging the chip pattern data of a reticle is contained in the drawing area of a master mask, generating chip layout information of the master mask by assigning the division patterns in the chip division information sequentially to the master mask in the ascending order and registering the chip layout information in a master mask chip layout information memory, a step (S102) for generating the chip pattern data of the master mask by dividing each chip according to the chip layout information of the master mask with reference to the chip pattern data of the reticle and registering the chip pattern data of the master mask in a master mask pattern data memory, and a step (S103) for generating master mask drawing data with reference to the chip layout information of the master mask and the chip pattern data of the master mask.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:生成可以使生成的主掩模的数量最小化的掩模绘图数据。 解决方案:用于生成绘图数据的方法包括:步骤(S101),用于通过划分芯片模式来产生芯片分割信息,使得通过将掩模版的芯片图案数据放大而获得的图案数据包含在主掩模的绘图区域中,产生 通过将芯片划分信息中的划分模式按升序顺序地分配给主掩模,并将芯片布局信息登记在主掩模芯片布局信息存储器中,将主芯片的芯片布局信息分配给主掩模,步骤(S102) 通过参照掩模版的芯片图案数据,根据主掩模的芯片布局信息划分每个芯片并将主掩模的芯片图案数据登记在主掩模图案数据存储器中,从而分割主掩模的图案数据,以及 步骤(S103),用于参照主掩模的芯片布局信息和芯片图案数据生成主掩模绘制数据 主面具。