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1. 发明专利

JP2009141223A Reflective mask 有权
标题翻译：反光面膜
公开(公告)号：JP2009141223A
公开(公告)日：2009-06-25
申请号：JP2007317695
申请日：2007-12-07
申请人： Renesas Technology Corp , Toshiba Corp , 株式会社ルネサステクノロジ , 株式会社東芝
发明人： KAMO TAKASHI , SUGA OSAMU , TANAKA TOSHIHIKO
IPC分类号： H01L21/027 , G03F1/22 , G03F1/24 , G03F7/20
CPC分类号： G03F1/24 , B82Y10/00 , B82Y40/00 , G03F1/58
摘要： PROBLEM TO BE SOLVED: To provide a reflective mask capable of suppressing a leak of exposure light from an overlap portion between adjacent shots and reducing an influence of shadowing of the exposure light. SOLUTION: The reflective mask is a reflective mask having a main surface irradiated with the exposure light 40, and has a pattern region 10 provided in the main surface, the pattern region 10 including a multilayered reflective film 2 which reflects the exposure light 40, and first absorber patterns 4 and 5 provided on the multilayered reflective film 2, absorbing the exposure light 40, and having a pattern corresponding to a pattern to be formed on a wafer, and a light shield region 11 provided in the main surface, the light shield region 11 being provided with second absorber patterns 4 to 6 having lower reflectivity to the exposure light 40 than the first absorber patterns 4 and 5 so as to prevent a region of the wafer other than a predetermined region from being irradiated with the exposure light 40 when the pattern is transferred to the predetermined region on the wafer by irradiating the main surface with the exposure light 40. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够抑制来自相邻镜头之间的重叠部分的曝光光的泄漏并且减少曝光光的阴影影响的反射掩模。解决方案：反射掩模是具有用曝光光40照射的主表面的反射掩模，并且具有设置在主表面中的图案区域10，图案区域10包括反射曝光光的多层反射膜2 40，以及设置在多层反射膜2上的第一吸收体图案4和5，吸收曝光光40，并且具有与形成在晶片上的图案对应的图案，以及设置在主表面上的遮光区域11，遮光区域11设置有比第一吸收体图案4和5更低的对曝光光40的反射率的第二吸收体图案4至6，以防止除了预定区域之外的晶片的区域被曝光当通过用曝光灯40照射主表面将图案转印到晶片上的预定区域时的光40。（C）2009，JPO＆INPIT

2. 发明专利

JP2007315696A Diagnosis device and diagnosis method for air preheater 审中-公开
标题翻译：诊断装置和空气预热器的诊断方法
公开(公告)号：JP2007315696A
公开(公告)日：2007-12-06
申请号：JP2006146664
申请日：2006-05-26
申请人： Toshiba Corp , 株式会社東芝
发明人： IWABUCHI KAZUNORI , TAKAGI YASUO , YAMASHITA KATSUYA , NAKATANI YUJIRO , TANAKA TOSHIHIKO , HAYASHI SHINJI , NISHIMURA MARIKO
IPC分类号： F23L15/02
CPC分类号： Y02E20/348
摘要： PROBLEM TO BE SOLVED: To provide a diagnosis device and a diagnosis method for an air preheater easily diagnosing an air leaking situation in the air preheater, with respect to a boiler facility not equipped with an exhaust gas property measuring means suited for monitoring air leakage in the air preheater. SOLUTION: In the diagnosis device for the gas type air preheater 10 attached to the boiler facility 30, the diagnosis device for the air preheater is characterized in that the consumed energy of an air flow side ventilator 21 installed at the combustion air system side of the gas type air preheater, and the consumed energy of a gas flow side ventilator 22 installed at an exhaust gas system side are provided as inputs, and on the basis of the estimation of a ventilation amount of the air flow side ventilator and the estimation of a ventilation amount of the gas flow side ventilator, the estimate of a leaking air amount in the air preheater is outputted. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于容易诊断空气预热器中的空气泄漏情况的空气预热器的诊断装置和诊断方法，相对于不配备有适于监测的排气性质测量装置的锅炉设备空气预热器漏气。解决方案：在安装在锅炉设备30上的气体型空气预热器10的诊断装置中，空气预热器的诊断装置的特征在于，安装在燃烧空气系统上的空气流侧通风机21的消耗能量气体型空气预热器的一侧，安装在废气系统侧的气流侧通气机22的消耗能量作为输入，并且基于气流侧通风机的通气量和输出气流侧通风机的通风量的估计，输出空气预热器中的泄漏空气量的估计。版权所有（C）2008，JPO＆INPIT

3. 发明专利

JP2003288115A Power plant integrated control system 审中-公开
标题翻译：电厂综合控制系统
公开(公告)号：JP2003288115A
公开(公告)日：2003-10-10
申请号：JP2002090294
申请日：2002-03-28
申请人： Toshiba Corp , 株式会社東芝
发明人： TANAKA TOSHIHIKO , FUKUDA HIROSHI , MURATA HITOSHI , YAMADA TOSHIHIRO
IPC分类号： G05B23/02
CPC分类号： G05B15/02 , Y10T307/25 , Y10T307/461 , Y10T307/747
摘要： PROBLEM TO BE SOLVED: To efficiently and safely continue operation with smaller manpower by structuring a system which integrates, monitors, and controls each power unit. SOLUTION: On a system which is structured to connect and operate the first power unit which operates auxiliaries, based on a command from the first unit calculator, the second power unit which operates a part of the auxiliaries based on a command from the second unit calculator and operates other auxiliaries based on a command from a operating panel, that is independently prepared from the second unit calculator; an integrated automation calculator at the upper of these unit calculator; an interface function, which is equivalent to an automation function set in the auxiliary side controlled by the command from the first or the second unit calculator of power unit structuring auxiliaries, is pseudo-set against a control system of the auxiliaries controlled by an operation command of the operating panel; and an operation signal output from the integrated automation calculator is output to both the unit calculator and the operating panel, then they are integrated and operated. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：通过构建一个集成，监控和控制每个电源单元的系统，以更小的人力来有效和安全地继续运行。解决方案：在被构造成连接和操作第一功率单元的系统中，其基于来自第一单元计算器的命令，基于来自第一单元计算器的命令来操作一部分辅助设备的第二电源单元第二单元计算器，并且基于来自操作面板的命令操作其他辅助设备，其从第二单元计算器独立地准备; 在这些单位计算器的上面的一个综合自动化计算器; 相当于通过由构成辅助设备的动力单元的第一单元计算器或第二单元计算器控制的辅助侧设置的自动化功能的接口功能相对于由操作命令控制的辅助设备的控制系统进行伪设置的操作面板; 并且从集成自动化计算器输出的操作信号输出到单元计算器和操作面板，然后它们被集成和操作。版权所有（C）2004，JPO

4. 发明专利

JP2007052537A Monitoring device and monitoring method 审中-公开
标题翻译：监控设备和监控方法
公开(公告)号：JP2007052537A
公开(公告)日：2007-03-01
申请号：JP2005235848
申请日：2005-08-16
申请人： Toshiba Corp , 株式会社東芝
发明人： NAKAGAWA EIJI , TANAKA TOSHIHIKO , MURATA HITOSHI , HAYASHI SHINJI
IPC分类号： G06F3/048 , G05B23/02
摘要： PROBLEM TO BE SOLVED: To provide a monitoring device and a monitoring method, capable of maintaining a simple screen display by maintaining such a state that only a necessary window is open when continuing a screen display request. SOLUTION: This monitoring device comprises a CRT display device 15 having a menu window for displaying a command execution button on a screen and an output window for displaying images of various information selected by a command, and an outputting window display data updating part 37 for updating display contents in an outputting window by selection of the command execution button in the menu window displayed on the screen of the CRT display device 15. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种监视装置和监视方法，能够通过维持在继续屏幕显示请求时仅需要窗口打开的状态来维持简单的屏幕显示。解决方案：该监视装置包括具有用于在屏幕上显示命令执行按钮的菜单窗口的CRT显示装置15和用于显示由命令选择的各种信息的图像的输出窗口，以及输出窗口显示数据更新部分 37，用于通过在CRT显示装置15的屏幕上显示的菜单窗口中的命令执行按钮的选择来更新输出窗口中的显示内容。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2005071277A Plant monitoring device 审中-公开
标题翻译：植物监测装置
公开(公告)号：JP2005071277A
公开(公告)日：2005-03-17
申请号：JP2003303580
申请日：2003-08-27
申请人： Toshiba Corp , 株式会社東芝
发明人： MATSUDA TOSHIRO , UNO KAZUMI , TANAKA TOSHIHIKO
IPC分类号： G05B23/02
摘要： PROBLEM TO BE SOLVED: To improve the visibility of plant information displayed without lowering the monitoring accuracy of a plant. SOLUTION: When a process value is plotted and displayed at a dialogue device 3, the time length corresponding to one plot region is used as one plot time length, and it is decided whether a plurality of process values exist in this one plot time length or not. If a plurality of plot values exists, an operation is conducted according to the operation formula required by a data display means 14 for those process values. A display data conversion means 15 which outputs its result as the process value of 1 is provided between a data acquisition means 13 and a data display means 14, and the lowering of visibility which is caused by a plurality of process values plotted in the region of one plot time length is prevented. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提高工厂信息的可视性，而不会降低工厂的监控精度。解决方案：当在对话设备3上绘制并显示过程值时，将对应于一个绘图区域的时间长度用作一个绘图时间长度，并且确定在该一个图中是否存在多个处理值时间长度与否如果存在多个绘图值，则根据数据显示装置14对于那些处理值所需的操作公式进行操作。在数据获取装置13和数据显示装置14之间提供输出其作为处理值1的结果的显示数据转换装置15，以及由在多个处理值中绘制的多个处理值引起的可见性的降低一个绘图时间长度被阻止。版权所有（C）2005，JPO＆NCIPI

6. 发明专利

JP2005044109A Plant monitoring device 审中-公开
标题翻译：植物监测装置
公开(公告)号：JP2005044109A
公开(公告)日：2005-02-17
申请号：JP2003202656
申请日：2003-07-28
申请人： Toshiba Corp , Toshiba Syst Technol Corp , 東芝システムテクノロジー株式会社 , 株式会社東芝
发明人： MURATA HITOSHI , TANAKA TOSHIHIKO , HOSHI YOSHIYUKI
IPC分类号： G05B23/02
摘要： PROBLEM TO BE SOLVED: To provide a plant monitoring device that can singly and easily store and reset the setting items of profiles and easily adapt to the settings of other devices. SOLUTION: The plant monitoring device comprises a plant data input means 100; a plant monitoring means 101 for supervising a plant according to profiles set by an operator as status information for monitoring the plant; an input means 40 for the operator to input necessary information; an output means 41 for the operator to output the necessary information; and an export means 201 for storing the profiles as other external profile data when the operator makes a request using the input means. The device includes a merging means 205 for merging a plurality of profiles together according to the operator's request from the input means, with the merging result stored as the other external profile data. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供可以单独容易地存储和重置配置文件的设置项目并且容易地适应其他设备的设置的设备监控设备。解决方案：工厂监控装置包括工厂数据输入装置100; 工厂监控装置101，用于根据操作员设置的轮廓监控设备作为用于监测设备的状态信息; 用于操作者输入必要信息的输入装置40; 输出装置41，用于操作者输出必要的信息; 以及输出装置201，用于当操作者使用输入装置作出请求时，将轮廓存储为其他外部轮廓数据。该装置包括合并装置205，用于根据来自输入装置的操作者的请求将多个简档合并在一起，合并结果被存储为另一外部简档数据。版权所有（C）2005，JPO＆NCIPI

7. 发明专利

JP2004334548A Failure monitoring system for distributed supervisory control system 审中-公开
公开(公告)号：JP2004334548A
公开(公告)日：2004-11-25
申请号：JP2003129775
申请日：2003-05-08
申请人： Toshiba Corp , 株式会社東芝
发明人： UCHIDA NORIHIRO , HAYASHI SHINJI , MURATA HITOSHI , TANAKA TOSHIHIKO , SHIOZAKI KAZUYA
IPC分类号： G05B23/02
摘要： PROBLEM TO BE SOLVED: To provide a distributed failure supervising system capable of properly supervising failure signals without being affected by hardware failure.
SOLUTION: Controllers 2a-2m connected to a network 1 and operating/supervising devices 3a-3m are provided with network normality signal output means 13a-13n, 14a-14m for outputting network normality checking signals to a network 1, and software diagnosing circuits 5a-5m, 6a-6m which perform self-diagnosis and output the results of the self-diagnosis to the network. The network normality checking signals are sent to a network diagnosing means 15 via the network 1 and the results of the self-diagnosis are sent to a supervising means 10. This allows failure signals to be properly inputted for the supervision of failure without being affected by hardware failure.
COPYRIGHT: (C)2005,JPO&NCIPI

8. 发明专利

JP2013055169A Defect inspection method and defect inspection device for mask blank 有权
标题翻译：缺陷检查方法和缺陷检测设备的掩蔽空白
公开(公告)号：JP2013055169A
公开(公告)日：2013-03-21
申请号：JP2011191288
申请日：2011-09-02
申请人： Renesas Electronics Corp , ルネサスエレクトロニクス株式会社 , Toshiba Corp , 株式会社東芝
发明人： TERASAWA TSUNEO , YAMANE TAKESHI , TANAKA TOSHIHIKO
IPC分类号： H01L21/027 , G03F1/22 , G03F7/20
摘要： PROBLEM TO BE SOLVED: To achieve inspection having high detection sensitivity even for a plurality of mask blanks having period lengths of multilayer films different from each other.SOLUTION: On the basis of information on a mask blank MB, an incident angle of an EUV light BM irradiating the surface of the mask blank MB is adjusted, and a region to be inspected of the mask blank MB is irradiated with the EUV light BM taken in via an illumination optical system. The incident angle of the EUV light BM is adjusted by controlling positions and angles of multilayer film mirrors PM1 and PM2 using mirror posture controlling means 23.
摘要翻译：要解决的问题：即使对于具有彼此不同的多层膜的周期长度的多个掩模坯料，也能实现高检测灵敏度的检查。解决方案：根据关于掩模毛坯MB的信息，调节照射掩模毛坯MB的表面的EUV光BM的入射角，并且将掩模毛坯MB的待检查区域照射 EUV光BM经由照明光学系统拍摄。通过使用镜子姿势控制装置23控制多层膜反射镜PM1和PM2的位置和角度来调节EUV光BM的入射角度。（C）2013，JPO和INPIT

9. 发明专利

JP2009068797A Method and system for operating cogeneration power plant 审中-公开
标题翻译：用于加工电厂的方法和系统
公开(公告)号：JP2009068797A
公开(公告)日：2009-04-02
申请号：JP2007239335
申请日：2007-09-14
申请人： Toshiba Corp , 株式会社東芝
发明人： TAKAGI YASUO , IWABUCHI KAZUNORI , TANAKA TOSHIHIKO
IPC分类号： F22B37/38 , F01D25/00
摘要： PROBLEM TO BE SOLVED: To provide a method of operating a power plant capable of accurately grasping damage of pipes caused by steam flow, and to provide a system carrying out optimum operation of the power plant composed of a plurality of boilers and a plurality of turbines.
SOLUTION: In the method of operating the power plant, the power plant has the plurality of boilers B and the plurality of steam turbines T and main steam is supplied to the steam turbines from the boilers via a high pressure steam header, a passing steam flow rate of the high pressure header is estimated, and management of pipes of the power plant is carried out based on the passing steam flow rate. In the system for operating the power plant having the plurality of boilers B and the plurality of steam turbines T, the operating system includes pipelines composed of a plurality of steam lines having boiler feed water heaters, respectively, and branching extracted steam of the turbines to the steam lines, and a control means for controlling a branching ratio of steam in the pipelines.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种操作能够精确地掌握由蒸汽流引起的管道损坏的发电厂的方法，并且提供一种执行由多个锅炉组成的动力装置的最佳操作的系统，以及多个涡轮机。解决方案：在操作发电厂的方法中，发电厂具有多个锅炉B和多个蒸汽轮机T，主蒸汽经由高压蒸汽集管从锅炉供应给蒸汽轮机，估计高压集管的通过蒸汽流量，根据通过的蒸汽流量进行发电厂的管道的管理。在具有多个锅炉B和多个蒸汽轮机T的发电厂的运行系统中，操作系统包括分别由具有锅炉给水加热器的多个蒸汽管线组成的管道，以及将涡轮机的抽出蒸汽分配到蒸汽管线和用于控制管道中的蒸汽分支比的控制装置。版权所有（C）2009，JPO＆INPIT

10. 发明专利

JP2004060615A Control device for gas turbine plant and operation control method for gas turbine plant 审中-公开
公开(公告)号：JP2004060615A
公开(公告)日：2004-02-26
申请号：JP2002223796
申请日：2002-07-31
申请人： Toshiba Corp , 株式会社東芝
发明人： SHIMIZU YOSHIKO , TOUBOU MASAYUKI , TANAKA TOSHIHIKO
IPC分类号： F02C9/28 , F02C9/00
摘要： PROBLEM TO BE SOLVED: To quickly restore a system frequency into a desirable value by producing an almost ideal change in the flow rate of a fuel while maintaining a governor free function even when detecting a failure in the system frequency.
SOLUTION: This control device comprises speed control means for inputting a load setting signal and a gas turbine speed signal to be coordinated in accordance with the output of a generator and computing a governor free speed control signal, means for computing a speed load control signal from the speed control signal and a non-load rated speed bias signal, means for computing an exhaust gas temperature control signal for limiting a fuel so that an exhaust gas temperature does not exceeds a limiting value, means for inputting the speed load control signal and the exhaust gas temperature control signal and selectively outputting a low-value signal, means for detecting a failure in a power system, and signal generating means provided in the speed load control means for outputting a preset fuel bias amount with the elapse of time. During the operation of system condition failure detecting means, the speed load control signal is corrected with an output signal from the signal generating means.
COPYRIGHT: (C)2004,JPO

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