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    • 1. 发明专利
    • Device and method for correcting multijoint robot
    • 用于校正多机器人的装置和方法
    • JP2014087863A
    • 2014-05-15
    • JP2012238145
    • 2012-10-29
    • Toshiba Corp株式会社東芝
    • TOKUNAGA YASUAKIUEHARA TAKUYAMATSUZAKI KENJISUGANUMA NAOTAKASUZUKI ATSUSHI
    • B25J9/10
    • PROBLEM TO BE SOLVED: To correct a rotation angle or the like of joints of a multijoint robot in a non-contact manner.SOLUTION: A device for correcting a multijoint robot 1 includes a body part 2, and leg parts 3, 4 installed to the body part and having a first joint 5A rotatable around a first rotary axis 8A and a second joint 5B rotatable around a second rotary axis 8B, in which the first joint 5A is installed closer to the side of the body part 2 than the second joint 5B. The device includes: a laser irradiation device 16A irradiating the predetermined position of the second joint 5B of the multijoint robot 1 taking a reference posture with laser light α; a light detector 17A mounted on a position where the laser light α can be detected when the rotation angle of the first joint 5A and the position and the direction of the first rotary axis 8A coincide to those when the multijoint robot 1 takes the reference posture; and a display device 18 displaying a detection result by the light detector 17A.
    • 要解决的问题:以非接触方式校正多关节机器人的关节的旋转角度等。解决方案:用于校正多点机器人1的装置包括主体部分2和安装到 主体部分具有围绕第一旋转轴线8A旋转的第一关节5A和可围绕第二旋转轴线8B旋转的第二接头5B,其中第一接头5A设置为比第二接头更靠近主体部分2的侧面 5B。 该装置包括:激光照射装置16A,照射具有激光α的参考姿势的多关节机器人1的第二关节5B的预定位置; 当第一关节5A的旋转角度和第一旋转轴线8A的位置和方向与多点机器人1参考基准姿势时的角度一致时,安装在可以检测激光α的位置处的光检测器17A; 以及显示装置18,其显示光检测器17A的检测结果。
    • 2. 发明专利
    • Refueling machine and method for suppressing vibration of the same
    • 修补机及其抑制振动的方法
    • JP2012198167A
    • 2012-10-18
    • JP2011063753
    • 2011-03-23
    • Toshiba Corp株式会社東芝
    • SHIMAMURA MITSUAKITOKUNAGA YASUAKIMATSUZAKI KENJISUGANUMA NAOTAKATSUYUKI AKIRA
    • G21C19/18
    • PROBLEM TO BE SOLVED: To quickly convey a conveyance object such as a fuel while suppressing vibration.SOLUTION: A refueling machine including a bridge capable of traveling on a reactor well of a nuclear power plant in one direction, a trolley capable of moving on the bridge in a direction orthogonal to the traveling direction of the bridge and a grapple 17 suspended from the trolley in a vertical direction and capable of grasping the conveyance object such as the fuel to underwater convey the conveyance object between the reactor well and a fuel pool further includes a vibration suppressing mechanism 18 for suppressing the vibration of the grapple 17 grasping the conveyance object against the trolley. The vibration suppressing mechanism includes a camera for detecting the position aberration of the grapple 17 against the trolley, thrusters 32A-32D arranged on a suppression mechanism body 30 coaxially connected to the grapple 17 and capable of generating thrust to the grapple 17, and a control device for controlling drive of the thrusters based on detection information from the camera.
    • 要解决的问题:在抑制振动的同时快速地传送诸如燃料的输送物体。 解决方案:一种加油机,其包括能够在一个方向上在核电站的反应器井上行进的桥梁,能够在与桥梁的行进方向正交的方向上在桥上移动的手推车和抓斗17 能够沿着竖直方向悬挂在手推车上并且能够抓住诸如燃料的输送对象以在水中输送反应堆井和燃料池之间的输送物体的步骤还包括:振动抑制机构18,其抑制抓握 反对手推车的运输对象。 振动抑制机构包括:摄像机,用于检测抓斗17相对于手推车的位置像差;布置在抑制机构主体30上的推进器32A-32D,该抑制机构主体30与抓爪17同轴连接并能够产生对抓斗17的推力;以及控制装置 基于来自相机的检测信息来控制推进器的驱动的装置。 版权所有(C)2013,JPO&INPIT
    • 3. 发明专利
    • System and method for operating robot arm
    • 用于操作机器人ARM的系统和方法
    • JP2012011498A
    • 2012-01-19
    • JP2010149728
    • 2010-06-30
    • Toshiba Corp株式会社東芝
    • SUGANUMA NAOTAKAMATSUZAKI KENJISHIMAMURA MITSUAKISHIGEMATSU SOICHIRO
    • B25J3/00
    • PROBLEM TO BE SOLVED: To avoid obstacles safely, reliably and easily, in operating a robot arm.SOLUTION: An robot arm operating system includes: a remote controller 1 for operating the robot arm 2 on the basis of an operation command value received in real-time; an environmental data storage part 4 for storing environmental data including a 3D shape model of the obstacle; a repulsive force vector field generating processor 5 for setting a virtual repulsive force vector field so that a repulsive force is increased as the distance to the obstacle becomes shorter; a virtual force generating processor 6 for calculating a virtual repulsive force in the direction of moving away from the obstacle relative to the robot arm by using the repulsive force vector field; and a robot controller 3 for generating a motion command value to the robot arm by combining the virtual repulsive force calculated by the virtual force generating processor 6 and the operation command value from the remote controller 1.
    • 要解决的问题:为了在操作机器人手臂时安全,可靠和容易地避免障碍物。 解决方案:机器人手臂操作系统包括:遥控器1,用于基于实时接收的操作命令值来操作机器人手臂2; 环境数据存储部分4,用于存储包括障碍物的3D形状模型的环境数据; 排斥力矢量场产生处理器5,用于设置虚拟排斥力矢量场,使得当与障碍物的距离变短时排斥力增加; 虚拟力产生处理器6,用于通过使用排斥力矢量场计算相对于机器人手臂离开障碍物的方向的虚拟排斥力; 以及机器人控制器3,用于通过组合由虚拟力产生处理器6计算出的虚拟排斥力和来自遥控器1的操作命令值来向机器人臂生成运动指令值。(C)2012年, JPO&INPIT
    • 4. 发明专利
    • Method of generating moving body posture and device of generating moving body posture
    • 产生移动身体姿势的方法和产生运动身体姿势的装置
    • JP2011031309A
    • 2011-02-17
    • JP2009176730
    • 2009-07-29
    • Toshiba Corp株式会社東芝
    • SUGANUMA NAOTAKAMATSUZAKI KENJISHIMAMURA MITSUAKI
    • B25J9/22
    • PROBLEM TO BE SOLVED: To solve the problem that, when a part of a moving body moves in accordance with a motion trajectory, a posture of the whole moving body has been conventionally generated by use of inverse kinematics, which is complicated in calculation and prevents the automatic choice of a solution when a number of solutions exist.
      SOLUTION: In a workspace, a repulsive force vector field set up based on the obstacles in the space is defined. The whole moving body is put into a three-dimensional shape model, on the surface of which representative points are set up. The posture of the whole moving body is automatically generated by applying repulsive force vectors to the representative points.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题为了解决当移动体的一部分根据运动轨迹移动时的问题,传统上通过使用逆运动学来产生整个运动体的姿势,这是相当复杂的 计算并防止在存在多个解决方案时自动选择解决方案。 解决方案:在工作空间中,定义基于空间中的障碍物设置的排斥力矢量场。 整个移动体被放置在三维形状模型中,其表面上设有代表点。 通过对代表点应用排斥力矢量自动生成整个移动体的姿势。 版权所有(C)2011,JPO&INPIT
    • 5. 发明专利
    • Method of manufacturing semiconductor device
    • 制造半导体器件的方法
    • JP2010182725A
    • 2010-08-19
    • JP2009022520
    • 2009-02-03
    • Toshiba Corp株式会社東芝
    • MATSUZAKI KENJI
    • H01L21/3213H01L21/28H01L21/8247H01L27/115H01L29/788H01L29/792
    • H01L21/76816H01L21/0337H01L21/32139H01L27/11521H01L27/11524
    • PROBLEM TO BE SOLVED: To suppress a difference in machining shape of a worked film when forming a pattern by means of a sidewall transfer process. SOLUTION: A silicon oxide film 11 is formed on a silicon nitride film 10 and patterned by lithography. The silicon oxide film 11 is slimmed by a slimming technology, and an amorphous silicon film 13 is deposited along an upper surface and a side face of the silicon oxide film 11 and along an upper surface of the silicon nitride film 10. The amorphous silicon film 13 is anisotropically etched, thereby making it remain like a spacer along the side face of the silicon oxide film 11. Then, etching is performed to make the upper end 11a of the silicon oxide film 11 lower than the upper end 13a of the amorphous silicon film 13, and an upper surface 13b of the amorphous silicon film 13 is formed to be an upwardly protruding curved surface. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:通过侧壁转移工艺形成图案时,抑制加工膜的加工形状的差异。 解决方案:氧化硅膜11形成在氮化硅膜10上并通过光刻图案化。 通过减肥技术使氧化硅膜11变薄,并且沿着氧化硅膜11的上表面和侧面并沿着氮化硅膜10的上表面沉积非晶硅膜13.非晶硅膜13 13进行各向异性蚀刻,从而使其沿着氧化硅膜11的侧面保持像间隔物。然后,进行蚀刻以使氧化硅膜11的上端11a低于非晶硅的上端13a 膜13,非晶硅膜13的上表面13b形成为向上突出的弯曲表面。 版权所有(C)2010,JPO&INPIT
    • 6. 发明专利
    • Underwater drive motor
    • 水下驱动电机
    • JP2009171669A
    • 2009-07-30
    • JP2008004160
    • 2008-01-11
    • Toshiba Corp株式会社東芝
    • SHIMAMURA MITSUAKIMATSUZAKI KENJIHOZUMI HISASHIMUKAI SHIGEHIKOTOGASAWA YUTAKAYUGUCHI YASUHIRO
    • H02K5/132H02K5/08H02K7/14
    • PROBLEM TO BE SOLVED: To provide an underwater drive motor which is smaller than conventional one and provides necessary output. SOLUTION: A stator 5 provided with a coil and a detecting coil 6 and an exciting coil 7 in a resolver 20 are insulated by the molding by an electric insulating material or the formation of an insulating film. Moreover, a casing 2 is provided with a water passing hole 11 which connects its inside with its outside. When the underwater drive motor 1 is sunk in water, the inside of a motor housing 2 is filled with water through the water passing hole 11, and a rotor 3, the stator 5, and the detecting coil 6 and the exciting coil 7 of the resolver are submerged. Hereby, heat dissipation increases, and it becomes possible to enlarge the electric capacity of the coil provided in the stator 5. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种小于常规的水下驱动马达并提供必要的输出。 解决方案:在旋转变压器20中设置有线圈,检测线圈6和励磁线圈7的定子5通过电绝缘材料的模制或绝缘膜的形成而被绝缘。 此外,壳体2设置有将其内部与其外部连接的水通孔11。 当水下驱动电动机1沉没在水中时,电动机壳体2的内部通过水通孔11,转子3,定子5以及检测线圈6和励磁线圈7填充水 旋转变压器被淹没。 因此,散热增加,并且可以扩大设置在定子5中的线圈的电容。版权所有(C)2009,JPO&INPIT
    • 7. 发明专利
    • Control device of underwater remote operation apparatus, and control method therefor
    • 水下遥控装置的控制装置及其控制方法
    • JP2008128788A
    • 2008-06-05
    • JP2006313318
    • 2006-11-20
    • Toshiba Corp株式会社東芝
    • HOZUMI HISASHIOKADA SATOSHISHIMAMURA MITSUAKIMATSUZAKI KENJIYUGUCHI YASUHIROSOMA KOICHI
    • G21C17/003G21C19/02
    • PROBLEM TO BE SOLVED: To provide a control device having excellent handleability so that an underwater remote operation apparatus such as a vehicle swimming in the water can run and work even in a narrow part of an incore apparatus in a nuclear power plant, and having high reliability and a shortened operation period.
      SOLUTION: This control device of the underwater remote operation apparatus has a plurality of underwater remote operation apparatuses 1a, 1b for moving underwater in a reactor of the nuclear power plant, and performing inspection and a work; a communication bus line 4 which is a communication line used in common for the underwater remote operation apparatuses 1a, 1b; a sensor information multiplexing means for multiplexing a plurality of sensor information of the underwater remote operation apparatuses 1a, 1b; a connection means for connecting the underwater remote operation apparatuses 1a, 1b together; and an operation monitoring apparatus 2 for monitoring each position and attitude of the underwater remote operation apparatuses 1a, 1b and the position and the attitude of an incore structure in the reactor.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了提供一种具有优异的可操作性的控制装置,使得诸如在水中游泳的车辆的水下遥控操作装置甚至可以在核电站的腋下装置的狭窄部分中运行和工作, 并且具有高可靠性和缩短的操作周期。 解决方案:水下遥控操作装置的该控制装置具有多个水下远程操作装置1a,1b,用于在核电厂的反应堆内水下移动,进行检查和作业; 作为水下遥控操作装置1a,1b共同使用的通信线路的通信总线4; 传感器信息多路复用装置,用于复用水下遥控操作装置1a,1b的多个传感器信息; 连接装置,用于将水下远程操作装置1a,1b连接在一起; 以及用于监视水下遥控操作装置1a,1b的各位置和姿势以及反应器中的腋下结构的位置和姿势的操作监视装置2。 版权所有(C)2008,JPO&INPIT
    • 8. 发明专利
    • Nonvolatile semiconductor storage device, and its manufacturing method
    • 非易失性半导体存储器件及其制造方法
    • JP2008108787A
    • 2008-05-08
    • JP2006287822
    • 2006-10-23
    • Toshiba Corp株式会社東芝
    • MATSUZAKI KENJISONODA MASAHISA
    • H01L21/8247H01L21/28H01L21/3065H01L27/115H01L29/788H01L29/792
    • PROBLEM TO BE SOLVED: To provide a method for manufacturing a nonvolatile semiconductor storage device by which it can be possible to prevent a silicon oxide film formed on the side wall of a tungsten silicide film from swelling than that formed on the side wall of a polycrystal silicon film when oxidizing the side wall of a gate electrode, and to provide a nonvolatile semiconductor storage device having a desired gate electrode's shape that is obtained by the manufacturing method.
      SOLUTION: A tungsten silicide film 6 is etched at 4 to 10 mmTorr of pressure, at 200 to 400 W of RF source power and 100 to 200 W of bias power, and under a mixed gas of CF
      4 /Cl
      2 /N
      2 at a flow rate of 1 to 50 sccm of CF
      4 gas, 100 to 150 sccm of Cl
      2 gas and 7 sccm or less of N
      2 gas, and the tungsten silicide film 6 is made to have a constricted shape beforehand. Thus, even when the tungsten silicide film 6 is oxidized more than a first polycrystal silicon film 3 and a second polycrystal silicon film 5 during oxidation of the side wall of the gate electrode, a desired gate electrode's shape can be obtained.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种制造非易失性半导体存储装置的方法,通过该方法可以防止形成在硅化钨膜的侧壁上的氧化硅膜比形成在侧壁上的氧化硅膜膨胀 的多晶硅膜,并且提供具有通过该制造方法获得的所需栅电极形状的非易失性半导体存储装置。 解决方案:将硅化钨膜6以4至10mmTorr的压力,200至400W的RF源功率和100至200W的偏置功率进行蚀刻,并在CF 4 < / SB> / Cl 2 / N 2 ,CF气体为1〜50sccm的流量,100〜150sccm的Cl 气体气体和7sccm以下的N SB 2气体,硅化钨膜6预先形成收缩状。 因此,即使当在栅电极的侧壁氧化期间硅化钨膜6比第一多晶硅膜3和第二多晶硅膜5被氧化时,可以获得期望的栅电极的形状。 版权所有(C)2008,JPO&INPIT
    • 9. 发明专利
    • System, method and program for controlling manipulator
    • 用于控制操纵器的系统,方法和程序
    • JP2008049459A
    • 2008-03-06
    • JP2006230483
    • 2006-08-28
    • Toshiba Corp株式会社東芝
    • MATSUZAKI KENJIOKADA SATOSHISATO KATSUHIKOSHIMAMURA MITSUAKITOGASAWA YUTAKA
    • B25J13/08
    • PROBLEM TO BE SOLVED: To surely hold and move an object to be held while preventing the object to be held from being slipped from a manipulator when the manipulator holds the object to be held having an unknown weight and without being broken even when the object to be held is brittle.
      SOLUTION: The manipulator operation support system is equipped with a material measured in a noncontact manner with a component analyzer 13 provided on a holding part 10 of the manipulator 11, a three-dimensional data measured in a noncontact manner with a shape measuring sensor 14 provided on the holding part 10, a PC42 for processing a shape measurement which calculates the weight of the object A based on the data of a body information database 43b, and calculates a holding force for holding the object A by the holding part 10 from the weight of the object A to be calculated, and a PC41 for controlling for operating the manipulator 11 with the holding force obtained by the PC 42 for processing the shape measurement.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:当机械手握住具有未知重量的待保持物体时,即使在不被破坏的情况下,也可以防止被保持物体从机械手滑动而确保保持并移动要保持的物体 要保持的对象是脆弱的。 解决方案:机械手操作支撑系统配备有以非接触方式测量的材料,其与设置在操纵器11的保持部分10上的分量分析器13,以非接触方式测量的形状测量的三维数据 设置在保持部10上的传感器14,用于处理形状测量的PC42,其基于身体信息数据库43b的数据计算对象A的权重,并且通过保持部10计算保持对象A的保持力 根据要计算的对象A的重量,以及PC41,用于通过PC 42获得的用于处理形状测量的保持力来操作操纵器11。 版权所有(C)2008,JPO&INPIT
    • 10. 发明专利
    • Conveying device, work system, and conveying method
    • 输送设备,工作系统和输送方法
    • JP2013014400A
    • 2013-01-24
    • JP2011147525
    • 2011-07-01
    • Toshiba Corp株式会社東芝
    • HIGASHIKURA ICHIROYUGUCHI YASUHIROMATSUZAKI KENJIKASAI SHIGERUMATSUZAKI MICHIHIROHAMADA TOMOHIRONISHIKUBO MASARUSUZUKI ATSUSHIUENO KENICHI
    • B66F9/06B66F9/24
    • PROBLEM TO BE SOLVED: To provide a conveying device that can reliably and quickly deliver a working machine up to an upper floor even when a facility for going up and down, such as stairs, is not available for use, and to provide a work system and a conveying method.SOLUTION: The conveying device includes: a working robot 11 that works in a building 2; a control device 12 for remotely controlling the working robot 11; a rack 43 for going up and down between a floor 3 and an upper floor 4 in an open ceiling extending to upper floors in the building 2, and having a moving device for horizontally translating an object loaded thereon; a fixed part 15b configured to be fixed through contact with the upper floor 4 or a structure 6 on the upper floor 4 after horizontally moved by the moving device on the rack 43; and a crossing board 15 serving as a passage 15a for the working robot 11.
    • 要解决的问题:提供一种能够可靠且快速地将工作机械运送到上层的输送装置,即使在楼梯等上下不动的设施不可用的情况下,也可以提供 工作系统和输送方法。 解决方案:输送装置包括:在建筑物2中工作的作业机器人11; 用于远程控制工作机器人11的控制装置12; 用于在延伸到建筑物2的上层的开放式天花板中的地板3和上层4之间上下移动的搁板43,并且具有用于水平平移装载在其上的物体的移动装置; 固定部分15b,被配置成通过与机架43上的移动装置水平移动之后与上层4或上层4上的结构6接触而固定; 和用作作业机器人11的通道15a的交叉板15.版权所有(C)2013,JPO&INPIT