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1. 发明专利

JP2009111402A Probe device 有权
标题翻译：探测器
公开(公告)号：JP2009111402A
公开(公告)日：2009-05-21
申请号：JP2008310819
申请日：2008-12-05
申请人： Tokyo Electron Ltd , 東京エレクトロン株式会社
发明人： SUGIYAMA MASAHIKO , INOUE YOSHINORI
IPC分类号： H01L21/66 , G01R31/26 , G01R31/28
摘要： PROBLEM TO BE SOLVED: To provide a probe device capable of promptly, as well as, efficiently performing probe inspection.
SOLUTION: The probe device which inspects a plurality of inspected bodies arranged on a wafer-like substrate, is equipped with a prober chamber: an X-Y stage 12 which is arranged in the prober chamber, forms first frame structure, and has a first space in its center; a substrate fixation mechanism 23 which is arranged on the X-Y stage 12, forms second frame structure, and has a second space connected to the first space at its center; a probe card 14 which is arranged opposite to the wafer-like substrate in the prober chamber and has a plurality of probes; a probing stage lifting mechanism 24 arranged in the first space; and a probing stage 3 which is attached to the probing stage lifting mechanism 24 and comes into contact with the bottom surface of the substrate to support the substrate from downward, when it is lifted by the probing stage lifting mechanism 24.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供能够及时，高效地进行探头检查的探针装置。
解决方案：检查布置在晶片状基板上的多个检查体的探针装置配备有探针室：布置在探测室中的XY台12形成第一框架结构，并且具有其中心的第一个空间; 设置在X-Y台12上的基板固定机构23形成第二框架结构，并且在其中心具有连接到第一空间的第二空间; 探针卡14，其在所述探测室中与所述晶片状基板相对配置并具有多个探针; 布置在第一空间中的探测台提升机构24; 以及探测台3，其附接到探测台提升机构24，并且当其被探测台提升机构24提升时，与探测台提升机构24接触，从而从底部向下支撑基板。版权所有：（C）2009，JPO＆INPIT

2. 发明专利

JP2004140296A Probe apparatus for temperature control of inspected object, and probe inspection method 有权
公开(公告)号：JP2004140296A
公开(公告)日：2004-05-13
申请号：JP2002305925
申请日：2002-10-21
申请人： Tokyo Electron Ltd , 東京エレクトロン株式会社
发明人： SUGIYAMA MASAHIKO , INOUE YOSHINORI
IPC分类号： G01R1/06 , G01R1/067 , G01R31/28 , H01L21/66
CPC分类号： G01R31/2874 , G01R1/06705 , G01R31/2865 , G01R31/2891
摘要： PROBLEM TO BE SOLVED: To provide a probe apparatus and its method whereby the temperature control of an inspected object can be performed properly in a probe inspection.
SOLUTION: The probe apparatus 100 for inspecting an inspected object while controlling its temperature is provided. The probe apparatus has a stage base 2, a Z-stage 10, an X-Y stage 12 having a frame-form structure, a substrate-fastening mechanism 23 provided on the X-Y stage, a probe card 14 disposed opposite to the substrate fastening mechanism, and a probing stage 3 fastened to the Z-stage and so provided in the frame-form structure of the X-Y stage as for its axis center so as to coincide with an extension trailing from the probe center of the probe card. Further, the probing stage has a temperature control device for heating or cooling the inspected object and a probing elevating mechanism to support the inspected object of the substrate from its bottom surface and to perform the temperature control of the inspected object.
COPYRIGHT: (C)2004,JPO

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