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    • 1. 发明专利
    • Projection exposure device and projection exposure method
    • 投影曝光装置和投影曝光方法
    • JP2008176257A
    • 2008-07-31
    • JP2007037073
    • 2007-01-22
    • Tokyo Denki Univ学校法人東京電機大学
    • HORIUCHI TOSHIYUKIKOBAYASHI HIROSHI
    • G03F7/20G02B3/00H01L21/027
    • G03F7/70191G02B3/0056G02B3/0087G02B26/02G02B26/0875G03F7/70275G03F7/70291G03F7/70466G03F7/70558
    • PROBLEM TO BE SOLVED: To decrease nonuniformity of an irradiation range or intensity distribution of light in projection exposure using a graded index lens array, to form a pattern having a uniform line width of the pattern or a smooth side wall, and to form a finer pattern. SOLUTION: The graded index lens array is moved in a direction perpendicular to the scanning direction; a plurality of the graded index lens array is disposed to wholly superpose the exposure region; an optical filter having a density distribution that compensates the nonuniformity in the propagation of light of the graded index lens array is disposed; or an aperture control plate that limits the use of the lens array only in a uniform portion is disposed. Two or more means above described can be used at a time. Otherwise, one of a micro transmissive shutter array, a micro reflective shutter array and a micro light emitting element array is used instead of a mask or an illumination device and the mask. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了降低使用渐变折射率透镜阵列的投影曝光中的照射范围或光的强度分布的不均匀性,以形成具有均匀的图案的线宽或平滑的侧壁的图案,并且 形成更精细的图案。

      解决方案:渐变折射率透镜阵列在垂直于扫描方向的方向上移动; 设置多个渐变折射率透镜阵列以完全叠加曝光区域; 设置具有补偿渐变折射率透镜阵列的光的传播不均匀性的密度分布的滤光器; 或者限制仅在均匀部分中使用透镜阵列的光圈控制板。 一次可以使用上述两种或更多种方法。 否则,使用微透射快门阵列,微反射快门阵列和微发光元件阵列中的一个代替掩模或照明装置和掩模。 版权所有(C)2008,JPO&INPIT

    • 2. 发明专利
    • Information distribution collecting system
    • 信息分配收集系统
    • JP2005122475A
    • 2005-05-12
    • JP2003356753
    • 2003-10-16
    • Tokyo Denki Univ学校法人東京電機大学
    • KOBAYASHI HIROSHISANO KO
    • G09B7/077G06Q50/00G06Q50/10G06Q50/20G06F17/60
    • PROBLEM TO BE SOLVED: To secure system reliability, and to contribute to fair and proper collection of response information, in response to inquiry information. SOLUTION: This server 2 is configured to temporally distribute and transmit inquiry information to a plurality of client terminals 3a to 3n, and the client terminals 3a to 3n are configured to make a display part 8 display the distributed inquiry information, from a preset start time to end time, which is common among the client terminals, and to temporally distribute and transmit reply information to the inquiry information inputted during that time to the server 2. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了确保系统的可靠性,并且响应于查询信息,有助于公正和适当地收集响应信息。 解决方案:该服务器2被配置为向多个客户终端3a至3n临时分发和发送查询信息,并且客户终端3a至3n被配置为使得显示部分8从显示部分8显示分布式查询信息 预设开始时间到结束时间,这在客户终端中是常见的,并且将回复信息暂时分发并发送到在该时间期间输入的查询信息到服务器2.版权所有:(C)2005,JPO&NCIPI
    • 3. 发明专利
    • Communication system in ptmp type network
    • PTMP类型网络中的通信系统
    • JP2012034042A
    • 2012-02-16
    • JP2010169659
    • 2010-07-28
    • Tokyo Denki UnivToshiba Corp学校法人東京電機大学株式会社東芝
    • KOBAYASHI HIROSHISANO KAORIMORIYA OSAMU
    • H04W74/08H04W72/04H04W84/12
    • PROBLEM TO BE SOLVED: To provide a communication system in a PTMP type network with improved throughput performance.SOLUTION: In this embodiment, in a hub device in a PTMP type network to share the hub device among multiple subscriber devices and to perform transmission control between the hub device and the subscriber devices, different bandwidths are allocated to an uplink control channel for transmitting CA(collision avoidance) frames between the hub device and the multiple subscriber devices and to a data channel for transmitting data frames, respectively. Further, the CA procedure in the uplink control channel is performed independently from the transmission control of the data channel based on a data occupation state of the data channel.
    • 要解决的问题:提供具有改进的吞吐量性能的PTMP型网络中的通信系统。 解决方案:在本实施例中,在PTMP型网络的集线器设备中,在多个用户设备之间共享集线器设备,并且在集线器设备和订户设备之间执行传输控制,将不同的带宽分配给上行链路控制信道 用于在集线器设备和多个用户设备之间发送CA(避免冲突)帧,以及分别用于发送数据帧的数据信道。 此外,基于数据信道的数据占用状态,独立于数据信道的传输控制来执行上行链路控制信道中的CA过程。 版权所有(C)2012,JPO&INPIT