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1. 发明专利

JP2009188344A Milling device and milling method 有权
标题翻译：铣削和铣削方法
公开(公告)号：JP2009188344A
公开(公告)日：2009-08-20
申请号：JP2008029382
申请日：2008-02-08
申请人： Tdk Corp , Tdk株式会社
发明人： KUBOTA NAOKI , HOTTA AKIHIRO , SATO MASATO , ISHIYAMA SHIGEKI , SASAKI TORU , MATSUI SATOSHI
IPC分类号： H01L21/302 , C23F4/00 , H01J27/02 , H01J37/08 , H01J37/305 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a milling device and a milling method that level the surface of a workpiece composed of different materials.
SOLUTION: A radical is supplied to a substrate S from a source of radical 3 along the direction almost orthogonal to a machined surface of the substrate S, a neutral particle beam source 4 irradiates a neutral particle beam NB along the direction almost parallel to the machined surface of the substrate S. This allows a highly resistant material to physical etching to be ground at a portion where a low resistant material to physical etching out of the substrates S so as not to grind a portion in the direction almost orthogonal from the machined surface of the substrate S by the radical too much, when machining the substrate S composed of a plurality of the materials. Furthermore, a portion where a chemically stable material is used may be auxiliarily machined by physical etching with the neutral particle beam NB. Therefore, a deviation of machined amount by the radical is supplemented with a neutral neon beam NB, thereby enabling the system to level the machined surface of the substrate S.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供对由不同材料构成的工件的表面进行平坦化的铣削装置和铣削方法。解决方案：自由基3沿着与基板S的加工表面几乎正交的方向从基体3供给基板S，中性粒子束源4沿着几乎平行的方向照射中性粒子束NB 到基板S的加工表面。这允许在物质蚀刻的低电阻材料从基板S出来的部分处理耐蚀材料以进行物理蚀刻，以便不在与基板S几何正交的方向上研磨部分当由多个材料组成的基板S进行加工时，基体S的加工表面由基团过多。此外，使用化学稳定材料的部分可以通过用中性粒子束NB进行物理蚀刻来辅助加工。因此，通过中性氖光束NB补充基团的加工量的偏差，从而使系统能够使基板S的加工表面平整。版权所有（C）2009，JPO＆INPIT

2. 发明专利

JP2009135209A Method of manufacturing laminated capacitor 有权
标题翻译：制造层压电容器的方法
公开(公告)号：JP2009135209A
公开(公告)日：2009-06-18
申请号：JP2007308924
申请日：2007-11-29
申请人： Tdk Corp , Tdk株式会社
发明人： WATANABE TAKASHI , YAGI HIROSHI , SATO MASATO
IPC分类号： H01G4/30 , H01G4/12 , H01G13/00
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a laminated capacitor capable of greatly reducing variations of the capacitance between manufactured respective laminated capacitors.
SOLUTION: The method of manufacturing the laminated capacitor includes the green laminate forming step of forming a green laminate 48 by the steps of forming belt-shaped electrically conductive coating films 24A-24D extending along the Y-axis direction on a dielectric green layer 22, forming a dielectric green layer 28 to cover any conductive coating films 24A-24D, and forming on the dielectric green layers 28 electrically conductive coating films 30A-30D extending along the Y-axis direction and including an opposing portion opposed to part of the conductive coating films 24A-24D as seen from the lamination direction and non-opposing portion other than it.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：提供一种能够大大减少制造的各层叠电容器之间的电容变化的叠层电容器的制造方法。＆lt; P＆gt;解决方案：层压电容器的制造方法包括通过以下步骤形成生坯层压体48的生坯层压体形成步骤：在电介质绿色上形成沿Y轴方向延伸的带状导电涂膜24A-24D 层22，形成介电绿色层28以覆盖任何导电涂膜24A-24D，并且在电介质绿色层28上形成沿着Y轴方向延伸的导电涂膜30A-30D，并且包括与从层叠方向观察导电性涂膜24A〜24D，除此以外的非相对部分。版权所有（C）2009，JPO＆INPIT

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