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1. 发明专利

JP2003045010A Magneto-resistance effect device, its manufacturing method, thin-film magnetic head and its manufacturing method 审中-公开
标题翻译：磁阻效应器件及其制造方法，薄膜磁头及其制造方法
公开(公告)号：JP2003045010A
公开(公告)日：2003-02-14
申请号：JP2002111587
申请日：2002-04-15
申请人： Tdk Corp , ティーディーケイ株式会社
发明人： INAGE KENJI , KUDO YOSHIHIRO , TAKANO KENICHI , TERUNUMA KOICHI , IWAI YUZURU
IPC分类号： G11B5/39 , H01L43/08 , H01L43/12
摘要： PROBLEM TO BE SOLVED: To improve the sensitivity, the output and the output stability of a magneto-resistance effect device, and to accurately decide an effective reading track width. SOLUTION: The magneto-resistance effect device is provided with an MR element 5, a bias magnetic field application layer 18 arranged to be adjacent to each side of the MR element 5, and tow electrode layers 6 for supplying sense currents to the MR element 5. The electrode layers 6 are arranged to overlap each other in one surface of the MR element 5. The total overlapping amount of the two electrode layers 6 is less than 0.3 μm. The MR element 5 has a substrate layer, a free layer, a spacer layer, a pind layer, an aitiferromagnetic layer and a gap layer, which are laminated from the lower aide in this order. The free layer includes a first soft magnetic layer, a middle layer and a second soft magnetic layer. The middle layer limits the path of the movement of electrons at least partially reflected when the sense current flows through the MR element 5.
摘要翻译：要解决的问题：提高磁阻效应器件的灵敏度，输出和输出稳定性，并准确地确定有效读取磁道宽度。解决方案：磁阻效应器件设置有MR元件5，布置成与MR元件5的每一侧相邻的偏置磁场施加层18以及用于向MR元件5提供感测电流的牵引电极层6 电极层6被配置为在MR元件5的一个表面上彼此重叠。两个电极层6的总重叠量小于0.3μm。 MR元件5具有从下侧辅助层叠的基板层，自由层，间隔层，点层，铁层和间隙层。自由层包括第一软磁层，中间层和第二软磁层。当感测电流流过MR元件5时，中间层限制电子移动的路径至少部分反射。

2. 发明专利

JP2003085708A Method for forming patterned thin-film, and method for manufacturing thin-film magnetic head 审中-公开
标题翻译：形成图案薄膜的方法及制造薄膜磁头的方法
公开(公告)号：JP2003085708A
公开(公告)日：2003-03-20
申请号：JP2001276097
申请日：2001-09-12
申请人： Tdk Corp , ティーディーケイ株式会社
发明人： TERUNUMA KOICHI
IPC分类号： G03F7/20 , C25D5/02 , C25D7/00 , G11B5/31 , G11B5/39 , H01L21/302
摘要： PROBLEM TO BE SOLVED: To accurately form a patterned thin film having very small width.
SOLUTION: The track width defining layer of a thin-film magnetic head is formed in the following manner. First, a substrate film 30, a first film, a releasable film and a second film are formed in this order on a recording gap layer 9. Then, the second film is subjected to patterning so as to form an opening in a position corresponding to a fame to be formed. Then, a third film is formed to cover the patterned second film and the releasable film, and the third film is subjected to patterning by a lift-off method. Then, by using the patterned third film 33P as a mask, the releasable layer and the first film are selectively etched, and a frame 34 is formed by the first film after etching. Then, by using the frame 34, a track width defining layer and a plated layer 35A are formed by a frame plating method.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：精确地形成具有非常小的宽度的图案化薄膜。解决方案：以下列方式形成薄膜磁头的磁道宽度限定层。首先，在记录间隙层9上依次形成衬底膜30，第一膜，可剥离膜和第二膜。然后，对第二膜进行图案化，以形成对应于成名。然后，形成第三膜以覆盖图案化的第二膜和可剥离膜，并且通过剥离法对第三膜进行图案化。然后，通过使用图案化的第三膜33P作为掩模，选择性地蚀刻可剥离层和第一膜，并且在蚀刻之后由第一膜形成框架34。然后，通过使用框架34，通过框架电镀法形成轨道宽度限定层和镀层35A。

3. 发明专利

JP2003036510A Thin-film magnetic head, magnetic head, and magnetic recording/reproducing device 有权
标题翻译：薄膜磁头，磁头和磁记录/再现装置
公开(公告)号：JP2003036510A
公开(公告)日：2003-02-07
申请号：JP2001222731
申请日：2001-07-24
申请人： Tdk Corp , ティーディーケイ株式会社
发明人： TERUNUMA KOICHI , SHIMAZAWA KOJI , UEJIMA SATOSHI
IPC分类号： G11B5/39
CPC分类号： G11B5/3903 , G11B5/3932 , G11B5/3967 , Y10T29/49046
摘要： PROBLEM TO BE SOLVED: To provide a thin-film magnetic head that can improve reliability of the insulation between the upper shield film and the electrode film and can avoid electro-migration caused by high-density current. SOLUTION: The magnetoresistive effect film 300 responds to a magnetic field applied from the outside. The magnetic-domain control films 311 and 312 apply a perpendicular magnetic bias field to the magnetoresistive effect film 300. The tips of the first electrode films 351, 361 included in a pair of electrode films 35, 36 overlap the surface of the magnetoresistive element film 300 and the tip surfaces rise with the inner angle θ1. The 2nd electrode layers 352 and 362 overlap the 1st electrode layers 351 and 361, and the tip surfaces rise with the inner angle θ1 smaller than θ1.
摘要翻译：要解决的问题：提供一种能够提高上部屏蔽膜和电极膜之间的绝缘性的可靠性的薄膜磁头，能够避免由高密度电流引起的电迁移。解决方案：磁阻效应膜300响应于从外部施加的磁场。磁畴控制膜311和312对磁阻效应膜300施加垂直磁偏置场。包括在一对电极膜35,36中的第一电极膜351,361的尖端与磁阻元件膜的表面重叠 300，并且尖端表面以内角θ1上升。第二电极层352和362与第一电极层351和361重叠，并且尖端表面以内角θ1小于θ1而上升。

4. 发明专利

JP2003067903A Thin film magnetic head, and manufacturing method thereof, head gimbal assembly, and hard disk device 有权
标题翻译：薄膜磁头及其制造方法，耳机组件和硬盘装置
公开(公告)号：JP2003067903A
公开(公告)日：2003-03-07
申请号：JP2001253814
申请日：2001-08-24
申请人： Tdk Corp , ティーディーケイ株式会社
发明人： ITO NORIYUKI , TANAKA KOSUKE , TERUNUMA KOICHI
IPC分类号： G11B5/39 , G11B5/596
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3903 , G11B5/3909 , G11B5/59683 , G11B2005/3996
摘要： PROBLEM TO BE SOLVED: To realize excellent magnetic signal read out characteristics by preventing to sustain an injury in processing of facing surface of a medium by making resistance of a conductive layer of a magnetroresistive (MR) effect element small enough to pass a current for detection of a magnetic signal.
SOLUTION: A playback head is provided with an MR element 5, two bias impress layers 27, and two conductive layers 6. Two bias magnetic field impress layers 27 are disposed abutting on each sideward 5c, 5d of the MR element 5, and impresses vertical bias magnetic field to the MR element 5. Two conductive layers 6 are disposed abutting on one surface of respective bias magnetic field impress layers 27 and also overlaying partly on one surface 5a of the MR element 5, and a sense current is passed to the MR element 5. The conductive layer 6 is gold alloy having the resistivity
摘要翻译：要解决的问题：为了通过使磁阻（MR）效应元件的导电层的电阻小到足以通过用于检测的电流来防止在介质的相对表面的处理中维持损伤来实现优异的磁信号读出特性的磁信号。解决方案：回放头设置有MR元件5，两个偏置压印层27和两个导电层6.两个偏置磁场施加层27被设置为邻接在MR元件5的每个侧面5c，5d上，并且使垂直两个导电层6邻接在相应的偏置磁场施加层27的一个表面上并且部分地覆盖在MR元件5的一个表面5a上，并且感测电流被传递到MR 导电层6是具有电阻率<22μΩ·cm的金合金，并且构成偏置磁场施加层27的材料的硬度> =硬度。

5. 发明专利

JP2003085711A Thin-film magnetic head, its manufacturing method, head gimbals assembly and hard disk device 审中-公开
标题翻译：薄膜磁头，其制造方法，头盔组件和硬盘设备
公开(公告)号：JP2003085711A
公开(公告)日：2003-03-20
申请号：JP2001275997
申请日：2001-09-12
申请人： Tdk Corp , ティーディーケイ株式会社
发明人： TERUNUMA KOICHI
IPC分类号： G11B5/39
摘要： PROBLEM TO BE SOLVED: To prevent a reduction in a reproduction output even when a length in a direction vertical to the medium-facing surface of the dynamic area of a magneto-resistance effect element is set small.
SOLUTION: A reproducing head is provided with an MR element 5, two bias magnetic field applied layers 27 and two conductive layers 6. The two bias magnetic field applied layers 27 are arranged to be adjacent to the respective sides of the MR element 5 to apply longitudinal boas magnetic fields to the MR element 5. The two conductive layers 6 are arranged such that each layer is adjacent to one surface of each bias magnetic field applied layer 27, arranged to partially to overlap the surface 5a of the MR element 5, and supply sense currents to the MR element 5. The MR element 5 includes an end 5f opposite to an air bearing surface 20, a part of its vicinity, and an insulating part 5g insulated from the two conductive layers 6. An insulating layer 28 is arranged between the insulating part 5g and the two conductive layers 6.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：即使当垂直于磁阻效应元件的动态区域的介质表面的方向上的长度被设定得较小时，也可以防止再现输出的减小。解决方案：再现头设置有MR元件5，两个偏置磁场施加层27和两个导电层6.两个偏置磁场施加层27被布置成与MR元件5的相应侧相邻以施加对MR元件5的纵向波纹磁场。两个导电层6布置成使得每个层邻近每个偏置磁场施加层27的一个表面，其布置成部分地与MR元件5的表面5a重叠，并且向MR元件5提供感测电流.MR元件5包括与空气轴承表面20及其附近的一部分相对的端部5f和与两个导电层6绝缘的绝缘部分5g。绝缘层28布置在绝缘部5g和两个导电层6之间。

6. 发明专利

JP2006172548A Thin film magnetic head, head gimbal assembly, and hard disk drive 审中-公开
标题翻译：薄膜磁头，头盖组件和硬盘驱动
公开(公告)号：JP2006172548A
公开(公告)日：2006-06-29
申请号：JP2004360889
申请日：2004-12-14
申请人： Tdk Corp , Tdk株式会社
发明人： TANAKA KOSUKE , SHIMAZAWA KOJI , TERUNUMA KOICHI , SASAKI TETSUO
IPC分类号： G11B5/39
摘要： PROBLEM TO BE SOLVED: To provide a thin film magnetic head including a magnetoresistance effect element by which the generation rate of Barkhausen noises is drastically reduced and arrangement is set concerning a free layer and bias magnetic field applying layers.
SOLUTION: The pair of bias magnetic field applying layers are arranged at both end parts forming a junction taper shape in the magnetoresistance effect film. When the thin film magnetic head is viewed from an ABS (Air Bearing SUrface) side with a substrate facing down, an X-axis is regulated by a line on the most upper surface constituting the free layer. A Y-axis is orthogonally crossed with the X-axis and regulated by a line passing in the most right direction of the line on the most upper surface constituting the free layer. In X-Y coordinate axes with the intersection of the X and Y axes as an original point concerning the thin film magnetic head, the distal end of one bias magnetic field applying layer arranged at an original point side end part is positioned in a first or fourth quadrant, and also a distance from the distal end of the bias magnetic field applying layer to the original point is within the range of 11nm.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种包括磁阻效应元件的薄膜磁头，通过该磁阻效应元件，巴克豪森噪声的产生速率急剧降低，并且关于自由层和偏置磁场施加层设置了布置。解决方案：一对偏置磁场施加层布置在磁阻效应膜中形成结锥形的两端部处。当从ABS（空气轴承表面）侧观察薄膜磁头时，基板朝下，X轴由构成自由层的最上面的线调节。 Y轴与X轴正交，并由构成自由层的最上面的线的最右侧的线路进行调节。在XY坐标轴上，X轴与Y轴的交点作为薄膜磁头的原点，配置在原点侧端部的一个偏磁场施加层的前端位于第一或第四象限并且从偏置磁场施加层的远端到原点的距离也在11nm的范围内。版权所有（C）2006，JPO＆NCIPI

7. 发明专利

JP2004206842A Thin film magnetic head, thin film magnetic head assembly, storage device and manufacturing method for thin film magnetic head 审中-公开
公开(公告)号：JP2004206842A
公开(公告)日：2004-07-22
申请号：JP2002377674
申请日：2002-12-26
申请人： Tdk Corp , Tdk株式会社
发明人： TANAKA KOSUKE , SHIMAZAWA KOJI , TERUNUMA KOICHI
IPC分类号： G11B5/39
CPC分类号： G11B5/3906 , Y10T29/49052
摘要： PROBLEM TO BE SOLVED: To provide a thin film magnetic head in which an effective track width is prevented from spreading and very high output stability is obtained by more reducing read-blurring at both ends in the track width direction of a magnetoresistance effect film. SOLUTION: On both sides of an MR film 7 in the track width direction, a 1st electrode layer 13 and a magnetic domain control layer 9 are layered. When using, as the reference plane G, the plane on the side of a lower gap layer 5 of the magnetic domain control layer 9 at the positions where the 1st electrode layer 13 and the magnetic domain control layer 9 are layered, the spacing L1 from the reference plane G up to the plane on the side of the upper gap layer 17 of the electrode layer 13 is made narrower than the spacing L2 from the reference plane G up to the plane on the side of the upper gap layer 17 of the MR film 7. Moreover, the spacing L3 between a lower magnetic shielding layer 3 and an upper magnetic shielding layer 19 at the positions where the magnetic domain layer 9 and the 1st electrode layer 13 are layered is set narrower than the spacing L4 between the lower magnetic shielding layer 3 and the upper magnetic shielding layer 19 at the position of the MR film 7. COPYRIGHT: (C)2004,JPO&NCIPI

8. 发明专利

JP2003151110A MAGNETIC RECORDING/REPRODUCING DEVICE 审中-公开
公开(公告)号：JP2003151110A
公开(公告)日：2003-05-23
申请号：JP2001350771
申请日：2001-11-15
申请人： TDK CORP
发明人： SHIMAZAWA KOJI , TAKEO KENJI , TERUNUMA KOICHI
IPC分类号： G11B5/39 , G11B5/60 , G11B21/21
摘要： PROBLEM TO BE SOLVED: To provide a magnetic recording/reproducing device in which a reading blur due to a magnetic space can be minimized. SOLUTION: An SV film 300 has a free layer 301 on an outermost side. Magnetic domain control films 37, 38 apply vertical bias magnetic fields to the free layer 301 of the SV film 300. Electrode layers 35, 36 include nonmagnetic layers 351, 361, and soft magnetic layers 352, 362. The nonmagnetic layers 351, 361 are adjacent to the free layer 301. The soft magnetic layers 352, 362 are adjacent to the nonmagnetic layers 351, 361. A gap d1 between the free layer 301 and the soft magnetic layers 352, 362, and a magnetic space g1 satisfy g1>=d1.

9. 发明专利

JP2003142754A THIN FILM DEVICE, THIN FILM MAGNETIC HEAD ASSEMBLY, MAGNETIC HEAD AND MANUFACTURING METHOD THEREOF 审中-公开
公开(公告)号：JP2003142754A
公开(公告)日：2003-05-16
申请号：JP2001338780
申请日：2001-11-02
申请人： TDK CORP
发明人： TAKEO KENJI , SHIMAZAWA KOJI , TERUNUMA KOICHI
IPC分类号： G11B5/31 , G11B5/39 , H01L21/302 , H01L21/3065 , H01L43/08 , H01L43/12
摘要： PROBLEM TO BE SOLVED: To provide a thin film device having a structure capable of computing the width of a thin film pattern having a width smaller than that of actually measuring limit with a high reliability. SOLUTION: The thin film device comprises a first thin film pattern 211, a second thin film pattern 212, and a third thin film pattern 213. The first thin film pattern 211 is provided with a first width (A) smaller than the actually measuring limit (Wmin), and the second thin film pattern 212 is provided with a second width (B) larger than the actually measuring limit. The third thin film pattern 213 is provided with a third width (C) larger than the second width (B) of the second thin film pattern 212.

10. 发明专利

JP2002124720A MAGNETORESISTANCE EFFECT DEVICE, ITS MANUFACTURING METHOD, THIN FILM MAGNETIC HEAD AND ITS MANUFACTURING METHOD 审中-公开
公开(公告)号：JP2002124720A
公开(公告)日：2002-04-26
申请号：JP2001213544
申请日：2001-07-13
申请人： TDK CORP
发明人： INAGE KENJI , KUDO YOSHIHIRO , TAKANO KENICHI , TERUNUMA KOICHI , IWAI YUZURU
IPC分类号： G01R33/09 , G11B5/39 , H01L43/08 , H01L43/12
摘要： PROBLEM TO BE SOLVED: To improve sensitivity, output and output stability of a magnetoresistance(MR) effect device. SOLUTION: This magnetoresistance effect device is provided with an MR element 5, a bias magnetic field applying layer 18 arranged adjacently to each side part of the MR element 5, and two electrode layers 6 for applying a sense current to the MR element 5. The electrode layers 6 are arranged overlapping with one surface of the MR element. The sum of the amount of overlap of the two electrode layers 6 is smaller than 0.3 μm. The MR element 5 is a spin valve type GMR element, and has a base layer, a free layer, a spacer layer, pinned layer, an antiferromagnetic layer and a cap layer which are laminated in this order from below. The pinned layer contains a nonmagnetic spacer layer and two ferromagnetic layers arranged sandwiching the nonmagnetic spacer layer.

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