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1. 发明专利

JP2013254335A PLANT OPERATION DEVICE AND METHOD 审中-公开
公开(公告)号：JP2013254335A
公开(公告)日：2013-12-19
申请号：JP2012129271
申请日：2012-06-06
申请人： TOSHIBA CORP , TOSHIBA SYST TECH
发明人： TAKADA HIROYUKI , HARADA TAKASHI
IPC分类号： G06F3/048 , G05B23/02
摘要： PROBLEM TO BE SOLVED: To provide a plant operation technique which allows multiple operation terminals to be operated on an operation screen at simultaneous timing.SOLUTION: A plant operation device 10 includes: a control unit 14 connected to a network 11 for controlling operations of operation terminals 13 (13a,13b,13c,13d) of a plant 12; a selection button displayed on a display part 16 of a terminal part 15 connected to the network 11 for outputting selection signal(s) for selecting operation terminal(s) 13 to be operation target(s); a setting button displayed on the display part 16 for outputting a setting signal for setting operation of each operation terminal 13 selected as an operation target; and an execution button displayed on the display part 16 for outputting an execution signal which causes each setting signal 32 to be output simultaneously to each operation terminal 13 of operation target.

2. 发明专利

JPH0696787A FUEL CELL GENERATING DEVICE 失效
公开(公告)号：JPH0696787A
公开(公告)日：1994-04-08
申请号：JP12479493
申请日：1993-04-30
申请人： TOSHIBA SYST TECH KK , TOSHIBA CORP
发明人： MASUDA KATSUTOSHI , TAKADA HIROYUKI , MATSUMURO HARUO
IPC分类号： H01M8/04
摘要： PURPOSE:To allow the transfer to load operating state without stopping a plant at a fuel cell failure by providing a means for separating a generating means of fuel cell failure information from a failed fuel cell and operating the plant only by normal fuel cells. CONSTITUTION:When any abnormality is generated in a fuel cell 7, the failure signal of the cell 7 is detected by a fuel cell judging means 23, and when the unusability is judged by an operator, the failure signal of the cell 7 is transmitted from the means 23 to a cell output bypass means 26. Thus, a switch signal is outputted to bypass switches 27, 28 corresponding to the cell 7 to bypass the cell output of the cell 7 in which the abnormality is generated, and the cell output of the whole plant is obtained only from normal fuel cells 8, 9. By this operation, the supply of fuel and air to the cell 7 is interrupted, and the cell output is bypassed and separated from the operation of the plant. Thus, the maintenance of the failed fuel cell can be performed while continuously operating the plant only with the normal fuel cells.

3. 发明专利

JPH08314532A PLANT MONITOR DEVICE 失效
公开(公告)号：JPH08314532A
公开(公告)日：1996-11-29
申请号：JP14692295
申请日：1995-05-23
申请人： TOSHIBA SYST TECH KK , TOSHIBA CORP
发明人： TAKADA HIROYUKI , DOSONO TAKESHI , TANAKA YOKO
IPC分类号： G06F3/14 , G05B23/02 , G06F3/048 , G08B23/00 , G08B25/00
摘要： PURPOSE: To execute a selection operation by a normal operation sense by interruption-displaying an operation input screen on a monitor screen when the operation terminal of the related operation terminal of the displayed monitor screen is designated by an operator and outputting an operation signal to the operation terminal when the operator executes operation input. CONSTITUTION: An automatization monitor means 9 fetches plant data, monitors the progressing state of a plant and outputs inconvenience information. A display processing means 1 displays an automatization progress monitor screen on a display device 2. When inconvenience information is inputted, it is displayed on the monitor screen. When related operation terminal information is inputted, it is interruption-displayed. When operation input screen information is inputted, it is interruption-displayed. When inconvenience information on the automatization progress monitor screen is designated by the operator, an operation information processing means 61 retrieves an inconvenience information storage part 51 by inconvenience information designated through a touch screen 3 and an input processing means 4 and outputs related operation terminal list information to the display processing means 1.

4. 发明专利

JP2014187079A Fiber laser device 审中-公开
标题翻译：光纤激光器件
公开(公告)号：JP2014187079A
公开(公告)日：2014-10-02
申请号：JP2013059183
申请日：2013-03-21
申请人： Toshiba Corp , 株式会社東芝
发明人： TAKADA HIROYUKI
IPC分类号： H01S3/067
摘要： PROBLEM TO BE SOLVED: To provide a fiber laser device in which spontaneous emission light is suppressed and efficiency in pulse amplification is improved.SOLUTION: A fiber laser device includes a seed light source, a polarizing holding fiber, an excitation light source, an optical coupler, a polarizer, and a spontaneous emission light control part. The polarizing holding fiber includes a first end part and a second end part on the side opposite to the first end part, with rare earth element added, and emits seed light as pulse amplification light while holding polarizing state of the seed light introduced from the first end part. The optical coupler allows the pulse amplification light to pass, and introduces excitation light into the second end part of the polarizing holding fiber. The polarizer is arranged in such a manner as a transmission axis is parallel to a polarizing axis of the pulse amplification light, and capable of reflecting an orthogonal component to the transmission axis in the light emitted from the second end part of the polarizing holding fiber. In spontaneous emission light, an output of excitation light is controlled by detecting inclination of light intensity of the reflection light of the polarizer relative to the light intensity of the seed light.
摘要翻译：要解决的问题：提供抑制自发发光并提高脉冲放大效率的光纤激光装置。解决方案：光纤激光装置包括种子光源，偏振保持光纤，激发光源，光耦合器，偏振器和自发发射光控制部件。偏光保持光纤包括第一端部和与第一端部相对的一侧的第二端部，添加稀土元素，并且发射种子光作为脉冲放大光，同时保持从第一端部引入的种子光的偏振状态结束部分。光耦合器允许脉冲放大光通过，并将激发光引入偏振保持光纤的第二端部。偏振器以透射轴平行于脉冲放大光的偏振轴的方式布置，并且能够在从偏振保持光纤的第二端部发射的光中反射到透射轴的正交分量。在自发发射光中，通过检测偏振器的反射光的光强度相对于种子光的光强度来控制激发光的输出。

5. 发明专利

JP2002149207A CONTROL DEVICE AND REMOTE MAINTENANCE SYSTEM FOR DECENTRALIZED TYPE SUPERVISORY CONTROL SYSTEM 失效
公开(公告)号：JP2002149207A
公开(公告)日：2002-05-24
申请号：JP2000347912
申请日：2000-11-15
申请人： TOSHIBA CORP
发明人： TAKADA HIROYUKI , UNO KAZUMI , AIBA HIROSHI , OOGAWARA TOMOHARU
IPC分类号： G05B15/02
摘要： PROBLEM TO BE SOLVED: To provide a control device and a remote maintenance system for a decentralized type supervisory control system which can adequately adjust the gain of the controller and speedily and securely modify the control program of the control device. SOLUTION: A gain adjusting means 7 varies and updates the gain value of a PID gain table 5 according to a gain increase/decrease fine adjustment gain value or a gain set value of operator operation information from an input processing means 1. The gain value can be adjusted by gain increase/decrease fine adjustment, so even a person which does not have much experience can speedily and safely set the gain value and does not set an abnormal value. The operation of a plant can be made stable with the best gain.

6. 发明专利

JP2000252257A METHOD AND DEVICE FOR MONITORING PRESSURE IN CHAMBER, METHOD AND DEVICE FOR CONTROLLING PRESSURE, AND ETCHING METHOD 失效
公开(公告)号：JP2000252257A
公开(公告)日：2000-09-14
申请号：JP5570099
申请日：1999-03-03
申请人： TOSHIBA CORP
发明人： TAKADA HIROYUKI , YAMAUCHI TAKEMOTO
IPC分类号： H01L21/302 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To accurately control the pressure in a vacuum chamber to be suitable for a process. SOLUTION: Related to the pressure control method, a vacuum chamber 1 is supplied with a reactive gas while applied with a high-frequency energy to generate a plasma 8, and with the plasma 8, the impedance of the plasma 8 is measured by an impedance measuring means 19 through a probe 16 during etching of a semiconductor wafer 3 provided in the vacuum chamber 1, and a pressure P in the vacuum chamber 1 is acquired by a pressure calculating means 20 based on a time-series change of the impedance, and based on the pressure P, the pressure in the vacuum chamber 1 is controlled by a pressure control means 21.

7. 发明专利

JP2000208479A METHOD AND APPARATUS FOR EVALUATING PLASMA TREATMENT AND MANUFACTURE OF SEMICONDUCTOR DEVICE 失效
公开(公告)号：JP2000208479A
公开(公告)日：2000-07-28
申请号：JP544599
申请日：1999-01-12
申请人： TOSHIBA CORP
发明人： TAKADA HIROYUKI , YAMAUCHI TAKEMOTO
IPC分类号： H01L21/302 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To easily evaluate the uniformity of a plasma treatment without time and labor. SOLUTION: The voltage and current of high-frequency power supplied to a vacuum chamber 1 are monitored by a probe 12. Impedance of plasma 8 is measured by impedance measuring means from the monitored voltage and current of the high-frequency power. The uniformity (a) of the etching rate of a semiconductor wafer 3 is evaluated by evaluating means 16 based on the time when the impedance change starts and the time when the impedance change ends.

8. 发明专利

JPH10294513A LASER DIODE EXCITING SOLID LASER SYSTEM 失效
公开(公告)号：JPH10294513A
公开(公告)日：1998-11-04
申请号：JP20007397
申请日：1997-07-25
申请人： TOSHIBA CORP
发明人： NAKAYAMA MICHIO , TAKADA HIROYUKI , TAKADA ATSUSHI , TAKASE TOMOHIRO
IPC分类号： H01S3/094 , H01S3/16
摘要： PROBLEM TO BE SOLVED: To increase the oscillation efficiency of laser system by controlling the temperature and flow rate of cooling medium running into respective heat sinks, so as to fit the wavelength of respective laser diodes for the absorption spectrum of laser medium. SOLUTION: A refrigerator 8 refrigerating LD 4-1 to 4-8 by feeding cooling water to heat sinks 6-1 to 6-8 through cooling water parts 7 is furnished with the adjusting function of the cooling water temperature. Besides, respective cooling water paths 7 piped to the heat sinks 6-1 to 6-8 are provided with respective flow rate adjusting valves 9-1 to 9-4 (heat sinks 6-1 to 6-8 sides are not shown in figure). In such a constitution, the temperature of the cooling water is set up so that the wavelength of the light from the LD emitting the light in the longest wavelength at a specific temperature out of the LD 4-1 to 4-8 may fit with the absorption spectrum of a YAG crystal 1, while the wavelength of the heat sinks 6-1 to 6-8 in the other LDs is controlled to fit with the absorption spectrum of the YAG crystal 1.

9. 发明专利

JPH09304532A LASER DISTANCE-MEASURING APPARATUS 失效
公开(公告)号：JPH09304532A
公开(公告)日：1997-11-28
申请号：JP11777896
申请日：1996-05-13
申请人： TOSHIBA CORP
发明人： TAKADA HIROYUKI , TANAKA YOSHIO , YUASA HIROSHI
IPC分类号： G01B11/00 , G01S17/10
摘要： PROBLEM TO BE SOLVED: To obtain a laser distance-measuring apparatus by which a distance is measured precisely by averaging respective times for respective reflected pulses which are returned in a shortest time and a longest time out of a plurality of reflected pulses so as to be chopped by a pulsed-laser-beam chopping means and so as to be reflected by a target, so as to find a time difference until a reflected pulsed laser is received. SOLUTION: A pulsed laser beam Pa which is output from a YAG laser light source 51 is chopped by a chopping device 54 so as to irradiate a target 4 as a prescribed pulse Pb. A reflected pulse Pc from the target 4 is incident on a light receiving sensor 52. A control device 50 starts the counting operation of a distance counter 53 after the intensity of the laser beam Pa has reached a prescribed threshold value when the laser beam Pa is output. The device 50 reads out the time difference between reflected pulses Pe, Pf which are returned in a longest time and a shortest time out of reflected pulses whose intensity exceeds a prescribed threshold value out of received pulses Pc, and every time difference is averaged so as to find a time difference in which an intrinsic reflected pulsed laser is returned.

10. 发明专利

JPH0378900A PLANT ABNORMALITY DETECTOR 失效
公开(公告)号：JPH0378900A
公开(公告)日：1991-04-04
申请号：JP21491089
申请日：1989-08-23
申请人： TOSHIBA CORP
发明人： TAKADA HIROYUKI
IPC分类号： G21C17/00 , G08B23/00 , G08B25/00
摘要： PURPOSE:To reduce the burden of a monitoring staff to speedily and exactly detect the abnormal state of a monitoring object by detecting a hue change based on the video signal of the monitoring object and judging the abnormal state by comparing the contents with object judgement information. CONSTITUTION:The monitoring object is photographed by a color television camera 1, etc., and it is detected by a hue fluctuation detecting means 23 whether there is the hue fluctuation between the obtained input picture and a normal picture or not. When the fluctuation is detected, the information in an object information storage part 26 are compared respectively with the information of three primary colors for the color of a hue fluctuating part, area information to be calculated according to the number of picture elements in the hue fluctuating art and hue fluctuation area information to be calculated by dividing the picture into plural block areas and show ing in which area the picture with the high rate of fluctuation is included. Then, an object with wholly equal information concerning the color, size and position on the picture, etc., is selected and decision information are referred. Thus, it is correctly decided whether the monitoring object is abnormal or normal, and the burden of the monitoring staff is reduced. Then, the abnormality of a plant, etc., is discovered early.

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