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1. 发明专利

JPH10257665A MULTIPLE TERMINAL TRANSMISSION LINE OVERLOAD DETECTION RELAY DEVICE 失效
公开(公告)号：JPH10257665A
公开(公告)日：1998-09-25
申请号：JP7673897
申请日：1997-03-13
申请人： TOSHIBA CORP , TOSHIBA ENGINEERING CO
发明人： TAKEDA AKIO , HASHIMOTO TAKU , MATSUO TOSHIYUKI
IPC分类号： H02H3/40
摘要： PROBLEM TO BE SOLVED: To resolve the overload of an arbitrary section. SOLUTION: Transmission lines S (S1-S5) are linked with each other, through halfway branch points and composed of (n) terminals T (n>=4). In order to detect the overload of an overload detection object section W, which is a section in the transmission lines between the halfway branch points R1 and R2, respective terminal devices 100 are provided, so as to correspond to the respective terminals T (T1-T4) to fetch information data of currents which are applied to the respective terminals T and to output cut-off command signals to breakers K, which cut off the currents applied to the respective terminals T. The information data of the respective currents are fetched from the respective terminal devices 100 to a judgment device 101 through transmission routes U and, based on the fetched information data, the judgment device 101 judges the overload state of the section and generates a cut off object selection signal, so as to resolve the overload state of the section and outputs the cut-off command signal to the corresponding terminal device 100.

2. 发明专利

JPH09294328A CURRENT DIFFERENTIAL RELAY 失效
公开(公告)号：JPH09294328A
公开(公告)日：1997-11-11
申请号：JP10259896
申请日：1996-04-24
申请人： TOKYO ELECTRIC POWER CO , TOSHIBA CORP , TOSHIBA ENGINEERING CO
发明人： TSURUSAKI HIROYUKI , UENO KAZUO , MATSUO TOSHIYUKI , KUDO KAZUHIKO
IPC分类号： H02H3/28 , H02H7/22
摘要： PROBLEM TO BE SOLVED: To make it possible to maintain a protective function even at the time of system separation, by the change of system constitution and so on. SOLUTION: In a PCM system current differential relay which collects information on the terminal currents of a plurality of electric stations using transmitting means and performs current differential protective operation, means 14a-14d for inputting system group numbers to which individual terminals belong and self-terminal numbers are provided, and whether or not system numbers settled by the self-terminal numbers with the system group numbers is judged. And the current of a terminal which was judged as uncoincident, is OA-controlled by an OA-control circuit 23a-23d, and differential operation is performed in a difference current calculating part 24.

3. 发明专利

JPH07128314A ULTRASONIC FLAW DETECTING METHOD FOR SOCKET WELDING COUPLING 失效
公开(公告)号：JPH07128314A
公开(公告)日：1995-05-19
申请号：JP30120793
申请日：1993-11-05
申请人： SHIN NIPPON HIHAKAI KENSA KK , TOSHIBA CORP , TOSHIBA ENG & CONSTR
发明人： TOMINAGA MASAAKI , MATSUO TOSHIYUKI , UENO AKIHIRO , WATANABE KUNIMICHI , KAWAMATA KUNIO
IPC分类号： G01N29/04 , G01N29/26 , G21C17/003 , G01N29/10
摘要： PURPOSE:To allow flaw detection over a wide range while enhancing S/N ratio by comparing a positional signal of an oblique angle probe detected by a position detecting means while driving a rotating means with an electric signal produced from an oscillator receiving ultrasonic wave reflected on a defect at a welded part. CONSTITUTION:When a welded part 14b between a piping 14 and a joint member 14a is inspected, a clamp arm 58 is adjusted to clamp the joint 14a in the vicinity thereof thus securing an apparatus 10 to the piping 14. A rotary board 17 is rotated by a motor 23 while applying the under face of an oblique angle probe to the joint 14a and then the probe 13 is shifted along the outer peripheral face of the joint 14a thus carrying out the inspection. When the probe 13 is being shifted, ultrasonic wave is transmitted from a transmission oscillator 54 through a transmission side wedge 53 toward a flaw detecting part. An echo reflected on a defective part 14c propagates through the piping 14 and a receiving side wedge 55 to a receiving oscillator 56 where the amplitude of defect echo is detected. Positional signal of the probe 13 detected by the encoder 24 is then compared with a signal received by the oscillator 56.

4. 发明专利

JPS5749082A Vacuum exhauster 失效
标题翻译：真空排气
公开(公告)号：JPS5749082A
公开(公告)日：1982-03-20
申请号：JP12424680
申请日：1980-09-08
申请人： Toshiba Corp
发明人： KATOU SATOSHI , MATSUO TOSHIYUKI , MIYOSHI MOTOSUKE , ODAKAWA KAICHIROU
IPC分类号： F04B37/16
摘要： PURPOSE: To improve efficiency of workability and quality in analysis and manufacture of parts requiring a high-vacuum system, by using a turbo molecular pump as a preliminary vacuum pump for a vacuum exhauster connected to a load chamber and a cryopump as a main vacuum pump.
CONSTITUTION: When a turbo molecular pump 11 is set into operation in the state that a gate valve 6 and a valve 2 are closed but an exhaust valve 8 is opened, contaminants in a load chamber 7 is exhausted and purified sufficiently although the exhaust speed in the chamber 7 is not so high, so that preliminary evacuation of the chamber 7 is accomplished. Subsequently, when a cryopump 9 is set into operation with the valves 8, 2 being closed but the gate valve 6 being opened, the chamber 7 can be evacuated in a short while without causing contamination of liquid helium in the pump 9 since gas in the chamber 7 is purified by the preliminary evacuation and therefore the high evacuating performance of the cryopump 9 can be exerted in a stable manner. Thus, it is enabled to improve the efficiency of operation for analyzing and manufacturing semiconductors or the like in the vacuum chamber 7.
COPYRIGHT: (C)1982,JPO&Japio
摘要翻译：目的：通过使用涡轮分子泵作为连接到负载室和低温泵作为主真空泵的真空排气器的初步真空泵，提高分析和制造需要高真空系统的部件的可加工性和质量的效率。构成：当涡轮分子泵11在闸阀6和阀2关闭但排气门8打开的状态下运转时，负载室7内的污染物排出并净化，尽管排气速度室7不是很高，从而完成了室7的预抽真空。随后，当阀门8,2关闭但闸阀6打开时，低温泵9被运行，腔室7可以在短时间内抽真空而不会引起泵9中的液氦污染，因为气体通过预抽真空来净化室7，能够以稳定的方式发挥低温泵9的高排气性能。因此，能够提高在真空室7中分析和制造半导体等的操作效率。

5. 发明专利

JPS58199864A Divided target 失效
标题翻译：分明的目标
公开(公告)号：JPS58199864A
公开(公告)日：1983-11-21
申请号：JP8383882
申请日：1982-05-18
申请人： Toshiba Corp
发明人： MATSUO TOSHIYUKI , OKUMURA KATSUYA
IPC分类号： C23C14/34 , H01L21/285
CPC分类号： C23C14/3407
摘要： PURPOSE:To make compact an equipment for manufacturing a target used in vapor deposition or other stage and to easily cool the target, by dividing the target into two or more parts. CONSTITUTION:In the manufacture of a target used in a sputtering system vapor deposition or other stage, a fan-shaped rod is divided into two or more parts, each of the parts is conically cut to form surfaces 11 to be sputtered, and the four cut parts are combined and used as a target. Thus, the target can be manufactured simply at a low cost, and since a method for cooling the target can be simplified, defects such as the formation of blow holes can be prevented.
摘要翻译：目的：为了制造用于制造用于气相沉积或其他阶段的目标的设备，并且通过将目标分成两个或更多个部分来容易地冷却目标。构成：在用于溅射系统气相沉积或其他阶段的靶材的制造中，将扇形棒分成两部分或更多部分，每个部分被锥形切割以形成要喷溅的表面11，并且四个切割部件组合并用作目标。因此，能够以低成本简单地制造目标，并且由于可以简化用于冷却目标的方法，可以防止诸如形成吹孔的缺陷。

6. 发明专利

JPS62145729A ION IMPLANTATION AND APPARATUS FOR THE SAME 失效
公开(公告)号：JPS62145729A
公开(公告)日：1987-06-29
申请号：JP28655185
申请日：1985-12-19
申请人： TOSHIBA CORP
发明人： MATSUO TOSHIYUKI
IPC分类号： H01L21/265 , H01J37/317
摘要： PURPOSE:To implant ions uniformly into a semiconductor wafer by applying ion beams while the semiconductor wafer is turned. CONSTITUTION:A supporter 25 is formed into a disc shape and a shaft 27 is provided on the backside of the supporter 25 and extended so as to be linked with a rotary driving means such as a motor. A wafer 29 is hooked on the front surface of the supporter 25 and turned with the supporter 25. At least one turn of rotation is necessary during ion beam application and, moreover, if the semiconductor wafer is supported with a certain inclination angle, for instance 7 degree, against the ion beam, up to the part of the shadow of the pattern can be exposed to the ion beam.

7. 发明专利

JPS5961943A Wafer transfer mechanism 失效
标题翻译：转移机构
公开(公告)号：JPS5961943A
公开(公告)日：1984-04-09
申请号：JP17276882
申请日：1982-10-01
申请人： Toshiba Corp
发明人： MATSUO TOSHIYUKI
IPC分类号： H01L21/677 , H01L21/68
CPC分类号： H01L21/67706 , H01L21/67715
摘要： PURPOSE:To quickly transfer wafers under the high quality condition by providing a plurality of transfer promotion wheels on the transfer path. CONSTITUTION:The guide rails 33 provided in parallel along the transfer direction of the transfer path are curved in the form of character as in the sectional view on the opposing internal wall suface, forming a wafer accommodating groove 33a. A plurality of transfer promoting wheels 34 which are provided in such a manner that the circumferential part is exposed to the transfer surface 27 in the transfer path has the rotating function like a ball bearing and thereby smoothly transfers the wafer 24. Therefore, the wafer 24 is very smoothly supplied to the wafer accommodating part 26a utilizing the inclined condition of the heating chamber 21, feed effect by the transfer promoting wheels 34 provided on the transfer path and a weight of wafer itself 24. Thereby, the wafer can be quickly transferred under the high quality condition, ensuring improvement in productivity.
摘要翻译：目的：通过在传送路径上设置多个转印促进轮，在高质量条件下快速转印晶片。构成：沿着传送路径的传送方向平行设置的导轨33以与相对的内壁面上的截面图相同的字符形式弯曲，形成晶片容纳槽33a。多个转印促进轮34以这样的方式设置，使得周向部分在转印路径中暴露于转印表面27具有类似于滚珠轴承的旋转功能，从而平滑地传递晶片24.因此，晶片24 利用加热室21的倾斜状态，设置在传送路径上的传送促进轮34的进给效果和晶片本身24的重量，非常顺利地供给到晶片容纳部26a。由此，可以将晶片快速地传送到高质量的条件，确保生产力的提高。

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