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    • 2. 发明专利
    • THIN CERAMIC FILM
    • JPH0673526A
    • 1994-03-15
    • JP22657192
    • 1992-08-26
    • TOSHIBA CORP
    • NAKAJIMA MASAHIROKURI YUUJIWATANABE MICHIO
    • C23C14/06
    • PURPOSE:To obtain a thin ceramic film having enhanced adhesive strength by successively forming a thin pure metal film using the same metallic element as a thin oxide film and a thin nitride film using the same metallic element as the thin oxide film on the surface of a substrate when the thin oxide film is formed on the surface of the substrate. CONSTITUTION:When a thin oxide film 2 (e.g. Al2O3) is formed on the surface of a substrate 1 made of a metallic material, a thin pure metal film 3 (e.g. Al) using the same metallic element as the thin oxide film is first formed as an undercoat layer on the surface of the substrate 1. A thin nitride film 4 (e.g. AlN) using the same metallic element as the thin oxide film 2 is further formed on the surface of the thin pure metal film 3 and then the thin oxide film 2 is formed on the thin nitride film 4 to obtain the objective thin ceramic film having enhanced adhesive strength without deteriorating electric insulating property or wear resistance.
    • 4. 发明专利
    • MANUFACTURE OF GREEN-LIGHT EMITTING DIODE
    • JPH0220077A
    • 1990-01-23
    • JP17025388
    • 1988-07-08
    • TOSHIBA CORP
    • WATANABE MASAYUKINAKAJIMA MASAHIRO
    • H01L33/16H01L33/30
    • PURPOSE:To make it possible to manufacture a green LED having high outer light emitting efficiency with good reproducibility at a low cost even if a GaP substrate at a commercially sold level is used by using a specified GaP single crystal wafer. CONSTITUTION:The cleavage plane (110) of a wafer undergoes anodic oxidation in, e.g., aqueous solution of KOH at an approximately one normal, and variable- density stripes of oxide films are obtained. An angle theta between the straight line of said stripe in the longitudinal direction and a straight line formed by the intersection between the cleavage plane and the (111) plane of the wafer does not exceed 5 degrees in the GaP single crystal wafer 1. Said GaP single crystal wafer is used in this diode. The variable-density stripes 7 are formed on the (110) cleavage plane 6 of the wafer 1. The angle theta between a straight line A-A' in the longitudinal direction, i.e., the stripe direction of the variable- density stripe 7 and a straight line B-B' at the intersection between the (110) cleavage plane and the (111) P plane 8 of the wafer is less than 5 degrees. The wafer having this property is used. After an oxide film is removed, an Si doped N layer 2 and a Zn doped P layer 3 are formed on the (111) P plane of the main surface of the wafer by liquid phase growing method.
    • 7. 发明专利
    • Liquid-phase epitaxial growing method of iii-v group compound semiconductor
    • III-V族化合物半导体的液相外延生长方法
    • JPS59197128A
    • 1984-11-08
    • JP6999483
    • 1983-04-22
    • Toshiba Corp
    • NAKAJIMA MASAHIRO
    • H01L21/208H01L33/30
    • H01L21/02395H01L21/02546H01L21/02625
    • PURPOSE:To suppress the quantities of evaporation of volatile components and improve crystallinity, and enhance luminous effeiciency by introducing the gas of one element having high volatility of compound as a III-V group compound semiconductor substrate while increasing the partial pressure of the gas. CONSTITUTION:A boat 7 made of carbon is charged and arranged into a reaction vessel 11, and a quartz boat 12 is charged. A GaAs substrate is entered into the lower plate 2 of the boat 7, the melted liquid of Ga and a GaAs polycrystal into the through-hole of an upper plate 1 and As 13 into the boat 12. The boat 12 is disposed to a low temperature section and the boat 7 to a high temperature section. As disperses into hydrogen under the state, and begins to flow to the downstream as a mixed gas of hydrogen and As. When an exhaust valve 14 at the end section of the vessel 11 is throttled and the inside of the vessel 11 is pressured at that time, the boat 7 is positioned in the atmosphere of the mixed gas. The lower plate 2 is slid, the melted liquid is brought into contact on the substrate and the temperature of the liquid is dropped at fixed speed, and the lower plate 2 is slid again and returned to an original position. Accordingly, a crystal in a growth layer is improved because the evaporation of an element having large volatility can be controlled.
    • 目的:为了抑制挥发成分的蒸发量,提高结晶性,通过在增加气体的分压的同时引入具有高挥发性的化合物的一种元素的气体作为III-V族化合物半导体衬底,提高发光效率。 构成:将由碳制成的船7装入反应容器11并装入石英舟12。 GaAs衬底进入船7的下板2,熔融的Ga和GaAs多晶体的液体进入上板1和As13的通孔进入船12中。船12被设置为低 温度段和船7到高温段。 在这种状态下分散到氢气中,并开始以氢气和As的混合气体流向下游。 当在容器11的端部处的排气阀14节流并且容器11的内部被压力时,船7位于混合气体的气氛中。 下板2滑动,熔融的液体在基板上接触,液体的温度以固定的速度下降,下板2再次滑动并返回原来的位置。 因此,可以控制生长层中的晶体,因为可以控制挥发性大的元素的蒸发。
    • 10. 发明专利
    • DEVICE FOR ACKNOWLEDGING ELECTRONIC DOCUMENT
    • JPH03149651A
    • 1991-06-26
    • JP28800989
    • 1989-11-07
    • TOSHIBA CORP
    • NAKAJIMA MASAHIRO
    • G06F17/21
    • PURPOSE:To acknowledge a document prepared as an electronic document in a terminal without temporarily printing out it by synthesizing an acknowledged image with a document displayed on a display means when inputted personal identification information is decided as a valid information and the acknowledgement of the document is instructed by an instructing means. CONSTITUTION:A document body data file 2 stores the document data of plural documents, a recognition image file 3 stores an image such as a seal to be impressed on a document to be acknowledged or a sign and a password file 4 stores a password, a personal name and the name of the file 3 for storing the image of the person's seal impression or sign. When personal identification information inputted by an input means 5 is decided as a valid one by a checking means 200 and the acknowledgement of the document is instructed by the instructing means 5, a document data handling device 100 synthesizes the acknowledgement image stored in the means 3 with the document displayed on a display means 5. Consequently, the prepared document can be acknowledged in the electronized state without printing it.