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    • 3. 发明专利
    • CIRCUIT SUBSTRATE
    • JPH01236644A
    • 1989-09-21
    • JP6404788
    • 1988-03-17
    • TOSHIBA CORP
    • NAKAMURA MIHOANZAI KAZUOIMAIZUMI TATSUYA
    • H01L23/12H01L23/14H01L23/15H05K3/24
    • PURPOSE:To make it possible to form reliably a plating on the surfaces of metallized layers by a method wherein a liquid phase component oozed out on the surface of an Al nitride substrate is stopped and prevented from creeping up on the surfaces of the metallized layers formed on the substrate surface. CONSTITUTION:Grooves 6 are respectively formed in the surface of an Al nitride substrate 1 encircling the periphery of each metallized layer 3 in every layer 3 and the grooves 6 are stop parts that each groove receives a liquid phase component oozed out on the surface of the substrate 1 to prevent the component from moving in such a way as to come into contact to each layer 3. Here, when the substrate 1 is fired, a compound containing Al2O3, Y2O3 and so on existing in the interiors of sheets 2 as its main component and so on come to have a liquid phase and the liquid phase component oozes out on the surface of the substrate 1, but the grooves 6 perform a function of a moat and it can be reliably stopped for this oozed liquid phase component to creep up on the surfaces of the layers 3. Thereby, the discoloration of the surfaces of the layers 3 and the deterioration of the degree of roughness of the surfaces are prevented. As this result, a plating can be reliably applied to the surfaces of the layers 3 in a necessary thickness.
    • 6. 发明专利
    • Method of manufacturing face panel
    • 制造面板的方法
    • JPS61135021A
    • 1986-06-23
    • JP25561484
    • 1984-12-05
    • Toshiba Corp
    • ANZAI KAZUOKATO ATSUSHI
    • H01J29/28H01J9/20H01J9/22
    • PURPOSE: To improve productivity of a panel by forming light reflecting metal film inside the face panel of a color receiver tube through sputtering technique and then heat absorbing film through introducing a very small amount of nitrogen gas inside the panel tube.
      CONSTITUTION: Air inside a face panel 1 in which fluorescent layer 2 and a film layer 6 are formed is exhaused up to 2×10
      -5 Torr vacuum by a vacuum pump system with an oil diffusion pump. Then, argon gas is introduced inside the face panel 1 maintaining gross pressure of 3×10
      -5 Torr vacuum, and a sputtering work is carried out for about 15min using aluminum as a target metal to form an about 1,200Å thick light reflecting aluminum metal film 7. Following these works, 5vol% of nitrogen gas relative to argon gas is introduced inside the panel 1 and the sputtering work is carried out for about 5min to form an about 1,200Å thick black-colored heat absorbing film 8. With the above method, productivity of the face panel is improved.
      COPYRIGHT: (C)1986,JPO&Japio
    • 目的:通过溅射技术在彩色接收管的面板内部形成光反射金属膜,然后在面板管内引入极少量的氮气,从而提高面板的生产效率。 构成:通过具有油扩散泵的真空泵系统将形成有荧光层2和膜层6的面板1内的空气排出至多达2×10 -5 Torr真空。 然后,在保持总压3×10 -5 Torr真空的面板1内部引入氩气,使用铝作为目标金属进行溅射工作约15分钟,形成约1200厚的反光铝金属 根据这些工作,将5体积%的氮气相对于氩气引入到面板1内,并且进行溅射工作约5分钟以形成约1200埃厚的黑色吸热膜8.利用上述 方法,改善了面板的生产率。
    • 8. 发明专利
    • Manufacture of face panel
    • 面板制造
    • JPS60195837A
    • 1985-10-04
    • JP4926184
    • 1984-03-16
    • Toshiba Corp
    • ANZAI KAZUOSHINOZAKI KAZUOKATOU ATSUSHI
    • H01J9/22H01J29/28
    • H01J29/28
    • PURPOSE:To heighten the productivity of face panels by a method, in which a phosphor layer and a film layer are formed on the inside of the face panel followed by maintaining the face panel inside in a gas atmosphere of a specific vacuum degree and performing sputtering for simultaneously fomring a luminous reflective metal film and a thermoabsorbing material film on the film layer. CONSTITUTION:Sputtering maintains the inside of a face panel 1 in a gas atmosphere of a vacuum degree 10 -10 Torr while being performed with a luminous reflective metal as a target. Generally, a mixture gas of rare gas such as helium, neon, argon, krypton and xenon and a nitric compound such as nitorgen, ammonia and dicyan or a compound separating and generating nitrogen under said sputtering atmosphere is used as the atmosphere gas. The kind of the atmospheric gas is properly selected according to a sputtering condition, however, desirably a mixture gas of nitrogen gas and rare gas, which are cheap and easy to handle, is used while more desirably mixture gas consisting of 3-10vol% of nitrogen and 90-97vol% of rare gas is used. Sputtering is desirably performed until the sputtering film thickness reaches 500-5,000Angstrom .
    • 目的:通过以下方法提高面板的生产率:其中在面板内侧形成荧光体层和膜层,然后将面板保持在特定真空度的气体气氛中并进行溅射 用于同时在膜层上产生发光反射金属膜和热吸收材料膜。 构成:溅射在以发光反射金属为目标的情况下,在真空度10 -4 -10 -2乇的气体气氛中维持面板1的内部。 通常,使用诸如氦,氖,氩,氪和氙的稀有气体和硝基化合物如硝基,氨和二氰的混合气体或在所述溅射气氛下分离和产生氮的化合物作为气氛气体。 根据溅射条件适当地选择气氛气体的种类,然而,优选使用便宜且易于处理的氮气和稀有气体的混合气体,更优选由3-10体积% 使用氮气和90-97vol%的稀有气体。 期望进行溅射,直到溅射膜厚度达到500-5,000埃。
    • 9. 发明专利
    • Infrared optical transmission line and its manufacture
    • 红外光传输线及其制造
    • JPS59152404A
    • 1984-08-31
    • JP2624383
    • 1983-02-21
    • Toshiba Corp
    • ANZAI KAZUOIMAGAWA HIROSHIKASORI MITSUOTAKANO TAKESHI
    • G02B1/02G02B6/00
    • PURPOSE:To obtain an infrared optical transmission line low in danger of heating by vapor depositing a metal to the inside wall of the coating tube of said line and halogenating said metal. CONSTITUTION:In the method for manufacturing an IR optical transmission line provided with an IR optical transmission body and a coating tube, a metal is vapor deposited to the inside wall of the coating tube and halogenated to obtain an IR optical transmission line provided with a metallic halide film having IR transmittance and lower in refractive index than said body. As said body, metallic halides, such as CsI, CsBr, CsCl, RbI, RbBr, RbCl, KI, KBr, KCl, AgCl, AgBr, TlI, TlBr, TlCl, and a combination of >=2 of them, etc. are exemplified. Since thickness of said metallic halide, if
    • 目的:通过将金属气相沉积到所述管线的涂覆管的内壁并卤化所述金属来获得低加热危险的红外光传输线。 构成:在设置有IR光传输体和涂布管的IR光传输线的制造方法中,将金属蒸镀在涂布管的内壁上并进行卤化,得到具有金属的IR光传输线 具有IR透射率和折射率低于所述主体的卤化物膜。 如所述体,金属卤化物如CsI,CsBr,CsCl,RbI,RbBr,RbCl,KI,KBr,KCl,AgCl,AgBr,TlI,TlBr,TlCl和它们的组合≥2的金属卤化物等 例证。 由于所述金属卤化物的厚度如果<10μm,则准备不均匀,如果<100μm,则会导致膜上的裂纹,其优选的厚度为10-100μm。