会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明专利
    • Nuclear reactor installation and nuclear reactor pressure reduction facility for the same
    • 核反应堆安装和核反应堆减压设备
    • JP2014106106A
    • 2014-06-09
    • JP2012259004
    • 2012-11-27
    • Toshiba Corp株式会社東芝
    • YAMAGUCHI YOSHITAKASATO TAKASHIAOKI YASUTAKAKURODA MICHITOMO
    • G21C15/18
    • Y02E30/40
    • PROBLEM TO BE SOLVED: To secure a pressure reduction function in the case of emergency whose operability has been improved without inviting excessive costs.SOLUTION: According to an embodiment, a nuclear reactor installation is provided with: a reactor core 1; a reactor pressure vessel 2; a nuclear reactor containment vessel 3; a main steam system 5 including a main steam piping 6; an emergency flooder system which includes an emergency reactor core cooling system and a nuclear reactor isolation cooling system 10, and is provided for cooling the reactor core in the case of emergency; and a nuclear reactor pressure reduction facility 50 for reducing pressure in the reactor pressure vessel 2 for cooling the reactor core 1 in the case of emergency. The nuclear reactor pressure reduction facility 50 has: a steam take-out piping 40 for taking steam out of the reactor pressure vessel 2; a pressure reduction valve 16a connected to the same; a steam return piping 41 which is connected to the pressure reduction valve 16a and transfers the steam below a pool water level of a suppression pool. A part of the steam return piping 41 and a RCIC turbine exhaust steam piping 14 of the reactor isolation cooling system 10 that is a part of the emergency flooding system facility are shared.
    • 要解决的问题:为了在紧急情况下确保减压功能,其可操作性得到改善而不会引起过高的成本。解决方案:根据实施例,核反应堆装置设置有:反应堆堆芯1; 反应堆压力容器2; 核反应堆安全壳3; 主蒸汽系统5包括主蒸汽管道6; 包括应急反应堆堆芯冷却系统和核反应堆隔离冷却系统10的紧急灭火器系统,用于在紧急情况下冷却反应堆堆芯; 以及用于在紧急情况下减小用于冷却反应堆堆芯1的反应堆压力容器2中的压力的​​核反应堆减压装置50。 核反应堆减压装置50具有:从反应堆压力容器2取出蒸汽的蒸汽取出配管40; 与其连接的减压阀16a; 蒸汽回流管道41,其连接到减压阀16a,并将蒸汽转移到抑制池的池水位以下。 蒸汽回流管道41的一部分和作为紧急淹水系统设施的一部分的反应堆隔离冷却系统10的RCIC涡轮排气蒸汽管道14被共享。
    • 5. 发明专利
    • Exposure method
    • 曝光方法
    • JP2013161919A
    • 2013-08-19
    • JP2012022101
    • 2012-02-03
    • Toshiba Corp株式会社東芝
    • SATO TAKASHI
    • H01L21/027
    • PROBLEM TO BE SOLVED: To provide an exposure method capable of correctly forming fine patterns.SOLUTION: An exposure method comprises: a step (S1) of performing first exposure with a photoresist formed on a substrate and a photomask having cyclic patterns spaced apart from each other by a first distance which is in accordance with a pitch of the patterns and a wavelength of exposure light, and then transferring the patterns on the photomask to a first position on the photoresist; and a step (S2) of performing second exposure with the photoresist and the photomask spaced apart from each other by a second distance which is in accordance with the pitch of the patterns and the wavelength of the exposure light but is different from the first distance, and then transferring the patterns on the photomask to a second position, on the photoresist, different from the first position.
    • 要解决的问题:提供能够正确形成精细图案的曝光方法。曝光方法包括:对形成在基板上的光致抗蚀剂进行第一次曝光的步骤(S1)和具有与每个图案间隔开的循环图案的光掩模 另外通过与图案的间距和曝光光的波长相对应的第一距离,然后将光掩模上的图案转印到光致抗蚀剂上的第一位置; 以及步骤(S2),其中所述光致抗蚀剂和所述光掩模彼此间隔开第二距离,所述第二距离与所述图案的间距和所述曝光光的波长相符但不同于所述第一距离, 然后将光掩模上的图案转印到不同于第一位置的光致抗蚀剂上的第二位置。
    • 6. 发明专利
    • Lithographic device
    • LITHOGRAPHIC设备
    • JP2013051292A
    • 2013-03-14
    • JP2011187874
    • 2011-08-30
    • Toshiba Corp株式会社東芝
    • SATO TAKASHI
    • H01L21/027G03F7/20
    • PROBLEM TO BE SOLVED: To provide a lithographic device capable of improving proximity exposure resolution.SOLUTION: A lithographic device of an embodiment which can perform proximity exposure comprises a stage 2 on which a substrate 1 in which a photosensitive resin is formed on its surface and holding means 4 for holding an original plate 3. This lithographic device further comprises: distance control means 7 for controlling a distance between the substrate 1 placed on the stage 2 and the original plate 3 held by the holding means 4; liquid filling means 9 for filling the portion between the substrate 1 and the original plate 3 with a liquid 8 whose refraction index is greater than 1 in the state in which the distance is controlled to a constant value greater than zero by the distance control means 7 so that the photosensitive resin layer and the original plate 3 become non-contact; and a light source 10 for exposing the photosensitive resin layer on the substrate 1 with light via the original plate 3 with the portion between the substrate 1 and the original plate 3 filled with the liquid by the liquid filling means 9.
    • 要解决的问题:提供能够改善接近度曝光分辨率的光刻设备。 解决方案:可以执行接近曝光的实施例的光刻设备包括阶段2,其上在其表面上形成有感光树脂的基板1和用于保持原版3的保持装置4。该平版印刷装置 包括:距离控制装置7,用于控制放置在平台2上的基板1与由保持装置4保持的原版3之间的距离; 在距离控制装置7将距离控制在大于零的一定值的状态下,用折射率大于1的液体8填充基板1和原版3之间的部分的液体填充装置9 使得感光性树脂层和原版3不接触; 以及光源10,用于通过原稿板3将基板1上的感光性树脂层与基板1和原始板3之间的部分通过液体填充装置9充满液体而曝光。版权所有: (C)2013,JPO&INPIT
    • 7. 发明专利
    • Reactor water level measuring device
    • 反应器水位测量装置
    • JP2012225850A
    • 2012-11-15
    • JP2011095421
    • 2011-04-21
    • Toshiba Corp株式会社東芝
    • SATO TAKASHIKURODA MICHITOMO
    • G21C17/035
    • PROBLEM TO BE SOLVED: To provide a reactor water level measuring device capable of measuring a water level of a reactor with high accuracy.SOLUTION: A reactor water level measuring device 10 comprises: a first pipeline 11 of which one end is connected to a steam area 23 of a reactor pressure vessel 22 and the other end is connected to a side of a condensation vessel 15; a second pipeline 12 of which one end is connected to a lower side of the condensation vessel 15; a third pipeline 13 of which one end is connected to a reactor water area 24 of the reactor pressure vessel 22; a differential pressure detection part 17 that detects a differential pressure between the other end of the second pipeline 12 and the other end of the third pipeline 13; and a fourth pipeline 14 of which one side is connected to the second pipeline 12 and the other side is connected to an accumulator 16 supplying water.
    • 要解决的问题:提供能够高精度地测量反应堆的水位的反应器水位测量装置。 解决方案:反应器水位测量装置10包括:第一管道11,其一端连接到反应堆压力容器22的蒸汽区域23,另一端连接到冷凝罐15的一侧; 其一端连接到冷凝罐15的下侧的第二管道12; 第三管道13的一端连接到反应堆压力容器22的反应堆水区24; 检测第二管路12的另一端与第三管道13的另一端之间的压差的差压检测部17; 以及第一管道14,其一侧连接到第二管道12,另一侧连接到供水的蓄能器16。 版权所有(C)2013,JPO&INPIT
    • 8. 发明专利
    • Exposure device inspection method and exposure device
    • 曝光装置检查方法和曝光装置
    • JP2012064786A
    • 2012-03-29
    • JP2010208145
    • 2010-09-16
    • Toshiba Corp株式会社東芝
    • SATO TAKASHINAKAJIMA YUMI
    • H01L21/027G03F1/44G03F7/207
    • PROBLEM TO BE SOLVED: To provide an exposure device inspection method and an exposure device, capable of obtaining a highly accurate inspection result by forming a highly accurate transfer pattern and by acquiring diffraction light detection data, when inspecting the exposure device using a photo mask.SOLUTION: The exposure device inspection method comprises illuminating, from a direction inclining relative to an optical axis, a photo mask 112 having a first pattern group 201 including a plurality of stripe-shaped patterns arrayed at a first pitch and having pattern widths different from patterns placed between both ends thereof, and a second pattern group 202 including a plurality of stripe-shaped patterns arrayed at a second pitch, to cause the first and the second pattern groups to generate first diffraction light and second diffraction light. The exposure device inspection method further comprises: forming a first image by the first diffraction light and a second image by the second diffraction light on the wafer; measuring a relative distance between the first image and the second image; and inspecting a state of a projection optical system in the exposure device based on the relative distance.
    • 要解决的问题:为了提供一种曝光装置检查方法和曝光装置,能够通过形成高精度的转印图案并且通过获取衍射光检测数据来获得高精度的检查结果,当使用 照片面具。 曝光装置检查方法包括从相对于光轴倾斜的方向照射具有第一图案组201的光掩模112,该第一图案组201包括以第一间距排列的多个条状图案,并且具有图案宽度 不同于放置在其两端之间的图案,以及包括以第二间距排列的多个条形图案的第二图案组202,以使第一和第二图案组产生第一衍射光和第二衍射光。 曝光装置检查方法还包括:通过第一衍射光形成第一图像,通过第二衍射光在晶片上形成第二图像; 测量第一图像和第二图像之间的相对距离; 并且基于所述相对距离来检查所述曝光装置中的投影光学系统的状态。 版权所有(C)2012,JPO&INPIT
    • 9. 发明专利
    • Vehicular blower
    • 车用鼓风机
    • JP2011137421A
    • 2011-07-14
    • JP2009298506
    • 2009-12-28
    • Toshiba Corp株式会社東芝
    • SATO TAKASHI
    • F04D29/70F04D29/58
    • PROBLEM TO BE SOLVED: To provide a vehicular blower improving cooling efficiency. SOLUTION: The vehicular blower includes a blower motor for driving an impeller, a fan case 33 storing the impeller and having cooling air inlet and outlet, and a separation duct 36 mounted on the outside of the fan case 33 and arranged in communication with the cooling air outlet to the inlet. Outside air taken from the outside of the fan case 33 is discharged into the separation duct 36 so as to be separated into first cooling air including much dust and second cooling air including less dust than the first cooling air using the centrifuging operation of the impeller. The first cooling air is discharged as cooling air for the blower motor from the cooling air inlet 33b via the first duct 37 of the separation duct 36, while the second cooling air is discharged as cooling air for cooled equipment therefrom via a second duct 38 of the separation duct 36. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供提高冷却效率的车辆风扇。 解决方案:车用鼓风机包括用于驱动叶轮的鼓风机马达,存储叶轮并具有冷却空气入口和出口的风扇壳体33,以及安装在风扇壳体33的外部并且布置成连通的分离管道36 冷却空气出口到入口。 从风扇壳体33的外部取出的外部空气被排出到分离管道36中,以便与使用叶轮的离心操作的第一冷却空气相比,分离成包含灰尘少的灰尘和第二冷却空气的第一冷却空气。 第一冷却空气经由分离管道36的第一管道37从冷却空气入口33b排出用于鼓风机马达的冷却空气,而第二冷却空气作为用于冷却设备的冷却空气从第二冷却空气经由第二管道38排出, 分离管36.版权所有(C)2011,JPO&INPIT
    • 10. 发明专利
    • Reactor containment vessel and nuclear power plant employing the same
    • 反应堆容器船和使用其的核电厂
    • JP2011058866A
    • 2011-03-24
    • JP2009206761
    • 2009-09-08
    • Toshiba Corp株式会社東芝
    • SATO TAKASHIAKINAGA MAKOTOKOJIMA YOSHIHIRO
    • G21C9/004G21C9/016G21C9/04G21C13/00G21D3/08
    • G21C9/004G21C9/016G21C13/10G21C15/18Y02E30/40
    • PROBLEM TO BE SOLVED: To prevent detonation and deflagration of hydrogen when a high pressure gas containing a large amount of hydrogen is vented from a reactor primary containment vessel in a reactor containment vessel, to prevent leakage of radioactive material included in the high pressure gas, and allow an operator to enter a space including an operation floor to perform the work during a normal operation. SOLUTION: The reactor containment vessel 8 includes: the reactor primary containment vessel 3 containing a reactor pressure vessel 2; a reactor secondary containment vessel 4 installed outside the reactor primary containment vessel 3 and having pressure resistance and gas tightness equivalent to those of the reactor primary containment vessel 3; an airbag 5 installed in the reactor secondary containment vessel 4 and expanding while receiving and containing the high pressure gas discharge from the inside of the reactor primary containment vessel 3 upon the accident inside the reactor primary containment vessel 3; and a gas-phase vent tube 6 connecting the reactor primary containment vessel 3 with the airbag 5. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:为了防止在含有大量氢气的高压气体从反应堆容纳容器中的反应堆初级容纳容器中排出时爆炸和爆燃,以防止包含在高压釜中的放射性物质泄漏 并且允许操作者进入包括操作台的空间以在正常操作期间执行工作。 解决方案:反应堆安全壳8包括:包含反应堆压力容器2的反应堆主要容纳容器3; 安装在反应堆主要容纳容器3外部并且具有与反应堆主要容纳容器3相同的耐压性和气密性的反应堆二次容纳容器4; 安装在反应堆二次容纳容器4中的安全气囊5,并且在反应堆主要容纳容器3内发生事故时,从反应堆主要容纳容器3的内部接收并容纳高压气体排出物而膨胀; 以及连接反应堆主要容纳容器3和气囊5的气相排气管6.(C)2011年,JPO&INPIT