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1. 发明专利

JPH0328270B2 失效
公开(公告)号：JPH0328270B2
公开(公告)日：1991-04-18
申请号：JP27827484
申请日：1984-12-27
申请人： TOKYO SHIBAURA ELECTRIC CO
发明人： TAKAHASHI TSUTAE , ISHIHARA HIDEO , NAKATATE SHIRO , AKUTSU HIDEO , OGINO KEIJI , KITAMORI NOBORU , KURAMOCHI SABURO , FUKUHARA YOSHIO
IPC分类号： B23K20/04 , H01L23/14

2. 发明专利

JPS608575B2 失效
公开(公告)号：JPS608575B2
公开(公告)日：1985-03-04
申请号：JP2149981
申请日：1981-02-18
申请人： TOKYO SHIBAURA ELECTRIC CO
发明人： KOIZUMI HIDEO , KOSEKI ISAMU , MORITA TADASHI , YAMAZAKI OSAMU , FUKUHARA YOSHIO
IPC分类号： H01J1/44 , H01J9/14 , H01J35/10

4. 发明专利

JPS5814543A SUBSTRATE FOR SEMICONDUCTOR ELEMENT 失效
公开(公告)号：JPS5814543A
公开(公告)日：1983-01-27
申请号：JP11210881
申请日：1981-07-20
申请人： TOKYO SHIBAURA ELECTRIC CO
发明人： FUKUHARA YOSHIO , TADA SHIYUN , KOIZUMI HIDEO
IPC分类号： H01L21/52 , H01L21/48
摘要： PURPOSE:To remove flashes without damaging the flatness of a W or Mo semiconductor substrate, by rounding off the angles of the substrate by barrel polishing. CONSTITUTION:Rough discs having a diameter of 12mm. and a thickness of 2mm. are put in a hexagonal stainless barrel vessel to about 1/3 of the capacity thereof, green carborundum (80 meshes) and a small quantity of barrel grindstones (having diameters of 5-10mm.) are put therein in an amount nearly equal to that of the Mo discs, water is added so that the content is about 3/4 of the capacity, and then processing is made for one hour at 70rpm. As the result, the angles of substrates are given smooth roundness (0.5-1R) throughout the entire peripheries of both front and back surfaces thereof, and thereby excellent substrates having the surface roughness of about 10mu at maximum and the parallelism of 10-20mum are prepared. Thus, the semiconductor substrates which are highly excellent in intimate adhesion can be obtained.

7. 发明专利

JPS57154756A ROTARY ANODE FOR X-RAY TUBE 失效
公开(公告)号：JPS57154756A
公开(公告)日：1982-09-24
申请号：JP3959581
申请日：1981-03-20
申请人： TOKYO SHIBAURA ELECTRIC CO
发明人： FUKUHARA YOSHIO , KOIZUMI HIDEO , SAITOU HIROYUKI
IPC分类号： H01J35/10
摘要： PURPOSE:To prevent any deformation of a rotary anode for an X-ray tube by removing the thermal stress, which develops between the contact surfaces when the anode rotates at a high temperature and at a high speed, by providing circular grooves, which have the same center as that of an irradiation orbit formed on the X-ray irradiation surface of the anode, near the said irradiation orbit. CONSTITUTION:A rotary anode for an X-ray tube is made by joining a molybdenum plate 2 and a tungsten plate 1. At the same time, two circular grooves 7 having the same center are provided near an annular irradiation orbit 6 and on the inner and the outer sides of the orbit 6, which develops on a part of a slant surface 5 of the plate 1 on which an electron beam is irradiated. Owing to the above constitution, the thermal stress, which develops between the contact surfaces of the plates 1 and 2 when the rotary anode rotates at a high temperature and at a high speed, can be effectively removed owing to the groove 7. Consequently, the reliability and the safety of the rotary anode can be enhanced by suppressing the warping of the slant surface 5.

8. 发明专利

JPS57136751A MANUFACTURE OF ROTATING ANODE FOR X-RAY TUBE 失效
公开(公告)号：JPS57136751A
公开(公告)日：1982-08-23
申请号：JP2149981
申请日：1981-02-18
申请人： TOKYO SHIBAURA ELECTRIC CO
发明人： KOIZUMI HIDEO , KOSEKI ISAMU , MORITA TADASHI , YAMAZAKI OSAMU , FUKUHARA YOSHIO
IPC分类号： H01J1/44 , H01J9/14 , H01J35/10
摘要： PURPOSE:To improve the bonding strength by bonding a surface layer consisting of tungsten and molybdenum and an intermediate layer comprising rhenium plate a in reducing atmosphere and bonding it on a graphite substrate in an inert atmosphere. CONSTITUTION:A tungsten plate 4, molybdenum plate 3, and rhenium plate 2 are put one on top the other, and bonded by heat-pressing at 1,400 to 1,700 deg.C under the pressure of 100 to 300kg/cm in the atmosphere of a reducing gas such as hydrogen. Then the bonded is put on a graphite substrate 1 and bonded by heat- pressing at 1,200 to 1,600 deg.C under the pressure of 50 to 500kg/cm in the atmosphere of inert gas such as nitrogen, and a rotating anode for X-ray tube is formed. Thus carbide layer on the bonding surface of the graphite substrate 1 scarcely forms during manufacture, and the bonding strength can be improved greatly.

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