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1. 发明专利

JP2002232365A RADIO WAVE MEASURING METHOD AND SYSTEM USING PLURAL ANTENNAS 失效
公开(公告)号：JP2002232365A
公开(公告)日：2002-08-16
申请号：JP2001030230
申请日：2001-02-06
申请人： TAKENAKA KOMUTEN CO , TAKENAKA DORO KK , TAKADA JUNICHI
发明人： WAKINAKA YOSHITAKA , HARAKAWA KENICHI , SAITO TOSHIO , KUNISHIMA TAKESHI , YOSHIMURA KENICHI , IWATA TAKEO , SHIMA KIMITOKI , TAKADA JUNICHI
IPC分类号： G01R29/08 , G01S13/74 , G01S13/91 , G07B15/00 , H04B17/00 , H04B17/364
摘要： PROBLEM TO BE SOLVED: To obtain a radio wave measuring method and system using a plurality of antennas whereby failures caused by reflected waves of radio waves can be suppressed. SOLUTION: An applicable point (a point receiving unnecessary reflected waves) is searched while the measuring system is moved (100). When a receiving level of radio waves exceeds a permissible range (denied in 102 and 104), reflected waves are extracted for a plurality of antennas having different azimuths after domain is measured (108, 110). Subsequently, a propagating path of radio waves to a measured part is geometrically analyzed by ray tracing (112), a propagation path is specified from the measurement result and the analysis result (114, 116), and a laser beam is emitted to a reflected part on the propagation path of the analysis result (118).

2. 发明专利

JP2002232364A RADIO AZIMUTH INDICATOR 失效
公开(公告)号：JP2002232364A
公开(公告)日：2002-08-16
申请号：JP2001030233
申请日：2001-02-06
申请人： TAKENAKA KOMUTEN CO , TAKENAKA DORO KK , TAKADA JUNICHI
发明人： WAKINAKA YOSHITAKA , HARAKAWA KENICHI , SAITO TOSHIO , KUNISHIMA TAKESHI , YOSHIMURA KENICHI , IWATA TAKEO , SHIMA KIMITOKI , TAKADA JUNICHI
IPC分类号： G01R29/08 , G01S13/74 , G01S13/91 , G07B15/00 , H04B17/00 , H04B17/364
摘要： PROBLEM TO BE SOLVED: To readily specify a propagating azimuth of reflected waves to reduce failures caused by reflected waves of radio waves. SOLUTION: A time domain for receiving and analyzing unnecessary reflected waves is measured while a measuring system is moved, a propagation path of radio waves is geometrically analyzed by ray tracing, a propagation path is specified from the measurement result and the analysis result, and the data is read (130). Next, an angle of an azimuth indication driving section is changed. Namely, an azimuth is found as to a straight line connecting the position coordinate of a reflecting point and the azimuth indication driving section, an attack angle and a rotation angle are computed regarding a radiating azimuth of a laser beam, and data is sent so as to drive an attack angle drive and a rotation angle drive by the computed attack angle and rotation angle (132, 134). Subsequently, a part around a reflected part is illuminated by turning on a light source. Therefore, an operator can visually confirm the reflected part.

3. 发明专利

JP2002236173A RADIO WAVE MEASURING METHOD AND SYSTEM BY SPACE-TIME MEASUREMENT 失效
公开(公告)号：JP2002236173A
公开(公告)日：2002-08-23
申请号：JP2001030225
申请日：2001-02-06
申请人： TAKENAKA KOMUTEN CO , TAKENAKA DORO KK , TAKADA JUNICHI
发明人： WAKINAKA YOSHITAKA , HARAKAWA KENICHI , SAITO TOSHIO , KUNISHIMA TAKESHI , YOSHIMURA KENICHI , IWATA TAKEO , SHIMA KIMITOKI , TAKADA JUNICHI
IPC分类号： G01S7/40 , G01S13/74 , G07B15/00
摘要： PROBLEM TO BE SOLVED: To provide a radio wave measuring method and a system by space- time measurement capable of suppressing obstacle caused by a reflected wave of the radio wave. SOLUTION: While moving this measuring system, a pertinent spot (spot where an unnecessary reflected wave is received) is searched (100), and, when the reception level of the radio wave exceeds a tolerance (102, the negative case in 104), the reflected wave is extracted after time domain measurement (108, 110). Then, a propagation route of the radio wave reaching a measuring part is analyzed geometrically by ray tracing processing (112), and the propagation route is specified by the measurement result and the analysis result (114, 116), and a laser beam is irradiated toward a reflection part on the propagation route of the analysis result (118).

4. 发明专利

JPH04315304A PLANE ANTENNA 失效
公开(公告)号：JPH04315304A
公开(公告)日：1992-11-06
申请号：JP8238391
申请日：1991-04-15
申请人： TAKADA JUNICHI , ANDO MAKOTO , GOTO NAOHISA
发明人： TAKADA JUNICHI , ANDO MAKOTO , GOTO NAOHISA
IPC分类号： H01Q13/10 , H01Q21/06 , H01Q21/24
摘要： PURPOSE:To obtain the plane antenna with a high gain and a high efficiency by forming a radiation or reception unit located on a concentric circle of an antenna aperture with four slots. CONSTITUTION:The plane antenna is an antenna radiating or receiving a linearly polarized radio wave with lots of line slots 4 provided to a radial conductive path excited in the axial symmetrical mode, the lots of the slots 4 are placed on a concentric circle of the antenna face and plural adjacent slots 4 are used for units of radiation or reception. Then the slots for forming each unit are arranged so that a radiation or received polarized wave is in matching with a desired direction and the radiation or reception unit consists of four adjacent slots 4. Thus, it is possible to make a design in which a desired linearly polarized wave radiates and the entire reflecting coefficient of the four slots is decreased and the return characteristic of the antenna is much improved.

5. 发明专利

JPH0963793A PLASMA PROCESSING DEVICE 失效
公开(公告)号：JPH0963793A
公开(公告)日：1997-03-07
申请号：JP24087695
申请日：1995-08-25
申请人： TOKYO ELECTRON LTD , GOTO NAOHISA , ANDO MAKOTO , TAKADA JUNICHI , HORIIKE YASUHIRO
发明人： ISHII NOBUO , KOBAYASHI YASUO , GOTO NAOHISA , ANDO MAKOTO , TAKADA JUNICHI , HORIIKE YASUHIRO
IPC分类号： H05H1/46 , C23C16/50 , C23C16/511 , C23F4/00 , H01L21/302 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To enable the atmospheric radiation of heat so as to avoid the thermal damage by providing an antenna member in a microwave lead-in port provided in a processing container. SOLUTION: Inside of a processing container 4 is maintained at the predetermined process pressure, and the etching gas is supplied from a processing gas supplying nozzle 20. At the same time, the microwave from a microwave generating unit 50 is supplied to an antenna member 36 through a rectangular waveguide 52 and a coaxial waveguide 58 so as to form an electric field, which is exponentially attenuated as it separates from the surface of the antenna, in a processing space S. In this case, as a result of the input of a large quantity of power, the antenna member 36 receives the Joule heat or the heat radiated from the plasma, and the temperature thereof is being raised. But, since the whole of the antenna member 36 is bonded to a dielectric 40 or an antenna cover member 42 in the surface contact condition by blazing, and furthermore, since the peripheral surface of the lower end of an inner conductor 56 and the dielectric 40 are bonded to each other in the surface contact condition by blazing, heat resistance between the members is small, and the heat of the antenna member 36 is effectively transmitted to the antenna cover member 42 for atmospheric radiation.

6. 发明专利

JPH09181052A PLASMA TREATING APPARATUS 失效
公开(公告)号：JPH09181052A
公开(公告)日：1997-07-11
申请号：JP15335796
申请日：1996-05-24
申请人： TOKYO ELECTRON LTD , GOTO NAOHISA , ANDO MAKOTO , TAKADA JUNICHI , HORIIKE YASUHIRO
发明人： ISHII NOBUO , GOTO NAOHISA , ANDO MAKOTO , TAKADA JUNICHI , HORIIKE YASUHIRO
IPC分类号： H05H1/46 , C23C16/50 , C23C16/507 , C23C16/511 , C23F4/00 , H01L21/205 , H01L21/302 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a plasma treating apparatus capable of generating a plasma, utilizing an electrostatic field generated by a microwave. SOLUTION: A plasma treating apparatus comprises a hermetic treating vessel having a holder 6 to hold a work W inside, a microwave generator 50, a waveguide 52 to guide a microwave generated by the generator 50 to the vessel 4, a planar antenna 44 which is connected to the waveguide 52 and faced at the holder 6, many slits 60 formed like many loops at the antenna 44 and means 20 and 22 for feeding gases into the vessel 4. To form an electrostatic field exponentially attenuating away from the surface of the antenna in the vessel 4, the slits 60 are set to be shorter than the guide wavelength of the microwave and distance between the slits 60 is set to be shorter than this guide wavelength. The microwave is fed to the antenna 44 to form an electrostatic field exponentially attenuating away from the antenna surface to form a plasma.

7. 发明专利

JPH0690115A PLANAR ANTENNA 失效
公开(公告)号：JPH0690115A
公开(公告)日：1994-03-29
申请号：JP19496491
申请日：1991-07-10
申请人： TAKADA JUNICHI , GOTO NAOHISA
发明人： TAKADA JUNICHI , GOTO NAOHISA
IPC分类号： H01Q3/00 , H01Q13/22 , H01Q21/24
摘要： PURPOSE:To provide a planar antenna for linear polarization shared polarization which can electrically change the direction of polarization by controlling feeding phases to respective feeding openings. CONSTITUTION:A conductor disk 11 constituting a radiating plane is provided with a lot of linear slots 10 to radiate circularly polarized waves. A coaxial cable 16 is composed of an inside coaxial cable 17 and an outside coaxial cable 18. Phase shifters 19 and 20 are respectively connected to cables 17 and 18 and connected through a power distributor 21 to a signal source 22. The radio wave turned to the direction of an arrow 25 by matching body 23 is propagated in a lower layer waveguide 15 as an upward cylindrical wave, reflected by surrounding walls 26, advanced through an upper layer waveguide 14 in the direction of an arrow 27 as an inside cylindrical wave and radiated from a lot of slots 10 to the outside. On the other hand, the radio wave turned to the direction of an arrow 30 by a matching body 28 is advanced through the upper layer waveguide 14 as an outside cylindrical wave and radiated from the a lot of slots 10 to the outside.

8. 发明专利

JPH09247062A DIVERSITY ANTENNA 失效
公开(公告)号：JPH09247062A
公开(公告)日：1997-09-19
申请号：JP8069196
申请日：1996-03-08
申请人： TAKADA JUNICHI
发明人： TAKADA JUNICHI , ANDO MAKOTO
IPC分类号： H01Q21/00 , H01Q1/24 , H01Q9/32 , H04B7/04
摘要： PROBLEM TO BE SOLVED: To obtain the diversity antenna for portable radio equipment without any deterioration in the diversity characteristic in the case of using the antenna in the vicinity of a human body by configuring the antenna with two sets of antennas having a directivity at a special angle opposite to each other in an in horizontal plane maximum radiation direction with respect to a direction of a human body. SOLUTION: Each directivity of dipole antennas 1, 2 differs from each other with respect to a direction of a human head 2 by 90 respectively. In this case, a maximum radiation direction by a human body head 2 changes by about 45 deg., but still the maximum radiation direction and the radiation pattern differ largely. As a result, a large diversity gain is expected. Thus, the antenna having its directivity in a direction perpendicular to the human body, that is, in a direction in parallel with the human body has a smaller change in the directivity depending on the presence/absence of the human body than the antenna having its directivity in a direction perpendicular to the human body. As a result, the diversity effect when the antenna is in use in the vicinity of the human body is increased to have a high resistance to multi-path characteristic.

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