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    • 1. 发明专利
    • Power conversion circuit
    • 电源转换电路
    • JP2013223393A
    • 2013-10-28
    • JP2012095308
    • 2012-04-19
    • Sumitomo Electric Ind Ltd住友電気工業株式会社Toyohashi Univ Of Technology国立大学法人豊橋技術科学大学
    • FUJIKAWA KAZUHIROHATSUKAWA SATOSHISHIGA NOBUOOHIRA TAKASHI
    • H02M7/48
    • H02M7/53871H02M7/538H02M7/5387
    • PROBLEM TO BE SOLVED: To make it possible to provide a power conversion circuit at a low price.SOLUTION: A power conversion circuit 1 according to an embodiment is a bridge type power conversion circuit which: comprises first and second switching elements 11 and 12 connected in series in order between a high voltage side input terminal and low voltage side input terminal, and third and fourth switching elements 13 and 14 connected in series in order between the high voltage side input terminal and low voltage side input terminal; and converts DC power input between the high voltage side input terminal and low voltage side input terminal to AC power by alternately switching a set of the first and fourth switching elements 11 and 14 and a set of the second and third switching elements 12 and 13 to an on-state, where any one set of a set of the first and third switching elements 11 and 13 and a set of the second and fourth switching elements 12 and 14 is controlled to be switched at a frequency higher than that of the other set.
    • 要解决的问题:使得可以以低价格提供电力转换电路。解决方案:根据实施例的电力转换电路1是桥式电力转换电路,其包括连接的第一和第二开关元件11和12 按照高压侧输入端子和低压侧输入端子之间的顺序串联连接的第三和第四开关元件13和14,高压侧输入端子和低压侧输入端子之间依次串联连接; 通过交替切换第一和第四开关元件11和14的一组以及第二和第三开关元件12和13的一组,将高压侧输入端子和低压侧输入端子之间的直流电力输入转换成交流电力,以 导通状态,其中一组第一和第三开关元件11和13以及一组第二和第四开关元件12和14中的一组被控制为以比另一组更高的频率切换 。
    • 2. 发明专利
    • Switching circuit, distributed constant type switching circuit, and envelope signal amplifier
    • 切换电路,分布式恒定类型开关电路和信号放大器
    • JP2011135357A
    • 2011-07-07
    • JP2009293257
    • 2009-12-24
    • Sumitomo Electric Ind LtdToyohashi Univ Of Technology住友電気工業株式会社国立大学法人豊橋技術科学大学
    • OHIRA TAKASHIWADA WASENNAKATA MITSUTOSHIHATSUKAWA SATOSHISHIGA NOBUO
    • H03F3/217H03F1/06
    • PROBLEM TO BE SOLVED: To provide a switching circuit with which higher frequency and larger power amplification is possible than with a push-pull amplifier using a switching element whose semiconductor material consists of silicon or gallium arsenide, by switching an inductance element with a single switching element, and to provide an envelope signal amplifier with the switching circuit.
      SOLUTION: The switching circuit 33a is provided with: an input side transmission line in which gates of n transistors (FET) M1, M2 to Mn using silicon carbide (SiC) as the semiconductor material are cascade-connected via a coil L1; and an output side transmission line in which drains of the respective transistors M1, M2 to Mn are cascade-connected via a coil L2. The transistors Mm (m is an integer from 1 to n) are sequentially turned on by a PWM signal which is given from an input end 331 to be propagated on the input side transmission line, and current which flows in the drain of the transistors Mm is added to current which is propagated in a direction toward an output end 332 on the output side transmission line.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:为了提供一种与使用半导体材料由硅或砷化镓组成的开关元件的推挽放大器相比可以实现更高频率和更大功率放大的开关电路,通过将电感元件与 单个开关元件,并且提供具有开关电路的包络信号放大器。 解决方案:开关电路33a具有:输入侧传输线,其中使用碳化硅(SiC)作为半导体材料的n个晶体管(FET)M1,M2至Mn的栅极通过线圈L1级联 ; 以及输出侧传输线,其中各个晶体管M1,M2至Mn的漏极经由线圈L2级联连接。 晶体管Mm(m是从1到n的整数)通过从输入端331输出的PWM信号顺序导通,以在晶体管Mm的漏极中流动的电流 被添加到在输出侧传输线上朝向输出端332的方向传播的电流。 版权所有(C)2011,JPO&INPIT
    • 9. 发明专利
    • Vapor-phase deposition apparatus and vapor-phase deposition method
    • 蒸气相沉积装置和蒸发相沉积方法
    • JP2008308747A
    • 2008-12-25
    • JP2007159106
    • 2007-06-15
    • Sumitomo Electric Ind Ltd住友電気工業株式会社
    • HATSUKAWA SATOSHI
    • C23C16/458H01L21/205
    • PROBLEM TO BE SOLVED: To provide a vapor-phase deposition apparatus capable of suppressing distribution of gas between the surface side and the backside of a susceptor, and to provide a vapor-phase deposition method.
      SOLUTION: The vapor-phase deposition apparatus has a susceptor as a rotating/revolving susceptor. The susceptor includes a susceptor body 5, an inner circumferential gear 7 and a soaking member 9. The susceptor body 5 revolves, and an opening part is formed therein. The inner circumferential gear 7 and the soaking member 9 are rotatably installed in the opening part of the susceptor body 5, and a substrate 26 is mounted thereon. The inner circumferential gear 7 has a gear part and a cover member 18. The gear part is formed on the outer circumferential part of a flange part of the inner circumferential gear 7, and driving force for rotating the inner circumferential gear 7 is transmitted thereto. The cover member 18 covers at least part of the upper surface of the flange part in the direction crossing the axis of rotation when the inner circumferential gear 7 rotates, and is projected in the direction crossing the axis of rotation from an outer edge on the side surface of an adjacent tooth of the gear formed on the outer circumferential part of the flange part.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 解决的问题:提供能够抑制基座的表面侧和背面之间的气体分布的气相沉积装置,并提供气相沉积方法。 气相沉积装置具有作为旋转/旋转基座的基座。 基座包括基座体5,内周齿轮7和均热构件9.基座体5旋转,并且在其中形成有开口部。 内周齿轮7和均热部件9可旋转地安装在基座体5的开口部分中,并且基板26安装在基体26上。 内周齿轮7具有齿轮部和盖部件18.齿轮部形成在内周齿轮7的凸缘部的外周部,并且使内周齿轮7旋转的驱动力被传递到内周齿轮7。 当内周齿轮7旋转时,盖构件18在与旋转轴线交叉的方向上覆盖凸缘部的上表面的至少一部分,并且从侧面的外边缘沿与旋转轴线交叉的方向突出 形成在凸缘部的外周部上的齿轮的相邻齿的表面。 版权所有(C)2009,JPO&INPIT
    • 10. 发明专利
    • Semiconductor manufacturing apparatus
    • 半导体制造设备
    • JP2008171933A
    • 2008-07-24
    • JP2007002325
    • 2007-01-10
    • Sumitomo Electric Ind Ltd住友電気工業株式会社
    • KURAMOTO TOSHIYUKIUEDA TOSHIOUENO MASANORISENDA HIROHIKOHATSUKAWA SATOSHIWATANABE YOKO
    • H01L21/68H01L21/205
    • PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing apparatus in which a higher processing temperature can be provided. SOLUTION: The semiconductor manufacturing apparatus includes a susceptor body 5 serving as a rotary susceptor that holds workpieces of substrates 26, and a rotating shaft 13 that transmits torque to the susceptor body 5. A rotating shaft connection is disposed on the front end of the rotating shaft 13 that faces the susceptor 5, and connecting members 15 are disposed at the center of main surface of the susceptor body 5 that faces the rotating shaft 13. The rotating shaft 13 is disposed above the center of main surface of the susceptor body 5 so that the rotation of the rotating shaft 13 causes the side face of the rotating shaft connection to press the side faces of the connecting members 15 to rotate the susceptor body 5. COPYRIGHT: (C)2008,JPO&INPIT
    • 解决的问题:提供一种其中可以提供较高处理温度的半导体制造装置。 解决方案:半导体制造装置包括用作保持基板26的工件的旋转基座的基座体5和将转矩传递到基座体5的旋转轴13.旋转轴连接设置在前端 与基座5相对的旋转轴13,并且连接构件15配置在基座体5的与旋转轴13相对的主面的中心。旋转轴13设置在基座的主面的中心的上方 使得旋转轴13的旋转使得旋转轴连接的侧面按压连接构件15的侧面以使基座体5旋转。版权所有(C)2008,JPO&INPIT