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    • 2. 发明专利
    • Apparatus and method for manufacturing substrate with intermediate layer for oxide superconductive wire rod
    • 用于制造氧化物超导线材中间层的基板的装置和方法
    • JP2013234350A
    • 2013-11-21
    • JP2012106861
    • 2012-05-08
    • Sumitomo Electric Ind Ltd住友電気工業株式会社
    • OKI YASUTAROHONDA GENKI
    • C23C14/34C23C14/08H01B13/00
    • PROBLEM TO BE SOLVED: To provide an apparatus and a method for manufacturing a substrate with an intermediate layer for an oxide superconductive wire rod, capable of manufacturing, in a shorter time, the substrate with the intermediate layer including multiple layers.SOLUTION: An apparatus is for manufacturing a substrate with an intermediate layer for an oxide superconductive wire rod, in which an intermediate layer having a multiple layer structure is formed on a long oriented metal substrate 21 using a gas phase growing method. In the apparatus for manufacturing the substrate with the intermediate layer for the oxide superconductive wire rod, a multi-target 15 including a plurality of sputter targets is disposed in a film forming apparatus 13, and targets corresponding to respective layers constituting the intermediate layer are provided in the multi-target from the upstream to the downstream in the transporting direction of the oriented metal substrate in the order of film deposition.
    • 要解决的问题:提供一种用于制造具有用于氧化物超导线材的中间层的基板的装置和方法,其能够在较短时间内制造具有包括多层的中间层的基板。解决方案:一种装置 用于制造具有氧化物超导线材的中间层的基板,其中使用气相生长法在长取向金属基板21上形成具有多层结构的中间层。 在用于制造具有用于氧化物超导线材的中间层的基板的设备中,在成膜设备13中设置包括多个溅射靶的多靶15,并且提供与构成中间层的各层对应的靶 在定向金属基板的输送方向上的上游到下游的多靶中以膜沉积的顺序。
    • 5. 发明专利
    • Manufacturing method of oxide superconducting thin film
    • 氧化物超导薄膜的制造方法
    • JP2011141984A
    • 2011-07-21
    • JP2010001162
    • 2010-01-06
    • Sumitomo Electric Ind Ltd住友電気工業株式会社
    • OKI YASUTARO
    • H01B13/00C01G1/00H01B12/06H01L39/24
    • Y02E40/642
    • PROBLEM TO BE SOLVED: To provide a manufacturing method of an oxide superconducting thin film, forming a calcination film with roughness generated on the surface suppressed at the time of calcination of a coating film of MOD solution, and capable of forming an oxide superconducting thin film with excellent superconductivity through firing after the calcination.
      SOLUTION: The manufacturing method of an oxide superconducting thin film, in which the oxide superconducting thin film used for manufacturing a superconducting wire is manufactured with a metal organic compound as a raw material by a coating pyrolytic method, comprises a coating film manufacturing process for manufacturing a coating film by coating solution of a metal organic compound on a substrate, a calcination heat treatment process for carrying out thermal decomposition and removing organic components contained in the metal organic compound of the coating film to manufacture a calcination film, and a firing treatment process for crystallizing the calcination film to manufacture the oxide superconducting thin film. In the calcination treatment process, temperature raising to reach the calcination treatment temperature is carried out under a higher pressure atmosphere than the atmospheric pressure.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 解决的问题:为了提供一种氧化物超导薄膜的制造方法,在MOD溶液的涂膜煅烧时抑制表面产生的粗糙度的煅烧膜形成氧化物,并且能够形成氧化物 超导薄膜具有优异的超导性,经焙烧焙烧后, 解决方案:通过涂层热解法以金属有机化合物作为原料制造用于制造超导线材的氧化物超导薄膜的氧化物超导薄膜的制造方法,包括涂膜制造 通过将金属有机化合物的溶液涂布在基材上来制造涂膜的方法,进行热分解并除去涂膜的金属有机化合物中含有的有机成分的煅烧热处理工序,制造煅烧膜, 烧结处理工艺用于结晶煅烧膜以制造氧化物超导薄膜。 在煅烧处理过程中,达到煅烧处理温度的升温在比大气压更高的压力气氛下进行。 版权所有(C)2011,JPO&INPIT
    • 8. 发明专利
    • Metal base for thin-film superconductive wire material, method of manufacturing the same, and thin-film superconductive wire material
    • 用于薄膜超导线材的金属基板,其制造方法和薄膜超导线材料
    • JP2012119125A
    • 2012-06-21
    • JP2010266593
    • 2010-11-30
    • Sumitomo Electric Ind Ltd住友電気工業株式会社
    • OKI YASUTAROSHINKAI YUKI
    • H01B12/06H01B13/00H01F6/06
    • Y02E40/642
    • PROBLEM TO BE SOLVED: To provide a metal base for thin-film superconductive wire material in which the occurrence of warp is suppressed, no uneven film thickness is produced in formation of an oxide superconductive layer, and the variation of Ic is suppressed, and which has no problem in handling, etc., and to provide a method of manufacturing the metal base, and a thin-film superconductive wire material.SOLUTION: The metal base for thin-film superconductive wire material includes a metal substrate, and intermediate layers formed on both faces of the metal substrate; the ratio D/L of the maximum deformation height D in a widthwise direction to its width L is 0.02 or smaller. The method of manufacturing the metal base for thin-film superconductive wire material includes the step of forming an intermediate layer on both the faces of metal substrate concurrently. In the step, the metal substrate is set in a position between two targets placed in parallel with each other so that the metal substrate is rotated by 90 degrees with respect to faces of the targets, and the intermediate layer is formed on both the faces of the metal substrate by off-axis sputtering. The thin-film superconductive wire material has an oxide superconductive layer formed on one or both of the ceramic layers of the metal base for thin-film superconductive wire material.
    • 要解决的问题:为了提供抑制翘曲发生的薄膜超导线材的金属基底,在形成氧化物超导层时不产生不均匀的膜厚度,并且Ic的变化被抑制 ,并且在处理等方面没有问题,并且提供了制造金属基底的方法和薄膜超导线材料。 解决方案:薄膜超导线材的金属基底包括金属基底和形成在金属基片的两个表面上的中间层; 宽度方向上的最大变形高度D与其宽度L的比D / L为0.02以下。 制造薄膜超导线材的金属基底的方法包括同时在金属基片的两个表面上形成中间层的步骤。 在该步骤中,将金属基板设置在彼此平行放置的两个靶之间的位置,使得金属基板相对于靶的表面旋转90度,并且中间层形成在 金属基板通过离轴溅射。 薄膜超导线材料具有形成在用于薄膜超导线材的金属基底的一个或两个陶瓷层上的氧化物超导层。 版权所有(C)2012,JPO&INPIT
    • 9. 发明专利
    • Oxide superconductive thin film wire rod, metal substrate for oxide superconductive thin film wire rod, and method of manufacturing the same
    • 氧化物超导薄膜线,用于氧化物超薄薄膜线的金属基底及其制造方法
    • JP2012049086A
    • 2012-03-08
    • JP2010192569
    • 2010-08-30
    • Sumitomo Electric Ind Ltd住友電気工業株式会社
    • OKI YASUTAROYAMAGUCHI TAKASHINAGAISHI TATSUOKI
    • H01B12/06C01G1/00C01G3/00H01B13/00
    • Y02E40/642
    • PROBLEM TO BE SOLVED: To provide an oxide superconductive thin film wire rod having superconductive characteristics by epitaxially growing an oxide superconductive layer thin film on a ceramic film using a metal substrate on which the ceramic film epitaxially grown is formed.SOLUTION: In this method of manufacturing the metal substrate for the oxide superconductive thin film wire rod, the ceramic film is deposited on a long oriented metal tape sent to a take-up reel by being unwound from a supply reel using a vapor deposition method, and an annealing process to apply pre-annealing to the oriented metal tape at a temperature of 600°C-820°C and under a pressure of 10Pa or less prior to deposition of the ceramic film is provided. The metal substrate for the oxide superconductive thin film wire rod is manufactured by this manufacturing method. The oxide superconductive thin film is deposited on the metal substrate for the oxide superconductive thin film wire rod in the oxide superconductive thin film wire rod.
    • 解决的问题:通过使用其上形成有外延生长陶瓷膜的金属基板在陶瓷膜上外延生长氧化物超导层薄膜来提供具有超导特性的氧化物超导薄膜线材。 解决方案:在这种制造用于氧化物超导薄膜线材的金属基底的方法中,陶瓷膜沉积在通过使用蒸气从供给卷轴展开而送到卷取卷轴的长取向金属带上 并且在600℃-820℃的温度和10℃的压力下对定向金属带施加预退火的退火工艺,或者 在沉积陶瓷膜之前较少。 通过该制造方法制造用于氧化物超导薄膜线材的金属基板。 氧化物超导薄膜沉积在氧化物超导薄膜线材上用于氧化物超导薄膜线材的金属基底上。 版权所有(C)2012,JPO&INPIT
    • 10. 发明专利
    • Method for producing oxide superconductive thin film
    • 生产氧化物超导薄膜的方法
    • JP2011230946A
    • 2011-11-17
    • JP2010101261
    • 2010-04-26
    • National Institute Of Advanced Industrial Science & TechnologySumitomo Electric Ind Ltd住友電気工業株式会社独立行政法人産業技術総合研究所
    • YAMAGUCHI IWAOKUMAGAI TOSHIYAHIKATA TAKESHIOKI YASUTARO
    • C01G1/00B05D5/12H01B13/00
    • PROBLEM TO BE SOLVED: To provide a method for producing an oxide superconductive thin film which forms a calcined film in which roughening generated in the surface is suppressed upon the calcining of a coating film of an MOD (Metal Organic Deposition) solution, and produces an oxide superconductive thin film having sufficiently high Jc and Ic by the subsequent normal firing.SOLUTION: The method for producing an oxide superconductive thin film uses a metal organic compound as raw material to produce an oxide superconductive thin film used for producing a superconductive wire rod, by metal organic deposition. The method includes: a coating film producing step of coating the surface of a substrate with a solution of a metal organic compound to produce a coating film; a calcining heat treatment step of thermally decomposing and removing organic components contained in the metal organic compound of the coating film to produce a calcined film; and a normal firing heat treatment step of crystallizing the calcined film to produce an oxide superconductive thin film. In the calcining heat treatment, temperature rising till a calcining heat treatment temperature is performed under a pressure atmosphere lower than the atmospheric pressure.
    • 要解决的问题:提供一种形成氧化物超导薄膜的方法,该氧化物超导薄膜形成煅烧膜,其中在对MOD(金属有机沉积)溶液的涂膜进行煅烧时,在表面产生粗糙度被抑制, 并通过随后的正常烧制产生具有足够高的Jc和Ic的氧化物超导薄膜。 解决方案:氧化物超导薄膜的制造方法使用金属有机化合物作为原料,通过金属有机沉积来制造用于制造超导线材的氧化物超导薄膜。 该方法包括:涂膜生产步骤,用金属有机化合物的溶液涂覆基材的表面以产生涂膜; 煅烧热处理步骤,热分解和除去涂膜的金属有机化合物中所含的有机组分以产生煅烧膜; 以及将煅烧膜结晶以产生氧化物超导薄膜的正常烧成热处理步骤。 在煅烧热处理中,在低于大气压的压力气氛下进行升温至煅烧热处理温度。 版权所有(C)2012,JPO&INPIT