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1. 发明专利

JP2013122847A Method for manufacturing oxide superconducting wiring material 有权
标题翻译：氧化物超导线材的制造方法
公开(公告)号：JP2013122847A
公开(公告)日：2013-06-20
申请号：JP2011270543
申请日：2011-12-09
申请人： Sumitomo Electric Ind Ltd , 住友電気工業株式会社
发明人： HONDA TAKAHIRO , HONDA GENKI , NAGAISHI TATSUOKI
IPC分类号： H01B13/00 , C01G1/00 , C01G3/00 , H01B12/06
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing an oxide superconducting thin film wiring material according to FF-MOD method by which a thick oxide superconducting thin film having sufficiently high Ic can be obtained with stability.SOLUTION: In the method for manufacturing an oxide superconducting wiring material, a liquid solution of an organic metal compound containing no fluorine is used to form an oxide superconducting thin film on a metal substrate according to MOD method, thereby manufacturing the oxide superconducting wiring material. The method comprises: a coating film-preparing step where a coating film is prepared by coating the metal substrate with the organic metal compound liquid solution, followed by drying; a preliminary baking heat treatment step where a preliminarily baked film is prepared by heating the coating film to thermally decompose the organic metal compound, thereby removing an organic component; and a primary baking heat treatment step where an oxide superconducting thin film is prepared by heating and crystallizing the preliminarily baked film. In the method, chlorine of 2 ppm or more to less than 2000 ppm to a total metal ion mass is added to the organic metal compound liquid solution. The primary baking heat treatment is performed after having prepared the preliminarily baked film with a thickness of 0.5 μm or larger.
摘要翻译：解决的问题：提供根据FF-MOD方法制造氧化物超导薄膜布线材料的方法，通过该方法可以稳定地获得具有足够高的Ic的厚氧化物超导薄膜。解决方案：在氧化物超导布线材料的制造方法中，使用不含氟的有机金属化合物的液体溶液，根据MOD法在金属基板上形成氧化物超导薄膜，从而制造氧化物超导接线材料。该方法包括：涂膜制备步骤，其中通过用有机金属化合物液体溶液涂覆金属基底然后干燥制备涂膜; 预焙烘热处理步骤，其中通过加热涂膜来热分解有机金属化合物，从而除去有机组分，制备预烘烤的膜; 以及通过对预先烘烤的膜进行加热和结晶来制备氧化物超导薄膜的初级烘烤热处理步骤。在该方法中，向有机金属化合物液体溶液中添加相对于总金属离子质量为2ppm以上且小于2000ppm的氯。在制备厚度为0.5μm以上的预烘烤膜之后进行一次烘焙热处理。版权所有（C）2013，JPO＆INPIT

2. 发明专利

JP2012174568A Oxide superconductive wire material and manufacturing method thereof 审中-公开
标题翻译：氧化物超导线材及其制造方法
公开(公告)号：JP2012174568A
公开(公告)日：2012-09-10
申请号：JP2011036565
申请日：2011-02-23
申请人： Sumitomo Electric Ind Ltd , National Institute Of Advanced Industrial & Technology , 住友電気工業株式会社 , 独立行政法人産業技術総合研究所
发明人： HANAFUSA KEI , HONDA GENKI , NAKANISHI TAKESHI , OKI YASUTARO , YAMAGUCHI TAKASHI , NAGAISHI TATSUOKI , MANABE TAKAAKI , YAMAGUCHI IWAO
IPC分类号： H01B13/00 , C01G1/00 , H01B12/06 , H01L39/24
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide an oxide superconductive wire material with sufficiently high Ic in which an oxide superconducting layer is formed so as to become thick on a substrate and be oriented to a c-axis as a whole, and provide a manufacturing method of the oxide superconductive wire material.SOLUTION: A manufacturing method for an oxide superconductive wire material in which organic metallic compound is used as raw material and an oxide superconducting layer is formed by a coating pyrolysis method on a substrate, includes stacking a plurality of temporary baked films having different optimum baking temperatures on the substrate in order of the baking temperature from lowest to highest so as to form a temporary baked film lamination, and then formally baking the temporary baked film lamination. The temporary baked films formed on the substrate are three or more layers. The thickness of the oxide superconducting layer formed from each of the temporary baked films is 0.05 to 1.0 μm.
摘要翻译：要解决的问题：为了提供具有足够高的Ic的氧化物超导线材，其中形成氧化物超导层以在基底上变厚并且整体上取向为c轴，并提供氧化物超导线材的制造方法。解决方案：在基板上通过涂层热解法形成其中使用有机金属化合物作为原料的氧化物超导线材料的制造方法和氧化物超导层，包括堆叠多个具有不同的临时焙烧膜烘烤温度从最低到最高的顺序在基板上的最佳烘烤温度，以便形成临时烘焙膜层压，然后正式烘烤临时烘焙膜层压。在基板上形成的临时烘烤膜为三层以上。由各临时烘焙膜形成的氧化物超导层的厚度为0.05〜1.0μm。版权所有（C）2012，JPO＆INPIT

3. 发明专利

JP2012174567A Oxide superconductive wire material and manufacturing method thereof 审中-公开
标题翻译：氧化物超导线材及其制造方法
公开(公告)号：JP2012174567A
公开(公告)日：2012-09-10
申请号：JP2011036560
申请日：2011-02-23
申请人： Sumitomo Electric Ind Ltd , National Institute Of Advanced Industrial & Technology , 住友電気工業株式会社 , 独立行政法人産業技術総合研究所
发明人： HONDA GENKI , NAGAISHI TATSUOKI , NAKANISHI TAKESHI , OKI YASUTARO , YAMAGUCHI TAKASHI , HANAFUSA KEI , YAMAGUCHI IWAO , MANABE TAKAAKI , KUMAGAI TOSHIYA , SHIMOYAMA JUNICHI
IPC分类号： H01B13/00 , C01G1/00 , H01B12/06 , H01F6/06 , H01L39/24
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide an oxide superconductive wire material in which, even though a lamination is thick, Jc is not reduced and an oxide superconducting layer having a sufficiently high Ic proportional to the thickness the lamination is formed on a substrate plate, and provide a manufacturing method of the oxide superconductive wire material.SOLUTION: A manufacturing method for an oxide superconductive wire material in which organic metallic compound is used as raw material and an oxide superconducting layer is formed by a coating pyrolysis method on an orientation metal substrate, includes a coating film forming process for forming a coating film of the organic metallic compound, a temporary baking treatment process for forming a temporary baked film by pyrolyzing and removing organic components contained in the coating film, and a formal baking treatment process for forming a formal baked film by crystallizing the temporary baked film. The coating film forming process, the temporary baking treatment process, and the formal baking treatment process are repeated so as to form and stack a plurality of formal baked films, so that the oxide superconducting layer in which a defective layer is formed between the stacked films is formed. An oxide superconductive wire material has a plurality of formal baked films which are stacked via a defective layer by the coating pyrolysis method.
摘要翻译：要解决的问题：提供一种氧化物超导线材料，其中即使层压较厚，Jc也不会被还原，并且具有足够高的Ic的氧化物超导层与叠片形成在衬底上的厚度成正比并提供氧化物超导线材的制造方法。解决方案：通过在取向金属基板上的涂层热解法形成其中使用有机金属化合物作为原料的氧化物超导线材料的制造方法和氧化物超导层，包括用于形成的涂膜形成工艺有机金属化合物的涂膜，通过热解除去包含在涂膜中的有机成分来形成临时烘烤膜的临时烘烤处理工艺和通过使临时烘烤膜结晶形成正式烘烤膜的正式烘烤处理过程。重复涂膜形成过程，临时烘烤处理过程和正式烘烤处理过程，以形成和堆叠多个正式烘烤膜，使得在层叠膜之间形成有缺陷层的氧化物超导层形成了。氧化物超导线材具有通过涂层热解法通过不良层堆叠的多个正式烘烤膜。版权所有（C）2012，JPO＆INPIT

4. 发明专利

JP2012064394A Method for manufacturing oxide superconductive thin film 审中-公开
标题翻译：氧化物超导薄膜的制造方法
公开(公告)号：JP2012064394A
公开(公告)日：2012-03-29
申请号：JP2010206697
申请日：2010-09-15
申请人： National Institute Of Advanced Industrial & Technology , Sumitomo Electric Ind Ltd , 住友電気工業株式会社 , 独立行政法人産業技術総合研究所
发明人： HONDA GENKI , NAGAISHI TATSUOKI , YAMAGUCHI IWAO , MANABE TAKAAKI , SHIMOYAMA JUNICHI
IPC分类号： H01B13/00 , C01G1/00 , C01G3/00 , H01B12/06
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing an oxide superconductive thin film, capable of obtaining a thick-film type oxide superconductive thin film formed by sintering a plurality of preliminary sintered films laminated and having a sufficiently high critical current value Ic.SOLUTION: A method for manufacturing an RE123-based (where RE is a rare earth element) oxide superconductive thin film used for manufacturing a superconductive wire rod by an application thermal decomposition method comprises: a preliminary-sintered-film forming step of forming preliminary sintered films having a plurality of films laminated by repeating several times, applying a raw material solution onto a base material and preliminary sintering the applied film; and an oxide-superconductive-thin-film forming step of forming the oxide superconductive thin film by sintering the preliminary sintered films. In the method for manufacturing the oxide superconductive thin film, the raw material solution having a ratio of RE, Ba and Cu deviating from a stoichiometric ratio is used for forming a first layer of the applied film provided on a surface of the base material.
摘要翻译：要解决的问题：为了提供一种制造氧化物超导薄膜的方法，能够获得通过烧结多个预先烧结的薄膜而形成的厚膜型氧化物超导薄膜，并且具有足够高的临界电流值我知道了。解决方案：通过应用热分解方法制造用于制造超导线材的RE123基（其中RE是稀土元素）氧化物超导薄膜的方法包括：预烧结膜形成步骤形成通过重复多次层叠多个膜的初步烧结膜，将原料溶液施加到基材上并预涂烧所述膜; 以及通过烧结预烧结膜来形成氧化物超导薄膜的氧化物超导薄膜形成步骤。在制造氧化物超导薄膜的方法中，使用偏离化学计量比的具有RE，Ba和Cu的比率的原料溶液来形成设置在基材表面上的涂布膜的第一层。版权所有（C）2012，JPO＆INPIT

5. 发明专利

JP2012003975A Manufacturing method of oxide superconducting thin film 有权
标题翻译：氧化物超导薄膜的制造方法
公开(公告)号：JP2012003975A
公开(公告)日：2012-01-05
申请号：JP2010138317
申请日：2010-06-17
申请人： Sumitomo Electric Ind Ltd , 住友電気工業株式会社
发明人： NAKANISHI TAKESHI , NAGAISHI TATSUOKI , HONDA GENKI , HANAFUSA KEI
IPC分类号： H01B13/00 , C01G1/00 , C01G3/00 , H01B12/06
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of an oxide superconducting thin film with excellent superconducting characteristics having high Ic by sufficient growth of a c-axis oriented crystal using an FF-MOD method.SOLUTION: A manufacturing method of an oxide superconducting thin film used for manufacturing a superconducting wire rod by a coating thermal decomposition method with an atmosphere furnace using a fluorine-free metal organic compound as a raw material comprises: a coating film making step in which a coating film is made by coating on a substrate with a solution of the metal organic compound; a calcination heat treatment step in which a calcined film is made by thermal decomposition and removal of an organic constituent contained in the metal organic compound of the coating film; and a sintering heat treatment step in which the oxide superconducting thin film is made by crystallization of the calcined film. An intermediate heat treatment step in which carbonate contained in the calcined film is decomposed by heat conducted from the heated substrate is provided between the calcination heat treatment step and the sintering heat treatment step.
摘要翻译：解决的问题：通过使用FF-MOD方法通过使c轴取向晶体充分生长，提供具有优异的具有高Ic的超导特性的氧化物超导薄膜的制造方法。解决方案：使用无机金属有机化合物作为原料的气氛炉，通过涂布热分解法制造超导线材的氧化物超导薄膜的制造方法包括：涂膜制作步骤其中通过用金属有机化合物的溶液涂覆在基材上来制备涂膜; 煅烧热处理步骤，其中通过热分解和去除包含在涂膜的金属有机化合物中的有机成分来制备煅烧膜; 以及烧结热处理步骤，其中通过煅烧膜的结晶来制造氧化物超导薄膜。在煅烧热处理工序和烧结热处理工序之间，设置由煅烧后的膜中含有的碳酸盐从加热的基板导入的热分解的中间热处理工序。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2014207056A 酸化物超電導線材の製造方法および酸化物超電導線材审中-公开
标题翻译：氧化物超导线和氧化物超导线的制造方法
公开(公告)号：JP2014207056A
公开(公告)日：2014-10-30
申请号：JP2013082414
申请日：2013-04-10
申请人：住友電気工業株式会社 , Sumitomo Electric Ind Ltd
发明人： HONDA TAKAHIRO , OKI KOTARO , HONDA GENKI , NAGAISHI TATSUOKI
IPC分类号： H01B13/00 , C01G1/00 , C01G3/00 , H01B12/06
CPC分类号： Y02E40/642
摘要：【課題】FF−MOD法を用いて従来よりも超電導特性が向上した酸化物超電導線材を製造することができる酸化物超電導線材の製造方法を提供する。【解決手段】フッ素を含まない有機金属化合物溶液に塩素が添加された原料溶液を調製する原料溶液調製工程と、原料溶液を配向金属基板1の表面に塗布した後に仮焼熱処理を施すことにより、配向金属基板上に膜厚50〜200nmの第1仮焼膜2aを形成する第1仮焼膜形成工程と、第1仮焼膜の表面に原料溶液を塗布した後に仮焼熱処理を施すことにより、第1仮焼膜上に第1仮焼膜よりも厚膜の第2仮焼膜2bを形成する第2仮焼膜形成工程と、本焼熱処理を施して、第1仮焼膜および第2仮焼膜を結晶化させることにより、配向金属基板上に酸化物超電導層を形成する酸化物超電導層形成工程とを備える酸化物超電導線材の製造方法。【選択図】図2
摘要翻译：要解决的问题：提供一种通过使用无氟金属有机沉积（FF-MOD）方法制造具有前所未有的超导特性的氧化物超导线的氧化物超导线的制造方法。解决方案：提供的方法制造氧化物超导线包括：原料溶液制备步骤，制备通过向无氟有机金属化合物溶液中加入氯获得的原料溶液;第一焙烤成膜步骤，形成第一焙烤膜2a，其厚度为在定向金属基板1的顶部涂覆50-200nm，将原料溶液涂布在定向金属基材的表面上，然后对溶液进行焙烧热处理，第二焙烤成膜步骤形成比第二烘烤膜2b厚通过在表面涂层上涂覆原料溶液，将第一个烤的薄膜上的第一个烤薄膜 e，然后对所述溶液进行焙烧热处理，以及氧化物超导层形成步骤，通过使所述第一烘烤膜和所述第二烤膜通过使所述第一烘烤膜和所述第二烘烤膜成膜而形成氧化物超导层，主要焙烧热处理。

7. 发明专利

JP2013201114A Intermediate layer having substrate for superconducting thin film wire material and superconducting thin film wire material 审中-公开
标题翻译：具有衬底的中间层，用于超薄薄膜材料和超薄薄膜材料
公开(公告)号：JP2013201114A
公开(公告)日：2013-10-03
申请号：JP2012200357
申请日：2012-09-12
申请人： Sumitomo Electric Ind Ltd , 住友電気工業株式会社
发明人： OKI YASUTARO , HONDA GENKI
IPC分类号： H01B12/06 , C01G1/00 , H01B13/00
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide a technique for obtaining, by means of a MOD method, an oxide superconducting wire material which does not degrade in Jc even when a calcination film is laminated and which is excellent in superconducting characteristics (having high Jc and high Ic).SOLUTION: An intermediate layer having substrate is used for a production of a superconducting thin film wire material by a coating thermal decomposition method. In the intermediate layer having substrate for the superconducting thin film wire material, an intermediate layer is provided on an oriented metal substrate, and the intermediate layer having a four-layer structure in which a CeOlayer, a YSZ layer, a YOlayer, a CeOlayer are arranged in this order from a surface toward the oriented metal substrate. The oriented metal substrate is a clad substrate in the intermediate layer having substrate for the superconducting thin film wire material. An oxide superconducting layer is formed on the intermediate layer having substrate for the superconducting thin film wire material by a coating thermal decomposition method in a superconducting thin film wire material.
摘要翻译：要解决的问题：为了提供一种通过MOD方法获得即使在煅烧膜层压时也不会在Jc中降解并且具有优异的超导特性（具有高Jc和高的）的氧化物超导线材的技术 Ic）。解决方案：具有基底的中间层用于通过涂层热分解法生产超导薄膜线材。在具有超导薄膜线材的基板的中间层中，在定向金属基板上设置中间层，具有CeO层，YSZ层，YO层，CeO层的四层结构的中间层为从表面朝向定向金属基板依次排列。定向金属基板是具有用于超导薄膜线材的衬底的中间层中的覆层衬底。通过超导薄膜线材中的涂层热分解方法，在具有超导薄膜线材的衬底的中间层上形成氧化物超导层。

8. 发明专利

JP2012234649A Oxide superconductive film, and method for manufacturing the same 审中-公开
标题翻译：氧化物超导膜及其制造方法
公开(公告)号：JP2012234649A
公开(公告)日：2012-11-29
申请号：JP2011100894
申请日：2011-04-28
申请人： Sumitomo Electric Ind Ltd , 住友電気工業株式会社
发明人： NAKANISHI TAKESHI , NAGAISHI TATSUOKI , HONDA GENKI , OKI YASUTARO , HANAFUSA KEI
IPC分类号： H01B13/00 , C01G1/00 , C01G3/00 , H01B12/06 , H01L39/24
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide an oxide superconductive film having a higher superconducting transition temperature Tc than a conventional oxide superconductive film.SOLUTION: In the oxide superconductive film manufacturing method, a liquid solution of an organic metal compound is used to manufacture an oxide superconductive film on a metal substrate by metal organic deposition (MOD) method. The method comprises: a coating film preparation step which includes coating a metal substrate with an organic metal compound liquid solution to prepare a coating film; a preliminary baking heat treatment step which includes heating the coating film to thermally decompose the organic metal compound and remove organic constituents, whereby forming a precursor film of the oxide superconductive film; and a primary baking heat treatment step which includes heating and crystallizing the precursor film to form the oxide superconductive film. In the preliminary baking heat treatment step, the coating film is heated under an atmosphere whose oxygen content proportion is 80-100 vol%.
摘要翻译：要解决的问题：提供具有比常规氧化物超导膜更高的超导转变温度Tc的氧化物超导膜。解决方案：在氧化物超导膜制造方法中，使用有机金属化合物的液体溶液通过金属有机沉积（MOD）方法在金属基底上制造氧化物超导膜。该方法包括：涂膜制备步骤，其包括用有机金属化合物液体溶液涂覆金属基材以制备涂膜; 初步烘焙热处理步骤，其包括加热涂膜以热分解有机金属化合物并除去有机成分，由此形成氧化物超导膜的前体膜; 以及初级烘烤热处理步骤，其包括加热和结晶前体膜以形成氧化物超导膜。在预烘烤热处理工序中，在氧含量比例为80〜100体积％的气氛下加热涂膜。版权所有（C）2013，JPO＆INPIT

9. 发明专利

JP2012174566A Oxide superconductive wire material and manufacturing method thereof 审中-公开
标题翻译：氧化物超导线材及其制造方法
公开(公告)号：JP2012174566A
公开(公告)日：2012-09-10
申请号：JP2011036557
申请日：2011-02-23
申请人： Sumitomo Electric Ind Ltd , National Institute Of Advanced Industrial & Technology , 住友電気工業株式会社 , 独立行政法人産業技術総合研究所
发明人： HANAFUSA KEI , NAKANISHI TAKESHI , HONDA GENKI , OKI YASUTARO , YAMAGUCHI TAKASHI , NAGAISHI TATSUOKI , MANABE TAKAAKI , YAMAGUCHI IWAO
IPC分类号： H01B13/00 , C01G1/00 , C01G3/00 , H01B12/06 , H01F6/06 , H01L39/24
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide an oxide superconductive wire material in which, even though a lamination is thick, Jc is not reduced and an oxide superconducting layer with sufficiently high Ic is formed on a substrate plate, and provide a manufacturing method of the oxide superconductive wire material.SOLUTION: A manufacturing method for an oxide superconductive wire material in which organic metallic compound is used as raw material and an oxide superconducting layer is formed by a coating pyrolysis method on a substrate, includes stacking a plurality of oxide superconducting layers having different optimum formal baking temperatures on the substrate in order of the baking temperature from highest to lowest. The oxide superconducting layers formed on the substrate are three or more layers, each thickness of which is 0.05 to 1.0 μm.
摘要翻译：要解决的问题：为了提供一种氧化物超导线材，其中即使层压较厚，Jc也不会被还原，并且在基板上形成具有足够高的Ic的氧化物超导层，并提供制造方法的氧化物超导线材料。解决方案：在基板上通过涂布热解法形成氧化物超导线材的制造方法，其中使用有机金属化合物作为原料和氧化物超导层，包括堆叠多个具有不同的氧化物超导层按照烘烤温度从最高到最低的顺序，在基板上最佳的正式烘烤温度。形成在基板上的氧化物超导层为三层以上，其厚度为0.05〜1.0μm。版权所有（C）2012，JPO＆INPIT

10. 发明专利

JP2012129085A Oxide superconductive thin film wire rod and manufacturing method thereof 审中-公开
标题翻译：氧化物超薄膜生产线及其制造方法
公开(公告)号：JP2012129085A
公开(公告)日：2012-07-05
申请号：JP2010280106
申请日：2010-12-16
申请人： National Institute Of Advanced Industrial & Technology , Sumitomo Electric Ind Ltd , 住友電気工業株式会社 , 独立行政法人産業技術総合研究所
发明人： HONDA GENKI , NAGAISHI TATSUOKI , NAKANISHI TAKESHI , OKI YASUTARO , HANAFUSA KEI , MANABE TAKAAKI , YAMAGUCHI IWAO , KAMIYA KUNIO , SHIMOYAMA JUNICHI
IPC分类号： H01B13/00 , C01G1/00 , C01G3/00 , H01B12/06 , H01F6/06
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide an oxide superconductive thin film wire rod which, owing to an oxide superconductive thin film formed in greater thickness, excels in superconducting characteristics showing sufficiently high Jc and Ic.SOLUTION: A manufacturing method of an oxide superconductive thin film wire rod involves forming an oxide superconductive thin film from a metal organic compound by an application thermal decomposition process on an oriented metal substrate having an intermediate layer formed on an oriented metal base material. The manufacturing method of an oxide superconductive thin film wire rod comprises a YBCO superconductive thin film formation step of forming a YBCO superconductive thin film on the intermediate layer of the oriented metal substrate and a HoBCO superconductive thin film formation step of forming a HoBCO superconductive thin film on top of the YBCO superconductive thin film. The oxide superconductive thin film wire rod has the YBCO superconductive thin film in film thickness of 0.3 μm or less formed on the oriented metal substrate having the intermediate layer formed on the oriented metal base material and further the HoBCO superconductive thin film formed on top of the YBCO superconductive thin film.
摘要翻译：要解决的问题：提供一种氧化物超导薄膜线材，其由于形成更大厚度的氧化物超导薄膜，具有显示足够高的Jc和Ic的超导特性。解决方案：氧化物超导薄膜线材的制造方法包括通过在具有在取向金属基材上形成的中间层的取向金属基材上的应用热分解方法从金属有机化合物形成氧化物超导薄膜。氧化物超导薄膜线材的制造方法包括在定向金属基板的中间层上形成YBCO超导薄膜的YBCO超导薄膜形成步骤和形成HoBCO超导薄膜的HoBCO超导薄膜形成步骤在YBCO超导薄膜的顶部。氧化物超导薄膜线材具有在具有形成在取向金属基材上的中间层的取向金属基板上形成的膜厚度为0.3μm以下的YBCO超导薄膜，并且还形成在该顶面上的HoBCO超导薄膜 YBCO超导薄膜。版权所有（C）2012，JPO＆INPIT

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