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1. 发明专利

JP2013122847A Method for manufacturing oxide superconducting wiring material 有权
标题翻译：氧化物超导线材的制造方法
公开(公告)号：JP2013122847A
公开(公告)日：2013-06-20
申请号：JP2011270543
申请日：2011-12-09
申请人： Sumitomo Electric Ind Ltd , 住友電気工業株式会社
发明人： HONDA TAKAHIRO , HONDA GENKI , NAGAISHI TATSUOKI
IPC分类号： H01B13/00 , C01G1/00 , C01G3/00 , H01B12/06
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing an oxide superconducting thin film wiring material according to FF-MOD method by which a thick oxide superconducting thin film having sufficiently high Ic can be obtained with stability.SOLUTION: In the method for manufacturing an oxide superconducting wiring material, a liquid solution of an organic metal compound containing no fluorine is used to form an oxide superconducting thin film on a metal substrate according to MOD method, thereby manufacturing the oxide superconducting wiring material. The method comprises: a coating film-preparing step where a coating film is prepared by coating the metal substrate with the organic metal compound liquid solution, followed by drying; a preliminary baking heat treatment step where a preliminarily baked film is prepared by heating the coating film to thermally decompose the organic metal compound, thereby removing an organic component; and a primary baking heat treatment step where an oxide superconducting thin film is prepared by heating and crystallizing the preliminarily baked film. In the method, chlorine of 2 ppm or more to less than 2000 ppm to a total metal ion mass is added to the organic metal compound liquid solution. The primary baking heat treatment is performed after having prepared the preliminarily baked film with a thickness of 0.5 μm or larger.
摘要翻译：解决的问题：提供根据FF-MOD方法制造氧化物超导薄膜布线材料的方法，通过该方法可以稳定地获得具有足够高的Ic的厚氧化物超导薄膜。解决方案：在氧化物超导布线材料的制造方法中，使用不含氟的有机金属化合物的液体溶液，根据MOD法在金属基板上形成氧化物超导薄膜，从而制造氧化物超导接线材料。该方法包括：涂膜制备步骤，其中通过用有机金属化合物液体溶液涂覆金属基底然后干燥制备涂膜; 预焙烘热处理步骤，其中通过加热涂膜来热分解有机金属化合物，从而除去有机组分，制备预烘烤的膜; 以及通过对预先烘烤的膜进行加热和结晶来制备氧化物超导薄膜的初级烘烤热处理步骤。在该方法中，向有机金属化合物液体溶液中添加相对于总金属离子质量为2ppm以上且小于2000ppm的氯。在制备厚度为0.5μm以上的预烘烤膜之后进行一次烘焙热处理。版权所有（C）2013，JPO＆INPIT

2. 发明专利

JP2013089354A Intermediate layer-formed base material for superconducting thin film wiring material, its manufacturing method and superconducting thin film wiring material 审中-公开
标题翻译：用于超薄薄膜接线材料的中间层形成材料，其制造方法和超导薄膜接线材料
公开(公告)号：JP2013089354A
公开(公告)日：2013-05-13
申请号：JP2011226836
申请日：2011-10-14
申请人： Sumitomo Electric Ind Ltd , 住友電気工業株式会社
发明人： OKI YASUTARO , NAGAISHI TATSUOKI
IPC分类号： H01B12/06 , H01B13/00 , H01F6/06
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To produce, on a metal substrate, an intermediate layer-formed base material which has an intermediate layer with a sufficiently small surface roughness and both crystal orientation and smoothness, and thereby to provide a superconducting thin film wiring material with an excellent superconducting property.SOLUTION: The intermediate layer-formed base material for superconducting thin film wiring material comprises: a metal substrate having metal crystal grains; and an intermediate layer formed on the metal substrate, which has crystal orientation. In the intermediate layer-formed base material for superconducting thin film wiring material, the intermediate layer has a surface roughness Rz of 50 nm or less. The method for manufacturing an intermediate layer-formed base material for superconducting thin film wiring material such that the intermediate layer having crystal orientation is formed on a metal substrate having metal crystal grains comprises: an Ar ion beam-irradiation step where the metal substrate is irradiated with an Ar ion beam; and an intermediate layer formation step where the intermediate layer is formed on the metal substrate irradiated with the Ar ion beam without being exposed to an ambient air.
摘要翻译：要解决的问题：为了在金属基板上制造具有足够小的表面粗糙度和晶体取向和平滑度的中间层的中间层形成的基材，从而提供超导薄膜布线材料具有优良的超导性能。解决方案：用于超导薄膜布线材料的中间层形成基材包括：具有金属晶粒的金属基板; 以及形成在具有晶体取向的金属基板上的中间层。在中间层形成的超导薄膜配线材料用基材中，中间层的表面粗糙度Rz为50nm以下。制造用于超导薄膜布线材料的中间层形成基材的方法使得具有晶体取向的中间层形成在具有金属晶粒的金属基板上的方法包括：Ar离子束照射步骤，其中金属基板被照射与Ar离子束; 以及中间层形成步骤，其中在不暴露于环境空气的情况下，在照射有Ar离子束的金属基板上形成中间层。版权所有（C）2013，JPO＆INPIT

3. 发明专利

JP2012174568A Oxide superconductive wire material and manufacturing method thereof 审中-公开
标题翻译：氧化物超导线材及其制造方法
公开(公告)号：JP2012174568A
公开(公告)日：2012-09-10
申请号：JP2011036565
申请日：2011-02-23
申请人： Sumitomo Electric Ind Ltd , National Institute Of Advanced Industrial & Technology , 住友電気工業株式会社 , 独立行政法人産業技術総合研究所
发明人： HANAFUSA KEI , HONDA GENKI , NAKANISHI TAKESHI , OKI YASUTARO , YAMAGUCHI TAKASHI , NAGAISHI TATSUOKI , MANABE TAKAAKI , YAMAGUCHI IWAO
IPC分类号： H01B13/00 , C01G1/00 , H01B12/06 , H01L39/24
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide an oxide superconductive wire material with sufficiently high Ic in which an oxide superconducting layer is formed so as to become thick on a substrate and be oriented to a c-axis as a whole, and provide a manufacturing method of the oxide superconductive wire material.SOLUTION: A manufacturing method for an oxide superconductive wire material in which organic metallic compound is used as raw material and an oxide superconducting layer is formed by a coating pyrolysis method on a substrate, includes stacking a plurality of temporary baked films having different optimum baking temperatures on the substrate in order of the baking temperature from lowest to highest so as to form a temporary baked film lamination, and then formally baking the temporary baked film lamination. The temporary baked films formed on the substrate are three or more layers. The thickness of the oxide superconducting layer formed from each of the temporary baked films is 0.05 to 1.0 μm.
摘要翻译：要解决的问题：为了提供具有足够高的Ic的氧化物超导线材，其中形成氧化物超导层以在基底上变厚并且整体上取向为c轴，并提供氧化物超导线材的制造方法。解决方案：在基板上通过涂层热解法形成其中使用有机金属化合物作为原料的氧化物超导线材料的制造方法和氧化物超导层，包括堆叠多个具有不同的临时焙烧膜烘烤温度从最低到最高的顺序在基板上的最佳烘烤温度，以便形成临时烘焙膜层压，然后正式烘烤临时烘焙膜层压。在基板上形成的临时烘烤膜为三层以上。由各临时烘焙膜形成的氧化物超导层的厚度为0.05〜1.0μm。版权所有（C）2012，JPO＆INPIT

4. 发明专利

JP2012174567A Oxide superconductive wire material and manufacturing method thereof 审中-公开
标题翻译：氧化物超导线材及其制造方法
公开(公告)号：JP2012174567A
公开(公告)日：2012-09-10
申请号：JP2011036560
申请日：2011-02-23
申请人： Sumitomo Electric Ind Ltd , National Institute Of Advanced Industrial & Technology , 住友電気工業株式会社 , 独立行政法人産業技術総合研究所
发明人： HONDA GENKI , NAGAISHI TATSUOKI , NAKANISHI TAKESHI , OKI YASUTARO , YAMAGUCHI TAKASHI , HANAFUSA KEI , YAMAGUCHI IWAO , MANABE TAKAAKI , KUMAGAI TOSHIYA , SHIMOYAMA JUNICHI
IPC分类号： H01B13/00 , C01G1/00 , H01B12/06 , H01F6/06 , H01L39/24
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide an oxide superconductive wire material in which, even though a lamination is thick, Jc is not reduced and an oxide superconducting layer having a sufficiently high Ic proportional to the thickness the lamination is formed on a substrate plate, and provide a manufacturing method of the oxide superconductive wire material.SOLUTION: A manufacturing method for an oxide superconductive wire material in which organic metallic compound is used as raw material and an oxide superconducting layer is formed by a coating pyrolysis method on an orientation metal substrate, includes a coating film forming process for forming a coating film of the organic metallic compound, a temporary baking treatment process for forming a temporary baked film by pyrolyzing and removing organic components contained in the coating film, and a formal baking treatment process for forming a formal baked film by crystallizing the temporary baked film. The coating film forming process, the temporary baking treatment process, and the formal baking treatment process are repeated so as to form and stack a plurality of formal baked films, so that the oxide superconducting layer in which a defective layer is formed between the stacked films is formed. An oxide superconductive wire material has a plurality of formal baked films which are stacked via a defective layer by the coating pyrolysis method.
摘要翻译：要解决的问题：提供一种氧化物超导线材料，其中即使层压较厚，Jc也不会被还原，并且具有足够高的Ic的氧化物超导层与叠片形成在衬底上的厚度成正比并提供氧化物超导线材的制造方法。解决方案：通过在取向金属基板上的涂层热解法形成其中使用有机金属化合物作为原料的氧化物超导线材料的制造方法和氧化物超导层，包括用于形成的涂膜形成工艺有机金属化合物的涂膜，通过热解除去包含在涂膜中的有机成分来形成临时烘烤膜的临时烘烤处理工艺和通过使临时烘烤膜结晶形成正式烘烤膜的正式烘烤处理过程。重复涂膜形成过程，临时烘烤处理过程和正式烘烤处理过程，以形成和堆叠多个正式烘烤膜，使得在层叠膜之间形成有缺陷层的氧化物超导层形成了。氧化物超导线材具有通过涂层热解法通过不良层堆叠的多个正式烘烤膜。版权所有（C）2012，JPO＆INPIT

5. 发明专利

JP2012113864A Superconducting rebco oxide thin film and method for manufacturing the same 有权
标题翻译：超导氧化物薄膜及其制造方法
公开(公告)号：JP2012113864A
公开(公告)日：2012-06-14
申请号：JP2010260114
申请日：2010-11-22
申请人： National Institute Of Advanced Industrial & Technology , Sumitomo Electric Ind Ltd , 住友電気工業株式会社 , 独立行政法人産業技術総合研究所
发明人： NAGAISHI TATSUOKI , OKI YASUTARO , YAMAGUCHI IWAO , SOMA MITSUGI , MANABE TAKAAKI , KUMAGAI TOSHIYA , SHIMOYAMA JUNICHI , MUKODA MASASHI
IPC分类号： H01B13/00 , C01G1/00 , C01G3/00 , C23C28/04 , H01B12/06
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a superconducting oxide thin film offering sufficiently high Ic with stability by thickening the film by a fluorine-free metal organic deposition (FF-MOD) method.SOLUTION: The method for manufacturing a superconducting REBCO oxide thin film comprises the steps of making a superconducting oxide layer by calcining a coating film of a fluorine-free metal organic compound solution and applying firing treatment to the calcined film by a MOD method; forming a non-superconducting material layer on the superconducting oxide layer; and making a dispersion layer by making a superconducting oxide layer on the non-superconducting material layer by the MOD method and dispersing the product of a chemical reaction between the non-superconducting material and the superconducting oxide layer caused by heat applied at the manufacture of the superconducting oxide layer to work as pins. The superconducting REBCO oxide thin film comprises the plurality of superconducting oxide layers made by the MOD method, and contains a dispersion layer made by dispersing the non-superconducting material to work as pins, between the superconducting oxide layers.
摘要翻译：要解决的问题：提供一种通过无氟金属有机沉积（FF-MOD）方法通过使膜增厚而使稳定性提供足够高的Ic的超导氧化物薄膜的制造方法。解决方案：制造超导REBCO氧化物薄膜的方法包括以下步骤：通过煅烧无氟金属有机化合物溶液的涂膜并通过MOD方法对煅烧膜进行焙烧处理来制造超导氧化物层 ; 在超导氧化物层上形成非超导材料层; 以及通过MOD法在非超导材料层上制造超导氧化物层并分散在超导材料与超导氧化物层之间产生的化学反应的产物，从而制造分散层，超导氧化物层作为引脚工作。超导REBCO氧化物薄膜包括通过MOD方法制成的多个超导氧化物层，并且包含通过将非超导材料分散成在超导氧化物层之间作为引脚而制成的分散层。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2012064394A Method for manufacturing oxide superconductive thin film 审中-公开
标题翻译：氧化物超导薄膜的制造方法
公开(公告)号：JP2012064394A
公开(公告)日：2012-03-29
申请号：JP2010206697
申请日：2010-09-15
申请人： National Institute Of Advanced Industrial & Technology , Sumitomo Electric Ind Ltd , 住友電気工業株式会社 , 独立行政法人産業技術総合研究所
发明人： HONDA GENKI , NAGAISHI TATSUOKI , YAMAGUCHI IWAO , MANABE TAKAAKI , SHIMOYAMA JUNICHI
IPC分类号： H01B13/00 , C01G1/00 , C01G3/00 , H01B12/06
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing an oxide superconductive thin film, capable of obtaining a thick-film type oxide superconductive thin film formed by sintering a plurality of preliminary sintered films laminated and having a sufficiently high critical current value Ic.SOLUTION: A method for manufacturing an RE123-based (where RE is a rare earth element) oxide superconductive thin film used for manufacturing a superconductive wire rod by an application thermal decomposition method comprises: a preliminary-sintered-film forming step of forming preliminary sintered films having a plurality of films laminated by repeating several times, applying a raw material solution onto a base material and preliminary sintering the applied film; and an oxide-superconductive-thin-film forming step of forming the oxide superconductive thin film by sintering the preliminary sintered films. In the method for manufacturing the oxide superconductive thin film, the raw material solution having a ratio of RE, Ba and Cu deviating from a stoichiometric ratio is used for forming a first layer of the applied film provided on a surface of the base material.
摘要翻译：要解决的问题：为了提供一种制造氧化物超导薄膜的方法，能够获得通过烧结多个预先烧结的薄膜而形成的厚膜型氧化物超导薄膜，并且具有足够高的临界电流值我知道了。解决方案：通过应用热分解方法制造用于制造超导线材的RE123基（其中RE是稀土元素）氧化物超导薄膜的方法包括：预烧结膜形成步骤形成通过重复多次层叠多个膜的初步烧结膜，将原料溶液施加到基材上并预涂烧所述膜; 以及通过烧结预烧结膜来形成氧化物超导薄膜的氧化物超导薄膜形成步骤。在制造氧化物超导薄膜的方法中，使用偏离化学计量比的具有RE，Ba和Cu的比率的原料溶液来形成设置在基材表面上的涂布膜的第一层。版权所有（C）2012，JPO＆INPIT

7. 发明专利

JP2012003975A Manufacturing method of oxide superconducting thin film 有权
标题翻译：氧化物超导薄膜的制造方法
公开(公告)号：JP2012003975A
公开(公告)日：2012-01-05
申请号：JP2010138317
申请日：2010-06-17
申请人： Sumitomo Electric Ind Ltd , 住友電気工業株式会社
发明人： NAKANISHI TAKESHI , NAGAISHI TATSUOKI , HONDA GENKI , HANAFUSA KEI
IPC分类号： H01B13/00 , C01G1/00 , C01G3/00 , H01B12/06
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of an oxide superconducting thin film with excellent superconducting characteristics having high Ic by sufficient growth of a c-axis oriented crystal using an FF-MOD method.SOLUTION: A manufacturing method of an oxide superconducting thin film used for manufacturing a superconducting wire rod by a coating thermal decomposition method with an atmosphere furnace using a fluorine-free metal organic compound as a raw material comprises: a coating film making step in which a coating film is made by coating on a substrate with a solution of the metal organic compound; a calcination heat treatment step in which a calcined film is made by thermal decomposition and removal of an organic constituent contained in the metal organic compound of the coating film; and a sintering heat treatment step in which the oxide superconducting thin film is made by crystallization of the calcined film. An intermediate heat treatment step in which carbonate contained in the calcined film is decomposed by heat conducted from the heated substrate is provided between the calcination heat treatment step and the sintering heat treatment step.
摘要翻译：解决的问题：通过使用FF-MOD方法通过使c轴取向晶体充分生长，提供具有优异的具有高Ic的超导特性的氧化物超导薄膜的制造方法。解决方案：使用无机金属有机化合物作为原料的气氛炉，通过涂布热分解法制造超导线材的氧化物超导薄膜的制造方法包括：涂膜制作步骤其中通过用金属有机化合物的溶液涂覆在基材上来制备涂膜; 煅烧热处理步骤，其中通过热分解和去除包含在涂膜的金属有机化合物中的有机成分来制备煅烧膜; 以及烧结热处理步骤，其中通过煅烧膜的结晶来制造氧化物超导薄膜。在煅烧热处理工序和烧结热处理工序之间，设置由煅烧后的膜中含有的碳酸盐从加热的基板导入的热分解的中间热处理工序。版权所有（C）2012，JPO＆INPIT

8. 发明专利

JP2014234544A 機能性薄膜の製造方法および製造装置审中-公开
标题翻译：功能薄膜的制造方法和装置
公开(公告)号：JP2014234544A
公开(公告)日：2014-12-15
申请号：JP2013118005
申请日：2013-06-04
申请人：住友電気工業株式会社 , Sumitomo Electric Ind Ltd
发明人： NAGAISHI TATSUOKI
IPC分类号： C23C14/24 , C01G1/00 , C01G3/00 , H01B13/00
摘要：【課題】膜厚が厚い場合でも、結晶性に優れ、機能性薄膜としての特性を充分に発揮させることができる機能性薄膜を得ることができる機能性薄膜の製造方法および製造装置を提供する。【解決手段】基材の成膜される表面とは反対側の裏面側に、基材を加熱するヒータを配置して、基材を裏面側から加熱すると共に、ヒータからの熱を蓄熱し放射する輻射板を、表面が前記基材の表面側と向かい合うように所定の傾斜角で配置することにより、輻射板からの熱の放射により前記基材を表面側から加熱して、気相薄膜合成法を用いて機能性薄膜の成膜を行う機能性薄膜の製造方法および前記機能性薄膜の製造方法に用いられる機能性薄膜の製造装置。【選択図】図1A
摘要翻译：要解决的问题：提供一种能够制造结晶度优异的功能性薄膜的制造方法和装置，并且即使当膜厚时也能充分显示作为功能薄膜的特性。解决方案：提供一种形成使用气相薄膜合成方法的功能性薄膜和制造方法中使用的功能性薄膜的制造装置。在制造方法中，将加热基板的加热器配置在与沉积有膜的正面相反的背面侧，并加热基板的背面。同时，将来自加热器的积聚和辐射热量的辐射板以预定的倾斜角度布置，使得其表面与基板的正面侧相反，因此基板的正面侧被加热来自辐射板的辐射热。

9. 发明专利

JP2014167941A Manufacturing method of oxide superconducting thin film 审中-公开
标题翻译：氧化物超导薄膜的制造方法
公开(公告)号：JP2014167941A
公开(公告)日：2014-09-11
申请号：JP2014115556
申请日：2014-06-04
申请人： Sumitomo Electric Ind Ltd , 住友電気工業株式会社
发明人： NAKANISHI TAKESHI , NAGAISHI TATSUOKI , HONDA GENKI , HANAFUSA KEI
IPC分类号： H01B13/00 , H01B12/08
CPC分类号： Y02E40/641
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of an oxide superconducting thin film with high Ic obtained by sufficient oriented growth of a crystal from a substrate to the surface of the film while sufficiently decomposing BaCOto curb a generation of a void caused by COgas.SOLUTION: A manufacturing method of an oxide superconducting thin film used for manufacturing a superconducting wire rod by a coating thermal decomposition method with an atmosphere furnace using a fluorine-free metal organic compound as a raw material comprises: a coating film making step in which a coating film is obtained by coating on a substrate with a solution of the metal organic compound; a calcination heat treatment step in which a calcined film is made by thermal decomposition and removal of an organic constituent contained in the metal organic compound of the coating film; and a sintering heat treatment step in which the calcined film is crystallized to be the oxide superconducting thin film. An intermediate heat treatment step is provided between the calcination heat treatment step and the sintering heat treatment step. In the intermediate heat treatment step, a carbonate contained in the calcined film is decomposed in an atmosphere of oxygen where a crystal phase of the oxide superconducting thin film is not formed.
摘要翻译：要解决的问题：提供一种具有高Ic的氧化物超导薄膜的制造方法，所述氧化物超导薄膜通过将晶体从衬底充分定向生长而获得，同时充分分解BaCO，以遏制由CO气体引起的空穴的产生。解决方案：使用无氟金属有机化合物作为原料的气氛炉，通过涂布热分解法制造超导线材的氧化物超导薄膜的制造方法包括：涂膜制作步骤，其中通过用金属有机化合物的溶液在基材上涂布来获得涂膜; 煅烧热处理步骤，其中通过热分解和去除包含在涂膜的金属有机化合物中的有机成分来制备煅烧膜; 以及烧结热处理步骤，其中煅烧膜被结晶为氧化物超导薄膜。在煅烧热处理工序和烧结热处理工序之间设置中间热处理工序。在中间热处理工序中，在氧化物超导薄膜的结晶相未形成的氧气氛中，煅烧膜中所含的碳酸盐分解。

10. 发明专利

JP2014077166A Substrate with intermediate layer for thin film superconducting wire and manufacturing method of the same, and thin film superconducting wire 审中-公开
标题翻译：具有中间层的薄膜，用于薄膜超导线及其制造方法及薄膜超导线
公开(公告)号：JP2014077166A
公开(公告)日：2014-05-01
申请号：JP2012225000
申请日：2012-10-10
申请人： Sumitomo Electric Ind Ltd , 住友電気工業株式会社
发明人： OKI KOTARO , NAGAISHI TATSUOKI
IPC分类号： C23C14/04 , H01B12/06 , H01B13/00
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide a technology which allows producing thin film superconducting wire having higher superconducting characteristics than conventional one.SOLUTION: In a manufacturing method of a substrate with an intermediate layer for thin film superconducting wire, which is used for producing thin film superconducting wires provided with oxide superconducting layers, the surface of a target which is arranged facing to a long oriented metallic substrate is sputtered to sputter sputtering particles. The sputtering particles are diffracted by colliding them with a collision/diffraction member which is parallelly arranged between the oriented metallic substrate and the target or atmosphere gas to reach the oriented metallic substrate, and an intermediate layer is deposited on the oriented metallic substrate.
摘要翻译：要解决的问题：提供一种允许制造具有比常规超导特性更高的超导特性的薄膜超导线的技术。解决方案：在用于制造薄膜的薄膜超导线用中间层的基板的制造方法中，设置有氧化物超导层的超导线，溅射面对长取向金属基板的靶的表面溅射溅射粒子。溅射颗粒通过与平行布置在定向金属基底和靶或气体气体之间的碰撞/衍射构件碰撞而到达定向金属基底，并且中间层沉积在取向金属基底上。

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