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1. 发明专利

JP2017082916A 流体制御弁审中-公开
公开(公告)号：JP2017082916A
公开(公告)日：2017-05-18
申请号：JP2015212084
申请日：2015-10-28
申请人： Smc株式会社 , Smc Corp , Smc株式会社
发明人： YAMADA HIROSUKE , SHISHIDO KENJI
IPC分类号： F16K11/10 , F16K15/18 , F16K31/122
CPC分类号： F15B11/00 , F15B11/024 , F15B21/14 , F16K31/122
摘要：【課題】流体圧アクチュエータの圧力室に接続することにより、該圧力室からの排気を取り出して再利用するのに適した構造を有する流体制御弁を提供する。【解決手段】第1ポート11と第2ポート12との間を連通させる給気流路14と、第2ポート12と第3ポート13との間を連通させる排気流路15と、給気流路15に設けられる第1チェック弁20と、排気流路15に設けられる第2チェック弁21と、第2ポート12から第3ポート13への連通を開閉する弁体30と、弁体30がその軸方向に摺動自在に挿入された弁孔22とを有し、排気流路15は、弁孔22と弁体30との間に形成された間隙15bによって形成され、弁体30には、第1ポート11の流体圧を弁体30の閉方向に作用させる第1受圧面と、第2ポート12の流体圧を弁体30の開方向に作用させる第2受圧面とが形成されている。【選択図】図1

2. 发明专利

JP2011149488A Flow control device 有权
标题翻译：流量控制装置
公开(公告)号：JP2011149488A
公开(公告)日：2011-08-04
申请号：JP2010011174
申请日：2010-01-21
申请人： Smc Corp , Smc株式会社
发明人： YAMADA HIROSUKE , NAKAMURA SANAE , KURIBAYASHI AKIRA
IPC分类号： F16K1/04 , F16K1/32 , F16K15/14 , F16K15/18 , F16K35/02
CPC分类号： F16K1/00 , F16K1/04 , F16K1/38 , F16K15/148 , F16K15/185 , F16K27/02 , F16K31/50 , F16K35/027 , Y10T137/87925 , Y10T137/88054
摘要： PROBLEM TO BE SOLVED: To reduce the size of a flow control device while improving the assembling property thereof. SOLUTION: The flow control device 10 includes a first body 14 having a first port 12 to which a pressure fluid is supplied; and a second body 18 incorporated to the first body 14. A valve mechanism 20 for controlling the flowing state of the pressure fluid flowing from the first port 12 to the second port 16 is provided inside the first body 14. A first connecting portion 30 of the first body 14 is inserted into and engaged with a second connecting portion 128 formed at an upper end portion of the second body 18, whereby the first body 14 is integrally connected to the second body 18. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了减小流量控制装置的尺寸，同时提高其组装性能。解决方案：流量控制装置10包括具有供应压力流体的第一端口12的第一主体14; 以及结合到第一主体14的第二主体18.用于控制从第一端口12流到第二端口16的压力流体的流动状态的阀机构20设置在第一主体14的内部。第一连接部30 第一主体14被插入并形成在第二主体18的上端部的第二连接部128，由此第一主体14与第二主体18一体连接。版权所有（C）2011 ，JPO＆INPIT

3. 发明专利

JPH10281318A SUCK BACK VALVE 失效
公开(公告)号：JPH10281318A
公开(公告)日：1998-10-23
申请号：JP9260397
申请日：1997-04-10
申请人： SMC CORP
发明人： TAMURA KAZUYA , YAMADA HIROSUKE , FUJIWARA NOBUHIRO
IPC分类号： F16K23/00
摘要： PROBLEM TO BE SOLVED: To accurately control a flow rate of a fluid which is sucked by a flexible member, by providing a suck back mechanism which sucks the fluid in a flow path under the negative pressure which is generated by displacement of the flexible member, and controlling an amount of displacement of the flexible member under driving operation of a motor-driven linear actuator. SOLUTION: When a signal is output to a flow controlling means 68, pressured fluid is fed to a cylinder room 48 of an on/off valve mechanism 26, and pilot pressure is controlled to a given value. The fluid shifts a piston 50 against a spring member 54, a diaphragm 56 separates from a seat part 59, and the valve mechanism 26 is turned on. Thus, coating liquid flows along a flow path 38 and drips onto a semiconductor wafer. By turning off the valve mechanism 26, driving a linear actuator 118 of a suck back mechanism 28, and returning the coating liquid to the suck back valve 20 side using negative pressure operation of a diaphragm 100 which is raised under operation of a spring member 98, liquid is prevented from dripping.

4. 发明专利

JPH10111721A PRESSURE REDUCING VALVE 失效
公开(公告)号：JPH10111721A
公开(公告)日：1998-04-28
申请号：JP26336996
申请日：1996-10-03
申请人： SMC CORP
发明人： YAMADA HIROSUKE , EBISAWA SATOSHI , KUDO TAKASHI
IPC分类号： G05D16/06
摘要： PROBLEM TO BE SOLVED: To eliminate the remaining pressure fluid in a diaphragm chamber and to secure the satisfactory flow rate characteristic at the secondary side by preparing a nozzle part to suck the pressure fluid contained in the diaphragm chamber toward a secondary port. SOLUTION: The pressure fluid supplied from a primary port 22 is partly led into a diaphragm chamber 64 from a 3rd chamber 58 via a 1st path 66 and then supplied to a nozzle hole 60 via a 2nd path 68 to generate the force to press up a 2nd diaphragm 62. Thus, the force that is generated by the pressure fluid supplied from the port 22 and presses up the diaphragm 62 counters the force of a pressure regulation spring 74. As a result, the secondary pressure applied to a fluid pressure equipment is regulated. Then the diaphragm 62 gradually moves up against the force of the spring 74, and a stem 38 and a valve body 44 move up in a single body with the diaphragm 62. Thus, the body 44 is set at its seating part 56 and the set pressure is secured.

5. 发明专利

JP2000161514A METHOD AND SYSTEM OF PREVENTING LIQUID FROM DRIPPING 失效
公开(公告)号：JP2000161514A
公开(公告)日：2000-06-16
申请号：JP24055799
申请日：1999-08-26
申请人： SMC CORP
发明人： YO KIYOMI , YAMADA HIROSUKE , TAMURA KAZUYA , FUJIWARA NOBUHIRO
IPC分类号： H01L21/027 , B05B1/30 , B05B12/00 , F04B49/00 , F16K23/00 , G03F7/16 , G06F9/00 , H01L21/18 , H01L21/30
摘要： PROBLEM TO BE SOLVED: To surely obstruct drip of liquid, facilitate regulation by even a nonexpert so as to reduce costs by controlling a circulation rate on the basis of a setting pattern so as to set a stream line in a contract condition under control action of a current-carrying quantity, and closing a fluid passage when the stream line becomes in the contract condition. SOLUTION: A motor-operated opening/closing valve 14 is composed of a valve element for controlling a coating liquid flow rate and an electrically driven actuator for controlling a displacement rate of the valve element. A control device 26 is composed of a ROM 34 in which a control program and a plurality of motion control patterns are housed, and a central processing unit 32 for transmitting a current value signal to a current amplifier 30 on the basis of a deviation by comparing a lift position of a valve element on the basis of an enumerated of a pulse counter 28 with a lift position on the basis of a motion control pattern. The valve element is controlled from a valve closing start time of the valve element until a contract condition with such speed that pressure pulsation is not generated. When the valve element achieves the contract condition, namely a valve rapidly closing motion position, the valve element is rapidly closed so as to surely and stably obstruct drip of liquid.

6. 发明专利

JPH10267146A SUCK-BACK VALVE 失效
公开(公告)号：JPH10267146A
公开(公告)日：1998-10-09
申请号：JP6875897
申请日：1997-03-21
申请人： SMC CORP
发明人： YAMADA HIROSUKE , YAMAMOTO HITOSHI , TAMURA KAZUYA
IPC分类号： F16K7/14 , F16K23/00
摘要： PROBLEM TO BE SOLVED: To provide suck back valve capable of preventing the quantity of fluid absorbed by the suck back valve from being changed to improve the responsiveness of a diaphragm, and accurately controlling the amount of displace ment, the speed of displacement of the diaphragm. SOLUTION: A diaphragm 72 provided so that it can be displaced toward the inside of a fluid passage 62, is made up of the first thin film body 74 and the second thin film body 80 lapped over the first thin film body 74, and the first thin film body 74 is absorbed on the second thin film body 80 under the energizing action of a negative pressure generating source 240 connected to a chamber 114 through a passage 116, through small holes 84 confined in the second thin film body 80. The shape of the first thin film body 74 is maintained by the second thin film body 80.

7. 发明专利

JPH10169802A DIAPHRAGM FOR CONTROLLING FLUID PRESSURE 失效
公开(公告)号：JPH10169802A
公开(公告)日：1998-06-26
申请号：JP33412196
申请日：1996-12-13
申请人： SMC CORP
发明人： YAMADA HIROSUKE , EBISAWA SATOSHI , KUDO TAKASHI
IPC分类号： F16K7/12 , G05D16/06
摘要： PROBLEM TO BE SOLVED: To prevent occurrence of the creep, and to obtain the excellent pressure tightness by providing a flexible diaphragm for controlling the hydraulic pressure under the pressure of the pressure fluid which comprises a first thin film and a second thin film to be stacked on the first thin film. SOLUTION: When the secondary pressure is lower than the primary pressure, and a diaphragm 48 for controlling the hydraulic pressure is pressed upward by the pressure fluid to be supplied from a primary port 12, the diaphragm 48 is gradually elevated against the elastic force of a pressure regulating spring 68, and a valve disk 32 is seated on a seat part 42, leading to the set pressure. In a pressure regulating valve 10, the diaphragm 48 for controlling the hydraulic pressure is formed by stacking thin film bodies 58, 60 comprising separate thin film diaphragms. The thin film body 58 comprises, for example, a rubber diaphragm having a base cloth, the thin film body 60 comprises a resin diaphragm made of fluorocarbon resin, and excellent pressure tightness can be obtained thereby without degrading the responsiveness.

8. 发明专利

JPH08110818A FLOW PROPORTIONAL CONTROL VALVE 失效
公开(公告)号：JPH08110818A
公开(公告)日：1996-04-30
申请号：JP27032294
申请日：1994-10-07
申请人： SMC CORP
发明人： YAMADA HIROSUKE , EBISAWA SATOSHI
IPC分类号： F17C6/00 , B67D99/00 , G05D7/01 , G05D16/18 , B67D5/00
摘要： PURPOSE: To provide a flow control valve which can suck vaporized steam from a storage tank nearly by as much as a volatile liquid supplied to the storage tank. CONSTITUTION: A 1st orifice 14 and a 1st pressure chamber 15 on the upstream side which is partitioned by a 1st diaphragum 7, are provided between an intake 10 for a volatile liquid and an outlet 11, and a 2nd orifice 23 and a 2nd pressure chamber 28 on the downstream side which is partitioned by a 2nd diaphragm 8, and a valve seat 26 are provided between an entrance 20 for vaporized steam and an exit 21, and, a stem 34 which couples those diaphragm 7 and 8 is provided with a valve body 35 which opens and closes the valve seat 26. The pressure of liquid determing the flow of the vaporized liquid is used as pilot pressure to control the pressure of steam determining the flow of the vaporized steam, and then the flow of the vaporized steam is controlled, so the supply amount of the volatile liquid can be made nearly equal to the suction amount of the vaporized steam by nearly equalizing the action forces by those pressures.

9. 发明专利

JPH0828510A LOCK MECHANISM 失效
公开(公告)号：JPH0828510A
公开(公告)日：1996-02-02
申请号：JP17100894
申请日：1994-07-22
申请人： SMC CORP
发明人： MIYAJI HIROSHI , KANDA KOICHIRO , YAMADA HIROSUKE
IPC分类号： F15B15/14 , F15B15/26
摘要： PURPOSE:To enable a movable part of an actuator to be reliably locked on the moving terminal without wearing the locking part, and also to enable setting and releasing of the locking state to be controlled. CONSTITUTION:A lock mechanism 18 is provided with a block body 26, a locking piston 46 provided in a chamber 30 of the block body 26 so as to be freely displaced, and a locking part 48 for locking a slide table 16 after being inserted into a locking hole part 50 formed on the slide table 16, and to be drawn out from the locking hole part 50. Moreover, it is provided with small diameter hole parts 68, 32 for guiding pressure fluid supplied to the chamber 30 into a cylinder chamber 20a when the locking state is released, and a small diameter hole part 72 for delaying the locking action of the locking part 48 when the slide table 16 is locked.

10. 发明专利

JP2020090964A 流量コントローラ及びそれを備えた駆動装置审中-公开
公开(公告)号：JP2020090964A
公开(公告)日：2020-06-11
申请号：JP2018226662
申请日：2018-12-03
申请人： SMC CORP
发明人： NISHIMURA AKIHO , YAMADA HIROSUKE , FUKUSHIMA KENJI
IPC分类号： F15B11/06
摘要：【課題】より容易に調整を行うことができる流量コントローラ及びそれを備えた駆動装置を提供する。【解決手段】エアシリンダ100から排気されるエアの流量をストローク動作の途中で変化させる流量コントローラ12において、パイロットエアの作用下に第1位置から第2位置に変位し、第1位置においてエアシリンダ100の一方のポート104を第1流路14に連通させ、第2位置においてエアシリンダの一方のポート104から排出されるエアを第1調整弁28で絞りつつ排気する第1切換弁20を備え、第1切換弁20のパイロットエアを第1流路14とは異なる系統の第2流路16から取り込むことで、第2調整弁26の調整作業にあたって、第1調整弁28の開度の影響を受けないようにした。【選択図】図1

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