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    • 5. 发明专利
    • Multilayer wiring board and manufacturing method thereof
    • 多层接线板及其制造方法
    • JP2008270531A
    • 2008-11-06
    • JP2007111642
    • 2007-04-20
    • Shinko Electric Ind Co Ltd新光電気工業株式会社
    • KITAJIMA MASAKUNIUEDA KEISUKEMATSUKI RYUICHI
    • H05K3/46
    • PROBLEM TO BE SOLVED: To provide a multilayer wiring board having a stack via structure providing interlayer connection of high reliability.
      SOLUTION: An interlayer connection structure consists of a substrate 10 equipped with: a wiring layer 20; an interlayer insulation layer 30 which is formed on the wiring layer 20 and is provided with a via hole VH1 reaching the wiring layer 20; and a via pad 40 formed, from within the via hole VH1, on the interlayer insulation layer 30 near the hole. A stack via structure 5 is formed by stacking a plurality of interlayer connection structures, with a plurality of via pads 40, 42, and 44 stacked vertically to be connected to each other. A recess C which is recessed from a peripheral part is provided at the central part of the upper surface of each of via pads 40, 42, and 44. On the bottom surface of the recess C of a lower side via pad, the bottom part of the via pad of upper side is arranged.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种具有提供高可靠性的层间连接的堆叠通孔结构的多层布线板。 解决方案:层间连接结构由配备有布线层20的基板10组成; 层间绝缘层30,其形成在布线层20上,并且设置有到达布线层20的通孔VH1; 以及从通孔VH1内形成在孔附近的层间绝缘层30上的通孔焊盘40。 堆叠通孔结构5通过堆叠多个层间连接结构而形成,多个通孔焊盘40,42和44垂直堆叠以彼此连接。 在每个通孔垫40,42和44的上表面的中央部设置有从周边部凹入的凹部C.在下侧通孔垫的凹部C的底面上,底部 的上侧通孔垫。 版权所有(C)2009,JPO&INPIT