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1. 发明专利

JP2005297374A Piezoelectric element actuator and method of manufacturing the same 审中-公开
标题翻译：压电元件致动器及其制造方法
公开(公告)号：JP2005297374A
公开(公告)日：2005-10-27
申请号：JP2004117467
申请日：2004-04-13
申请人： Shikino Mekki Kk , Tateyama Kagaku Kogyo Kk , Toyama Prefecture , 富山県 , 志貴野メッキ株式会社 , 立山科学工業株式会社
发明人： FUTAKUCHI TOMOAKI , SAKAI YUICHI , YAMANO HIROSHI , YANAGAWA ARATA , NAKAMURA TOSHIFUMI , EMORI YOSHIO , WATANABE MITSUO , OKUNO HIROYUKI
IPC分类号： B41J2/045 , B41J2/055 , B41J2/16
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric element actuator capable of generating a large amount of displacement by a piezoelectric material thick film having a predetermined performance in a predetermined drive voltage.
SOLUTION: A silicon oxide film layer 2, a Pt lower electrode 3, a piezoelectric material thick film 4 and an upper Au electrode 5 are sequentially laminated on a monocrystalline silicon substrate 1. A part of the silicon substrate 1 at a portion corresponding to the piezoelectric material thick film 4 provided to the rear face side of the silicon substrate 1 is completely removed by dry etching, and then the silicon oxide film layer 2 is exposed to form a pressure chamber 7. The silicon oxide film layer 2 and the Pt lower electrode 3 serve as a diaphragm 6. The Pt lower electrode 3 is constituted of a laminated structure having a thick film electrode 3a including a glass, a thick film electrode 3b not including a glass and a thin film electrode. It is possible to carry out the etching of the silicon substrate 1 by wet etching using alkaline.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够通过在预定驱动电压中具有预定性能的压电材料厚膜产生大量位移的压电元件致动器。解决方案：氧化硅膜层2，Pt下电极3，压电材料厚膜4和上Au电极5依次层压在单晶硅衬底1上。一部分硅衬底1的一部分对应于设置在硅衬底1的背面侧的压电材料厚膜4，通过干蚀刻完全除去，然后暴露氧化硅膜层2，形成压力室7.氧化硅膜层2和 Pt下电极3用作隔膜6.Pt下电极3由具有包括玻璃的厚膜电极3a，不包括玻璃的厚膜电极3b和薄膜电极的层压结构构成。可以通过使用碱性的湿蚀刻来进行硅衬底1的蚀刻。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JPH0834521A STACKING DEVICE FOR THIN PLATE 失效
公开(公告)号：JPH0834521A
公开(公告)日：1996-02-06
申请号：JP19482994
申请日：1994-07-26
申请人： SHIKINO MEKKI KK
发明人： MIYAMOTO YUKIO , OKUNO HIROYUKI , YOKAWA JIRO , TAJIMA SATORU
IPC分类号： B65G57/30
摘要： PURPOSE:To provide a stacking device for thin plates capable of surely and regularly stacking the articles discharged from part of a line and excellent in flexibility on productivity and production control at a low cost. CONSTITUTION:At least a pair of lifting shafts 1 are rotatably erected at the front and rear across a lift path 3 where thin plates are lifted, an advance limiting guide 4 to be kept in contact with tips of the thin plates is erected in front of the lift path 3, and a torsional ridge-like spiral hook section 5 holding and lifting the side edge section of each thin plate by the rotation of each lift shaft 1 is protruded on the lower outer periphery of the lift shaft 1. A cylindrical slip section 6 having nearly the same diameter as that of the valley section 5a of the spiral hook section 5 is provided at the upper section of each lift shaft 1 continued to the spiral hook section 5, boundaries between the spiral hook sections 5 of the lift shafts 1 and the slip sections 6 are set to the same height, and a shaft driving means 8 rotating the lift shafts 1 is provided.

3. 发明专利

JPH06220694A DEVICE FOR DISMOUNTING MATERIAL TO BE WORKED 失效
公开(公告)号：JPH06220694A
公开(公告)日：1994-08-09
申请号：JP3144193
申请日：1993-01-26
申请人： SHIKINO MEKKI KK
发明人： MIYAMOTO YUKIO , OKUNO HIROYUKI , YOKAWA JIRO , TAJIMA SATORU
IPC分类号： B05B13/02 , B65G17/20 , B65G47/36 , B65G47/61 , C23C2/34 , C25D17/00 , C25D17/06 , H01L23/50
摘要： PURPOSE:To surely and automatically dismount a material to be treated from a working line by plating the strip-shaped material in the working line and then passing the material through a dismounting device consisting of the vertical and horizontal rollers at the terminal end of the line. CONSTITUTION:A strip-shaped material 3 to be worked is hung from a hook 4 fixed to an endless chain 2 and passed through a working line consisting of a plating tank, washing tank, etc., to electroplate the material. The plated material 3 is moved at the terminal end of the line by many rubber belts 30 laid between a vertical roller 28 provided with plural annular grooves 27 and a a horizontal roller 30 set on the downstream side and furnished with plural annular grooves 29. As the material 3 is moved from the vertical roller 28 to the horizontal roller 30 by the rubber belt 31, the material is horizontally erected, automatically unhooked from the hook 4 at the place of the horizontal roller 30 higher than the hook 4 and automatically dismounted from the working line.

4. 发明专利

JPH06220695A PLATING METHOD AND DEVICE THEREFOR 失效
公开(公告)号：JPH06220695A
公开(公告)日：1994-08-09
申请号：JP3144093
申请日：1993-01-26
申请人： SHIKINO MEKKI KK
发明人： MIYAMOTO YUKIO , OKUNO HIROYUKI , YOKAWA JIRO , TAJIMA SATORU
IPC分类号： B65G49/02 , C25D17/00 , C25D17/06 , C25D17/08 , C25D21/00 , H01L23/48
摘要： PURPOSE:To improve plating efficiency by hooking a strip-shaped material to be plated on a hook provided in an endless chain, conveying the material through a treating tank provided with an overflow on both sides utilizing a slit and plating the material. CONSTITUTION:A strip-shaped sheet 3 to be plated is hooked on the many hooks 4 fixed to a circulating endless chain 2, connected to the negative electrode of power source through the chain 2 passed through a section 12 filled with a plating soln. and plated with the sheet 3 as a cathode. An overflow 11 is provided on both sides of the section 12, a slit 13 having a guide 14 is furnished in the partition wall 10 of the section 12, and the sheet 3 is passed through the section 12 via the slit 13. The soln. leaked from the slit 13 is introduced into the overflow 11 and returned to the section 12 by a pump 17 from a bottom outlet 15 through a storage tank 16. Consequently, the sheet 3 is not vertically moved in the washing, plating, and washing stages, and the sheet 3 is rapidly and manpower-savingly moved and efficiently plated.

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