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    • 4. 发明专利
    • Plasma processing unit
    • 等离子体加工单元
    • JP2003073834A
    • 2003-03-12
    • JP2001259977
    • 2001-08-29
    • Sharp Corpシャープ株式会社
    • SAKAI OSAMU
    • H05H1/46C23C16/455C23C16/509H01L21/205
    • PROBLEM TO BE SOLVED: To provide a plasma processing unit which can form and process a film of high quality in a stable condition.
      SOLUTION: High-frequency voltage is applied to an aluminum plate part of an electrode substrate. Aluminum rods of 5 mm×10 mm×1,000 mm work as cathode electrodes 2a. Aluminum rods of 5 mm×5 mm×1,000 mm insulated to the cathode electrode 2a by an interelectrode insulating layer 3 work as anode electrodes 2b having a ground potential. A gas retention part 7 has a structure surrounded by the aluminum plate part of the electrode substrate and the other inner walls, are all composed of metals, and hence have the same electric potential to constitute the plasma processing unit.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:提供一种能够在稳定状态下形成和处理高质量的膜的等离子体处理单元。 解决方案:将高频电压施加到电极基板的铝板部分。 5mm×10mm×1000mm的铝棒作为阴极2a工作。 通过电极间绝缘层3与阴极电极2a绝缘的5mm×5mm×1,000mm的铝棒作为具有接地电位的阳极电极2b。 气体保持部7具有由电极基板的铝板部和其他内壁包围的结构,全部由金属构成,因此具有构成等离子体处理单元的相同的电位。
    • 5. 发明专利
    • Display device, active element array substrate, and amplifying element
    • 显示设备,主动元件阵列基板和放大元件
    • JP2005134476A
    • 2005-05-26
    • JP2003367724
    • 2003-10-28
    • Sharp Corpシャープ株式会社
    • HASHIMOTO TOMOSHISAKAI OSAMU
    • H01L51/50G09G3/20G09G3/282G09G3/296G09G3/30G09G3/36H05B33/14G09G3/28
    • PROBLEM TO BE SOLVED: To provide a display device that can be manufactured at low cost and increase in size is easy, and to provide an active element array substrate, used suitably for the display device, and to provide an amplifying element. SOLUTION: The display device comprises a substrate 30 having a plurality of pixels P arranged in to a matrix form, a drive circuit 50 for outputting a signal for driving the plurality of the pixels P, and a plurality of amplifying elements 10, provided on the substrate 30 and supplied to the plurality of the pixels P by amplifying the signal output from the drive circuit 50. Each of the plurality of the amplifying elements 10 includes a first electrode 1 and a second electrode 2, generating discharges mutually between them, and a third electrode 3 for controlling the magnitude of discharge current flowing between the first electrode 1 and the second electrode 2. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供可以以低成本制造并且尺寸增加的显示装置容易,并且提供适用于显示装置的有源元件阵列基板,并提供放大元件。 解决方案:显示装置包括具有以矩阵形式布置的多个像素P的基板30,用于输出用于驱动多个像素P的信号的驱动电路50和多个放大元件10, 设置在基板30上并通过放大从驱动电路50输出的信号而提供给多个像素P.多个放大元件10中的每一个包括第一电极1和第二电极2,在它们之间相互产生放电 ,以及用于控制在第一电极1和第二电极2之间流动的放电电流的大小的第三电极3。版权所有(C)2005,JPO&NCIPI
    • 6. 发明专利
    • Plasma treatment apparatus and method of manufacturing substrate formed with thin film
    • 等离子体处理装置和制造薄膜形成薄膜的方法
    • JP2003282459A
    • 2003-10-03
    • JP2002086148
    • 2002-03-26
    • Sharp Corpシャープ株式会社
    • SAKAI OSAMU
    • H05H1/46C23C16/509H01J37/32H01L21/205H01L21/3065
    • H01J37/32009
    • PROBLEM TO BE SOLVED: To provide a plasma treatment apparatus which can conduct plasma treatment satisfactorily only on a part of a substrate to be treated, and also provide a method of manufacturing a substrate formed with a thin film. SOLUTION: The plasma treatment apparatus comprises treatment chamber 10 to place the substrate 50 to be treated inside thereof, a gas inlet port for introducing gas into the treatment chamber 10, and a plurality of plasma discharge generating sections 30, each having an anode 30a and a cathode 30b. The plasma treatment apparatus is used for conducting plasma treatment on the substrate 50 to be treated. The plurality of plasma discharge generating sections 30 selectively generates plasma discharge in only each corresponding part of a face to be treated of the substrate 50 to be treated. COPYRIGHT: (C)2004,JPO
    • 解决的问题:提供一种等离子体处理装置,其能够仅在待处理的基板的一部分上令人满意地进行等离子体处理,并且还提供了制造形成有薄膜的基板的方法。 解决方案:等离子体处理装置包括处理室10以将待处理的基板50放置在其中,用于将气体引入处理室10的气体入口端口和多个等离子体放电产生部分30,每个等离子体放电产生部分具有 阳极30a和阴极30b。 等离子体处理装置用于对待处理的基板50进行等离子体处理。 多个等离子体放电产生部分30仅选择性地在要处理的基板50的待处理面的相应部分中产生等离子体放电。 版权所有(C)2004,JPO
    • 7. 发明专利
    • Display device
    • 显示设备
    • JP2007241313A
    • 2007-09-20
    • JP2007147351
    • 2007-06-01
    • Sharp Corpシャープ株式会社
    • SAKAI OSAMUOKAMOTO MASAYA
    • G09F9/30G02F1/1333G02F1/1368
    • PROBLEM TO BE SOLVED: To provide a switching element easy to manufacture and a display device comprising the same. SOLUTION: This display device is constituted of a plurality of pixels arranged in a matrix form and the switching element 100 prepared for the plurality of pixels each and comprises: a first electrode 1 and a second electrode 2 provided apart from each other so as to run a discharge current between them; a switching element having a third electrode 3 configured to be capable of changing the difference in potential from at least one of the first and second electrodes 1, 2, and capable of controlling the magnitude of the discharge current running between the first and second electrodes 1, 2 by changing the potential difference; scanning wiring electrically connected to either the first electrode of switching element, or the second electrode; a signal wiring electrically connected to the third electrode of the switching element; a pixel electrode electrically connected to the other of the first and second electrodes of the switching element; a counter electrode 6 opposing the pixel electrode; and a display medium layer arranged between the pixel electrode and the counter electrode. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供易于制造的开关元件和包括该开关元件的显示装置。 解决方案:该显示装置由以矩阵形式布置的多个像素构成,并且为多个像素制备的开关元件100各自包括:彼此分开设置的第一电极1和第二电极2 以便在它们之间运行放电电流; 具有第三电极3的开关元件,其被配置为能够改变与第一和第二电极1,2中的至少一个电极的电位差,并且能够控制在第一和第二电极1之间的放电电流的大小 ,2通过改变电位差; 电连接到开关元件的第一电极或第二电极的扫描布线; 电连接到所述开关元件的第三电极的信号布线; 电连接到开关元件的第一和第二电极中的另一个的像素电极; 与像素电极相对的对置电极6; 以及布置在像素电极和对电极之间的显示介质层。 版权所有(C)2007,JPO&INPIT
    • 10. 发明专利
    • Electrode substrate, plasma treatment apparatus using same, and plasma treatment method
    • 电极基板,等离子体处理装置及其等离子体处理方法
    • JP2003332247A
    • 2003-11-21
    • JP2002139311
    • 2002-05-14
    • Sharp Corpシャープ株式会社
    • NAKAMURA KENJISAKAI OSAMU
    • H05H1/46B01J19/08C23C16/505H01L21/205H01L21/3065
    • PROBLEM TO BE SOLVED: To provide an electrode substrate, by which only a necessary part can be treated on a surface of the substrate and a treated part can be readily changed, a plasma treatment apparatus, and a plasma treatment method. SOLUTION: A plasma CVD device generates plasma 8 with the supply of electrical energy applied by a power supply 6, places material gas into a plasma state, and treats the surface of a substrate 1 by decomposing the material gas into active species. A pair of electrode wires 2a and 2b is formed on the substrate 1. A distance between the electrode wires 2a and 2b is varied depending upon the point on the substrate 1. Electrical energy is applied to the electrode wires 2a and 2b, so that the surface of the substrate 1 is treated according to a distance between the electrode wires 2a and 2b while a part of the electrode wires 2a and 2b serves as a discharge electrode. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:提供一种电极基板,通过该电极基板,可以在基板的表面上仅处理必要部分,并且处理部分可以容易地改变,等离子体处理装置和等离子体处理方法。 解决方案:等离子体CVD装置通过由电源6施加的电能的供给产生等离子体8,将原料气体置于等离子体状态,并通过将原料气体分解为活性物质来处理基板1的表面。 一对电极线2a和2b形成在基板1上。电极线2a和2b之间的距离根据基板1上的点而变化。电能施加到电极线2a和2b, 基板1的表面根据电极线2a和2b之间的距离进行处理,而一部分电极线2a和2b用作放电电极。 版权所有(C)2004,JPO