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1. 发明专利

JP2013230018A Actuator, robot hand, robot, transportation device, electronic component transportation device and electronic component inspection device 有权
标题翻译：执行机构，机器手，机器人，运输装置，电子部件运输装置和电子部件检查装置
公开(公告)号：JP2013230018A
公开(公告)日：2013-11-07
申请号：JP2012100771
申请日：2012-04-26
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： MATSUZAWA AKIRA , MIYAZAWA OSAMU
IPC分类号： H02N2/00 , B25J15/08 , B65G47/90
摘要： PROBLEM TO BE SOLVED: To provide an actuator capable of reliably performing braking without additionally providing a brake device serving as braking means, and further to provide a robot hand that uses the actuator and enables accurate positioning control, a robot, a transportation device, an electronic component transportation device and an electronic component inspection device.SOLUTION: An actuator comprises: a piezoelectric element that vibrates by a bending vibration mode being excited or vibrates by the bending vibration mode and a longitudinal vibration mode being simultaneously excited; a driven body with which a contact part provided to the piezoelectric element is brought into contact, the driven body driven by vibration of the contact part; a holding part provided with holding means for holding the piezoelectric element; and a base provided with first biasing means for biasing the contact part of the piezoelectric element toward the driven body through the holding part. The holding part comprises a protruding part brought into contact with the driven body and second biasing means for biasing the protruding part toward the driven body.
摘要翻译：要解决的问题：提供一种能够可靠地进行制动的致动器，而不需要另外设置用作制动装置的制动装置，并且还提供使用致动器并且能够进行精确定位控制的机器人手，机器人，运输装置，电子部件运送装置和电子部件检查装置。驱动器包括：通过弯曲振动模式振动的压电元件，其被弯曲振动模式激励或振动，同时激励纵向振动模式; 被驱动体与所述压电元件设置的接触部分接触，所述驱动体由所述接触部分的振动驱动; 保持部，设置有用于保持压电元件的保持装置; 以及设置有第一偏置装置的基座，用于通过保持部件将压电元件的接触部分朝向被驱动体偏置。保持部包括与被驱动体接触的突出部和用于将突出部朝向被驱动体偏压的第二偏置装置。

2. 发明专利

JP2010233338A Piezoelectric motor, liquid ejecting apparatus and clock 有权
标题翻译：压电电机，液体喷射装置和时钟
公开(公告)号：JP2010233338A
公开(公告)日：2010-10-14
申请号：JP2009077873
申请日：2009-03-26
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： MIYAZAWA OSAMU , HASHIMOTO TAIJI , MATSUMOTO AKITO , MATSUZAWA AKIRA
IPC分类号： H02N2/00 , G04C3/12
CPC分类号： B41J13/03 , B41J2/14201 , B41J11/42 , B41J23/00 , G04C3/00 , G04C3/12 , H01L41/08 , H01L41/0913 , H02N2/004 , H02N2/0055 , H02N2/021 , H02N2/026 , H02N2/103 , H02N2/123
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric motor that improves the vibration characteristics of a piezoelectric element, and to provide a liquid ejecting apparatus and a clock.
SOLUTION: The piezoelectric motor includes a piezoelectric actuator having a piezoelectric layer 40 and a piezoelectric element 30 having a first electrode 50 and a second electrode 60 arranged on both sides sandwiching the piezoelectric layer 40, and a vibration member fixed to the side of the first electrode 50 of the piezoelectric element 30; and a rotating shaft which rotates by being abutted to the vibration member. The piezoelectric layer 40 has a vertical vibration excitation region 41 which is arranged at the center side in a short-length direction, and excites vertical vibration, and two sets of bending vibration excitation regions 42, 43 which excite bending vibrations while regions opposing each other to form an angle with the vertical vibration excitation region 41 therebetween are paired. Polarization directions of the vertical vibration excitation region 41 of the piezoelectric layer 40, one set 42 of the bending vibration excitation regions 42, 43, and the other set 43 of the bending vibration excitation regions 42, 43 are inverted.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种提高压电元件的振动特性并提供液体喷射装置和时钟的压电马达。解决方案：压电电动机包括具有压电层40和压电元件30的压电致动器，压电元件30具有布置在夹着压电层40的两侧的第一电极50和第二电极60，以及固定到侧面的振动元件的压电元件30的第一电极50; 以及通过抵靠振动部件而旋转的旋转轴。压电体层40具有沿长度方向配置在中心侧的垂直振动激励区域41，激励垂直振动，以及两组激励弯曲振动的弯曲振动激励区域42,43，同时彼此相对的区域与它们之间的垂直振动激发区域41成一角度。压电层40的垂直振动激励区域41的偏振方向，弯曲振动激励区域42,43的一组42以及弯曲振动激励区域42,43的另一组件43反转。版权所有（C）2011，JPO＆INPIT

3. 发明专利

JP2009051104A Liquid jetting head and liquid jetting device 审中-公开
标题翻译：液体喷射头和液体喷射装置
公开(公告)号：JP2009051104A
公开(公告)日：2009-03-12
申请号：JP2007220320
申请日：2007-08-27
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： MATSUZAWA AKIRA
IPC分类号： B41J2/16 , B41J2/045 , B41J2/055
摘要： PROBLEM TO BE SOLVED: To provide a liquid jetting head which has a compliance part capable of easily adjusting flexibility with a small number of parts, and a liquid jetting device.
SOLUTION: This liquid jetting head includes: a flow passage formed board 10 having a plurality of pressure generating chambers 12 communicating with nozzle openings 21 and a reservoir 13 as a common liquid chamber; piezoelectric elements 300 provided in regions opposite to the pressure generating chambers 12 on a diaphragm provided on one side of the flow passage formed board 10; and lead electrodes 90 drawn out of the piezoelectric elements 300 onto the diaphragm, wherein the side, on which the piezoelectric elements 300 of the flow passage formed board 10 are provided, of the reservoir 13 is sealed by the diaphragm and, at the same time, the compliance part 40 as a flexible part deformable through the change of the pressure in the reservoir 13 is formed by the lead electrodes 90 and the diaphragm sealing the reservoir 13 by extending the lead electrodes 90 to the regions opposite to the reservoir 13.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种液体喷射头，其具有能够容易地以少量部件调节柔性的柔顺部件和液体喷射装置。该液体喷射头包括：流路形成板10，其具有与喷嘴开口21连通的多个压力产生室12和作为公共液体室的储存器13; 压电元件300设置在设置在流路形成基板10的一侧的隔膜上的与压力发生室12相反的区域中; 以及从压电元件300拉出到隔膜上的引线电极90，其中设置有流路形成板10的压电元件300的一侧由隔膜密封，并且同时通过引导电极90和隔膜通过将引线电极90延伸到与储存器13相对的区域来密封储存器13来形成作为通过储存器13中的压力变化而变形的柔性部分的柔性部分40。 P>版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2008114371A Method for manufacturing liquid jetting head 有权
标题翻译：制造液体喷头的方法
公开(公告)号：JP2008114371A
公开(公告)日：2008-05-22
申请号：JP2006296677
申请日：2006-10-31
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： MATSUZAWA AKIRA
IPC分类号： B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/16
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1635 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , H01L41/314 , Y10T29/42 , Y10T29/49401
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid jetting head in which an adhesion layer constituting a discontinuous metal layer that seals each penetration part can be surely removed by wet etching. SOLUTION: The manufacturing method has a process for forming a piezoelectric element on a channel-forming substrate wafer and forming openings in a region which becomes each penetration part, a process for forming a lead electrode comprising both the adhesion layer made from NiCr and a metal layer and also forming the discontinuous metal layer discontinuous to the lead electrode in a region corresponding to each opening, a process for joining a joining substrate wafer with a first through-hole formed therein to the channel-forming substrate wafer, a process for forming a second through-hole by wet etching the channel-forming substrate wafer, a process for forming the penetration parts by wet etching the discontinuous metal layer, and a process for dividing the channel-forming substrate wafer and the like. At the time of forming the second through-hole by wet etching, the discontinuous metal layer formed at each opening is made to be electrically connected. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：解决的问题：提供一种制造液体喷射头的方法，其中可以通过湿法蚀刻可靠地去除构成密封每个穿透部分的不连续金属层的粘附层。解决方案：制造方法具有在通道形成用基板晶片上形成压电元件的工序，在成为各贯通部的区域形成开口的工序，形成引线电极的工序，包括由NiCr构成的粘合层金属层，并且在对应于每个开口的区域中形成与引线电极不连续的不连续金属层，将接合基片与其中形成的第一通孔接合到沟道形成用基板晶片的工序，用于通过湿式蚀刻沟道形成用基板晶片来形成第二贯通孔，通过湿蚀刻不连续金属层形成贯通部的工序，以及分割通道形成用基板晶片等的工序。在通过湿蚀刻形成第二通孔时，形成在每个开口处的不连续金属层被电连接。版权所有（C）2008，JPO＆INPIT

5. 发明专利

JP2007261215A Manufacturing method for liquid jet head, and liquid jet head 有权
标题翻译：液体喷射头和液体喷嘴的制造方法
公开(公告)号：JP2007261215A
公开(公告)日：2007-10-11
申请号：JP2006092550
申请日：2006-03-29
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： HIRANO AKIYOSHI , MATSUZAWA AKIRA
IPC分类号： B41J2/16 , B41J2/045 , B41J2/055
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method for a liquid jet head preventing nozzle clogging or the like caused by foreign matters, and also to provide the liquid jet head.
SOLUTION: A piezoelectric element 300 is formed via a diaphragm on one surface side of a path forming substrate 10 wherein a liquid flow path having a pressure generating chamber 12 and a communication part 31 are formed, and a penetration part 52 is formed in the diaphragm of the area being the communication part 13. The penetration part 52 is sealed with a wiring layer 190, and a reservoir forming substrate 30 is connected to the path forming substrate 10. The liquid flow path and the communication part 13 obtained by partitioning the path forming substrate 10 with a plurality of partition walls 11 are formed so that the distance between the end part which is on the reserver part 31 side of the partition wall 11 and on the surface of which the partition wall contacts the diaphragm 50 is 5 to 200 μm. A protective film 16 is formed on the inner surface of the liquid flow path and the communication part 13, and a separation layer is formed on the protective film. The separation layer is removed and, at the same time, the protective film on the wiring layer 190 is selectively removed, and the wiring layer is also removed to allow the reservoir part 31 to communicate with the communication part 13.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种防止由异物引起的喷嘴堵塞等的液体喷射头的制造方法，并且还提供液体喷射头。解决方案：压电元件300通过膜片形成在路径形成基板10的一个表面侧上，其中形成有具有压力产生室12和连通部分31的液体流动路径，并且形成了穿透部分52 在作为连通部13的区域的隔膜中。穿透部52被布线层190密封，并且储存器形成基板30连接到路径形成基板10.液流路径和通信部13通过形成具有多个分隔壁11的路径形成基板10，使分隔壁11的保留部31侧的端部与隔壁与隔膜50接触的表面之间的距离为 5〜200μm。在液体流路的内表面和连通部13上形成保护膜16，在保护膜上形成分离层。去除分离层，并且同时选择性地去除布线层190上的保护膜，并且还去除布线层以允许储存部分31与通信部分13通信。版权所有：（C）2008，JPO＆INPIT

6. 发明专利

JP2007245589A Liquid injection head and liquid injection apparatus 有权
标题翻译：液体注射头和液体注射装置
公开(公告)号：JP2007245589A
公开(公告)日：2007-09-27
申请号：JP2006073447
申请日：2006-03-16
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： SEKIZAKI TAKESHI , MATSUZAWA AKIRA
IPC分类号： B41J2/055 , B41J2/045 , B41J2/16
摘要： PROBLEM TO BE SOLVED: To improve reliability by preventing peel-off of an adhesive.
SOLUTION: A liquid injection head comprises: a flow path forming substrate 10 in which a plurality of pressure generating chambers 12 communicating with nozzle openings 21 to inject a liquid, and a communicating section 13 communicating with the pressure generating chambers12 are formed; pressure generating means 300 which is provided in the flow path forming substrate 10 and generates pressure change in the pressure generating chambers 12; and a reservoir forming substrate 30 comprising the reservoir section 31 which is bonded to one side surface of the flow path forming substrate 10 via an adhesive 35, communicates with the communicating section 13, and comprises part of a common liquid chamber 100 for the pressure generating chambers 12. The liquid injection head also comprises an adhesive layer 200 consisting of metal or metal oxide at least around the reservoir 31 in the bonding area bonded to the flow path forming substrate 10, in the reservoir forming substrate 30.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：通过防止粘合剂的剥离来提高可靠性。液体注入头包括：流路形成基板10，其中形成有与喷嘴开口21连通以喷射液体的多个压力产生室12和与压力产生室12连通的连通部分13; 压力产生装置300设置在流路形成基板10中，并在压力发生室12中产生压力变化; 以及储存器形成基板30，其包括经由粘合剂35与流路形成基板10的一个侧面接合的储存部31，与连通部13连通，并且包括用于压力产生的公共液体室100的一部分液体注入头还包括由金属或金属氧化物组成的粘合剂层200，该粘合层200至少围绕结合到流路形成基底10的结合区域中的贮存器31周围在储存器形成基底30中。版权所有：（C）2007，JPO＆INPIT

7. 发明专利

JP2007190776A Process for manufacturing liquid ejection head 审中-公开
标题翻译：制造液体喷射头的方法
公开(公告)号：JP2007190776A
公开(公告)日：2007-08-02
申请号：JP2006010427
申请日：2006-01-18
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： MATSUZAWA AKIRA , OTA MUTSUHIKO
IPC分类号： B41J2/16 , B41J2/045 , B41J2/055
摘要： PROBLEM TO BE SOLVED: To provide a process for manufacturing a liquid ejection head which keeps cost reduced by simplifying the manufacturing process.
SOLUTION: The process for manufacturing a liquid ejection head including a channel forming board composed of a silicon board and a reservoir forming board 30 bonded to one surface side of the channel forming board comprises a step for forming a barrier film 131 covering at least the opening of a reservoir portion on the other surface of the reservoir forming board 30 opposite to the one surface bonded to the channel forming board, a step for forming the reservoir portion 31 in the reservoir forming board 30, a step for bonding the reservoir forming board 30 to one surface of the channel forming board, a step for forming a pressure generation chamber and an interconnecting portion by performing wet etching from the other surface side of the channel forming board, and a step for removing the barrier film 131.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种制造液体喷射头的方法，其通过简化制造过程来降低成本。解决方案：用于制造液体喷射头的方法包括：由硅板构成的流道形成板和与流道形成板的一个表面侧结合的储存器形成板30的步骤包括形成覆盖在至少在储存器形成板30的另一个表面上与粘合到通道形成板的一个表面相对的储存器部分的开口，用于在储存器形成板30中形成储存器部分31的步骤，用于将储存器形成板30到通道形成板的一个表面，用于通过从沟道形成板的另一个表面侧进行湿蚀刻来形成压力产生室和互连部分的步骤以及用于去除阻挡膜131的步骤。 P>版权所有（C）2007，JPO＆INPIT

8. 发明专利

JP2006272913A Liquid injection head, its manufacturing method, and liquid injection apparatus 有权
标题翻译：液体注射头及其制造方法和液体注射装置
公开(公告)号：JP2006272913A
公开(公告)日：2006-10-12
申请号：JP2005099704
申请日：2005-03-30
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： MATSUZAWA AKIRA , OTA MUTSUHIKO , TAKIMOTO ISAO
IPC分类号： B41J2/045 , B41J2/055 , B41J2/16
摘要： PROBLEM TO BE SOLVED: To provide a liquid injection head which surely prevents a discharge failure such as clogging of a nozzle with foreign matters, and is provided with a flow path forming substrate and a reservoir forming substrate well joined to each other, and also to provide manufacturing method thereof.
SOLUTION: The liquid injection head is provided with: the flow path forming substrate 10 where a pressure chamber 12 communicating with a nozzle opening to discharge a liquid droplet is formed; a piezoelectric element 300 consisting of a lower electrode 60, a piezoelectric body layer 70 and an upper electrode 80, which are provided on one surface of the flow path forming substrate 10 through an oscillating plate; and the reservoir forming substrate 30 which is joined to the flow path forming substrate 10 with an adhesive 35 and has a reservoir part 31. The head also has a joining layer 98 consisting of an oxidized metal at least in a part of joining area of the flow path forming substrate 10 with the reservoir forming substrate 30 so that the reservoir forming substrate 30 is joined on the joining layer 98.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种液体注入头，其可靠地防止诸如异物堵塞喷嘴的排放故障，并且设置有彼此良好接合的流路形成基板和储液器形成基板，并提供其制造方法。解决方案：液体注射头设置有流路形成基板10，其中形成有与喷嘴开口连通以排出液滴的压力室12; 由下部电极60，压电体层70和上部电极80构成的压电元件300，其通过振动板设置在流路形成基板10的一个表面上; 以及用粘合剂35接合到流路形成基板10并具有储存部31的储存器形成基板30.头部还具有由氧化金属组成的接合层98，至少部分接合区域具有储存器形成基板30的流路形成基板10，使得储存器形成基板30接合在接合层98上。版权所有（C）2007，JPO＆INPIT

9. 发明专利

JP2006231897A Method for manufacturing liquid injection head 有权
标题翻译：制造液体注射头的方法
公开(公告)号：JP2006231897A
公开(公告)日：2006-09-07
申请号：JP2005092285
申请日：2005-03-28
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： TAKAHASHI TETSUJI , TAKIMOTO ISAO , MATSUZAWA AKIRA , OTA MUTSUHIKO
IPC分类号： B41J2/16 , B41J2/045 , B41J2/055
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid injection head which surely prevents a nozzle from a discharge failure such as clogging due to foreign matters.
SOLUTION: The method includes steps of: forming a piezoelectric element on one surface side of a flow passage forming substrate through a diaphragm, and also forming a through-hole by removing a diaphragm in an area being a communicating part; forming a lead electrode constituted of a nickel chrome adhesion layer and a metal layer, and also forming a lead electrode consisting of an adhesion layer and a metal layer, and a discontinuous metal layer in an area corresponding to the through-hole; joining a reservoir forming substrate on the one surface side of the flow passage forming substrate; forming a communicating section by wet etching the flow passage forming substrate from the other surface side in a state of the through-hole being sealed up by the discontinuous metal layer; removing a deteriorated layer of a surface layer in such a way that an etching solution etching the flow passage forming substrate contacts the adhesion layer constituting the discontinuous metal layer; and communicating a reservoir section and the communicating section with each other by sequentially removing by wet etching the adhesion layer and the metal layer constituting the discontinuous metal layer.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决的问题：提供一种液体注射头的制造方法，其可以防止喷嘴由于异物堵塞而引起排放故障。解决方案：该方法包括以下步骤：通过隔膜在流路形成基板的一个表面侧形成压电元件，并且通过在作为连通部的区域中去除隔膜来形成通孔; 形成由镍铬粘附层和金属层构成的引线电极，并且还形成由粘合层和金属层组成的引线电极和与通孔相对应的区域中的不连续金属层; 在所述流路形成基板的一个表面侧连接储液器形成基板; 在由所述不连续金属层密封的所述通孔的状态下，从所述另一个表面侧湿式蚀刻所述流路形成用基板，形成连通部; 以使蚀刻流路形成基板的蚀刻液与构成不连续金属层的粘合层接触的方式除去表面层的劣化层; 并且通过湿法蚀刻附着层和构成不连续金属层的金属层，依次除去储存部和连通部。版权所有（C）2006，JPO＆NCIPI

10. 发明专利

JP2005153242A Manufacturing method for liquid jetting head 有权
标题翻译：液体喷嘴的制造方法
公开(公告)号：JP2005153242A
公开(公告)日：2005-06-16
申请号：JP2003393173
申请日：2003-11-21
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： MATSUZAWA AKIRA , NAKAMURA TAKASHI , TORIMOTO TATSURO
IPC分类号： B41J2/16 , B41J2/045 , B41J2/055
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method for a liquid jetting head which can favorably form pressure generation chambers, and at the same time can improve the manufacturing efficiency and greatly reduce costs.
SOLUTION: The manufacturing method includes a process of forming a vibrating plate and piezoelectric elements on a passage formation substrate wafer which consists of a silicon wafer and where a passage formation substrate is integrally formed; a process of joining a protecting substrate wafer where a protecting substrate consisting of a silicon wafer and having a piezoelectric element holding part for protecting the piezoelectric elements is integrally formed, onto the passage formation substrate wafer; a process of bonding a sealing sheet composed of a poly-para-phenyleneterephthalamide (PPTA) to a surface of the protecting substrate wafer; a process of forming the pressure generation chambers by etching the passage formation substrate wafer; a process of removing the sealing sheet; and a process of dividing the passage formation substrate wafer and the protecting substrate wafer to a predetermined size.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种可以有利地形成压力发生室的液体喷射头的制造方法，同时可以提高制造效率并大大降低成本。解决方案：制造方法包括在由硅晶片构成的通道形成基板晶片上形成振动板和压电元件的过程，其中通道形成基板一体形成; 在通路形成用基板晶片上一体形成保护用基板晶片的工序，将保护基板由硅晶片构成并具有用于保护压电元件的压电元件保持部一体形成，将由聚对苯二甲酰对苯二胺（PPTA）构成的密封片粘接到保护基板晶片的表面的工序; 通过蚀刻通道形成用基板晶片来形成压力产生室的工序; 去除密封片的过程; 以及将通道形成衬底晶片和保护衬底晶片分隔成预定尺寸的过程。版权所有（C）2005，JPO＆NCIPI

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