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    • 2. 发明专利
    • Semiconductor device and method for forming it
    • 半导体器件及其形成方法
    • JP2008103729A
    • 2008-05-01
    • JP2007271758
    • 2007-10-18
    • Samsung Electronics Co Ltd三星電子株式会社Samsung Electronics Co.,Ltd.
    • KWAK DONG-HWAPARK JAE-KWANSIM JAE-HWANGKIM JIN-HOKIM KI-NAM
    • H01L21/768H01L21/8247H01L27/10H01L27/115H01L29/788H01L29/792
    • H01L21/76897H01L21/76816H01L27/11521H01L27/11524H01L27/11526H01L27/11529
    • PROBLEM TO BE SOLVED: To provide a method for forming wiring which is electrically connected to a lower region through a contact. SOLUTION: The method for forming the wiring includes steps of: forming an insulating film on a substrate which has a plurality of first regions and a plurality of second regions which are arranged between the first regions; forming a plurality of first wiring on the insulating film which are connected electrically to the corresponding first regions through first contacts penetrating the insulating film; forming spacers on side faces of the first wiring; removing the insulating film positioned between the adjacent spacers so as to form a plurality of contact holes in which the corresponding second regions are exposed between the adjacent first contacts; and forming a plurality of second contacts which are filled in the corresponding contact holes to form a plurality of second wiring which are connected electrically to the corresponding second contacts. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种通过接触电连接到下部区域的布线的形成方法。 解决方案:用于形成布线的方法包括以下步骤:在具有多个第一区域和布置在第一区域之间的多个第二区域的基板上形成绝缘膜; 在所述绝缘膜上形成多个第一布线,所述多个第一布线通过穿过所述绝缘膜的第一触点与相应的第一区域电连接; 在所述第一布线的侧面上形成间隔物; 去除位于相邻间隔物之间​​的绝缘膜,以便形成多个接触孔,相邻的第二区域在相邻的第一接触件之间露出; 以及形成多个第二触点,其填充在相应的接触孔中以形成多个第二布线,所述多个第二布线电连接到相应的第二触点。 版权所有(C)2008,JPO&INPIT
    • 5. 发明专利
    • Semiconductor device
    • 半导体器件
    • JP2007294995A
    • 2007-11-08
    • JP2007174271
    • 2007-07-02
    • Samsung Electronics Co Ltd三星電子株式会社Samsung Electronics Co.,Ltd.
    • KIM KI-NAMJUNG DONG-JIN
    • H01L21/8246H01L21/8247H01L21/02H01L21/8242H01L27/105H01L27/108H01L27/115H01L29/78H01L29/788H01L29/792
    • H01L27/11502H01L28/55
    • PROBLEM TO BE SOLVED: To provide a semiconductor which prevents the deterioration on the uses at high temperatures and of repeated read/wright, and has a large sensing margin.
      SOLUTION: The semiconductor device includes a conductive layer formed on an active region of a semiconductor substrate having an element separation region to define the active region and a non-active region; a first insulating film formed on the semiconductor substrate with the conductive layer included; a capacitor including a lower electrode, a ferroelectric film and an upper electrode, which are laminated sequentially on the first insulating film, and formed such that the upper electrode and the ferroelectric film are overlapped on a part of the lower electrode; a second insulating film formed on the first insulating film with the capacitor included; a first opening formed so as to penetrate the second insulating film and exposing the lower electrode; a second opening which penetrates the second insulating film and the first insulating film and exposes an upper surface of the semiconductor substrate of a side of the conductive layer; and a contact layer to electrically connect the lower electrode and the semiconductor substrate of the side of the conductive layer through the first opening and the second opening.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种半导体,其防止高温下的使用劣化和重复的读/写,并且具有大的感测余量。 解决方案:半导体器件包括形成在具有元件分离区域的半导体衬底的有源区上以限定有源区和非有源区的导电层; 形成在具有导电层的半导体衬底上的第一绝缘膜; 包括下电极,铁电体膜和上电极的电容器,其顺序层叠在第一绝缘膜上,并且形成为使得上电极和铁电体膜重叠在下电极的一部分上; 形成在具有电容器的第一绝缘膜上的第二绝缘膜; 形成为穿透所述第二绝缘膜并使所述下电极露出的第一开口; 第二开口,其穿过所述第二绝缘膜和所述第一绝缘膜,并且暴露所述半导体衬底的所述导电层侧的上表面; 以及接触层,以通过第一开口和第二开口电连接导电层侧面的下电极和半导体衬底。 版权所有(C)2008,JPO&INPIT
    • 8. 发明专利
    • Flash memory device and method of programming multi-pages in the same
    • 闪存存储器件及其编程方法
    • JP2008108418A
    • 2008-05-08
    • JP2007275333
    • 2007-10-23
    • Samsung Electronics Co Ltd三星電子株式会社Samsung Electronics Co.,Ltd.
    • PARK KI-TAEKIM KI-NAMLEE YEONG-TAEK
    • G11C16/02
    • G11C16/10G11C16/0483G11C2216/14
    • PROBLEM TO BE SOLVED: To provide a flash memory device and a method of programming multi-pages in the same.
      SOLUTION: In programming multi-pages in a flash memory device, a first page group and a second page group are formed with respect to each of at least one memory plane by grouping page buffers such that logical odd bitlines and logical even bitlines correspond to one of the first page group and the second page group, respectively. Program data corresponding to at least one page coupled to a selected wordline are loaded, and then a program voltage is applied to the selected wordline. A plurality of pages, including at least two pages pertaining to the same memory plane, can be simultaneously programmed and a row-coupling disturbance can be reduced.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种闪存器件和一种编程多页的方法。 解决方案:在对闪存设备中的多页进行编程中,通过对页缓冲器进行分组来形成关于至少一个存储器平面中的每一个的第一页组和第二页组,使得逻辑奇位图和逻辑偶位 分别对应于第一页组和第二页组之一。 加载对应于耦合到所选字线的至少一个页面的程序数据,然后将程序电压施加到所选择的字线。 包括属于相同存储器平面的至少两页的多个页面可以被同时编程,并且可以减少行耦合干扰。 版权所有(C)2008,JPO&INPIT
    • 9. 发明专利
    • Method of operating non-volatile memory device
    • 操作非易失性存储器件的方法
    • JP2007318138A
    • 2007-12-06
    • JP2007134668
    • 2007-05-21
    • Samsung Electronics Co Ltd三星電子株式会社Samsung Electronics Co.,Ltd.
    • KIN DAIMANKWON WOOK-HYUNKIM KI-NAMPARK CHAN-KWANGSHIM SANG-PIL
    • H01L21/8247G11C16/02G11C16/04H01L27/115H01L29/788H01L29/792
    • G11C16/10G11C11/5671G11C16/0483G11C16/3409G11C16/345
    • PROBLEM TO BE SOLVED: To provide a method of operating a non-volatile memory device which can decrease the number of electrons stored in a tunnel insulating film, while writing/erasing cycles are repeated. SOLUTION: The method of operating the non-volatile memory device having a memory cell includes a source region 12 and a drain region formed in a semiconductor substrate 10 to define a channel region therebetween, a tunnel insulating layer 16 laminated on the channel region, a charge storing layer 18, and a control gate electrode 22. The method has the steps of: applying a negative voltage to the gate electrode, applying a positive voltage to at least one of the source and drain regions, implanting a hole into the tunnel insulating layer, and recombining the hole injected in the tunnel insulating layer with a negative charge trapped in the tunnel insulating layer, thereby removing the negative charge in the tunnel insulating layer. Thus, by removing the electrons trapped in the tunnel insulating layer, the number of the electrons stored in the tunnel insulating layer during writing/erasing cycles can be significantly decreased, which attains a high reliability with little data variation. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种操作非易失性存储器件的方法,其可以减少存储在隧道绝缘膜中的电子数量,同时重复写/擦除周期。 解决方案:具有存储单元的非挥发性存储器件的操作方法包括形成在半导体衬底10中的源区12和漏区,以限定它们之间的沟道区,层叠在沟道上的隧道绝缘层16 区域,电荷存储层18和控制栅电极22.该方法具有以下步骤:向栅电极施加负电压,向源区和漏区中的至少一个施加正电压,将孔注入 将隧道绝缘层中注入的空穴与隧道绝缘层中俘获的负电荷重新组合,从而去除隧道绝缘层中的负电荷。 因此,通过去除俘获在隧道绝缘层中的电子,可以显着地减少在写入/擦除周期期间存储在隧道绝缘层中的电子数,从而在数据变化很小的情况下获得高的可靠性。 版权所有(C)2008,JPO&INPIT