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1. 发明专利

JP2006323358A LIGHT DEFLECTOR, LIGHT DEFLECTION ARRAY, OPTICAL SYSTEM, IMAGE PROJECTION DISPLAY APPARATUS, AND IMAGE FORMING APPARATUS 审中-公开
公开(公告)号：JP2006323358A
公开(公告)日：2006-11-30
申请号：JP2006037914
申请日：2006-02-15
申请人： RICOH KK
发明人： NANJO TAKESHI , KATO SEIICHI , OTAKA KOICHI
IPC分类号： G02B26/08 , B81B3/00 , B81B7/04
摘要： PROBLEM TO BE SOLVED: To realize a low voltage driving of a light deflector by forming an arbitrary part (contact part or supporting point) on a substrate with which a plate-shaped member, which is a mirror, comes into contact when tilted and dislocated, or a corresponding contact part of the plate-shaped member, with a (hard) film having heat resistance and a small mechanical deformation, and suppressing a sticking. SOLUTION: A supporting point member 103, a contact part 106 and the lower layer 104a of the plate-shaped member 104 are formed by a layer consisting essentially of a high melting point metal element. The layer consisting essentially of a high melting point metal element has a high heat resistance, high Young's modulus, and hardness, shows a small mechanical deformation against the force acting by accompanying an optical deflection action (the increase in the contact area is suppressed), and the increase in sticking force is suppressed. COPYRIGHT: (C)2007,JPO&INPIT

2. 发明专利

JP2002258178A OPTICAL MODULATOR 失效
公开(公告)号：JP2002258178A
公开(公告)日：2002-09-11
申请号：JP2001060694
申请日：2001-03-05
申请人： RICOH KK
发明人： NANJO TAKESHI , KATO SEIICHI , OTAKA KOICHI
IPC分类号： G02B26/08 , H04N5/74
摘要： PROBLEM TO BE SOLVED: To drive a beam with a lower driving voltage by making the beam having a light reflection part easily deformable by the action of electrostatic attraction. SOLUTION: In the optical modulator, a deflection region 110 is formed at part of both ends-fixed beam 105, and particularly, is formed in the vicinity of one fixed end 105a. The deflection region 110 is bent into a V-shape at the space 108 side, and the extended direction of the ridgeline 112 of its apex is formed in parallel with the tangential direction (width direction) of the fixed end 105a. Thereby, the both ends-fixed beam 105 can be inclined to the space 108 side according to the deformation of the deflection region 110 caused by the action of electrostatic attraction. Accordingly, force to drive the both ends- fixed beam 105 is decreased, and a small voltage is enough to drive an electrode 103 and a pad 107.

3. 发明专利

JP2002250875A OPTICAL MODULATING DEVICE AND MANUFACTURING METHOD FOR THE OPTICAL MODULATING DEVICE, IMAGE FORMING APPARATUS EQUIPPED WITH THE OPTICAL MODULATING DEVICE, AND IMAGE PROJECTION DISPLAY DEVICE EQUIPPED WITH THE OPTICAL MODULATING DEVICE 失效
公开(公告)号：JP2002250875A
公开(公告)日：2002-09-06
申请号：JP2001049485
申请日：2001-02-23
申请人： RICOH KK
发明人： KATO SEIICHI
IPC分类号： B41J2/445 , G02B26/08 , G02B27/18 , G03B21/00 , H04N1/036 , H04N1/113 , H04N5/74
摘要： PROBLEM TO BE SOLVED: To provide a low-cost optical modulating device which has a simple structure optically modulating incident light by changing its reflecting direction, has quick response, imposes no restriction on the wavelength of the incident light in use, stably and reliably operates with a low driving voltage, and requires a small number of manufacturing processes. SOLUTION: This optical modulating device is equipped with a thin-film both-end fixed beam 2 which is constituted by combining a reflecting means 1 with the side face thereof and formed of a thin film and has both the ends fixed and deforms with an electrostatic force, a substrate electrode 3 which faces the thin-film both-end fixed beam 2 and applies the driving voltage, a substrate 4 which holds the held parts 2a of both the ends of the thin-film both-end fixed beam 2 while forming the substrate electrode 3 in the recessed shape part of the substrate 4, and a displacement accelerating means 5 which is so formed that the end side of one held part 2a1 of the beam 2 held by the substrate 4 is easier to displace than the end side of the other held part 2a2 .

4. 发明专利

JP2002052711A ELECTRIC ACTUATOR AND ITS MANUFACTURING METHOD, INK JET RECORDING HEAD COMPRISING ELECTRIC ACTUATOR, ITS MANUFACTURING METHOD, AND INK JET RECORDER COMPRISING INK JET RECORDING HEAD 失效
公开(公告)号：JP2002052711A
公开(公告)日：2002-02-19
申请号：JP2000245185
申请日：2000-08-11
申请人： RICOH KK
发明人： KATO SEIICHI
IPC分类号： B41J2/045 , B41J2/055 , B41J2/16 , H02N1/00
摘要： PROBLEM TO BE SOLVED: To provide a small and inexpensive electric actuator having a limited space for connecting a drive power supply circuit with an electrode pad and its manufacturing method, an ink jet recording head comprising the electric actuator and its manufacturing method and an ink jet recorder comprising the ink jet recording head. SOLUTION: The electric actuator comprises a working plate 1 being actuated by applying a drive voltage, a substrate 2 on which the working plate 1 is formed, and an electrode pad 3 formed on the side face of the substrate 2 while being connected with the working plate 1.

5. 发明专利

JP2001341306A IMAGING HEAD, IMAGING APPARATUS COMPRISING IT AND METHOD FOR MANUFACTURING IMAGING HEAD 失效
公开(公告)号：JP2001341306A
公开(公告)日：2001-12-11
申请号：JP2000165045
申请日：2000-06-01
申请人： RICOH KK
发明人： OTAKA KOICHI , FUJII MITSUYOSHI , KATO SEIICHI
IPC分类号： B41J2/045 , B41J2/055 , B41J2/16
摘要： PROBLEM TO BE SOLVED: To provide an electrostatic imaging head requiring no diaphragm electrode, its manufacturing method and an imaging apparatus comprising the imaging head. SOLUTION: The imaging head comprises a nozzle part 110 for ejecting ink, an ink liquid chamber 102 communicating with the nozzle part, a diaphragm 101 forming the wall face of the ink liquid chamber, and a drive electrode 109 disposed oppositely to the diaphragm through a space and ejects ink 116 by deforming the diaphragm wherein the ink 116 has conductivity.

6. 发明专利

JP2000052551A INK-JET HEAD STRUCTURE 失效
公开(公告)号：JP2000052551A
公开(公告)日：2000-02-22
申请号：JP22468798
申请日：1998-08-07
申请人： RICOH KK
发明人： KATO SEIICHI
IPC分类号： B41J2/045 , B41J2/055 , B41J2/14 , B41J2/16 , B81B3/00 , B81C1/00
摘要： PROBLEM TO BE SOLVED: To improve a driving frequency by obtaining a sufficient shift of a diaphragm to discharge ink even when a gap defined by the diaphragm and an individual counter electrode is narrowed so as to lower a driving voltage and driving the diaphragm without being in touch with the individual counter electrode. SOLUTION: When a voltage is not impressed, an individual counter electrode 2 and a diaphragm 11 are in a state (A). When a driving voltage is impressed between the individual counter electrode 2 and the diaphragm 11, the diaphragm 11 is shifted by a static electricity and a thick part 11a of the diaphragm 11 comes in touch with an upper face 7 of a step 5 as shown in (B). The thick part 11a of the diaphragm 11 faces the counter electrode 2 via a gap, i.e., a height L of the step. The thick part 11a of the diaphragm and the counter electrode 2 are equivalently in a state (C). In driving the diaphragm electrostatically, the diaphragm is instable to reach 1/3 the gap and collides with the counter electrode 2. For avoiding the collision, the diaphragm 11 is displaced in a range higher than 2/3 the height L of the step.

7. 发明专利

JPH11320873A INK-JET HEAD 失效
公开(公告)号：JPH11320873A
公开(公告)日：1999-11-24
申请号：JP11513098
申请日：1998-04-24
申请人： RICOH KK
发明人： KATO SEIICHI , OTAKA KOICHI , KOMAI HIROMICHI , AZUMI JUNICHI
IPC分类号： B41J2/045 , B41J2/055 , B41J2/14 , B41J2/16
摘要： PROBLEM TO BE SOLVED: To eliminate a wiring board such as a flexible substrate or the like and eventually eliminate an extra space for a supporting body to be set at the wiring board by constituting an ink-jet head so that an opposite electrode at the side of a front face of an electrode substrate is taken out at the side of a rear face of the electrode substrate. SOLUTION: When a lead wiring from an opposite electrode 7 is taken out to a rear face through a conductor bury through hole 3b of a glass substrate 1, a metal wiring pattern 14 is formed at the rear face of the glass substrate 1 and a bump-like conductor 6' is formed at a position of the metal wiring pattern appropriate to be connected to a device. Finally an Si substrate 8 is anodically united, and a nozzle plate 9 with a nozzle hole formed by Ni electrocasting or the like manner is bonded to the Si substrate 8 with the use of an epoxy adhesive. This ink-jet head is thus formed. In the constitution, the ink-jet head of an electrostatic type can be mounted easily without specially using a flexible substrate or the like, and mount costs can be reduced.

8. 发明专利

JPH1012881A SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF, AND MIS DEVICE AND MANUFACTURE THEREOF 失效
公开(公告)号：JPH1012881A
公开(公告)日：1998-01-16
申请号：JP17992496
申请日：1996-06-20
申请人： RICOH KK
发明人： KATO SEIICHI
IPC分类号： H01L21/336 , H01L21/8238 , H01L27/092 , H01L29/78
摘要： PROBLEM TO BE SOLVED: To provide a semiconductor device wherein hot carrier effect is re laxed and ON resistance is reduced without using a special film forming device and restricting a direction of a drain which forms a side wall and an orientation of a transistor when MIS transistors are connected in series on the same active region of a substrate for formation. SOLUTION: In comparison with a width w1 of a side wall SW1 which is formed on the outside side wall of gate electrodes 3-1 and 3-n of outermost MIS transistors T-1 and T-n, a width w2 of the other side wall SW2 is formed narrowly. Therefore, in compartion with the width w1 of a lightly doped region LD1 in a source 6-1 and a drain 6-(n+1) on the outside of the outermost gate electrodes 3-1 and 3-n, the width w2 of a lightly doped region LD2 in sources and drains, 6-2-6-n, among gate electrodes is formed narrowly.

9. 发明专利

JPH08306665A PHYSICAL QUANTITY MEASURING DEVICE IN VACUUM DEVICE 失效
公开(公告)号：JPH08306665A
公开(公告)日：1996-11-22
申请号：JP12936695
申请日：1995-04-28
申请人： RICOH KK
发明人： KATO SEIICHI
IPC分类号： H05H1/46 , H01L21/302 , H01L21/3065 , H01L31/12
摘要： PURPOSE: To make it possible to measure the physical quantity of temperature and the others in a vacuum device without adding any alteration to the vacuum device and to make it possible to start the intrinsic work of the vacuum device immediately after the measurement. CONSTITUTION: A sampling circuit, a control pulse waveform formation circuit, a drive part, a demodulation part and a control part are formed in a silicon wafer 30 as an integrated circuit 26 according to the process of a CMOS device. Photocells 24, a liquid crystal optical switching module 4 and temperature detecting parts 2a, which are respectively formed using a platinum resistor, are formed on the wafer 30 via an interlayer insulating film consisting of a silicon nitride film. A quartz spacer is bonded on the photocells 24, the switching module 4 and the detecting parts 2a, a quartz plate 32, which is formed into the same plane form as that of the wafer 30 and has a thickness of 0.3mm, is laminated on the quartz spacer with an epoxy bonding agent and a sapphire thin film 34 is formed on the plate 32 as an etching-resisting film by a sputtering method.

10. 发明专利

JPH0831949A DUAL GATE STRUCTURE CMOS SEMICONDUCTOR DEVICE AND ITS MANUFACTURE 失效
公开(公告)号：JPH0831949A
公开(公告)日：1996-02-02
申请号：JP18060194
申请日：1994-07-08
申请人： RICOH KK
发明人： USAMI TARO , KATO SEIICHI
IPC分类号： H01L21/28 , H01L21/8238 , H01L27/092 , H01L29/78
摘要： PURPOSE:To prevent impurities from passing through a silicide layer in a polycide gate electrode and mutually diffusing. CONSTITUTION:Boron is injected into a p-type region of a polysilicon film 5 to make it a p-type polysilicon film 7. A silicon oxide film 8 is formed on this polysilicon film as a film preventing diffusion of impurities. A resist 6P having an opening in a n-type region is formed on this silicon oxide film 8. This is used as a mask for etching the silicon oxide film 8 isotropically and the silicon oxide film 8 under the resist 6P is side etched. Next, this resist 6P is used as a mask for arsenic ion implantation into a polysilicon film at the opening part to make it an n-type polysilicon film 9. After the resist 6P is removed, a tungsten film 10 is deposited and heat treated and a silicide layer 11 is formed.

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