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    • 5. 发明专利
    • Analog interferometric modulator device with electrostatic actuation and release
    • 具有静电驱动和释放功能的模拟干涉仪调制器
    • JP2011209751A
    • 2011-10-20
    • JP2011138327
    • 2011-06-22
    • Qualcomm Mems Technologies Incクゥアルコム・メムス・テクノロジーズ・インコーポレイテッドQUALCOMM MEMS Technologies, Inc.
    • KOTHARI MANISHKOGUT LIORSAMPSELL JEFFREY B
    • G02B26/02B81B3/00B81C1/00
    • G02B26/001
    • PROBLEM TO BE SOLVED: To provide an analog interferometric modulator device with electrostatic actuation and release.SOLUTION: A microelectromechanical system (MEMS) device includes a first electrode, a second electrode electrically insulated from the first electrode, and a third electrode electrically insulated from the first electrode and the second electrode. The MEMS device also includes a support structure which separates the first electrode from the second electrode and a reflective element located and movable between a first position and a second position. The reflective element is in contact with a portion of the device when in the first position and is not in contact with the portion of the device when in the second position. An adhesive force is generated between the reflective element and the portion when the reflective element is in the first position. Voltages applied to the first electrode, the second electrode, and the third electrode at least partially reduce or counteract the adhesive force.
    • 要解决的问题:提供具有静电致动和释放的模拟干涉式调制器装置。解决方案:微机电系统(MEMS)装置包括第一电极,与第一电极电绝缘的第二电极和与第一电极电绝缘的第三电极 第一电极和第二电极。 MEMS器件还包括将第一电极与第二电极分开的支撑结构和位于第一位置和第二位置之间并可移动的反射元件。 反射元件在处于第一位置时与装置的一部分接触,并且当处于第二位置时不与装置的部分接触。 当反射元件处于第一位置时,在反射元件和部分之间产生粘合力。 施加到第一电极,第二电极和第三电极的电压至少部分地减小或抵消粘附力。