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    • 4. 发明专利
    • Spatial light modulator with integrated optical structure
    • 具有集成光学结构的空间光调制器
    • JP2011048380A
    • 2011-03-10
    • JP2010221500
    • 2010-09-30
    • Qualcomm Mems Technologies Incクゥアルコム・メムス・テクノロジーズ・インコーポレイテッドQUALCOMM MEMS Technologies, Inc.
    • CHUI CLARENCESAMPSELL JEFFREY BCUMMINGS WILLIAM JTUNG MING-HAU
    • G02B26/02G02B26/00G02F1/1335G02F1/136G09F9/00
    • G02F1/21G02B26/001G02F1/1335G02F2001/13356
    • PROBLEM TO BE SOLVED: To provide a spatial light modulator having an integrated optical compensation structure and methods for making the same. SOLUTION: A spatial light modulator 40 comprises an integrated optical compensation structure, e.g., an optical compensation structure 41 arranged between a substrate 42 and a plurality of individually addressable light-modulating elements 44, or located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure, and may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供具有集成光学补偿结构的空间光调制器及其制造方法。 解决方案:空间光调制器40包括集成的光学补偿结构,例如,布置在基板42和多个单独寻址的光调制元件44之间或位于光的相对侧上的光学补偿结构41 从衬底调制元件。 可单独寻址的光调制元件被配置为调制透射通过或从透明基板反射的光。 制造这种空间光调制器的方法包括在衬底上制造光学补偿结构,并在光学补偿结构上制造多个可单独寻址的光调制元件。 光学补偿结构可以是无源光学补偿结构,并且可以包括补充前照灯源,漫射器,黑色掩模,衍射光学元件,滤色器,抗反射层,散射的结构中的一个或多个 光,微透镜阵列和全息膜。 版权所有(C)2011,JPO&INPIT