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1. 发明专利

JPS6195229A Measurement of impurities in ultra-high purity gas 失效
标题翻译：测量超高纯度气体中的污染物
公开(公告)号：JPS6195229A
公开(公告)日：1986-05-14
申请号：JP21707084
申请日：1984-10-16
申请人： Osaka Gas Co Ltd
发明人： IPPONMATSU MASAMICHI , MATSUMOTO MASARU , WADA MASAO , HAMADA HIROBUMI , MIYATA TOMOYUKI , NAGASE HIROAKI , TAKEDA YOSHIO
IPC分类号： G01N21/27 , G01N21/39
CPC分类号： G01N21/3504
摘要： PURPOSE:To measure the concn. of impurities in ultra-high purity gas in a steady state by holding the internal pressure in a vacuum long light path cell, by controlling the flow amount of the ultra-high purity gas to said cell. CONSTITUTION:The laser beam of an infrared region from a semiconductive laser oscillator 1 passes a movable reflective mirror 2 and a grating 3 and only laser beam with a necessary wavelength is incident to a reflective mirror 4 and the light path thereof is changed over to a vacuum long light path cell 7, through which ultra-high purity gas containing impurities flows, by movable mirrors 5, 8. A laser beam detector 9 is reciprocated about 100 times by the reflection in the cell 7 and receives laser beam attenuated by the beam absorption of impurities in the gas to measure the intensity thereof. An information processing system 10 operates the absorbancy due to impurities in the cell 7 from the measured intensity of laser beam to measure the concn. of impurities. A control apparatus 15 controls quantitative values 13, 14 and always adjusts the pressure in the vacuum long light path cell 7 to proper pressure.
摘要翻译：目的：测量浓度通过将超高纯度气体的流量控制在所述电池中，通过将真空长路径电池中的内部压力保持在稳态的超高纯度气体中的杂质。构成：来自半导体激光振荡器1的红外区域的激光束通过可动反射镜2和光栅3，只有具有必要波长的激光束入射到反射镜4，并且其光路被切换到通过可移动镜5,8使包含杂质的超高纯度气体流过的真空长光路单元7.激光束检测器9通过电池7中的反射往复运动约100次，并接收由光束衰减的激光束吸收气体中的杂质来测量其强度。信息处理系统10根据测量的激光束的强度来操作由于单元7中的杂质引起的吸收，以测量该浓度。的杂质。控制装置15控制定量值13,14，并且总是将真空长光通道单元7中的压力调节到适当的压力。

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