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    • 3. 发明专利
    • NEAR-FIELD OPTICAL MICROSCOPE
    • JPH11326345A
    • 1999-11-26
    • JP12591098
    • 1998-05-08
    • OLYMPUS OPTICAL CO
    • YAMAGUCHI MITSUSHIRO
    • G01B11/30G01J1/22G01N37/00G01Q60/18
    • PROBLEM TO BE SOLVED: To provide a near-field optical microscope which can measure stably without being affected by an intensity change of an output light of a light source. SOLUTION: A luminous flux projected from a wavelength variable laser light source 3 enters a neutral density(ND) continuous filter 4. The ND continuous filter 4 has a continuous density distribution, attenuating the entering light in accordance with a position where the light enters. The ND continuous filter 4 is supported to be able to change a position where it traverses an optical path and is moved by a driving motor 8. The luminous flux passing the ND continuous filter 4 is split to two by a beam splitter 5, and the light passing the beam splitter 5 is reflected at a mirror 9 and irradiated to a sample 1 and a probe 12 arranged in the vicinity of a front face of the sample. The luminous flux reflected by the beam splitter 5 enters a photodetector 6. A control circuit 7 controls by the driving motor 8 the position where the ND continuous filter 4 traverses the optical path so that an output of the photodetector 6, namely, the light output from the light source 3 has a constant intensity.