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1. 发明专利

JP2010274389A Recovering method and recovering device of slurry 有权
标题翻译：恢复方法和恢复浆料装置
公开(公告)号：JP2010274389A
公开(公告)日：2010-12-09
申请号：JP2009131575
申请日：2009-05-29
申请人： Nomura Micro Sci Co Ltd , 野村マイクロ・サイエンス株式会社
发明人： FUNAKOSHI TAKAO , DATE TSUKASA , HIOKI MASAJI , KOJIMA SENRI
IPC分类号： B24B57/02
摘要： PROBLEM TO BE SOLVED: To provide a recovering method and device of slurry, recovering useful used slurry at high concentration and high recovery rate with a simple device by using a difference in viscosity and a difference in used amount between the slurry and cleaning water.
SOLUTION: The method recovers the slurry used in a polishing device, in which a polishing process using slurry and a cleaning process using cleaning water are repeatedly performed at predetermined timings. A slurry drain recovering pipe having a slurry catching pocket catching the slurry flowing down an inner wall, is attached into a common discharge hole for the slurry and cleaning water of the polishing device, so that the slurry flowing down the inner wall of the slurry drain recovering pipe is recovered through the slurry collecting pocket. The drain containing the cleaning water is recovered by using a whole slurry drain recovering pipe.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：解决问题：为了提供浆料的回收方法和装置，通过使用粘度差和浆料与清洗剂之间的使用量的差异，通过简单的装置以高浓度和高回收率回收有用的废浆料水。解决方案：该方法回收在抛光装置中使用的浆料，其中使用浆料的抛光工艺和使用清洁水的清洁工艺在预定的时间重复进行。将具有从内壁流下的浆料捕获的浆料捕集袋的浆料排出回收管附接到用于抛光装置的浆料和清洁水的公共排放孔中，使得浆料从浆料排出管的内壁流下回收管通过浆料收集袋回收。通过使用整个浆料排出回收管回收含有清洁水的排水管。版权所有（C）2011，JPO＆INPIT

2. 发明专利

JP2012178418A Method and apparatus for collecting polishing agent 审中-公开
标题翻译：收集抛光剂的方法和装置
公开(公告)号：JP2012178418A
公开(公告)日：2012-09-13
申请号：JP2011039948
申请日：2011-02-25
申请人： Nomura Micro Sci Co Ltd , 野村マイクロ・サイエンス株式会社
发明人： ISHII KEIICHIRO , HIOKI MASAJI
IPC分类号： H01L21/304 , B01D61/14 , B01D61/58 , B01D63/02 , B01D63/06 , B01D71/16 , B01D71/26 , B01D71/34 , B01D71/36 , B01D71/64 , B01D71/68 , B24B37/00 , B24B57/00 , C02F1/44
CPC分类号： B24B57/00 , B01D61/18 , B01D63/02 , B01D2317/022 , B24B57/02 , C02F1/444 , C02F2103/346
摘要： PROBLEM TO BE SOLVED: To provide an apparatus and a method for collecting a polishing agent in which a slurry obtained by condensing the polishing agent to a high concentration can be collected while suppressing increase of a pressure loss or considerable reduction of a collection rate caused by clogging a film.SOLUTION: A collection apparatus 1 for polishing agent is configured to collect a polishing agent from a used polishing slurry which is used for a CMP step includes a separating film 41 in which a porous path through which the used polishing slurry is introduced is tubular and a length of an effective filtering portion is 0.8 m or less, and the polishing agent concentration in the used polishing slurry is condensed to a concentration of 10 mass% or more.
摘要翻译：要解决的问题：提供一种用于收集抛光剂的装置和方法，其中可以在抑制压力损失的增加或收集的显着减少的同时收集通过冷凝抛光剂而获得的浆料以高浓度电影堵塞造成的速度。解决方案：用于抛光剂的收集装置1被配置为从用于CMP步骤的用过的抛光浆料中收集抛光剂，包括分离膜41，其中引入使用的抛光浆料的多孔路径是管状，有效过滤部的长度为0.8μm以下，将研磨用浆料中的研磨剂浓缩浓缩至10质量％以上。版权所有（C）2012，JPO＆INPIT

3. 发明专利

JP2012071231A Filter unit 审中-公开
标题翻译：过滤器单元
公开(公告)号：JP2012071231A
公开(公告)日：2012-04-12
申请号：JP2010216474
申请日：2010-09-28
申请人： Nomura Micro Sci Co Ltd , 野村マイクロ・サイエンス株式会社
发明人： HIOKI MASAJI , NAKANO KAZUNORI
IPC分类号： C02F1/28 , B01D15/00 , C02F1/42
摘要： PROBLEM TO BE SOLVED: To provide a filter unit for chemically filtering metal components in the liquid to be processed, uniformly in the whole processing area of a filter material.SOLUTION: An inlet for the liquid to be processed is formed at the center of a lower end plate (inlet end plate) of a housing. An outlet for the liquid processed is formed in an upper end plate (outlet end plate) of the housing. An end plate of the filter material is supported by a support member. Passages for the liquid to be processed are formed at equal intervals between the lower end plates of the end plate and the housing.
摘要翻译：要解决的问题：提供一种用于在过滤材料的整个处理区域中均匀地对待处理液体中的金属成分进行化学过滤的过滤器单元。解决方案：用于待处理液体的入口形成在壳体的下端板（入口端板）的中心。用于处理液体的出口形成在壳体的上端板（出口端板）中。过滤材料的端板由支撑构件支撑。待处理液体的通道在端板的下端板和壳体之间以相等的间隔形成。版权所有（C）2012，JPO＆INPIT

4. 发明专利

JP2007105010A Live fish survival rate-improving apparatus and live fish survival rate-improving method 审中-公开
标题翻译：实时鱼类生存率提高装置和实时鱼类生存率改进方法
公开(公告)号：JP2007105010A
公开(公告)日：2007-04-26
申请号：JP2005301679
申请日：2005-10-17
申请人： Namutetsuku:Kk , Nomura Micro Sci Co Ltd , 株式会社ナムテック , 野村マイクロ・サイエンス株式会社
发明人： SAKUMA KOICHI , HIOKI MASAJI , OTA YOSHIHARU
IPC分类号： A01K63/04 , A01K63/02 , B01F3/04
摘要： PROBLEM TO BE SOLVED: To provide a live fish survival rate-improving apparatus which can efficiently enhance a dissolved oxygen concentration of a growth environment and does not affect the bodies of the live fishes; and to provide a live fish survival rate-improving method.
SOLUTION: This live fish survival rate-improving apparatus 1 comprises an aquarium 3 capable of receiving a liquid 2 in which live fishes can grow, and a fine gas bubble-releasing means 4 for supplying oxygen to sea water received in the aquarium 3 to enhance the concentration of dissolved oxygen. The fine gas bubble-releasing means 4 is set to the bottom portion of the aquarium 3 and releases fine gas bubbles 5 in the liquid 2.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种能有效提高生长环境的溶解氧浓度并且不影响活鱼体的活鱼存活率提高装置，并提供活鱼生存率提高方法。解决方案：这种活鱼存活率提高装置1包括能够接收活鱼可以生长的液体2的水族箱3和用于向在水族箱中接收的海水供氧的细气泡释放装置4 3增强溶解氧的浓度。精细的气泡释放装置4设置在水族箱3的底部，并在液体2中释放出细小的气泡5.版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2005324109A Paddle motion type stirring device 审中-公开
标题翻译： PADDLE运动型搅拌装置
公开(公告)号：JP2005324109A
公开(公告)日：2005-11-24
申请号：JP2004144003
申请日：2004-05-13
申请人： Nomura Micro Sci Co Ltd , 野村マイクロ・サイエンス株式会社
发明人： SAKUMA KOICHI , HIOKI MASAJI
IPC分类号： B01F11/00 , H02K7/10
摘要： PROBLEM TO BE SOLVED: To provide a paddle motion type stirring device with excellent stirring efficiency applied with unreasonable burden on a link mechanism and requiring no complex control.
SOLUTION: The paddle motion type stirring device is provided with a stirring means 2 having two flat-like stirring paddles 27A, 27B; and a rotation force transmission means 4 for receiving rotation force from a rotation driving means 3 and rotating two parallel rotation output shafts 15, 16 in directions opposite to each other. The link mechanism 30 is constituted such that the 8-shaped paddle motion is performed by two stirring paddles 27A, 27B in the state that each angular velocity of two rotation output shafts 15, 16 during rotation is complementarily varied. The rotation driving means 3 is constituted by a motor and the rotation transmission means 4 is constituted by a differential gear mechanism.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种具有优良搅拌效率的桨式搅拌装置，对连杆机构施加不合理的负担并且不需要复杂的控制。解决方案：桨式运动型搅拌装置设有具有两个平坦搅拌桨27A，27B的搅拌装置2; 以及旋转力传递装置4，用于接收来自旋转驱动装置3的旋转力，并使两个平行的旋转输出轴15,16沿彼此相反的方向旋转。连杆机构30构成为使得在旋转期间两个旋转输出轴15,16的每个角速度互补地变化的状态下，两个搅拌桨27A，27B进行8形桨叶运动。旋转驱动装置3由马达构成，旋转传递装置4由差动齿轮机构构成。版权所有（C）2006，JPO＆NCIPI

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