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1. 发明专利

JP2004264281A Inertial sensor having failure threshold 审中-公开
标题翻译：具有故障阈值的惯性传感器
公开(公告)号：JP2004264281A
公开(公告)日：2004-09-24
申请号：JP2003307627
申请日：2003-08-29
申请人： Nokia Corp , Stmicroelectronics Srl , エスティーマイクロエレクトロニクスエス.アール.エルSTMicroelectronics S.r.l. , ノキアコーポレイションNokia Corporation
发明人： ZERBINI SARAH , MERASSI ANGELO , SPINOLA DURANTE GUIDO , DE MASI BIAGIO
IPC分类号： B81B3/00 , G01P15/00 , G01P15/06 , G01P15/08 , G01P15/18 , H01H1/00 , H01H35/14 , H01L29/84
CPC分类号： G01P1/127 , G01P15/06 , G01P15/0802 , G01P15/0891 , G01P15/18 , G01P2015/0814 , H01H1/0036 , H01H35/146
摘要： PROBLEM TO BE SOLVED: To provide an inertial sensor having failure threshold.
SOLUTION: The inertial sensor having failure threshold is provided with a first body 2 and a second body 18, which can move relatively with respect to one another and are constrained by a plurality of elastic elements, and at least one sample element 6, connected between the first body 2 and the second body 18 and shaped so as to be subjected to a stress, when the second body 18 goes outside of the relative resting position with respect to the first body 2. The sample element 6 has at least one weakened region 9, 10.
COPYRIGHT: (C)2004,JPO&NCIPI
摘要翻译：要解决的问题：提供具有故障阈值的惯性传感器。解决方案：具有故障阈值的惯性传感器设置有第一主体2和第二主体18，第一主体2和第二主体18可相对于彼此相对运动并且被多个弹性元件约束，并且至少一个样本元件6 连接在第一主体2和第二主体18之间并且当第二主体18相对于第一主体2移动到相对静止位置之外时被成形为受到应力。样本元件6至少具有一个弱化区域9,10。（C）2004，JPO＆NCIPI

2. 发明专利

JP2004134763A Manufacturing process of inertial sensor having failure threshold 有权
公开(公告)号：JP2004134763A
公开(公告)日：2004-04-30
申请号：JP2003307928
申请日：2003-08-29
申请人： Nokia Corp , Stmicroelectronics Srl , エスティーマイクロエレクトロニクスエス.アール.エルSTMicroelectronics S.r.l. , ノキアコーポレイションNokia Corporation
发明人： ZERBINI SARAH , MERASSI ANGELO , SPINOLA DURANTE GUIDO , DE MASI BIAGIO
IPC分类号： G01P21/00 , B81B3/00 , G01P1/02 , G01P15/06 , G01P15/08 , G01P15/18 , H01H1/00 , H01H35/14 , H01L29/84
CPC分类号： H01H1/0036 , G01P1/023 , G01P15/06 , G01P15/0802 , G01P15/0891 , G01P15/18 , G01P2015/0814 , H01H35/146
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing an inertial sensor having a failure threshold.
SOLUTION: A process of manufacturing the inertial sensor, having a failure threshold includes the steps of: on the substrate 2 of a semiconductor wafer 1, forming at least one sample element 6 embedded in a sacrificial region 3 and 12; on the sacrificial region 3 and 12, forming a body 18 connected to the sample element 6; and etching the sacrificial region 3 and 12 to free the body 18 and the sample element 6.
COPYRIGHT: (C)2004,JPO

3. 发明专利

JP2007271611A Microelectromechanical integrated sensor structure using rotary drive motion 有权
标题翻译：使用旋转驱动运动的微电子综合传感器结构
公开(公告)号：JP2007271611A
公开(公告)日：2007-10-18
申请号：JP2007060949
申请日：2007-03-09
申请人： Stmicroelectronics Srl , エスティーマイクロエレクトロニクスエス.アール.エル.STMicroelectronics S.r.l.
发明人： SPINOLA DURANTE GUIDO , BALZELLI LUDOVICO ALESSANDRO , ZERBINI SARAH
IPC分类号： B81B5/00 , G01C19/56
CPC分类号： G01C19/5712
摘要： PROBLEM TO BE SOLVED: To provide an integrated microelectromechanical mechanism, having high sensing efficiency and high design possibilities. SOLUTION: A first sensor mass 16a is connected to a drive mass 3 via an elastic support member 20 so as to make a first sensing motion, in the presence of a first external stress. The drive mass 3 is attached to an anchor 7, disposed along a rotation axis, and makes a rotary motion on the rotation axis z. Installed in the drive mass is a through hole 9a, in which the first sensor mass 16a is disposed. The elastic support member and the anchor cause the first sensor mass 16a to be fixed to the drive mass 3 when a rotational motion is made, and cause the sensor mass 16a to be separated from the drive mass, when a sensing motion is made. A second sensor mass 25a is connected to the drive mass so as to make a second sensing motion in the presence of a second external stress. The first sensing motion is a rotational motion, centered about an in-plane axis, and the second sensing motion is a linear motion along the direction of the in-plane axis. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供具有高感测效率和高设计可能性的集成微机电机构。解决方案：第一传感器质量块16a经由弹性支撑构件20连接到驱动块3，以便在存在第一外部应力的情况下进行第一感测运动。驱动块3安装在沿旋转轴线设置的锚固件7上，并在旋转轴线z上进行旋转运动。安装在驱动块中的是设有第一传感器块16a的通孔9a。当进行旋转运动时，弹性支撑构件和锚使得第一传感器质量块16a固定到驱动块3，并且当进行感测运动时，使传感器质量块16a与驱动块分离。第二传感器质量25a连接到驱动质量块，以便在存在第二外部应力的情况下进行第二感测运动。第一感测运动是以面内轴为中心的旋转运动，第二感测运动是沿着平面内轴方向的直线运动。版权所有（C）2008，JPO＆INPIT

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