会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 8. 发明专利
    • Electron microscope
    • 电子显微镜
    • JPS61110954A
    • 1986-05-29
    • JP23378784
    • 1984-11-06
    • Hitachi LtdNippon Steel Corp
    • SATO YUJISUNAKOZAWA SHIGETOYANO MITSURUKOMATSU HAJIME
    • H01J37/26H01J37/295
    • H01J37/295
    • PURPOSE:To enable a microscopic image and an electron beam diffracted image to be simultaneously observed by displaying the electron beam diffracted image on a displayer according to the detected electron beam and producing the microscopic image from part of the electron beam through imaging lenses. CONSTITUTION:Electron rays discharged from an electron ray source 10 are irradiated upon a sample 14 located on an objective 16 through a convergent lens 12. Then, the electron rays pass through an objective 16 and then an electron beam diffracted image 36 is produced on the back focal surface 28 of the objective 16. At the same time, the main beam passes through the penetrating hole 48 of an electron beam detector 40 and a transmitted image is produced on the image surface 20 of the objective 16. The electron beam diffracted image 36 produced on the back focal surface 28 of the objective 16 is detected by an electron beam detector 40 consisting of many detection elements. Next, a displayer 44 receives the detection signal from the electron beam detector 40 through an amplifier 42 and then displays the electron beam diffracted image 36. On the other hand, the transmitted image is magnified by an intermediate lens 18 and the projection lens 22 and then the magnified image is produced on a fluorescent plate 26.
    • 目的:通过根据检测到的电子束在显示器上显示电子束衍射图像并通过成像透镜从电子束的一部分产生显微镜图像,同时观察微观图像和电子束衍射图像。 构成:通过会聚透镜12将从电子射线源10放出的电子射线照射在位于物镜16上的样品14上。然后,电子束通过物镜16,然后在电子束衍射图像36上产生电子束衍射图像36 同时,主光束通过电子束检测器40的穿透孔48,并且在物镜16的图像表面20上产生透射图像。电子束衍射图像 通过由许多检测元件组成的电子束检测器40检测在物镜16的后焦面28上产生的图36所示的光。 接下来,显示器44通过放大器42从电子束检测器40接收检测信号,然后显示电子束衍射图像36.另一方面,透射图像被中间透镜18和投影透镜22放大, 则在荧光板26上产生放大图像。