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1. 发明专利

JP2010103309A Particle-containing resin film and method of manufacturing laminate 审中-公开
标题翻译：含颗粒树脂薄膜和制造层压板的方法
公开(公告)号：JP2010103309A
公开(公告)日：2010-05-06
申请号：JP2008273369
申请日：2008-10-23
申请人： Nikon Corp , 株式会社ニコン
发明人： IGUCHI TADASUKE , KIKUCHI MAKIKO
IPC分类号： H01L21/60
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a particle-containing resin film which is easily applied to three-dimensional packaging and in which the particle-containing resin film having conductivity at a desired place is obtained.
SOLUTION: The method of manufacturing the particle-containing resin film includes a first stage of disposing a raw material mixture containing conductive particles and a resin or resin precursor between a plurality of first electrodes and a plurality of second electrodes disposed opposite them, a second stage of applying a voltage between one or more first electrodes and one or more second electrodes to align the conductive particles in the raw material mixture in the direction of an electric field produced between combinations of electrodes at a short distance among combinations of the first electrodes and second electrodes applied with the voltage, a third stage of obtaining a solidified body by solidifying the resin or resin precursor while applying the voltage, and a fourth stage of obtaining the resin-containing resin film by removing the first electrodes and second electrodes from the solidified body.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：待解决的问题：提供一种容易应用于三维包装的含颗粒的树脂膜的制造方法，其中获得在所需位置具有导电性的含颗粒的树脂膜。解决方案：含有颗粒的树脂膜的制造方法包括在多个第一电极和与其相对设置的多个第二电极之间设置包含导电粒子和树脂或树脂前体的原料混合物的第一阶段，在一个或多个第一电极和一个或多个第二电极之间施加电压的第二阶段，以使原料混合物中的导电颗粒沿着电极组合之间产生的电场方向在短距离内产生，所述电场在第一施加电压的电极和第二电极，第三阶段通过在施加电压的同时使树脂或树脂前体固化获得凝固体，第四阶段通过从第一阶段中除去第一电极和第二电极而获得含树脂的树脂膜凝固的身体。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2011190389A Method for producing particle-containing resin and production apparatus 审中-公开
标题翻译：生产含颗粒树脂和生产设备的方法
公开(公告)号：JP2011190389A
公开(公告)日：2011-09-29
申请号：JP2010059273
申请日：2010-03-16
申请人： Nikon Corp , 株式会社ニコン
发明人： KIKUCHI MAKIKO , IGUCHI TADASUKE , TAKAHASHI YOHEI , TAKI YUSUKE
IPC分类号： C08L101/00 , C08K7/00
摘要： PROBLEM TO BE SOLVED: To provide a method for producing a particle-containing resin, capable of selectively arranging the particles at desired positions in the resin.
SOLUTION: The method for producing the particle-containing resin includes: a step of providing a pair of substrates each having a patterned electrode on one face while facing the patterned electrodes opposite to each other and of placing a raw material mixture containing the particles and the resin material between the substrates; a step of applying electric potential between the patterned electrodes of the substrate pair to orient the particles; and a step of solidifying the resin material while keeping the orientation of the particles, wherein the face where the substrate is brought into contact with the raw material mixture comprising the patterned electrode is an almost flat face.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够选择性地将颗粒排列在树脂中所需位置的含颗粒树脂的制造方法。解决方案：含有颗粒的树脂的制造方法包括：在一面上设置一对基板，同时面对与图案化电极相对的图案化电极的一对基板，放置含有颗粒和基板之间的树脂材料; 在基板对的图案化电极之间施加电位以使颗粒定向的步骤; 以及在保持所述颗粒的取向的同时固化所述树脂材料的步骤，其中所述基板与包含图案化电极的原料混合物接触的面几乎是平的表面。版权所有（C）2011，JPO＆INPIT

3. 发明专利

JP2010126412A Method and apparatus for producing carbon nanotube 审中-公开
标题翻译：生产碳纳米管的方法和装置
公开(公告)号：JP2010126412A
公开(公告)日：2010-06-10
申请号：JP2008304180
申请日：2008-11-28
申请人： Nikon Corp , 株式会社ニコン
发明人： KIKUCHI MAKIKO
IPC分类号： C01B31/02
摘要： PROBLEM TO BE SOLVED: To provide a method for producing a carbon nanotube in which a long carbon nanotube is easily produced, in a method of bringing a mixture containing a raw material carbon component into contact with a catalyst particle.
SOLUTION: The production method includes bringing a mixture containing a raw material carbon component into contact with a catalyst particle 55 to grow a carbon nanotube 57 from the catalyst particle 55 by the raw material carbon component in the mixture. The mixture is brought into contact with an immobilizing material 41 for immobilizing a component other than the raw material carbon component or a component which reduces catalytic activity in the mixture, thereby reducing the component other than the raw material carbon component or the activity-reducing component in the mixture to increase the existence ratio of the raw material carbon component before growing the carbon nanotube 57.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：待解决的问题：提供一种使含有原料碳成分的混合物与催化剂粒子接触的方法，其中容易制造长碳纳米管的碳纳米管的制造方法。解决方案：制备方法包括使含有原料碳组分的混合物与催化剂颗粒55接触，以通过混合物中的原料碳组分从催化剂颗粒55生长碳纳米管57。使混合物与固定化材料41接触，用于固定除了原料碳成分以外的成分或降低混合物中的催化活性的成分，由此还原原料碳成分或活性降低成分以外的成分在该混合物中增加碳纳米管57生长前的原料碳成分的存在比例。（C）2010，JPO＆INPIT

4. 发明专利

JP2010116305A Process of producing carbon nanotube and base material for growing carbon nanotube 审中-公开
标题翻译：生产碳纳米管和生产碳纳米管的基料的工艺
公开(公告)号：JP2010116305A
公开(公告)日：2010-05-27
申请号：JP2008292057
申请日：2008-11-14
申请人： Nikon Corp , 株式会社ニコン
发明人： KIKUCHI MAKIKO
IPC分类号： C01B31/02
摘要： PROBLEM TO BE SOLVED: To provide a process of producing a carbon nanotube which facilitates the extension of carbon nanotubes to be grown.
SOLUTION: The process includes thermally decomposing a raw material substance to generate a decomposition mixture containing a raw material carbon component, and contacting the decomposition mixture with a catalyst particle 55 to grow a carbon nanotube 57 growing from the catalyst particle 55 out of the raw material carbon component. A fixing material 54 to fix a deactivating component for the catalyst particle 55 is arranged in the region where the catalyst particle 55 is placed. The carbon nanotube 57 is grown, while the decomposition mixture is in contact with the fixing material 54 and the catalyst particle 55 to fix the deactivating component in decomposition mixture to the fixing material 54.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种制造碳纳米管的方法，其有利于生长的碳纳米管的延伸。解决方案：该方法包括热分解原料物质以产生含有原料碳组分的分解混合物，并使分解混合物与催化剂颗粒55接触，以使从催化剂颗粒55生长的碳纳米管57从原料碳成分。在催化剂粒子55的配置区域配置固定催化剂粒子55的钝化成分的固定材料54。生成碳纳米管57，同时分解混合物与固定材料54和催化剂颗粒55接触，以将分解混合物中的钝化组分固定到固定材料54.版权所有（C）2010，JPO＆INPIT

5. 发明专利

JP2010269982A Method for manufacturing carbon nanotube assembly 审中-公开
标题翻译：制备碳纳米管组件的方法
公开(公告)号：JP2010269982A
公开(公告)日：2010-12-02
申请号：JP2009124220
申请日：2009-05-22
申请人： Nikon Corp , 株式会社ニコン
发明人： TAKAHASHI YOHEI , KIKUCHI MAKIKO
IPC分类号： C01B31/02 , B01J23/75
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a carbon nanotube assembly improved in the uniformity of carbon nanotube length. SOLUTION: The method for manufacturing the carbon nanotube assembly is characterized in that catalyst particles are heated to the temperature where the degree of the aggregation of the catalyst particles and the growth rate of the carbon nanotube are balanced in a CVD process of growing carbon nanotubes by the thermal decomposition of an organic compound vapor with the catalyst particles formed on a substrate as a base point. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：解决的问题：提供一种提高碳纳米管长度均匀性的碳纳米管组件的制造方法。解决方案：制造碳纳米管组件的方法的特征在于，催化剂颗粒被加热到在生长CVD过程中催化剂颗粒的聚集程度和碳纳米管的生长速率平衡的温度碳纳米管通过有机化合物蒸汽的热分解与形成在基板上的催化剂颗粒作为基点。版权所有（C）2011，JPO＆INPIT

6. 发明专利

JP2010111765A Particle-containing resin and production method thereof 有权
标题翻译：含颗粒树脂及其生产方法
公开(公告)号：JP2010111765A
公开(公告)日：2010-05-20
申请号：JP2008285413
申请日：2008-11-06
申请人： Nikon Corp , 株式会社ニコン
发明人： IGUCHI TADASUKE , KIKUCHI MAKIKO
IPC分类号： C08J5/24
摘要： PROBLEM TO BE SOLVED: To provide a method of producing particle-containing resin by which the particle-containing resin capable of exhibiting sufficient characteristics can be obtained even when the addition amount of particles is small.
SOLUTION: The method of producing the particle-containing resin includes: a first step of disposing a raw material mixture, containing particles and resin or a resin precursor, between a pair of electrodes disposed opposing to each other; a second step of applying a voltage between the pair of electrodes to orient the particles in the raw material mixture in the electric field direction; and a third step of solidifying the resin or the resin precursor while applying the voltage between the pair of electrodes. During the second step, the distance between the pair of electrodes is extended more than that in the first step.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：待解决的问题：提供一种生产含有颗粒的树脂的方法，即使当颗粒的添加量小时，也可以获得能够显示足够特性的含有颗粒的树脂。解决方案：含有颗粒的树脂的制造方法包括：在彼此相对设置的一对电极之间设置包含颗粒和树脂或树脂前体的原料混合物的第一步骤; 在所述一对电极之间施加电压以在所述原料混合物中的电场方向取向的第二步骤; 以及在施加一对电极之间的电压的同时使树脂或树脂前体固化的第三步骤。在第二步骤期间，一对电极之间的距离比第一步长。版权所有（C）2010，JPO＆INPIT

7. 发明专利

JP2010103812A Switching element and slide transformer 审中-公开
标题翻译：开关元件和滑块变压器
公开(公告)号：JP2010103812A
公开(公告)日：2010-05-06
申请号：JP2008274121
申请日：2008-10-24
申请人： Nikon Corp , 株式会社ニコン
发明人： IGUCHI TADASUKE , KIKUCHI MAKIKO , TAKI YUSUKE
IPC分类号： H03K17/94 , H01F29/06
摘要： PROBLEM TO BE SOLVED: To provide a switching element which causes a heavy current to be flowed although being small-sized.
SOLUTION: In a liquid 3 in which particles are dispersed, a pair of electrodes 41, 42 are disposed while facing to each other at a predetermined facing interval D1. By applying a high frequency voltage between the pair of electrodes 41, 42, dielectrophoresis of particles is performed in the liquid 3 to bridge between the electrodes 41, 42 to achieve a conduction state (Fig.(b)). By stopping applying the high frequency voltage between the pair of electrodes 41, 42, dielectrophoresis of particles is stopped, and bridging between these electrodes 41, 42 is destroyed to cancel the conduction state (Fig.(a)). Thus, ON/OFF of a switch is changed over in accordance with the presence or absence of applying the high frequency voltage to the electrodes 41, 42.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供虽然小型化而使大电流流过的开关元件。解决方案：在其中分散有颗粒的液体3中，以预定的相对间隔D1彼此面对地设置一对电极41,42。通过在一对电极41,42之间施加高频电压，在液体3中进行电介质电泳以在电极41,42之间桥接以实现导通状态（图（b））。通过停止在一对电极41,42之间施加高频电压，停止颗粒的介电电泳，并且破坏这些电极41,42之间的桥接以消除导通状态（图（a））。因此，根据是否存在对电极41,42施加高频电压来切换开关的ON / OFF。（C）2010，JPO＆INPIT

8. 发明专利

JP2005340513A Filtering device and exposure apparatus 审中-公开
标题翻译：过滤装置和曝光装置
公开(公告)号：JP2005340513A
公开(公告)日：2005-12-08
申请号：JP2004157681
申请日：2004-05-27
申请人： Nikon Corp , 株式会社ニコン
发明人： KIKUCHI MAKIKO
IPC分类号： H01L21/027
摘要： PROBLEM TO BE SOLVED: To supply a gas from which impurities are removed enough.
SOLUTION: The exposure apparatus is provided with a first filter 57 that is provided in supply paths 39, 42, 45, 47, and 59 for a gas supplied into a gas supply chamber that is partitioned in the exposure apparatus and has high cleaning performance to a low-humidity gas (approx. 1,000 ppm in humidity or less), a second filter 58 that is provided in the supply paths 39, 42, 45, 47, and 59 and has higher cleaning performance for a high-humidity gas (approx. 5% in humidity or more) higher than the low-humidity gas, and humidity adjusting devices 70 and 80 that are provided in at least either of the prestage of the first filter 57 and that of the second filter 58 and adjust the humidity of a gas according to the cleaning performance of the filters 57 and 58 in the poststage.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供足够去除杂质的气体。解决方案：曝光装置设置有第一过滤器57，其设置在供给路径39,42,45,47和59中，用于供给到在曝光装置中分隔的气体供给室中的气体，并且具有高的对低湿度气体的清洁性能（约为1000ppm或更少湿度），设置在供应路径39,42,45,47和59中的第二过滤器58，并且具有较高的高湿度清洁性能高于低湿度气体的气体（大约5％的湿度或更高），以及设置在第一过滤器57和第二过滤器58的至少任一个中的湿度调节装置70和80，并且调节根据后台中的过滤器57和58的清洁性能，气体的湿度。版权所有（C）2006，JPO＆NCIPI

9. 发明专利

JP2010027251A Laminate, and manufacturing method thereof 有权
标题翻译：层压板及其制造方法
公开(公告)号：JP2010027251A
公开(公告)日：2010-02-04
申请号：JP2008184134
申请日：2008-07-15
申请人： Nikon Corp , 株式会社ニコン
发明人： IGUCHI TADASUKE , KIKUCHI MAKIKO
IPC分类号： H01B13/00 , B32B7/02 , B32B37/24 , H01B5/14
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of a laminate equipped with particles containing resin capable of exhibiting sufficient characteristics even if an additive amount of the particles is less. SOLUTION: The manufacturing method of the particle containing resin has a first process to arrange two substrates equipped with electrodes in which electrode layers are formed on the substrates opposedly so that the electrode layers are opposed to each other, and a raw material mixture to contain the particles and the resin or a resin precursor is arranged between the electrode layers, a second process to apply a voltage between the electrode layers in the two substrates equipped with the electrode and to orient the particles in the raw material mixture in an electric field direction, a third process to solidify the resin or the resin precursor while applying the voltage between the electrode layers, and a fourth process to peel off the two substrates equipped with the electrodes from the electrode layers and to obtain the laminate in which the particle containing resin is arranged between two electrode layers. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：即使颗粒的添加量较少，也可以提供一种具有能够表现出足够特性的含有树脂的颗粒的层压体的制造方法。解决方案：含有颗粒的树脂的制造方法具有第一工序，将配置有电极的两个基板配置在基板的相反方向上形成电极层，使得电极层彼此相对，并且将原料混合物为了容纳所述粒子，在所述电极层之间配置有树脂或树脂前体，在配置有所述电极的两个基板的电极层之间施加电压的第二工序，将所述原料混合物中的粒子定向成电场方向，第三种在电极层之间施加电压时固化树脂或树脂前体的方法，以及从电极层剥离装备有电极的两个基板的第四工序，并获得其中颗粒在两个电极层之间配置含有树脂的树脂。版权所有（C）2010，JPO＆INPIT

10. 发明专利

JP2009173915A Particle-containing resin and method of manufacturing the same 有权
标题翻译：含颗粒树脂及其制造方法
公开(公告)号：JP2009173915A
公开(公告)日：2009-08-06
申请号：JP2008330830
申请日：2008-12-25
申请人： Nikon Corp , 株式会社ニコン
发明人： TAKI YUSUKE , IGUCHI TADASUKE , KIKUCHI MAKIKO
IPC分类号： C08L101/00 , C08K7/00
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a particle-containing resin for obtaining a particle-containing resin which can exhibit adequate characteristics even when the small amount of particles is added.
SOLUTION: The method of manufacturing the particle-containing resin includes: a first process of arranging a raw material mixture including particles and a resin or a resin precursor between a pair of electrodes arranged opposite to each other; a second process of aligning the particles in the raw material mixture in the electrical field direction by applying a voltage between the pair of electrodes; and a third process of solidifying the resin or resin precursor while applying a voltage between the pair of electrodes.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：待解决的问题：提供一种制造含颗粒的树脂的方法，用于获得即使添加少量颗粒也能够表现出足够特性的含颗粒的树脂。解决方案：含有颗粒的树脂的制造方法包括：在彼此相对布置的一对电极之间布置包括颗粒和树脂或树脂前体的原料混合物的第一工序; 通过在所述一对电极之间施加电压来使所述原料混合物中的所述粒子在电场方向上对准的第二过程; 以及在所述一对电极之间施加电压的同时使所述树脂或树脂前体固化的第三工序。版权所有（C）2009，JPO＆INPIT

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