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1. 发明专利

JP2007250966A Filler and substrate using it 有权
标题翻译：填充物和底物使用它
公开(公告)号：JP2007250966A
公开(公告)日：2007-09-27
申请号：JP2006074342
申请日：2006-03-17
申请人： Ngk Spark Plug Co Ltd , 日本特殊陶業株式会社
发明人： KAWAMURA AYAKO , WAKAZONO MAKOTO , MIYAJI MONICHI , KOJIMA TOSHIFUMI , TAKADA TOSHIKATSU
IPC分类号： H05K1/11 , H05K3/32
摘要： PROBLEM TO BE SOLVED: To provide a filler to be easily drilled without generating adhesion defects or cracks between the filler and a substrate. SOLUTION: The filler to be filled in at least one of a through-hole and a recess on the substrate contains at least a curing agent, an inorganic filler, an organic filler, and a liquid resin. Further, the filler is prepared characteristically in the form of liquid. By the filler, the linear thermal expansion coefficient difference of the substrate and the cured filler is low and the elastic modulus of excellent drilling workability is attained. Thus, the generation of the adhesion defects is suppressed between the substrate and the filler generated by the difference in the linear thermal expansion coefficient and the cracks by the elastic modulus. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供容易钻孔的填料，而不会在填料和基材之间产生粘合缺陷或裂纹。解决方案：填充在基板上的通孔和凹部中的至少一个中的填料至少含有固化剂，无机填料，有机填料和液体树脂。此外，填充剂以液体的形式特征性地制备。通过填料，基板和固化的填料的线性热膨胀系数差小，并且获得了优异的钻孔加工性的弹性模量。因此，通过线膨胀系数和裂纹的差异产生的基板和填料之间的粘合缺陷的产生被弹性模量抑制。版权所有（C）2007，JPO＆INPIT

2. 发明专利

JP2006003868A Optical waveguide device and its manufacturing method 审中-公开
标题翻译：光波器件及其制造方法
公开(公告)号：JP2006003868A
公开(公告)日：2006-01-05
申请号：JP2005078219
申请日：2005-03-17
申请人： Ngk Spark Plug Co Ltd , 日本特殊陶業株式会社
发明人： KOJIMA TOSHIFUMI , MIYAJI MONICHI , ONO TAKESHI , SUZUKI ATSUSHI , HORIO TOSHIKAZU , TAKADA TOSHIKATSU , KAWAMURA AYAKO
IPC分类号： G02B6/13 , G02B6/122
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide device having the high degree of freedom in terms of design such as the forming position of an optical path changing part and restraining the leakage of light and scattering loss, and its manufacturing method. SOLUTION: The manufacturing method for the optical waveguide device is a method for manufacturing the optical waveguide device 100 equipped with a base part 3, a lower clad part 21 arranged on the base part 3, a core part 1 layered on the lower clad part 21 and propagating light, an upper clad part 22 arranged on the core part 1, the optical path changing parts 41 and 42 formed on the base part 3 and changing the optical path of the light propagated through the core part, and includes a core part forming unhardened film disposing stage for disposing a core part forming unhardened film on a layered body equipped with the base part 3, and the lower clad part 21 and the optical path changing parts 41 and 42 formed on the base part 3, a core part forming stage for forming the core part 1, and an upper clad part forming stage for forming the upper clad part 22. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种在诸如光路改变部分的形成位置和抑制光的泄漏和散射损耗的设计方面具有高自由度的光波导装置及其制造方法。解决方案：光波导器件的制造方法是一种制造光波导器件100的方法，该光波导器件100具有基部3，布置在基部3上的下部包层部21，层叠在下部的芯部1 包层部21和传播光，布置在芯部1上的上包层部22，形成在基部3上的光路改变部41和42，并且改变通过芯部传播的光的光路，并且包括芯部，形成未硬化膜配置阶段，用于在形成未硬化膜的芯部上设置有配备有基部3的层叠体，下包层部21和形成在基部3上的光路改变部41和42，芯用于形成芯部1的部分成型阶段和用于形成上部包层部分22的上部包层部分形成阶段。（C）2006年，JPO＆NCIPI

3. 发明专利

JP2014207374A 半導体製造装置用部品及びその製造方法有权
标题翻译：半导体制造装置的部件及其制造方法
公开(公告)号：JP2014207374A
公开(公告)日：2014-10-30
申请号：JP2013084949
申请日：2013-04-15
申请人：日本特殊陶業株式会社 , Ngk Spark Plug Co Ltd
发明人： KONDO AYAKO , SUZUKI ATSUSHI , MIYAJI MONICHI , INUI YASUHIKO
IPC分类号： H01L21/683 , C04B37/02 , H02N13/00
摘要：【課題】セラミック部材と金属部材とを接着剤層で接合する半導体製造装置用部品において、応力緩和が可能でしかも密着性が良好な接着剤層を有する半導体製造装置用部品及びその製造方法を提供すること。【解決手段】セラミック部材(9)と、金属部材(15)と、セラミック部材(9)及び金属部材(15)の間に配置されてセラミック部材(9)及び金属部材(15)を接合する第1の接着剤層(97)と、を備えた半導体製造装置用部品(1)において、セラミック部材(9)と金属部材(15)とに対する水の接触角は90?以下であり、且つ、第1の接着剤層(97)は、伸び率が100%以上で、ショアAの硬度が70以下である。【選択図】図2
摘要翻译：要解决的问题：为了提供一种具有陶瓷构件和金属构件的半导体制造装置的一部分，其通过粘合剂层粘合在一起，并且被布置成使得粘合剂层用于松弛应力并具有良好的粘附性，并且提供一种方法用于制造用于半导体制造装置的这种部件。解决方案：用于半导体制造装置的部分（1）包括：陶瓷构件（9）; 金属构件（15）; 以及设置在所述陶瓷构件（9）和所述金属构件（15）之间用于将所述陶瓷构件（9）和所述金属构件（15）接合在一起的第一粘合剂层（97）。水与陶瓷构件（9）和金属构件（15）的接触角为90°以下。第一粘合层（97）的伸长率为100％以上，肖氏A硬度为70以下。

4. 发明专利

JP2008214479A Inorganic material component 有权
标题翻译：无机材料组件
公开(公告)号：JP2008214479A
公开(公告)日：2008-09-18
申请号：JP2007053318
申请日：2007-03-02
申请人： Ngk Spark Plug Co Ltd , 日本特殊陶業株式会社
发明人： KAWAMURA AYAKO , MIYAJI MONICHI , HORIO TOSHIKAZU , ONO TAKESHI , KOJIMA TOSHIFUMI , TAKADA TOSHIKATSU
IPC分类号： C08L63/00 , H05K1/02
摘要： PROBLEM TO BE SOLVED: To provide an inorganic material component capable of having a cured product which shows a low thermal expansion and an excellent processability and is excellent in filling property in the state of a filler.
SOLUTION: The component (100a) is the inorganic material component (100a) comprising an inorganic material substrate (LTCC substrate etc. 200) having void parts (210) which are through-holes and/or recesses and a cured product (300) obtained by filling the filler in at least one of the void parts (through-holes etc. 210) 210 and curing the same. The filler comprises a liquid epoxy resin (bisphenol and aminophenol etc.), a hardener, a compatibilizer (silicone oil etc.), an inorganic filler (silica etc.) and an organic filler (silicone rubber), provided that the inorganic filler has a particle size distribution wherein the difference between D10 and D50 is ≥9 μm. Alignment holes (310) can be formed on some parts of the cured product (300).
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供能够具有低热膨胀和优异加工性的固化产物的无机材料成分，并且在填料状态下的填充性能优异。解决方案：组件（100a）是包括具有作为通孔和/或凹部的空隙部分（210）的无机材料基板（LTCC基板等）200的无机材料部件（100a）和固化产物 300），其通过将填料填充在空隙部（通孔等）210中的至少一个中而使其固化。填料包括液体环氧树脂（双酚和氨基苯酚等），硬化剂，增容剂（硅油等），无机填料（二氧化硅等）和有机填料（硅橡胶），条件是无机填料具有其中D10和D50之间的差为≥9μm的粒度分布。可以在固化产物（300）的一些部分上形成对准孔（310）。版权所有（C）2008，JPO＆INPIT

5. 发明专利

JP2005345928A Optical waveguide device and manufacturing method thereof, optical path conversion component, optical waveguide structure body with optical path conversion component 有权
标题翻译：光学波导装置及其制造方法，光学路径转换组件，光学波形结构体与光路转换组件
公开(公告)号：JP2005345928A
公开(公告)日：2005-12-15
申请号：JP2004167810
申请日：2004-06-04
申请人： Ngk Spark Plug Co Ltd , 日本特殊陶業株式会社
发明人： SUZUKI ATSUSHI , KOJIMA TOSHIFUMI , ONO TAKESHI , MIYAJI MONICHI , HORIO TOSHIKAZU , TAKADA TOSHIKATSU
IPC分类号： G02B6/42 , G02B6/122
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide device with which an angular deviation of a reflecting surface is less likely to occur, because of the stable arrangement of an optical oath conversion component, and with which the light transmission loss is small. SOLUTION: The optical waveguide device 10 includes a support substrate 11, an optical waveguide structure body 41, and the optical path conversion component 52. The support substrate 11 has a substrate main surface 12. The optical waveguide structure body 41 has clads 42, 44 surrounding cores 43, 43 as optical paths for transmitting an optical signal and is supported on the substrate main surface 12. The optical path conversion component 52 consists of a pedestal part 53 and a light-reflecting part 54. The pedestal part 53 has an underside 56 placed on the substrate main surface 12. The light-reflecting part 54 is formed integral with the pedestal part 53 and has reflecting surfaces 55 inclined with respect to the underside 56. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种由于光学誓言转换部件的稳定布置而导致反射面的角度偏差不太可能发生的光波导装置，光传输损耗小的光波导装置。解决方案：光波导装置10包括支撑基板11，光波导结构体41和光路转换部件52.支撑基板11具有基板主表面12.光波导结构体41具有包层 42,44围绕芯43,43作为用于传输光信号的光路，并被支撑在基板主表面12上。光路转换部件52由基座部分53和光反射部分54组成。基座部分53 具有放置在基板主表面12上的底面56.光反射部分54与基座部分53形成一体，并且具有相对于下侧56倾斜的反射表面55.权利要求（C）2006，JPO＆NCIPI

6. 发明专利

JP2005331779A Optical waveguide structure, its manufacturing method, and optical waveguide device 有权
标题翻译：光波导结构及其制造方法和光波导装置
公开(公告)号：JP2005331779A
公开(公告)日：2005-12-02
申请号：JP2004151033
申请日：2004-05-20
申请人： Ngk Spark Plug Co Ltd , 日本特殊陶業株式会社
发明人： SUZUKI ATSUSHI , KOJIMA TOSHIFUMI , MIYAJI MONICHI , ONO TAKESHI , HORIO TOSHIKAZU , TAKADA TOSHIKATSU
IPC分类号： G02B6/122
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide structure that facilitates accuracy and great latitude of design, and also to provide its manufacturing method and an optical waveguide device. SOLUTION: The method for manufacturing the structure includes a process for forming an unhardened lower clad part 21" which becomes a lower clad part 21; and a process for embedding, into the unhardened lower clad part 21", a part of optical path changing components 41, 42 which become optical path changing parts 41, 42. The structure 100 includes the lower clad part 21; a core part 1 which is arranged in the lower clad part 21, with light propagating therein; an upper clad part 22 arranged on the core part 1; and the optical path changing parts 41, 42 which, partly arranged in the lower clad part 21, change the optical path of the light propagating in the core part 1. The optical waveguide device 200 includes this structure 100 and optical elements 61, 62. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种有助于精度和设计宽度的光波导结构，并且还提供其制造方法和光波导装置。解决方案：该结构的制造方法包括形成下部包层部21的未硬化的下部包层部21“的工序，以及将未硬化的下部包层部21”嵌入一部分光学部件的工序路径改变部件41,42，其成为光路改变部分41,42。结构100包括下包层部分21; 芯部1布置在下包层部分21中，光在其中传播; 布置在芯部1上的上包层部22; 并且部分地布置在下包层部分21中的光路改变部分41,42改变在芯部分1中传播的光的光路。光波导器件200包括该结构100和光学元件61,62。版权所有（C）2006，JPO＆NCIPI

7. 发明专利

JP2005331759A Manufacturing method for device with optical waveguide structure 有权
标题翻译：具有光波导结构的器件的制造方法
公开(公告)号：JP2005331759A
公开(公告)日：2005-12-02
申请号：JP2004150688
申请日：2004-05-20
申请人： Ngk Spark Plug Co Ltd , 日本特殊陶業株式会社
发明人： SUZUKI ATSUSHI , KOJIMA TOSHIFUMI , MIYAJI MONICHI , ONO TAKESHI , HORIO TOSHIKAZU , TAKADA TOSHIKATSU
IPC分类号： G02B6/13 , G02B6/122 , H01L31/0232 , H01S5/022
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a device having an optical waveguide structure with little optical transmission loss that enables an optical waveguide to be efficiently manufactured on a substrate. SOLUTION: The method for manufacturing a device having, on a substrate, an optical waveguide structure which is composed of a core part transmitting light and a clad part comprising an upper and a lower clad part and surrounding the core part, is characterized in that it includes an unhardened lower clad part forming process in which an unhardened film for the lower clad part is press-fixed onto the substrate; a lower clad part forming process in which the lower clad part is obtained by hardening the unhardened film for the lower clad part; a core part forming process in which the core part is formed; and an upper clad part forming process in which the upper clad part is formed. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种具有光传输损耗小的光波导结构的装置的制造方法，能够在基板上有效地制造光波导。解决方案：一种在基板上具有透光元件的核心部分的光波导结构的装置的制造方法以及包含上包层部分和下包层部分并且围绕芯部的包层部分的特征在于其中包括未硬化的下部包层部分形成工艺，其中用于下部包层部分的未硬化膜被压固在基底上; 下包层部分形成工艺，其中通过硬化用于下包层部分的未硬化膜获得下包层部分; 形成芯部的芯部形成工序; 以及形成上部包层部的上部包层部形成工序。版权所有（C）2006，JPO＆NCIPI

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