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1. 发明专利

JP2011191717A Pattern inspection apparatus and pattern inspection method 有权
标题翻译：模式检查装置和模式检查方法
公开(公告)号：JP2011191717A
公开(公告)日：2011-09-29
申请号：JP2010060222
申请日：2010-03-17
申请人： Nec Corp , Toshiba Corp , 日本電気株式会社 , 株式会社東芝
发明人： ISOMURA IKUNAO , HIRANO RYOICHI , KIKUIRI NOBUTAKA
IPC分类号： G01N21/956 , G03F1/84 , H01L21/027 , H01L21/66
CPC分类号： G03F1/84 , G01N21/95607
摘要： PROBLEM TO BE SOLVED: To provide a pattern inspection device capable of performing high-accuracy inspection upon die-to-die inspection on an inspection object sample where a preliminarily distorted pattern is formed.
SOLUTION: The pattern inspection device 100 of one embodiment includes: an optical image acquiring unit 150 acquiring the optical image data of a target object on which a plurality of identical patterns with respective distortions are formed at given positions; a cut-out unit 72 to cut out the optical image data into a plurality of partial optical image data; a correction unit 74 correcting positions of the plurality of partial optical image data by using the distortion information from which distortion amounts of the patterns formed in the inspection sample can be acquired; and a comparing circuit 108 comparing the plurality of corrected partial optical image data with each other by each pixel.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够对形成预先变形的图案的检查对象样品进行模 - 模检验的高精度检查的图案检查装置。解决方案：一个实施例的图案检查装置100包括：光学图像获取单元150，获取在给定位置处形成有多个相同失真的相同图案的目标对象的光学图像数据; 切出单元72，用于将光学图像数据切割成多个部分光学图像数据; 校正单元74通过使用可以获取在检查样本中形成的图案的失真量的失真信息来校正多个部分光学图像数据的位置; 以及比较电路108，通过每个像素将多个校正的部分光学图像数据彼此进行比较。版权所有（C）2011，JPO＆INPIT

2. 发明专利

JP2011099788A Pattern inspection device and pattern inspection method 有权
标题翻译：模式检验装置和模式检验方法
公开(公告)号：JP2011099788A
公开(公告)日：2011-05-19
申请号：JP2009255377
申请日：2009-11-06
申请人： Nec Corp , Toshiba Corp , 日本電気株式会社 , 株式会社東芝
发明人： HIRANO RYOICHI , ISOMURA IKUNAO , KIKUIRI NOBUTAKA
IPC分类号： G01N21/956
摘要： PROBLEM TO BE SOLVED: To provide a pattern inspection device acquiring high signal intensity with respect to each of a coarse and fine patterns.
SOLUTION: This pattern inspection device 100 is equipped with: an illumination optical system 170 for illuminating a pattern-formed photomask 101; a beam splitter 131 for separating optically a first optical image acquired from the photomask 101 by illumination into a plurality of second optical images; a plurality of sensor circuits 106, 136 for generating a plurality of optical image data at least partial signal intensity of which is different respectively, by using the plurality of separated second optical images; a reference circuit 112 for generating reference image data to be compared with a piece of the plurality of optical image data; and a comparison circuit 108 for comparing the piece of the plurality of optical image data with the reference image data, pixel by pixel.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种针对粗细和精细图案获得高信号强度的图案检查装置。解决方案：该图案检查装置100配备有：用于照射图案形成的光掩模101的照明光学系统170; 分光器131，用于通过照明将从光掩模101获取的第一光学图像光学分离成多个第二光学图像; 多个传感器电路106,136，用于通过使用多个分离的第二光学图像来生成至少部分信号强度不同的多个光学图像数据; 用于产生要与多个光学图像数据中的一个进行比较的参考图像数据的参考电路112; 以及用于逐个像素地比较多个光学图像数据与参考图像数据的比较电路108。版权所有（C）2011，JPO＆INPIT

3. 发明专利

JP2012002680A Apparatus and method for correcting sensor output data 有权
标题翻译：校正传感器输出数据的装置和方法
公开(公告)号：JP2012002680A
公开(公告)日：2012-01-05
申请号：JP2010138125
申请日：2010-06-17
申请人： Nec Corp , Toshiba Corp , 日本電気株式会社 , 株式会社東芝
发明人： INOUE HIROSHI , HIRANO RYOICHI , KIKUIRI NOBUTAKA
IPC分类号： G01N21/956 , G03F1/84
摘要： PROBLEM TO BE SOLVED: To correct a change in an output level of a sensor, which may be caused by a light quantity change with the lapse of time and a sensitivity change of each light receiving element itself of the sensor.SOLUTION: A correction apparatus for correcting output data from the sensor includes the following circuits. An offset circuit illuminates a sample, receives light transmitted or reflected through/by the sample, inputs output data from the sensor for outputting image data, and performs offset correction. A gain correction circuit inputs a gain correction coefficient and performs gain correction by the inputted gain correction coefficient. An average value calculation circuit calculates an average value of respective pixel values by using sensor output data acquired on a position where light is transmitted from a pattern in a transmission state or on a position where light is reflected from the pattern in a reflection state out of sensor output data processed by offset correction and gain correction. A gain correction coefficient calculation circuit corrects the gain correction coefficient to be used for gain correction by using a change rate of the average value from a set reference value and feeds back the corrected gain correction coefficient to the gain correction circuit.
摘要翻译：要解决的问题：为了校正传感器的输出电平的变化，这可能是由于随时间的光量变化和传感器的每个光接收元件本身的灵敏度变化引起的。解决方案：用于校正来自传感器的输出数据的校正装置包括以下电路。偏移电路照亮样品，接收通过样本传输或反射的光，输入来自传感器的输出数据以输出图像数据，并进行偏移校正。增益校正电路输入增益校正系数，并通过输入的增益校正系数进行增益校正。平均值计算电路通过使用从在透射状态下的图案或从反射状态的图案反射光的位置处获取的传感器输出数据获得的各个像素值的平均值，通过偏移校正和增益校正处理的传感器输出数据。增益校正系数计算电路通过使用来自设定的参考值的平均值的变化率来校正用于增益校正的增益校正系数，并将校正的增益校正系数反馈给增益校正电路。版权所有（C）2012，JPO＆INPIT

4. 发明专利

JP2012002676A Mask defect checking device and mask defect checking method 审中-公开
标题翻译：掩蔽缺陷检查装置和掩蔽缺陷检查方法
公开(公告)号：JP2012002676A
公开(公告)日：2012-01-05
申请号：JP2010138062
申请日：2010-06-17
申请人： Nec Corp , Toshiba Corp , 日本電気株式会社 , 株式会社東芝
发明人： HIRANO RYOICHI , KIKUIRI NOBUTAKA
IPC分类号： G01N21/956
摘要： PROBLEM TO BE SOLVED: To provide a mask defect checking device that realizes highly accurate defect detection by acquiring checkup pictures differing in focal position.SOLUTION: A mask defect checking device has: a light source; an illuminating optical system that branches light emitted from the light source into first and second checking beams and irradiates different areas of the same face of a mask with the beams; an image forming optical system that forms the first and second checking beams irradiating the mask into first and second images on the same image face; first and second enlarging optical systems that respectively enlarge the first and second images; first and second picture sensors that respectively photograph the first and second images enlarged by the first and second enlarging optical systems; a comparator unit that compares first and second checkup pictures, which are pictures of the first and second images photographed by the first and second picture sensors, with a reference picture and detects any defect in the mask; and a mechanism that displaces by a prescribed extent a focal position with respect to the image face of the first enlarging optical system and a focal position with respect to the image face of the second enlarging optical system.
摘要翻译：要解决的问题：提供一种掩模缺陷检查装置，其通过获取焦点位置不同的检验图像来实现高度准确的缺陷检测。解决方案：掩模缺陷检查装置具有：光源; 照明光学系统，其将从所述光源发射的光分散到第一和第二检查光束中，并用所述光束照射面罩的相同面的不同区域; 形成光学系统，其形成将所述掩模照射在同一图像面上的第一和第二图像的第一和第二检查光束; 分别放大第一和第二图像的第一和第二放大光学系统; 分别拍摄由第一和第二放大光学系统放大的第一和第二图像的第一和第二图像传感器; 比较单元，其将作为由第一和第二图像传感器拍摄的第一和第二图像的图像的第一和第二检查图像与参考图像进行比较，并检测掩模中的任何缺陷; 以及相对于第一放大光学系统的图像面和相对于第二放大光学系统的图像面的焦点位置移动预定范围的焦点位置的机构。版权所有（C）2012，JPO＆INPIT

5. 发明专利

JP2012002675A Pattern inspection apparatus and pattern inspection method 有权
标题翻译：模式检查装置和模式检查方法
公开(公告)号：JP2012002675A
公开(公告)日：2012-01-05
申请号：JP2010138061
申请日：2010-06-17
申请人： Nec Corp , Toshiba Corp , 日本電気株式会社 , 株式会社東芝
发明人： INOUE HIROSHI , HIRANO RYOICHI , KIKUIRI NOBUTAKA
IPC分类号： G01N21/956 , G03F1/84
摘要： PROBLEM TO BE SOLVED: To provide an apparatus capable of obtaining sufficient contrast required for an inspection even when inspecting a mask on which a pattern having reduced signal amplitude is formed.SOLUTION: The pattern inspection apparatus includes a sensor, a storage device, a gradation conversion part, and a comparison part. The sensor picks up an optical image of a mask to be inspected on which a pattern is formed. The storage device stores a plurality of gradation conversion tables created in accordance with the sorts of masks. The gradation conversion part selects a gradation conversion table corresponding to the sort of the mask to be inspected from the plurality of gradation conversion table stored in the storage device and performs gradation conversion of a pixel value of the optical image data picked up by the sensor in accordance with the selected gradation conversion table. The comparison part inputs reference image data to be compared with the gradation-converted optical image data and compares the gradation-converted optical image data with the reference image data in each pixel.
摘要翻译：要解决的问题：即使在检查其上形成有减小的信号幅度的图案的掩模时，提供能够获得检查所需的足够的对比度的装置。解决方案：图案检查装置包括传感器，存储装置，灰度转换部分和比较部分。传感器拾取要在其上形成图案的被检查的掩模的光学图像。存储装置存储根据各种掩码创建的多个灰度转换表。灰度转换部从存储在存储装置中的多个灰度转换表中选择与被检查掩模的种类对应的灰度变换表，并对由传感器拾取的光学图像数据的像素值进行灰度转换根据所选择的灰度转换表。比较部分输入要与灰度转换的光学图像数据进行比较的参考图像数据，并将灰度转换的光学图像数据与每个像素中的参考图像数据进行比较。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2004303536A Electronic equipment 有权
公开(公告)号：JP2004303536A
公开(公告)日：2004-10-28
申请号：JP2003093996
申请日：2003-03-31
申请人： Toshiba Corp , 株式会社東芝
发明人： IWASAKI HIDEO , KUNO KATSUMI , TAKAMATSU TOMONAO , SAKAGAMI HIDEKAZU , KIKUIRI NOBUTAKA
IPC分类号： H01M8/04
CPC分类号： Y02E60/50
摘要： PROBLEM TO BE SOLVED: To provide electronic equipment capable of heating a fuel cell with the use of heat of heat-generating components and maintaining the electronic components and the fuel cell in a proper operating temperature when the fuel cell generates heat.
SOLUTION: The electronic equipment, provided with the heat-generating electronic components 7 and the fuel cell 17 as a power source, is also provided with a heat transfer means 9 transferring heat by heat generation of the electronic components to the fuel cell 17, and a heat radiation part 13 attached to the heat transfer means 9 for dissipating excess heat by the heat generation of the fuel cell 17. It is so constructed that an airstream channel guiding a part of cooling air sent from a blower means 19 for sending cooling air to the heat radiating part 13 to an air-in-flow hole of the fuel cell 17 is provided, and an exit 31 of an exhaust channel 29 of the fuel cell 17 is arranged at a distribution channel for the air sent from the blower means 19 and flowing out of the heat radiation part 13.
COPYRIGHT: (C)2005,JPO&NCIPI

7. 发明专利

JP2004291154A Battery mounted robot 审中-公开
公开(公告)号：JP2004291154A
公开(公告)日：2004-10-21
申请号：JP2003086802
申请日：2003-03-27
申请人： Toshiba Corp , 株式会社東芝
发明人： OGAWA HIDEKI , YAMAMOTO DAISUKE , KIKUIRI NOBUTAKA , MATSUHIRA NOBUHITO , YOSHIMI TAKU , SUZUKI KAORU , HIROKAWA JUNKO , NAKAMOTO SHUICHI
IPC分类号： B25J19/00 , H01M8/00 , H01M8/04 , H01M10/44
CPC分类号： Y02E60/50
摘要： PROBLEM TO BE SOLVED: To provide a robot for personal use wherein it is not necessary to return to a charging station for charging if a mounted secondary battery is used up to dispense with the charging station, and the problem wherein the robot is not available during the charging period is solved, and which can work without charging for a long time. SOLUTION: The robot has a rechargeable secondary battery built in the robot, a fuel cell for charging the secondary battery, and a charging circuit as an auxiliary battery in a robot body so that the power generating function of the fuel cell is maintained to keep charging of the secondary battery, and the secondary battery and the fuel cell are combinedly used. COPYRIGHT: (C)2005,JPO&NCIPI

8. 发明专利

JP2003294397A In-fluid free moving body 审中-公开
标题翻译：无流体移动体
公开(公告)号：JP2003294397A
公开(公告)日：2003-10-15
申请号：JP2002097984
申请日：2002-03-29
申请人： Toshiba Corp , 株式会社東芝
发明人： SADAMOTO ATSUSHI , DEBASIS BISWAS , KIKUIRI NOBUTAKA , SATO HIROKAZU , TAKAHASHI HIROSHI , NISHIMURA OSAMU , MATSUOKA TAKASHI
IPC分类号： F42B10/60 , B63H25/46 , F42B15/01
摘要： PROBLEM TO BE SOLVED: To provide a free movement control mechanism which is reduced in size and weight, and also to provide an in-fluid free moving body using it.
SOLUTION: The in-fluid free moving body includes: a body 9 that moves freely within a fluid for movement; a fluid logic circuit 5 provided within the body 9 for selecting one of a plurality of fluid paths 2a and 2b by use of the nature of the fluid and obtaining multivalued outputs; and a plurality of nozzles 14a and 14b connected to the plurality of fluid paths of the fluid logic circuit 5 and disposed in different positions on the surface of the body 9 for selectively ejecting a main jet 18 outside of the body 9 in a manner corresponding to one of the multivalued outputs.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种减小尺寸和重量的自由运动控制机构，并且还提供使用它的流体内移动体。解决方案：无流体移动体包括：主体9，其在流体内自由移动以移动; 设置在主体9内的流体逻辑电路5，用于通过使用流体的性质选择多个流体通路2a和2b中的一个，并获得多值输出; 以及连接到流体逻辑电路5的多个流体路径并且设置在主体9的表面上的不同位置的多个喷嘴14a和14b，用于以对应于主体9的方式选择性地将主喷嘴18喷射到主体9外部多值输出之一。版权所有（C）2004，JPO

9. 发明专利

JP2005011123A Portable information apparatus 有权
标题翻译：便携式信息装置
公开(公告)号：JP2005011123A
公开(公告)日：2005-01-13
申请号：JP2003175515
申请日：2003-06-19
申请人： Toshiba Corp , 株式会社東芝
发明人： TAKAMATSU TOMONAO , SAKAGAMI HIDEKAZU , KIKUIRI NOBUTAKA , KUNO KATSUMI , IWASAKI HIDEO
IPC分类号： G06F1/16 , G06F1/20 , H05K7/20
摘要： PROBLEM TO BE SOLVED: To provide a portable information apparatus provided with a fuel cell unit on the backside of a display unit of a notebook computer or the like. SOLUTION: The portable information apparatus is provided with a first case 3 with a built-in semiconductor element, a second case 9 which is provided on the first case 3 via a hinge part 5 for permitting the opening and closing thereof and has the display unit 7, and the fuel cell unit 13 provided in the second case. Heat generated by the fuel cell unit 13 can be radiated from the display unit 7 and a wall part 11 in the second case 9, and the fuel cell unit 13 is thermally connected to the wall part 11 in the second case 9. In addition, the fuel cell unit 13 is thermally connected to a radiation unit 35 disposed in the second case 9. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供在笔记本电脑等的显示单元的背面上设置有燃料电池单元的便携式信息装置。解决方案：便携式信息装置设置有具有内置半导体元件的第一壳体3，第二壳体9，其经由铰链部5设置在第一壳体3上，用于允许其打开和关闭，并且具有显示单元7和设置在第二壳体中的燃料电池单元13。燃料电池单元13产生的热能够从显示单元7和第二壳体9中的壁部11辐射，燃料电池单元13与第二壳体9中的壁部11热连接。此外，燃料电池单元13热连接到设置在第二壳体9中的辐射单元35.版权所有（C）2005，JPO＆NCIPI

10. 发明专利

JP2004342413A Fuel cell system 审中-公开
公开(公告)号：JP2004342413A
公开(公告)日：2004-12-02
申请号：JP2003136173
申请日：2003-05-14
申请人： Toshiba Corp , 株式会社東芝
发明人： ISOZAKI YOSHIYUKI , SATO HIROSUKE , KIKUIRI NOBUTAKA
IPC分类号： C01B3/32 , C01B3/48 , C01B3/50 , H01M8/04 , H01M8/06
CPC分类号： H01M8/0662 , C01B3/323 , C01B3/48 , C01B3/501 , C01B2203/00 , C01B2203/0233 , C01B2203/0283 , C01B2203/0405 , C01B2203/044 , C01B2203/0445 , C01B2203/047 , C01B2203/066 , C01B2203/0811 , C01B2203/0822 , C01B2203/0827 , C01B2203/1035 , C01B2203/1052 , C01B2203/1064 , C01B2203/107 , C01B2203/1076 , C01B2203/1082 , C01B2203/1205 , C01B2203/145 , C01B2203/146 , H01M8/04097 , H01M8/0612 , Y02P20/128
摘要： PROBLEM TO BE SOLVED: To provide a compact fuel cell system applicable also as a power source for portable electronic equipment.
SOLUTION: The fuel cell system (1) is provided with a reforming part (20) obtaining reformed gas containing hydrogen by reforming a raw material, a fuel cell body (30) generating power by supplying the reformed gas to a fuel electrode and supplying an oxidant gas containing oxygen to an oxidant electrode, and a circulation gas flow channel (40) circulating at least part of the exhaust gas containing hydrogen exhausted from the fuel electrode side to the reforming part (20) during the operation of the fuel cell body (30). Further, the fuel cell system (2) is provided with the reforming part (20), the fuel cell body (30), and the circulation gas flow channel (40) circulating at least part of hydrogen generated at obtaining the reformed gas at the reforming part (20) to the reforming part (20).
COPYRIGHT: (C)2005,JPO&NCIPI

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