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1. 发明专利

JP2013178917A Method for forming conductive film 审中-公开
标题翻译：形成导电膜的方法
公开(公告)号：JP2013178917A
公开(公告)日：2013-09-09
申请号：JP2012041556
申请日：2012-02-28
申请人： Nagoya Univ , 国立大学法人名古屋大学 , Tokyo Electron Ltd , 東京エレクトロン株式会社
发明人： HORI MASARU , TOYODA HIROTAKA , SEKINE MAKOTO , TAKEDA KEIGO , KONDO HIROKI , ISHIKAWA KENJI , KUBOTA YUSUKE , ITO HITOSHI , MIYOSHI SHUSUKE
IPC分类号： H01B13/00 , B01J19/08 , H05H1/24 , H05K3/12
CPC分类号： H01B13/0026 , B01J19/088 , B01J19/126 , C23C18/08 , C23C18/14 , C23C24/00 , C23C26/00 , H01B13/003 , H01J37/3222 , H01J37/32229 , H01J37/32266 , H01J37/32522 , H01J2237/327 , H01J2237/336 , H05H1/46 , H05H2001/4622 , H05H2001/463 , H05K1/092 , H05K3/105 , H05K2203/095
摘要： PROBLEM TO BE SOLVED: To provide a method for forming a conductive film with sufficient quality from metal fine particles or a metal compound in short time by a simple technique.SOLUTION: In a plasma processor 100, an electromagnetic field is formed in a rectangular waveguide 22 by microwaves introduced from a microwave generator 21 to the rectangular waveguide 22, processing gas containing hydrogen gas supplied to the inside of the rectangular waveguide 22 is made into plasma by a slot hole 41 of an antenna part 40. Plasma with high hydrogen radical density is radiated from the inside of the antenna part 40 of the rectangular waveguide 22 with relatively high pressure toward an external base material S via a slot hole 41 to decompose and remove an organic compound of a precursor containing film formed on the base material S and aggregate metal fine particles or reduce metal ions derived from a metal compound to thereby form a conductive film.
摘要翻译：要解决的问题：提供一种通过简单的技术在短时间内从金属微粒或金属化合物形成具有足够质量的导电膜的方法。解决方案：在等离子体处理器100中，电磁场形成在矩形波导通过从微波发生器21向矩形波导管22引入的微波22，通过天线部40的槽孔41将供给到矩形波导管22的内部的氢气的处理气体制成等离子体。具有高氢自由基密度的等离子体从矩形波导管22的天线部分40的内侧以较高的压力经由狭缝孔41向外部基材S辐射，以分解和除去在基材S上形成的含前体的膜的有机化合物和聚集体金属微粒或还原金属化合物的金属离子，形成导电膜。

2. 发明专利

JP2012199226A Plasma generating apparatus, plasma processing apparatus, and plasma processing method 有权
标题翻译：等离子体生成装置，等离子体处理装置和等离子体处理方法
公开(公告)号：JP2012199226A
公开(公告)日：2012-10-18
申请号：JP2012028187
申请日：2012-02-13
申请人： Nagoya Univ , Tokyo Electron Ltd , 国立大学法人名古屋大学 , 東京エレクトロン株式会社
发明人： TOYODA HIROTAKA , HORI MASARU , SEKINE MAKOTO , TAKEDA KEIGO , MIYOSHI SHUSUKE , ITO HITOSHI , KUBOTA YUSUKE
IPC分类号： H05H1/24 , H01L21/3065 , H05H1/46
CPC分类号： H05H1/46 , H05H2001/4622 , H05H2001/463
摘要： PROBLEM TO BE SOLVED: To provide an atmospheric-pressure plasma generating apparatus in which uniform line plasma is generated using a long waveguide and uniform processing can be performed to a workpiece.SOLUTION: A plasma generating apparatus 20 includes: a microwave generating apparatus 21 generating microwaves; a rectangular waveguide 22 connected to the microwave generating apparatus 21 and provided with an antenna section 40 as a part of the rectangular waveguide; a gas supply apparatus 23 connected to the rectangular waveguide 22 and supplying processing gas to an inside of the rectangular waveguide; an exhaust apparatus 24 for exhausting the gas in the antenna section 40 and, if necessary, exhausting an inside of a processing container 10; and a phase shift apparatus 25A changing the phase of a standing wave in the rectangular waveguide 22. The antenna section 40 has a slot hole 41, and the processing gas having been supplied to the inside of the rectangular waveguide 22 in an atmospheric pressure state is transformed into plasma using microwaves and is discharged through the slot hole 41 toward an external workpiece.
摘要翻译：要解决的问题：提供一种使用长波导产生均匀的线等离子体并且可以对工件进行均匀处理的大气压等离子体产生装置。解决方案：等离子体产生装置20包括：产生微波的微波产生装置21; 连接到微波发生装置21的矩形波导22，并且设置有作为矩形波导的一部分的天线部分40; 连接到矩形波导22并将处理气体提供给矩形波导的内部的气体供应装置23; 用于排出天线部40中的气体的排气装置24，如果需要，排出处理容器10的内部; 以及改变矩形波导22中的驻波相位的相移装置25A。天线部40具有槽孔41，并且在大气压状态下被供给到矩形波导管22的内部的处理气体为使用微波转化成等离子体，并通过槽孔41朝向外部工件排出。版权所有（C）2013，JPO＆INPIT

3. 发明专利

JP2013153972A Melanoma treatment device 审中-公开
标题翻译：墨西哥治疗装置
公开(公告)号：JP2013153972A
公开(公告)日：2013-08-15
申请号：JP2012017266
申请日：2012-01-30
申请人： Chube Univ , 学校法人中部大学 , Nagoya Univ , 国立大学法人名古屋大学
发明人： KATO MASASHI , YAJIMA ICHIRO , HORI MASARU , KONDO HIROMOTO , TAKEDA KEIGO , KANO HIROYUKI
IPC分类号： A61N1/44 , A61B17/00 , A61B18/00 , H05H1/24
摘要： PROBLEM TO BE SOLVED: To provide a melanoma treatment device for seeking to kill melanoma cells without giving much influence on normal cells by using atmospheric pressure plasma.SOLUTION: A melanoma treatment device 110 includes a pair of opposite electrodes being an electrode 2a and an electrode 2b where recessions (hollows) H are formed in opposite surfaces. Argon gas is introduced from a gas introduction opening 11i into a housing part 11 and also a voltage is applied between the electrodes 2a, 2b, so that the melanoma treatment device 110 injects plasma from a gas injection opening 11o. The plasma density of the plasma is within the range of ≥1×10cmand ≤1×10cm. The plasma is continuously radiated toward melanoma for only a fixed period.
摘要翻译：要解决的问题：提供一种黑色素瘤治疗装置，用于通过使用大气压等离子体来寻求杀死黑素瘤细胞而不对正常细胞产生太大影响。解决方案：黑素瘤治疗装置110包括一对相对电极，其为电极2a和电极其中凹部（空洞）H形成在相对的表面中。氩气从气体导入口11i导入壳体部11，并且在电极2a，2b之间施加电压，使得黑色素瘤处理装置110从气体注入口11o注入等离子体。等离子体的等离子体密度在≥1×10cm和≤1×10cm的范围内。等离子体只持续辐射到黑色素瘤。

4. 发明专利

JP2014173150A Production method of water-repellent thin film, and water-repellent treatment device 有权
标题翻译：水膜薄膜生产方法及水处理装置
公开(公告)号：JP2014173150A
公开(公告)日：2014-09-22
申请号：JP2013047704
申请日：2013-03-11
申请人： Nagoya Univ , 国立大学法人名古屋大学 , Ajinomoto General Foods Inc , 味の素ゼネラルフーヅ株式会社
发明人： HORI MASARU , TAKEDA KEIGO , OGAWA MASANAGA
IPC分类号： C23C16/448 , C09K3/18
摘要： PROBLEM TO BE SOLVED: To provide a production method of a water-repellent thin film having super water-repellent property.SOLUTION: Atmospheric pressure plasma is generated by using mixed gas of Ar and Hby an atmospheric pressure plasma generating apparatus 10. The atmospheric pressure plasma is radiated together with a gas flow in the y-axis direction from an opening of a hole 123. Then, hexamethyldisiloxane is formed mistily by using a mist feeding device 20, and mixed with the atmospheric pressure plasma through a mist feeding pipe 207. Hereby, a water-repellent thin film 60 is deposited on the surface of a substrate 30.
摘要翻译：要解决的问题：提供具有超疏水性的防水薄膜的制造方法。解决方案：通过使用大气压等离子体发生装置10的Ar和H的混合气体产生大气压等离子体。大气压等离子体与空穴123的开口在y轴方向上一起气流一起照射。然后，通过使用雾化供给装置20，使六甲基二硅氧烷形成为雾状，并通过雾化供给管207与大气压等离子体混合。因此，在衬底30的表面上沉积防水薄膜60。

5. 发明专利

JP2013153995A Ovarian cancer treatment device 审中-公开
标题翻译： OVARIAN癌症治疗装置
公开(公告)号：JP2013153995A
公开(公告)日：2013-08-15
申请号：JP2012017483
申请日：2012-01-31
申请人： Nagoya Univ , 国立大学法人名古屋大学 , Nu Eco Engineering Kk , Nuエコ・エンジニアリング株式会社
发明人： HORI MASARU , KONDO HIROMOTO , TAKEDA KEIGO , TANAKA HIROMASA , YOSHIKAWA FUMITAKA , KAJIYAMA HIROAKI , NAKAMURA KAE , KANO HIROYUKI
IPC分类号： A61N1/44 , A61B17/42 , A61B18/00 , H05H1/24
摘要： PROBLEM TO BE SOLVED: To provide an ovarian cancer treatment device capable of terminating ovarian cancer cells while hardly affecting normal cells by using atmospheric pressure plasma.SOLUTION: An ovarian cancer treatment device 110 includes a pair of counter electrodes 2a and 2b, on whose opposing face concave parts (hollows) H are formed. Introducing argon gas into a housing 11 through a gas inlet 11i and applying a voltage between the electrodes 2a and 2b allow the ovarian cancer treatment device 110 to blow out plasma from a gas outlet 11o. The plasma density is not less than 1×10cmand not more than 1×10cm. Ovarian cancers are continuously irradiated with the plasma for a certain period.
摘要翻译：要解决的问题：提供能够终止卵巢癌细胞但不会通过使用大气压血浆几乎不影响正常细胞的卵巢癌治疗装置。解决方案：卵巢癌治疗装置110包括一对对置电极2a和2b，其对置形成面凹部（中空部）H。通过气体入口11i将氩气引入壳体11并在电极2a和2b之间施加电压允许卵巢癌治疗装置110从气体出口11o吹出等离子体。等离子体密度不小于1×10cm，不大于1×10cm。卵巢癌血浆持续照射一定时间。

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