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    • 3. 发明专利
    • IRRADIATION WINDOW
    • JPH11101898A
    • 1999-04-13
    • JP27965897
    • 1997-09-26
    • NISSIN HIGH VOLTAGE CO LTD
    • IWATAKE TOMOYUKI
    • G21K5/00
    • PROBLEM TO BE SOLVED: To maintain an initial uniform interval even if they are heated by making a plurality of juxtaposed sash bars folded in the form of a trapezoid in planar view, respectively. SOLUTION: All sash bars 8 of an irradiation window 4a are made folded in the form of a trapezoid in planar view, respectively. Thus, folding parts 8a exist on both ends of each sash bar 8, respectively. When the folding angle of the folding part 8a is small, action freely allowing the longitudinal elongation of the sash bar 8 is lowered, and if it is large, it is preferably in a range of 50-70 degrees since it is difficult to work the sash bar. The sash bar 8 and a frame 10 may be integrally formed by a wire cutting processing method and the like, and may be mutually combined by being formed by different members. Even if the sash bar 8 is heated by irradiation of a charged particle to be extended, the angle of the folding part 8a is large to be absorbed, and bending of the sash bar 8 can be prevented. Thus, an initial uniform interval can be maintained, and damage and life lowering due to partial overheat of a window foil can be prevented.
    • 7. 发明专利
    • IRRADIATION WINDOW
    • JPH11101899A
    • 1999-04-13
    • JP28277297
    • 1997-09-29
    • NISSIN HIGH VOLTAGE CO LTD
    • IWATAKE TOMOYUKIMIZUSAWA KENICHI
    • G21K5/00
    • PROBLEM TO BE SOLVED: To improve a charged particle-passing rate while maintaining cooling ability by making the widths of a plurality of sash bars supporting and cooling a window foil gradually thin toward the center of the longitudinal direction. SOLUTION: The width of each sash bar 8 of an irradiation window 4a is gradually made thin toward the center of the longitudinal direction Y of each sash bar 8. Since charged particles have distribution of high density in the center part, the high density part of the charged particles can be efficiently passed since the opening ratio of an opening part 9 between the sash bars 8 in the center part of the longitudinal direction Y of each sash bar 8. As the result, the utilization efficiency of the charged particles is improved, and the processing efficiency of an object to be processed is improved. In addition, since the more the flow of the longitudinal heat of the sash bar 8 goes to an end, the larger it is, lowering of heat conduction property is prevented, damage and life lowering due to overheat of a window foil is prevented since the cooling ability of the window foil is maintained. The sash bar 8 and a frame 10 may be integrally formed by a wire-cutting method and the like, and mutually combined by being formed of different members.
    • 8. 发明专利
    • ION BEAM INCIDENT STRUCTURE OF TANDEM ACCELERATOR TUBE
    • JPH10335099A
    • 1998-12-18
    • JP17878497
    • 1997-05-31
    • NISSIN HIGH VOLTAGE CO LTD
    • BABA TAKASHIIWATAKE TOMOYUKI
    • H05H5/06
    • PROBLEM TO BE SOLVED: To provide an ion beam incident structure of a tandem accelerator tube, capable of efficiently perform vacuuming in the tandem accelerator tube without deteriorating the lens effect of a magnetic field-type lens. SOLUTION: A vacuum chamber 11 in which a magnetic field-type lens 14 is installed on the outer periphery is connected to the entering side of an ion beam 16 of a tandem accelerator tube 12, a vacuum pump 13 is connected to the vacuum chamber 11 between the tandem accelerator tube 12 and the magnetic field lens 14, accelerating electrodes 15a, 15b positioned in the incident side of the ion beam 16 of the tandem accelerator tube 12 are projected in the direction of the magnetic field-type lens 14, the electrodes 15a, 15b are arranged near the magnetic field-type lens 14, the ion beam 16 is made to be incident on the tandem accelerator tube 12 in a state where the effect of the lens of the magnetic field-type lens 14 is maintained, and the vacuum resistance in the tandem accelerator tube 12, by the vacuum pump 13 is decreased.