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    • 3. 发明专利
    • Method for purifying unsaturated fluorinated carbon compound
    • 净化不饱和氟化碳化合物的方法
    • JP2005239596A
    • 2005-09-08
    • JP2004048973
    • 2004-02-25
    • Nippon Zeon Co Ltd日本ゼオン株式会社
    • SUGAWARA MITSURUSUGIMOTO TATSUYAYAMADA TOSHIRO
    • C07C17/38C07C17/389C07C21/22C07C23/08
    • PROBLEM TO BE SOLVED: To provide a technique for extremely reducing inorganic impurities in an unsaturated fluorinated carbon compound since more reduction in impurities in raw material gas is required in the field of semiconductor production, electronic and electric parts, etc.
      SOLUTION: An unsaturated fluorinated carbon compound having extremely reduced inorganic impurities such as nitrogen, oxygen, etc., is obtained by packing an unsaturated fluorinated carbon compound into a pressure vessel such as a cylinder, etc., and extracting gas from a vapor-phase part in a state compressed to specific pressure or above. Preferably the unsaturated fluorinated carbon compound is brought into contact with a calcined metal oxide besides the gas extraction operation from the vapor-phase part. The water content in the unsaturated fluorinated carbon compound is extremely reduced by bringing the compound into contact with the calcined metal oxide.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供一种用于在不饱和氟化碳化合物中极度降低无机杂质的技术,因为在半导体生产领域中需要更多的原料气体杂质的减少,电子和电气部件等。

      解决方案:通过将不饱和氟化碳化合物填充到诸如气缸等的压力容器中而获得具有极低的无机杂质如氮气,氧气等的不饱和氟化碳化合物, 相位部分处于压缩至特定压力或以上的状态。 除了来自气相部分的气体提取操作之外,优选使不饱和氟化碳化合物与煅烧金属氧化物接触。 通过使化合物与煅烧的金属氧化物接触,使不饱和氟化碳化合物中的水分含量极度降低。 版权所有(C)2005,JPO&NCIPI