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1. 发明专利

JPS60219334A CONTROLLING DEVICE OF FORCED-FEEDING DEVICE FOR SOIL 失效
公开(公告)号：JPS60219334A
公开(公告)日：1985-11-02
申请号：JP7575084
申请日：1984-04-17
申请人： NIPPON TELEGRAPH & TELEPHONE , HITACHI CONSTRUCTION MACHINERY
发明人： YAMAMOTO HIROSHI , SATOU SHIYUUICHI , IWAI YOSHIYUKI , FUKUMOTO TAKAAKI , TSUCHIYA KIYOSHI , SUDA MASAO , NAGANO YOSHIYA , SHIMA TAKEO , OGATA KOUJIROU , MITSUYANAGI NAOKI
IPC分类号： E02F7/10 , E21D9/12 , F04B15/00 , F04B15/02
摘要： PURPOSE:To control a device so that it is automatically operated, by a method wherein, after detection of completion of forward movement of piston for forced- feeding of soil, actuation of a delay motion circuit, and detection of completion of backward movement, a direction switching valve is changed over through motion of the delay motion circuit. CONSTITUTION:By means of a first hydraulic detector 45, completion of forward movement of a piston 30 for forced-feeding of soil is detected. Thereafter, by means of a coil 55 with a timer, a timing motion (a) of a contact 67 and a coil 69, with all of which a first motion delay circuit is formed, after forward movement of the piston 30 is completed, the piston is brought to a stop in the position for a set time. Through the working of a second hydraulic detector 46, completion of backward movement of a piston 19 for pushing an outer cylinder is detected, an electromagnetic valve 42 is switched, and malfunction is prevented from occurring by means of a second delay motion circuit. This prevents the occurrence of a reverse flow due to elasticity of soil, forcibly pushed in a soil forced-feed pipe once, and enables reliable feed of soil to a soil suction port.

2. 发明专利

JPS60219333A CONTROLLING DEVICE OF FORCED-FEEDING DEVICE FOR SOIL 失效
公开(公告)号：JPS60219333A
公开(公告)日：1985-11-02
申请号：JP7574984
申请日：1984-04-17
申请人： NIPPON TELEGRAPH & TELEPHONE , HITACHI CONSTRUCTION MACHINERY
发明人： YAMAMOTO HIROSHI , SATOU SHIYUUICHI , IWAI YOSHIYUKI , FUKUMOTO TAKAAKI , TSUCHIYA KIYOSHI , SUDA MASAO , NAGANO YOSHIYA , OGATA KOUJIROU , MITSUYANAGI NAOKI
IPC分类号： E02F7/10 , E21D9/12 , F04B15/00 , F04B15/02
摘要： PURPOSE:To enable a device to be automatically and orderly actuated by a method wherein a direction switching valve is changed over by means of a first detecting means, which detects completion of forward movement of a piston for forced-feeding soil, and a second detecting means for detecting completion of backward movement. CONSTITUTION:A means, which changes over first and second detectors 45 and 46, mounted in first and second oil passages 43 and 44 of a hydraulic circuit, and a direction switching valve, is provided. After completion of forward movement of a piston 30 for forced-feeding soil, an outer cylinder 18 is automatically and reliably moved in a backward direction. When a piston 19 is brought into abutment on the rear wall of a casing 13 and movement thereof is stopped, the outer cylinder 18 is moved in a forward direction in prior to forward movement of the piston 30 for forced-feeding soil. This enables desired orderly motion of a soil forced-feeding device to be automatically and reliably effected.

3. 发明专利

JPS60112996A SAND AND EARTH SENDING APPARATUS 失效
公开(公告)号：JPS60112996A
公开(公告)日：1985-06-19
申请号：JP21954183
申请日：1983-11-24
申请人： NIPPON TELEGRAPH & TELEPHONE , HITACHI CONSTRUCTION MACHINERY
发明人： YAMAMOTO HIROSHI , SATOU SHIYUUICHI , IWAI YOSHIYUKI , FUKUMOTO TAKAAKI , KUROSAWA TOMOHIRO , TSUCHIYA KIYOSHI , SUDA MASAO , NAGANO YOSHIYA , OGATA KOUJIROU , MITSUYANAGI NAOKI , NAKANO MANABU , HIDA NOBUYUKI
IPC分类号： E21D9/12 , E02F7/10

4. 发明专利

JP2001300755A METHOD AND DEVICE FOR LASER BEAM MACHINING 失效
公开(公告)号：JP2001300755A
公开(公告)日：2001-10-30
申请号：JP2000117543
申请日：2000-04-19
申请人： HITACHI CONSTRUCTION MACHINERY
发明人： MITSUYANAGI NAOKI , NAGANO YOSHIYA
IPC分类号： B23K26/02 , B23K26/03 , B23K101/42
摘要： PROBLEM TO BE SOLVED: To realize a method of laser beam machining and a device for laser beam machining by which a precise machining is performed without generating a deviation in a machining position due to an error of the positioning. SOLUTION: A machining pattern whose reflectivity is different from that of other parts is formed on a work 1 for the laser beam machining. A galovanoscanner scans an optical axis for machining, then the surface of the work 1 is scanned with a detected light from a detector 8 which passes through a laser oscillator 3, a dichroic mirror 93, galvanomirrors 42 and 43, and a lens 5. The detected light reflected on the surface of the work 1 is image-formed on a photosensor 92 via the lens 5, the galvanomirrors 42 and 43, the dichroic mirror 93, and a focusing lens 91. The output from the photosensor 92 becomes larger on the machining pattern and smaller on other parts, the detected signal of the photosensor 92 is binarized by a threshold value preliminarily set on a comparator of a triggering means 10 and is inputted to the laser oscillator 3 after giving a delay time of a predetermined time td.

5. 发明专利

JPH1034367A DAM BAR CUTTING DEVICE 失效
公开(公告)号：JPH1034367A
公开(公告)日：1998-02-10
申请号：JP19796096
申请日：1996-07-26
申请人： HITACHI CONSTRUCTION MACHINERY
发明人： NAGANO YOSHIYA , MITSUYANAGI NAOKI , SHIRAI TAKASHI , SHIMOMURA YOSHIAKI , OKUMURA SHINYA , SAKURAI SHIGEYUKI , NISHIGAKI TAKESHI
IPC分类号： B23K26/00 , B23K26/02 , B23K26/046 , H01L23/50 , B23K26/04
摘要： PROBLEM TO BE SOLVED: To always keep the distance constant between a condensing lens and a dam bar at the time of a laser beam irradiation even though the flatness of a lead frame surface is worsened due to the deformation of the lead frame or the like and to always cut the dam bar under a constant laser beam condensing condition. SOLUTION: The oscillation of a laser beam is controlled to successively cut the dam bar while transfering a work 1 with a XY table. At this time, the dam bar before cutting is irradiated with the detecting light from a detecting light source, the reflecting light is detected with a photosensor to generate a detecting signal, whereby the signal is processed with a pulse converting unit 23 to generate a correcting signal S13 , and a Z table 15 is controlled to move up and down with a main controller 21 in accordance with the correcting signal S13 .

6. 发明专利

JPH09213858A INSPECTION EQUIPMENT OF SEMICONDUCTOR DEVICE AND DAM BAR CUTTING DEVICE 失效
公开(公告)号：JPH09213858A
公开(公告)日：1997-08-15
申请号：JP1980296
申请日：1996-02-06
申请人： HITACHI CONSTRUCTION MACHINERY
发明人： NAGANO YOSHIYA , MITSUYANAGI NAOKI , SHIRAI TAKASHI , SHIMOMURA YOSHIAKI , OKUMURA SHINYA , SAKURAI SHIGEYUKI , MINOMOTO YASUSHI
IPC分类号： G01B11/24 , B23K26/00 , B23K26/08 , H01L21/66 , H01L23/50
摘要： PROBLEM TO BE SOLVED: To obtain an inspection equipment and a dam bar cutting device which are capable of accurately measuring the number and width of the cut dam bars of a semiconductor device so as to quickly detect cutting failures even if dam bars to cut are changed in dimensions with the change of a semiconductor device in type and size. SOLUTION: After dam bars are cut off, rectangular wave signals T corresponding to the width of the cut part of the dam bar are generated from a comparator 14, the number of pulses of pulse signals sent from an encoder 10a is counted in the rise time of the rectangular wave signals T through a counter circuit, and the number of counts is compared with a certain value based on a design value through a quality judging circuit. By this setup, trouble as to the cutting of a dam bar can be quickly detected.

7. 发明专利

JPH09201685A LASER BEAM MACHINE 失效
公开(公告)号：JPH09201685A
公开(公告)日：1997-08-05
申请号：JP868196
申请日：1996-01-22
申请人： HITACHI CONSTRUCTION MACHINERY
发明人： MINOMOTO YASUSHI , MITSUYANAGI NAOKI , NAGANO YOSHIYA , SHIRAI TAKASHI , SHIMOMURA YOSHIAKI , OKUMURA SHINYA , SAKURAI SHIGEYUKI
IPC分类号： B23K26/00 , B23K26/02 , B23K26/08 , H01L23/50
摘要： PROBLEM TO BE SOLVED: To machine a specified positions to be machined at a high speed even when the interval between positions is not only equal but also unequal in a laser beam process and accurately and quickly detect the cause of laser beam processing error. SOLUTION: The image of a work 1 is picked up preliminarily by a camera 29 and displayed on a monitor 28. Then, the work 1 is moved on the XY table 21, then the dumb bar 2 is successively cut while the irradiation position of the laser beam is determined based on the reflected light of a detected light beam. In this cutting, a trigger signal TP1 is produced for controlling the generation of the laser beam based on the reflected light of the detected light beam, and the pulse from a pulse encoder 21a attached to the XY table 21 is counted for every its generation, so that the irradiation position of the laser beam is superimposed on the image of the monitor 28 based on the counted value.

8. 发明专利

JPH09108867A LASER BEAM MACHINE, LASER BEAM PROCESSING METHOD AND DAM BAR PROCESSING METHOD 失效
公开(公告)号：JPH09108867A
公开(公告)日：1997-04-28
申请号：JP26540195
申请日：1995-10-13
申请人： HITACHI CONSTRUCTION MACHINERY
发明人： SHIMOMURA YOSHIAKI , MITSUYANAGI NAOKI , NAGANO YOSHIYA , OKUMURA SHINYA , SAKURAI SHIGEYUKI , MINOMOTO YASUSHI
IPC分类号： B23K26/00 , B23K26/08 , H01L23/50 , H01S3/00 , H01S3/10
摘要： PROBLEM TO BE SOLVED: To obtain a laser beam machine and laser beam processing method capable of processing a desired processing position where a work exists at a high speed not only in the case the processing positions are spaced at equal intervals but in the case these positions are spaced at unequal intervals and obviating the unnecessary execution of laser beam processing in accordance with the melt splashes produced according to laser beam processing. SOLUTION: The detecting light from a detecting light source is cast to the work 1 and the reflected light thereof is detected by a photodetector 126. At this time, the change in the light accompany with the spatters generated in the laser beam processing is also detected by a photodetector 126. A trigger signal TP2 for oscillation of pulse laser beams is generated in accordance with the detection signal from the photodetector 126 in a laser controller 26. The change in the detection signal accompanying with the spatters is deleted in a gate circuit in accordance with the gate signal GP generated by feeding back the trigger signal TP2 .

9. 发明专利

JPH08316396A DAM BAR CUTTING METHOD AND DAM BAR CUTTING DEVICE 失效
公开(公告)号：JPH08316396A
公开(公告)日：1996-11-29
申请号：JP11729895
申请日：1995-05-16
申请人： HITACHI CONSTRUCTION MACHINERY
发明人： OKUMURA SHINYA , MITSUYANAGI NAOKI , TADA NOBUHIKO , NAGANO YOSHIYA , SHIMOMURA YOSHIAKI , SAKURAI SHIGEYUKI , MINOMOTO YASUSHI
IPC分类号： B23K26/06 , B23K26/073 , B23K26/38 , H01L23/50 , B23K26/00
摘要： PURPOSE: To obtain a highly accurate and good quality by uniforming input quantities of heat on the sides near and far from a resin mold of a dam bar and unifying and identifying cutting widths at the time of cutting the dam bar of a semiconductor device by slim and cross-sectional laser light irradiation. CONSTITUTION: A mask 15 having a slim tapered hole 15a between a bending mirror 11 and a condensing lens 12 is provided so as to make a narrow side of a sport 14a of laser light 14 to come to the side of a resin mold 3. Thereby, an input heat quantity due to irradiation with the laser light 14 becomes less on the side near the resin mold 3 than on the far side from the resin mold 3 of a dam bar 2 so as to unify an input heat quantity on the side near the resin mold 3 which is a total of heat from in-dam resin 4 and input heat net laser light irradiation and an input heat quantity on the far side from the resin mold 3. Accordingly, cut width after cutting of the dam bar 2 can be identified.

10. 发明专利

JPH07135282A METHOD AND DEVICE FOR CUTTING DUMB BAR AND SEMICONDUCTOR DEVICE 失效
公开(公告)号：JPH07135282A
公开(公告)日：1995-05-23
申请号：JP28265493
申请日：1993-11-11
申请人： HITACHI CONSTRUCTION MACHINERY
发明人： SAKURAI SHIGEYUKI , MITSUYANAGI NAOKI , TADA NOBUHIKO , SHIMOMURA YOSHIAKI , OKUMURA SHINYA , NAGANO YOSHIYA , KIMURA NOBUYUKI
IPC分类号： B23K26/38 , H01L23/50 , B23K26/00
摘要： PURPOSE:To provide such a dumb bar cutting method and cutting device that the flatness accuracy and lead pitch accuracy of front end sections of leads after bending the leads can be improved and the occurrence of troubles by the falling down of dross can be prevented. CONSTITUTION:After setting a semiconductor device 1 on an X-Y table 11a, a dam bar 4 is cut from its surface by irradiating the device 1 with a laser beam from a laser machining head 15a from its surface side while the device 1 is moved in a horizontal plane by means of the table 11a. Then the device 1 is turned over by means of an turn-over device 12 and the turned-over device 1 is set on another X-Y table 11b. Then the cut part of the dumb bar 4 is processed from its rear side by irradiating the device 1 with a laser beam from another laser machining head 15b from its rear surface side while the device 1 is moved in a horizontal plane by means of the table 11b.

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