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    • 3. 发明专利
    • VACUUM CHUCK FOR RESIST COATING APPARATUS AND RESIST COATER
    • JPH02291108A
    • 1990-11-30
    • JP11159489
    • 1989-04-28
    • NIPPON STEEL CORPKUROSAKI REFRACTORIES CO
    • KOTABE NORIOINAYOSHI MASATOMIZOBE ARIHITO
    • B05C11/08H01L21/027H01L21/312
    • PURPOSE:To execute a resist coating operation by which a deviation of a film thickness is small and to reduce a problem that a wafer is detached during its turning operation by a method wherein a suction face coming into contact with the wafer is formed of a ceramic and at least one part between the suction face and a connection part to a shaft is formed of a material whose heat conductivity is lower than that of the ceramic. CONSTITUTION:A vacuum chuck 1 has a nearly T-shaped cross-sectional shape which is composed of a tubular shaft part 2 connected to a shaft and of a disk-shaped support part 3 formed at the upper part of the shaft part. The support part 3 and the outer- face side of the shaft part 2 are formed collectively by using a ceramic C. On the other hand, the inner-face side of the shaft part 2 is formed of a material 1 whose heat conductivity is lower than that of the ceramic. This material as a tubular heat- insulating material 7 is inserted into a member formed of the ceramic C. Accordingly, heat which is going to move from the side of a motor to a suction face can be reduced; in addition, the heat which has reached the suction face of the vacuum chuck can be moved and diffused quickly to the whole surface of the suction face because the heat conductivity of the ceramic constituting the suction face of the vacuum chuck is comparatively high.
    • 4. 发明专利
    • PLATE BRICK
    • JPH1157989A
    • 1999-03-02
    • JP21533297
    • 1997-08-08
    • KUROSAKI REFRACTORIES CO
    • MIZOBE ARIHITOHARUKI KOUICHI
    • B22D41/28
    • PROBLEM TO BE SOLVED: To eliminate the warp of a brick at the time of using and to reduce the surface wearing at a stroke position and the chip of a nozzle hole edge part by arranging a recessed surface surrounding the nozzle hole on the sliding surface of the brick. SOLUTION: The nozzle hole 2 is arranged on the sliding surface 1 of the plate brick 10, and the recessed surface 3 is arranged around this nozzle hole 2. In the case of being too shallow of the recessed surface 3, the relaxation of compressive stress caused by the thermal expansion at the time of using is unsufficient and the effect to achieve the target is reduced. The depth of the recessed surface 3 is desirable to be the depth, in which the stress developed to the surrounding of the nozzle hole is relaxed and gap between the surfaces is eliminated or reduced even in the case of expanding in the thickness direction at the surroundings of the inner hole in the plate at the time of using. This condition is decided with the coefficient of thermal expansion of a material used to the plate brick and the used temp., but the depth of the recessed surface is desirable to be 0.1-2% of the thickness of the plate brick from the coefficient of thermal expansion of alumina, zirconia, magnesia, silica or carbon, etc., as the material generally used.