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1. 发明专利

JPH11186372A ELECTROSTATIC CHUCK 失效
公开(公告)号：JPH11186372A
公开(公告)日：1999-07-09
申请号：JP36477997
申请日：1997-12-22
申请人： NIHON CEMENT
发明人： TANJI SEIICHI , ISHII MAMORU , TSUKAMOTO KEIZO
IPC分类号： B23Q3/15 , H01L21/68 , H01L21/683 , H02N13/00
摘要： PROBLEM TO BE SOLVED: To provide an electrostatic chuck, wherein the contamination by the particles of a sucked body to be sucked is less. SOLUTION: An electrode 2 and an insulating layer 3 which arranged thereon are provided. A voltage is applied on the electrode 2. As a result, an electrostatic chuck, which electrostatically sucks a body to be sucked W, is constituted on the insulating layer 3. A suction surface 3a, which sucks at least the body to be sucked W of the insulting layer 3 is constituted of resin, the pencil hardness of which is 5H or lower. Thus, the generation of particles becomes less, and the electrostatic chuck, in which the contamination by the particles with respect to the wafer W is less, can be obtained.

2. 发明专利

JPH10120461A ALUMINA SINTERED COMPACT 失效
公开(公告)号：JPH10120461A
公开(公告)日：1998-05-12
申请号：JP28899796
申请日：1996-10-14
申请人： NIHON CEMENT
发明人： SASHITA NORIKAZU , FUKUDA EIJI , TSUKAMOTO KEIZO
IPC分类号： C04B35/111
摘要： PROBLEM TO BE SOLVED: To solve a problem of requiring a higher cost to obtain a sintered compact having a low alkali content or, in other word, an alumina sintered compact having a low dielectric loss. SOLUTION: This alumina sintered compact includes >=98wt.% Al2 O3 , and further contains 0.2-1.0wt.% total amount of SiO2 and MgO in the weight ratio (SiO2 /MgO) of 2-4 in the sintered compact. Further, the sintered compact includes 0.3-1.4wt.% cordierite phase formed out of SiO2 and MgO and the dielectric loss of the sintered compact is not larger than 0.004 at 100kHz to 1GHz.

3. 发明专利

JPH09295257A GRINDING METHOD FOR CERAMICS SINTERED MATERIAL 失效
公开(公告)号：JPH09295257A
公开(公告)日：1997-11-18
申请号：JP12930596
申请日：1996-04-26
申请人： NIHON CEMENT
发明人： SASHITA NORIKAZU , SUZUKI ATSUSHI , MATSUO SUKEYUKI , TSUKAMOTO KEIZO
IPC分类号： B24B9/00 , B24B9/06
摘要： PROBLEM TO BE SOLVED: To provide the excellent grinding surface, with which existence of fine grains is not recognized in a worked surface without polishing, by grinding the surface of a sintered body, and thereafter, heating this sintered material at the specified temperature for the specified time in the same atmosphere with the time of sintering. SOLUTION: In this method for grinding a ceramics sintered material, after grinding the surface of the sintered material, this sintered material is heated at a temperature lower than the sintering temperature by 200 deg.C to 50 deg.C for 1-3 hours in the same atmosphere with sintering. Fine grains, of which grain growth is not advanced, appear in the surface with the grinding, and become the fine grains to be recognized by a grinding surface, but a part of the fine grains becomes the free surface, and absorbed for elimination by the grown grains, with which the fine grains contact, at the time of heating. As the atmosphere of heating, in case of oxide, heating is desirably performed in the air, and in case of nitride, heating is desirably performed in the nitrogen, in case of carbide, heating is desirably performed in argon. A ceramic sintered material having excellent cut surfaces, in which existence of the fine grains is not recognized in the worked surface, can be thereby obtained.

4. 发明专利

JPH09267313A SIALON POWDER CAST MOLDING 失效
公开(公告)号：JPH09267313A
公开(公告)日：1997-10-14
申请号：JP9965796
申请日：1996-03-29
申请人： NIHON CEMENT
发明人： SUZUKI ATSUSHI , SASHITA NORIKAZU , MATSUO HIROYUKI , TSUKAMOTO KEIZO
IPC分类号： B28B1/26 , C04B35/599
摘要： PROBLEM TO BE SOLVED: To provide a method for cast molding sialon powder by which it is possible to maintain the viscosity of slurry at a low level, if the percentage of a solid content in the slurry is increased and consequently, eliminate a streaky defect in a molding. SOLUTION: In a method for adding a solvent to sialon powder, then mixing it with an added dispersant and cast molding this mixed slurry into a molding die, the average grain diameter of the sialon powder should be 0.9μm or less, the dispersant be quaternary ammonium salt, its addition content be 0.05-1.0 pts.wt. for 100 pts.wt. of the sialon powder, and the solid content of the slurry be 45-53vol.%.

5. 发明专利

JPH0817888A DUMMY WAFER 失效
公开(公告)号：JPH0817888A
公开(公告)日：1996-01-19
申请号：JP17032594
申请日：1994-06-30
申请人： NIHON CEMENT
发明人： HAKOJIMA JIYUNICHIROU , MINAMIZAWA KAZUSUKE , OGURA KATSUHIKO , KISHI YUKIO , TSUKAMOTO KEIZO
IPC分类号： H01L21/66 , H01L21/02
摘要： PURPOSE:To provide a repeatedly usable dummy wafer which exhibits high strength, cleaning property and chemical resistance and is suitable for various thin film analysis, by making the wafer of a sintered body of polycrystalline aluminum oxide with average strength, bulk density and purity not lower than predetermined levels and average crystal grain size not greater than a predetermined value. CONSTITUTION:A dummy wafer us made of a sintered body of polycrystalline aluminum oxide with average strength not lower than 450MPa, average crystal grain size not greater than 5mum, bulk density not lower than 3980kg/m and purity not lower than 99.9%. For instance, powder of aluminum oxide with average grain size of 0.2mum and purity of 99.99% is mixed and kneaded with a binder and water, and the mixture is pushed out from a cap to form a sheet. The sheet is dried and formed into a thin plate molded body. The molded body is punched out to obtain a wafer material. The binder is removed from the wafer material at 450 deg.C, and the resulting wafer material is fired at 1350 deg.C or HIP-processed, thus producing a sintered body. The sintered body is then laser-processed and ground, and one side thereof is further abraded. Thus, the dummy wafer is produced.

6. 发明专利

JPH06122107A CAST MOLDING OF CERAMIC 失效
公开(公告)号：JPH06122107A
公开(公告)日：1994-05-06
申请号：JP29924392
申请日：1992-10-12
申请人： NIHON CEMENT
发明人： TSUTO HIROYUKI , FUKUDA EIJI , TSUKAMOTO KEIZO , YAMAGISHI SENJO
IPC分类号： B28B1/26
摘要： PURPOSE:To easily form a ceramics molded object provided with holes having no cracks present therearound by cast molding. CONSTITUTION:When a ceramics molded object 1 provided with holes 2 having no cracking generated therearound is formed by cast molding, detachable projections for forming the holes 2 are implanted in the cavity of a mold having water absorbability and a ceramics slurry is injected in the mold to form a molded object with a definite thickness within the cavity and, before the drying and contraction of the formed molded object are started, the implanted projections are pulled out of the mold and the molded object is allowed to stand in the mold until sufficient strength is developed by drying and subsequently demolded by a usual method.

7. 发明专利

JPH06100372A CAST-FORMING OF SILICON NITRIDE POWDER 失效
公开(公告)号：JPH06100372A
公开(公告)日：1994-04-12
申请号：JP27677092
申请日：1992-09-22
申请人： NIHON CEMENT
发明人： TSUTO HIROYUKI , FUKUDA EIJI , TSUKAMOTO KEIZO , YAMAGISHI SENJO
IPC分类号： B28B1/26 , C04B35/58 , C04B35/626
摘要： PURPOSE:To provide a process for the cast-forming of a silicon nitride powder such as silicon nitride and Sialon. CONSTITUTION:Silicon nitride powder coated with a water-resistant polyamide resin is dispersed in water and the obtained slurry is subjected to cast-forming. The coating with the polyamide resin can be carried out by coating the surface of the silicon nitride powder particle with a dibasic acid or its derivative, dispersing the coated particles in a solution of a diamine or a diamine derivative and polymerizing the components. The surface-oxidation of the silicon nitride powder caused by the mixing of the powder with water in the preparation of a cast-forming slurry can be prevented even by using water as the dispersion medium of the cast-forming slurry and, accordingly, a sintered silicon nitride having excellent mechanical strength can be produced without deteriorating the intrinsic characteristic properties of the silicon nitride.

8. 发明专利

JPH0691619A CAST MOLDING METHOD FOR CERAMIC POWDER 失效
公开(公告)号：JPH0691619A
公开(公告)日：1994-04-05
申请号：JP26671492
申请日：1992-09-09
申请人： NIHON CEMENT
发明人： TSUTO HIROYUKI , FUKUDA EIJI , TSUKAMOTO KEIZO , YAMAGISHI SENJO
IPC分类号： B28B1/26 , B28B7/38
摘要： PURPOSE:To provide the cast molding method for ceramic powder which can mold a ceramic material of high purity even by using a gypsum mold of good water absorption properties, inexpensive and easy to manufacture. CONSTITUTION:First, a film of ceramic powder of same kind as a raw material to be cast molded is formed on a molding surface of a gypsum mold by the thickness of 1.0-4.0mm, and further a film of ammonium alginate is formed on the surface by the thickness of 1.0mm or less, and the ceramic powder is cast molded by using the gypsum mold on which the above-said films are formed in the method.

9. 发明专利

JPH05102541A SUPERCONDUCTING MAGNETO-SENSITIVE ELEMENT 失效
公开(公告)号：JPH05102541A
公开(公告)日：1993-04-23
申请号：JP28734291
申请日：1991-10-08
申请人： NIHON CEMENT
发明人： SHIMOJIMA HIROMASA , ISHII MAMORU , TSUKAMOTO KEIZO , YAMAGISHI SENJO
IPC分类号： H01L39/00 , H01L39/22
摘要： PURPOSE:To improve reluctance of a Bi based superconductor, and obtain a magneto-sensitive element having high magnetic sensitivity, by adding a specified amount of compound containing Sb to Bi based oxide superconductor, and performing firing at a specified temperature. CONSTITUTION:Bi based oxide superconductor can be obtained by firing mixture of material containing Bi, Pb, Sr, Ca and Cu. Compound containing Sb is added to said superconductor. The Sb content is 0.1-5.0mol%, preferably 0.5-3.0mol% of the Sr content. When the Sb content is smaller than 0.1mol%, the improvement of reluctance effect can not be obtained. When the content exceeds 5.0mol%, superconducting characteristics are deteriorated, and reluctance effect is decreased. Powder to which the compound containing Ba is added is fired at 840-860 deg.C after molding. When firing is performed at 840 deg.C or lower, 110 class superconductor is hard to be formed. When firing is performed at 860 deg.C or higher, a fired object is fused and can not be used as a magneto-sensitive element.

10. 发明专利

JPH0574232A DEGRADATION PREVENTING METHOD FOR OXIDE SUPERCONDUCTOR 失效
公开(公告)号：JPH0574232A
公开(公告)日：1993-03-26
申请号：JP26136691
申请日：1991-09-13
申请人： NIHON CEMENT
发明人： SHIMOJIMA HIROMASA , ISHII MAMORU , TSUKAMOTO KEIZO , YAMAGISHI SENJO
IPC分类号： C01G1/00 , C04B41/85 , H01B12/02 , H01B13/00 , H01L39/24
摘要： PURPOSE:To prevent the degradation of an oxide superconductor due to moisture. CONSTITUTION:A Pb-Si-Cd-Bi-O base glass material, which melts at 600 deg.C or less and vitrifies, is coated on the surface of an oxide superconductive polycrystalline so as to form a vitreous protecting film. Its degradation due to the invasion of moisture can be prevented by the vitreous protecting film, so that the characteristics served by the oxide superconductive polycrystalline can be kept for a long term. And subsequently the quantity of optimum stabilizing materials can be easily selected by varying the ratio of the wire 7 to the wire 8. Whereby, the increase in the critical current density and the decrease in the AC loss can be performed while enhancing the stability and the high strength.

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