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1. 发明专利

JP2003273062A Etching rate control monitor 审中-公开
标题翻译：蚀刻速率控制监视器
公开(公告)号：JP2003273062A
公开(公告)日：2003-09-26
申请号：JP2002068133
申请日：2002-03-13
申请人： Miyota Kk , ミヨタ株式会社
发明人： SAKURAI HIDENORI
IPC分类号： H01L21/306
摘要： PROBLEM TO BE SOLVED: To provide an etching rate control monitor which controls the progress of etching of Si and SiO2 in a chemical, such as hydrofluoric acid or ammonium fluoride in which Si and SiO2 are dissolved, by a measurement method which is independent of the component concentrations in the chemical.
SOLUTION: There are provided an electrode which always contacts to an AT cut quartz oscillator by utilizing the relation between the frequency and the thickness of the AT cut quartz oscillator, an etching rate control monitor which comprises a movable electrode that repeats touching/detouching from the surface of AT cut quartz oscillator in the pressure of a liquid caused by reciprocation of a monitor body, a mechanism which automatically reciprocates it, and an instrument that measures the frequency.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供一种蚀刻速率控制监视器，其通过测量方法来控制溶解有Si和SiO 2的氢氟酸或氟化铵等化学物质中的Si和SiO 2的蚀刻进行，独立于化学品中的组分浓度。解决方案：通过利用AT切割石英振荡器的频率和厚度之间的关系，提供总是与AT切割石英振荡器接触的电极，蚀刻速率控制监视器，其包括可重复接触/ 在AT切割石英振荡器的表面上，由监视器主体的往复运动引起的液体压力，自动往复运动的机构，以及测量频率的仪器。版权所有（C）2003，JPO

2. 发明专利

JP2004282141A Surface mount tuning fork type crystal oscillator incorporating illumination 审中-公开
公开(公告)号：JP2004282141A
公开(公告)日：2004-10-07
申请号：JP2003066888
申请日：2003-03-12
申请人： Miyota Kk , ミヨタ株式会社
发明人： SAKURAI HIDENORI
IPC分类号： H03B5/32 , H03H9/02 , H03H9/10 , H03H9/215
摘要： PROBLEM TO BE SOLVED: To provide a surface mount tuning fork type crystal oscillator wherein the mechanical operations of a built-in tuning fork type crystal chip can be observed.
SOLUTION: An illumination unit such as an LED for lighting up the tuning fork type crystal chip is built inside the surface mount tuning fork type crystal oscillator and the mechanical operations of the tuning fork type crystal chip can be observed by controlling the blinking period of the LED, and the surface mount tuning fork type crystal oscillator incorporating the illumination is configured by incorporating an LED blinking period control circuit, a vibration chip for the blinking period control circuit, and an oscillation circuit for the tuning fork type crystal chip, and providing a magnification lens function such as a Fresnel lens function to the lid.
COPYRIGHT: (C)2005,JPO&NCIPI

3. 发明专利

JP2005274699A Patterning method 有权
标题翻译：绘图方法
公开(公告)号：JP2005274699A
公开(公告)日：2005-10-06
申请号：JP2004084724
申请日：2004-03-23
申请人： Miyota Kk , ミヨタ株式会社
发明人： SAKURAI HIDENORI
IPC分类号： G03F9/02 , H03H3/02
摘要： PROBLEM TO BE SOLVED: To solve a problem that resist is applied and peeled each time a pattern is formed on each surface of a substrate and then the resist is consumed more.
SOLUTION: A patterning method of forming a substrate in a desired external shape includes the stages of: forming metal films at least on both surfaces of the substrate; forming a resist film on one surface of the substrate where the metal films are formed; exposing the resist film to a pattern in an arbitrary shape and developing it; forming a protection film on the surface of the substrate where the resist film is formed; forming a resist film on the other surface of the substrate, i.e. the surface of the substrate where the protection film is not formed; exposing the resist film formed on the other surface of the substrate to a pattern in an arbitrary shape and developing it; removing the protection film; etching the metal films exposed on both the surfaces of the substrate; and removing the resist film.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了解决每次在基板的每个表面上形成图案并且然后抗蚀剂被消耗的问题，抗蚀剂被施加和剥离。解决方案：以期望的外形形成衬底的图案化方法包括以下阶段：至少在衬底的两个表面上形成金属膜; 在形成金属膜的基板的一个表面上形成抗蚀剂膜; 将抗蚀剂膜暴露于任意形状的图案并显影; 在形成有抗蚀剂膜的基板的表面上形成保护膜; 在基板的另一个表面，即不形成保护膜的基板的表面上形成抗蚀剂膜; 将形成在基板的另一表面上的抗蚀剂膜暴露于任意形状的图案并显影; 去除保护膜; 蚀刻暴露在基板的两个表面上的金属膜; 并除去抗蚀剂膜。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JPH11271369A Method for measuring characteristic of quartz oscillator 失效
标题翻译：用于测量QUARTZ振荡器特性的方法
公开(公告)号：JPH11271369A
公开(公告)日：1999-10-08
申请号：JP9834798
申请日：1998-03-25
申请人： Citizen Watch Co Ltd , Miyota Kk , シチズン時計株式会社 , ミヨタ株式会社
发明人： AKUTSU SATORU , SAKURAI HIDENORI , YANAGISAWA KATSUNORI , IWAHASHI HIROSUKE
IPC分类号： G01R29/22
摘要： PROBLEM TO BE SOLVED: To correctly measure a characteristic at many points in a minimum required time by resetting a measurement requirement time (standby time) with taking a responsivity corresponding to a Q value of a quartz oscillator into consideration and measuring the characteristic.
SOLUTION: Measurement conditions such as a center frequency F0, a resolution bandwidth (BW), a sweep speed, etc., are input to a measuring apparatus. A quartz oscillator to be measured is set to a measuring jig having an electrode and inserted to a π circuit. A ratio of input output voltages, a phase difference, or the like of the quartz oscillator is measured according to a transmission method. A Q value proper to the oscillator is measured. In accordance with the measured result, a measurement time interval, that is, a response time or standby time for measurements after a drive level(DL), a frequency or the like condition is changed, and the sweep speed, etc., are calculated and reset. In this case, a measurement requirement time is set to be longer as the Q value is higher. With using an initial value of the DL as a start condition, a predetermined characteristic dependent on the DL is measured, recorded and accumulated. An inspection time is accordingly shortened and inspection costs and investment amount into inspection facilities are reduced.
COPYRIGHT: (C)1999,JPO
摘要翻译：要解决的问题：考虑并测量特性，通过以与石英振荡器的Q值对应的响应度来重置测量要求时间（待机时间）来在最小所需时间内在许多点上正确地测量特性。解决方案：测量装置输入诸如中心频率F0，分辨率带宽（BW），扫描速度等的测量条件。要测量的石英振荡器设置为具有电极并插入到π电路的测量夹具。根据传输方法测量石英振荡器的输入输出电压，相位差等的比率。测量振荡器适当的Q值。根据测量结果，测量时间间隔，即，在驱动电平（DL），频率等条件之后的测量的响应时间或待机时间被改变，并且计算扫描速度等并重置。在这种情况下，随着Q值越高，测量要求时间越长。使用DL的初始值作为起始条件，测量，记录和累积取决于DL的预定特性。相应地缩短了检查时间，降低了检查费用和投入金额。

5. 发明专利

JP2003283288A Support structure of crystal oscillator 审中-公开
标题翻译：晶体振荡器的支撑结构
公开(公告)号：JP2003283288A
公开(公告)日：2003-10-03
申请号：JP2002085048
申请日：2002-03-26
申请人： Miyota Kk , ミヨタ株式会社
发明人： KOBAYASHI SHINICHI , SAKURAI HIDENORI
IPC分类号： H03H9/10 , H03H9/02
摘要： PROBLEM TO BE SOLVED: To provide an easily manufacturable crystal oscillator support structure.
SOLUTION: The crystal oscillator is composed of at least a tuning fork type crystal piece having lengthwise fork branches or a rectangular crystal piece, a package having a recess for housing the crystal piece, and a lid for tightly closing the recess. The package has a pedestal for fixing only lengthwise one end of the crystal piece in the recess. The crystal piece has a broad shoulder at a portion to be fixed to the pedestal and a boss on the lengthwise end. The shoulder and the boss on the crystal piece end serve for positioning and fixing the piece on the pedestal in the package recess.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供易于制造的晶体振荡器支撑结构。解决方案：晶体振荡器至少由具有纵向叉分支或矩形晶体片的音叉型晶体片组成，具有用于容纳晶片的凹部的封装以及用于紧密封闭凹部的盖。该包装具有用于将水晶片的纵向一端固定在凹槽中的基座。水晶片在要固定到基座的部分上具有宽的肩部，在纵向端部具有凸台。晶片上的肩部和凸台用于将件定位并固定在包装凹槽中的底座上。版权所有（C）2004，JPO

6. 发明专利

JP2005260712A Method for manufacturing tuning fork type quartz oscillator 审中-公开
标题翻译：用于制造调谐型脉冲振荡器的方法
公开(公告)号：JP2005260712A
公开(公告)日：2005-09-22
申请号：JP2004071217
申请日：2004-03-12
申请人： Miyota Kk , ミヨタ株式会社
发明人： SAKURAI HIDENORI
IPC分类号： H03H3/02 , H03H9/19 , H03H9/215
摘要： PROBLEM TO BE SOLVED: To solve the problem that the shapes of left and right turning fork branch parts of a tuning fork type quartz oscillator using a photolithography technique become different by the influence of etching anisotropy.
SOLUTION: In a method for manufacturing the tuning fork type quartz oscillator using the photolithography technique, etching pattern width of a crystal orientation side that causes etching residue of a tuning fork branch part of the tuning fork type quartz oscillator is uniformly set to perform etching.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题为了解决使用光刻技术的音叉型石英振荡器的左右转叉分支部件的形状由于蚀刻各向异性的影响而变得不同的问题。解决方案：在使用光刻技术制造音叉型石英振荡器的方法中，将音叉型石英振荡器的音叉分支部分的蚀刻残留物的晶体取向侧的蚀刻图案宽度均匀地设定为进行蚀刻。版权所有（C）2005，JPO＆NCIPI

7. 发明专利

JPH11271370A Method for measuring dependency characteristic on excitation power of piezoelectric oscillator 失效
标题翻译：测量压电振荡器激励力依赖性的方法
公开(公告)号：JPH11271370A
公开(公告)日：1999-10-08
申请号：JP9834898
申请日：1998-03-25
申请人： Citizen Watch Co Ltd , Miyota Kk , シチズン時計株式会社 , ミヨタ株式会社
发明人： AKUTSU SATORU , SAKURAI HIDENORI
IPC分类号： G01R29/22
摘要： PROBLEM TO BE SOLVED: To surely catch an abnormal characteristic by measuring an excitation power dependency characteristic (DLD) at many points in an ascending and a descending reciprocatory processes and judging a quality by measured data.
SOLUTION: A measurement condition is input to a measuring apparatus and a sample quartz oscillator is set to a measuring jig. A frequency is swept while a set excitation power (DL) is maintained. A characteristic is measured, that is, a resonant frequency Fn and a crystal impedance(CI) value as a minimum value of an impedance exhibited by the quartz oscillator are obtained. When the resonant frequency Fn is present within a good product range between a lower limit FL and an upper limit FU, whether or not an upper limit value of the DL is reached is checked and the upper limit value of the DL is set. The measurement is carried out for a descending process in the same procedures as for the above ascending process. When the DL reaches a final value, or when the oscillator is judged to have a frequency failure and is a last sample in an inspection lot being measured, the measurement is terminated. If the oscillator is not a last one, the measurement is returned to an initial stage.
COPYRIGHT: (C)1999,JPO
摘要翻译：要解决的问题：通过在上升和下降的往复处理中测量多个点处的激励功率依赖特性（DLD）来确定地捕获异常特性，并通过测量数据判断质量。解决方案：将测量条件输入到测量装置，并将样品石英振荡器设置到测量夹具。当维持设定的励磁功率（DL）时，频率被扫描。测定特性，即，获得作为石英振荡器所呈现的阻抗的最小值的共振频率Fn和晶体阻抗（CI）值。当共振频率Fn存在于下限值FL和上限值FU之间的良好乘积范围内时，检查是否达到了DL的上限值，并且设定了DL的上限值。以与上述上升处理相同的程序进行下降处理。当DL达到最终值时，或当振荡器被判定为频率故障并且是被测量的检验批中的最后一个样本时，测量结束。如果振荡器不是最后一个振荡器，测量将返回到初始阶段。

8. 发明专利

JPH11271368A Method for measuring frequency of quartz oscillator 失效
标题翻译：用于测量QUARTZ振荡器频率的方法
公开(公告)号：JPH11271368A
公开(公告)日：1999-10-08
申请号：JP9834698
申请日：1998-03-25
申请人： Citizen Watch Co Ltd , Miyota Kk , シチズン時計株式会社 , ミヨタ株式会社
发明人： AKUTSU SATORU , SAKURAI HIDENORI , YANAGISAWA KATSUNORI , IKEDA RYOTA
IPC分类号： G01R29/22
摘要： PROBLEM TO BE SOLVED: To provide a measurement method whereby a resonant frequency can be measured sufficiently correctly and efficiently under a condition close to a final product with error factors and operation inconvenience in the prior art measurement method eliminated.
SOLUTION: A quartz oscillator 1 of a rectangular plate having a plurality of lead electrodes for excitation electrodes disposed in the vicinity of at least one short side is an object to be measured according to this method. A pair of contact elements 2 are provided which touch thereby holding a small area of a predetermined position of the vicinity of the short side in a perpendicular direction to a plate face. A conductor to be in touch with the lead electrode 12 is set at the contact element. A jig to which a measurement terminal of an oscillator characteristic-measuring circuit 3 according to a transmission method is connected beforehand is used for the conductor. While the quartz oscillator to be measured is held by the contact elements 2, a resonant frequency of the quartz oscillator to be measured is measured by the transmission method.
COPYRIGHT: (C)1999,JPO
摘要翻译：要解决的问题：提供一种测量方法，其可以在接近最终产品的状况下充分正确和有效地测量共振频率，并且消除了现有技术测量方法中的误差因素和操作不便。解决方案：根据该方法，具有设置在至少一个短边附近的用于激励电极的多个引线电极的矩形板的石英振荡器1是待测量的对象。提供一对接触元件2，从而将短边附近的预定位置的小面积保持在与板面垂直的方向上。与引线电极12接触的导体设置在接触元件上。导体使用根据传输方法连接的振荡器特性测量电路3的测量端的夹具。当被测量的石英振荡器被接触元件2保持时，通过传输方法测量被测量的石英振荡器的谐振频率。

9. 发明专利

JP2000269764A METHOD AND DEVICE FOR INSPECTION OF QUARTZ VIBRATOR 失效
公开(公告)号：JP2000269764A
公开(公告)日：2000-09-29
申请号：JP7486199
申请日：1999-03-19
申请人： MIYOTA KK , CITIZEN WATCH CO LTD
发明人： AKUTSU SATORU , SAKURAI HIDENORI , IWAHASHI HIROSUKE , YANAGISAWA KATSUNORI
IPC分类号： G01R29/22 , H03H3/02
摘要： PROBLEM TO BE SOLVED: To automatically perform efficient inspection in a short time without increasing the number of substantial inspectors by measuring electrical feature and classifying it, on the basis of measurement data after individually detecting faults of an outward appearance optically. SOLUTION: A quartz piece 1 is irradiated with a light from a light source 4, which is a transmission light of an outward appearance inspection stage 3 of a transparent glass, its outline, a boundary between a bevel surface and a planar surface, a state of etching unevenness, a fault position and shape, and a size are focused upon a CCD camera 5 by a luminance difference, a light amount of a pixel is scanned, a dimensional accuracy of the quartz piece 1 and the fault of the outward appearance are stored in a controller 100. After that, the quartz piece 1 is dropped to an electrical feature detection stage 7 by a rocking lever 6, an oscillation frequency and an equivalent resistance value at the time of serial resonance are measured by a movable electrode 7b on a fixed electrode 7a, and their data are stored in the controller 100. Then, the quartz piece 1 is picked up by a rocking lever 8 and classified into one section in a classifying device 9, according to two data stored by the controller.

10. 发明专利

JP2001237663A CRYSTAL VIBRATOR 失效
公开(公告)号：JP2001237663A
公开(公告)日：2001-08-31
申请号：JP2000048409
申请日：2000-02-25
申请人： MIYOTA KK
发明人： SAKURAI HIDENORI
IPC分类号： H03H9/02 , H03H9/19
摘要： PROBLEM TO BE SOLVED: To facilitate connection of a crystal vibrator which is to be connected to a ground pattern while using a metal case as a shield member, to the ground pattern. SOLUTION: Concerning the crystal vibrator, with which a crystal piece is directly or indirectly fixed to the inner lead terminal of an air-tight terminal respectively independently positioning and fixing plural lead terminals to a metal frame by insulating glass and the metal cover is bonded and sealed to the metal frame, a solder layer is formed over all or a part of the lower surface or lower surface and side face of the metal frame.

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