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    • 1. 发明专利
    • Joining structure of element
    • 元件接合结构
    • JP2008108975A
    • 2008-05-08
    • JP2006291616
    • 2006-10-26
    • Mitsui Mining & Smelting Co Ltd三井金属鉱業株式会社
    • URABE HIRONARIMATSUURA YOSHINORIKUBOTA TAKASHI
    • H01L21/3205H01L21/28H01L21/768H01L23/52H01L29/786
    • PROBLEM TO BE SOLVED: To provide an element wherein when directly joining a semiconductor layer such as n + -Si and an Al-Ni-based alloy layer, the mutual diffusion of Al and Si can be so prevented as to be able to maintain the ohmic characteristic of the element. SOLUTION: In the element having a semiconductor layer and having an Al-Ni-based alloy layer joined directly to the semiconductor layer, the Al-Ni-based alloy layer joined directly to the semiconductor layer is so formed that the concentration of the nitrogen contained in it is not smaller than 2×10 17 atoms/cm 3 and is smaller than 9×10 21 atoms/cm 3 . Also, the refractive index of the bonding surface side of the Al-Ni-based alloy layer is made preferably not less than 1.9. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种元素,其中当直接接合诸如n -Si和Al-Ni基合金层的半导体层时,Al和Si的相互扩散可以 能够保持元件的欧姆特性。 解决方案:在具有半导体层并且具有直接连接到半导体层的Al-Ni基合金层的元件中,形成直接连接到半导体层的Al-Ni基合金层,使得浓度 其中所含的氮不小于2×10 3原子/ cm 3 / SP,并且小于9×10 21原子/ cm 2, SP> 3 。 此外,Al-Ni系合金层的接合面侧的折射率优选为1.9以上。 版权所有(C)2008,JPO&INPIT
    • 2. 发明专利
    • Method for manufacturing display device
    • 制造显示装置的方法
    • JP2007072325A
    • 2007-03-22
    • JP2005261396
    • 2005-09-08
    • Mitsui Mining & Smelting Co Ltd三井金属鉱業株式会社
    • KUBOTA TAKASHIMATSUURA YOSHINORI
    • G02F1/1343G02F1/1368G03F7/42H01L21/027H01L21/768
    • PROBLEM TO BE SOLVED: To provide techniques of manufacturing a display device capable of preventing an increase in a contact resistance or joint failure in a display device having a structure of an aluminum alloy layer and a transparent electrode layer directly joined through a contact hole. SOLUTION: The method for manufacturing a display device includes the steps of forming an insulating layer on an aluminum alloy layer formed on a substrate, coating the insulating layer with a resist, dry etching to form a contact hole, and directly joining the transparent electrode layer with the aluminum alloy layer through the contact hole, wherein a stripping liquid used to strip the resist is a nonaqueous solution and the nonaqueous solution contains a polar solvent and/or an organic amine. COPYRIGHT: (C)2007,JPO&INPIT
    • 解决的问题:提供一种能够防止在具有通过接触直接接合的铝合金层和透明电极层的结构的显示装置中的接触电阻或接合故障增加的显示装置的制造技术 孔。 解决方案:显示装置的制造方法包括以下步骤:在形成在基板上的铝合金层上形成绝缘层,用抗蚀剂涂覆绝缘层,干蚀刻以形成接触孔,并直接接合 透明电极层与铝合金层通过接触孔,其中用于剥离抗蚀剂的剥离液是非水溶液,非水溶液含有极性溶剂和/或有机胺。 版权所有(C)2007,JPO&INPIT
    • 5. 发明专利
    • Bonding structure of element
    • 元素的结合结构
    • JP2008078243A
    • 2008-04-03
    • JP2006253488
    • 2006-09-19
    • Mitsui Mining & Smelting Co Ltd三井金属鉱業株式会社
    • MATSUURA YOSHINORIKUBOTA TAKASHI
    • H01L21/3205C22C21/00H01L23/52
    • PROBLEM TO BE SOLVED: To provide a manufacturing technology with which damage such as erosion to a wiring circuit is suppressed as much as possible on an element where the wiring circuit formed of Al-based alloy is directly bonded to a transparent electrode and the highly reliable element is achieved.
      SOLUTION: In a bonding structure of having a transparent electrode and a wiring circuit formed of Al-based alloy which is directly bonded to the transparent electrode, a taper angle of a wiring circuit side is 20°to 75°. It is desirable that Al-based alloy is Al-Ni-based alloy and it is much more desirable that it is Al-Ni-B alloy.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种制造技术,其中尽可能地将由Al基合金形成的布线电路直接接合到透明电极的元件上尽可能地抑制诸如对布线电路的侵蚀的损坏,以及 实现了高度可靠的元件。 解决方案:在具有透明电极和直接接合到透明电极的Al基合金形成的布线电路的接合结构中,布线电路侧的锥角为20°至75°。 Al基合金优选为Al-Ni系合金,更优选为Al-Ni-B系合金。 版权所有(C)2008,JPO&INPIT