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    • 1. 发明专利
    • Apparatus for forming carbon-based thin film, film-forming apparatus and film-forming method
    • 用于形成基于碳的薄膜,成膜装置和成膜方法的装置
    • JP2005082887A
    • 2005-03-31
    • JP2003320205
    • 2003-09-11
    • Mitsubishi Heavy Ind LtdTsuru Gakuen三菱重工業株式会社学校法人鶴学園
    • YOSHIDA MITSUHIROKATSURA TOSHIAKICHIYOMARU MASARUFUKUMORI KENJITAKAGI TOSHINORITANAKA TAKESHI
    • H05H1/46C23C14/06C23C14/34C23C14/40
    • PROBLEM TO BE SOLVED: To provide a film-forming technology for further optimizing a quality and structure of a carbon-based thin film. SOLUTION: This film-forming apparatus comprises a vacuum vessel (1) for accommodating a workpiece (W); raw material-feeding mechanisms (4, 7 and 8) for feeding a raw material of the carbon-based thin film to be formed on the surface of the workpiece (W); an electrode (6) which is accommodated in the vacuum vessel (1) and holds the workpiece (W); and a power source (11) for generating plasma, which applies voltage for generating plasma inside the vacuum vessel (1) to the electrode (6). The voltage for generating plasma applied to the electrode (6) comprises a pulsed alternating current with RF (Radio Frequency) (22) in which alternating voltage is continued with a frequency in a radio frequency RF band for a predetermined period of time, a pulsed direct current having positive voltage (21), and a pulsed direct current having negative voltage (23). COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供一种用于进一步优化碳基薄膜的质量和结构的成膜技术。 解决方案:该成膜装置包括用于容纳工件(W)的真空容器(1)。 用于将要形成的碳基薄膜的原料供给到工件(W)的表面上的原料供给机构(4,7和8); 容纳在真空容器(1)中并保持工件(W)的电极(6); 以及用于产生等离子体的电源(11),其将用于在所述真空容器(1)内产生等离子体的电压施加到所述电极(6)。 用于产生施加到电极(6)的等离子体的电压包括具有射频(射频)(22)的脉冲交流电,其中交变电压以射频RF频带中的频率持续预定时间段,脉冲 具有正电压(21)的直流电流和具有负电压(23)的脉冲直流电。 版权所有(C)2005,JPO&NCIPI
    • 2. 发明专利
    • Gas sampler, gas sampling system, exhaust gas separation method and exhaust gas analyzing method
    • 气体取样器,气体采样系统,排气分离方法和排气分析方法
    • JP2010133875A
    • 2010-06-17
    • JP2008311502
    • 2008-12-05
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • NOZAKI AKIHIROCHIYOMARU MASARUTSUKAHARA CHISATODOBASHI SHINSAKU
    • G01N1/22G01N30/04G01N30/88G01N31/00G01N31/16
    • PROBLEM TO BE SOLVED: To provide a gas sampler, gas sampling system, exhaust gas separation method and exhaust gas analyzing method for analyzing a gas component in exhaust gas simply and more accurately. SOLUTION: The gas sampler 10A includes: an injection syringe 14A that includes an outer cylinder 11A and an inner cylinder 12A insertably installed in the outer cylinder 11A and that has a storage part 13 for storing a predetermined amount of off-gas when the inner cylinder 12A is pulled out; and an absorbent liquid containing part 15 that is formed inside the inner cylinder 12A and that contains an absorbent liquid for absorbing a particular component in a predetermined amount of exhaust gas, wherein the absorbent liquid is supplied into the storage part 13. When sampling an off-gas, an absorbent liquid corresponding to a target component is contained in the absorbent liquid containing part 15 and thus a component being the main cause of deposition in the off-gas is absorbed by the absorbent liquid and separated, and then the concentrations of the component in the absorbent liquid and another component in the remaining gas are analyzed and thus the balance of the entire gas composition of the off-gas is determined. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种简单,准确地分析排气中的气体成分的气体取样器,气体取样系统,废气分离方法和排气分析方法。 气体取样器10A包括:注射注射器14A,其包括外筒11A和可插入安装在外筒11A中的内筒12A,并且具有用于储存预定量的废气的储存部13, 内筒12A被拉出; 以及吸收液体容纳部15,其形成在内筒12A的内部,并且含有用于吸收规定量的废气中的特定成分的吸收液,其中,吸收液被供给到收纳部13中。 气体,吸收剂液体容纳部15中含有与目标成分相当的吸收性液体,因此作为废气中沉积的主要原因的成分被吸收液吸收并被分离, 分析吸收液中的成分和剩余气体中的其他成分,确定废气的全部气体成分的平衡。 版权所有(C)2010,JPO&INPIT
    • 8. 发明专利
    • Mist containing gas analyzer
    • 含气体分析仪的MIST
    • JP2013130444A
    • 2013-07-04
    • JP2011279377
    • 2011-12-21
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • OKAMOTO SHINICHINAGAYASU HIROTSUGUCHIYOMARU MASARUTSUJIUCHI TATSUYAHIRATA TAKUYATANAKA YUJI
    • G01N1/22C01B32/50
    • G01N1/4055B01D53/1412B01D53/1475B01D53/18G01N33/0054G01N2001/2267G01N2001/4066Y02A50/246
    • PROBLEM TO BE SOLVED: To provide a mist containing gas analyzer capable of easily and accurately measuring the concentration of a substance to be measured in a target gas containing mist of the substance to be measured.SOLUTION: A mist containing gas analyzer comprises a collection vessel 116 in which a collected liquid 2 can be stored, a sampling tube 111 for sampling combustion exhaust gas 1, a guide tube 112, an introduction tube 114, etc., an electrothermal heater 113 which heats the tubes 111, 112, 114 so as to atomize amine or the like sampled by the tubes 111, 112, 114, a feed tube 115 or the like for feeding the gas 1 sampled by the tubes 111, 112, 114 into the collected liquid 2 inside of the collection vessel 116, a clean liquid introduction tube 132 or the like for feeding supplying a clean liquid 3 to the pipe 115 and feeding the amine or the like deposited on the tube 115 from the tube 115 into the collection vessel 116 together with the clean liquid 3, and a measuring device 130 which measures the concentration of the amine or the like in the liquids 2, 3.
    • 要解决的问题:提供一种含雾气分析仪,其能够容易且准确地测量待测物质的目标气体中待测物质的浓度。解决方案:含雾气体分析仪包括收集容器 116,其中可以存储收集的液体2,用于对燃烧废气1进行采样的采样管111,引导管112,导入管114等,加热管111,112,114的电热加热器113,以便 以雾化由管111,112,114取样的胺等,用于将由管111,112,114取样的气体1供给到收集容器116内的收集液体2中的进料管115等 用于将清洁液体3供给到管115并将沉积在管115上的胺等与清洁液体3一起从管115供给到收集容器116中的清洁液体引入管132等, 开发商 冰130,其测量液体2,3中胺等的浓度。
    • 9. 发明专利
    • Selenium analyzer and selenium fractional determination method
    • SELENIUM分析仪和SELENIUM分级测定方法
    • JP2008076253A
    • 2008-04-03
    • JP2006256371
    • 2006-09-21
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • CHIYOMARU MASARUSHIRAKUSA YUKIKO
    • G01N31/00C02F1/32C02F1/42C02F1/70G01N21/31G01N21/71G01N27/62G01N30/88
    • PROBLEM TO BE SOLVED: To provide a selenium analyzer capable of rapid and accurate measurement of the respective concentrations of tetravalent selenium and hexavalent selenium in wastewater, and to provide a selenium fractional determination method.
      SOLUTION: The selenium analyzer 10 has a selenium separation part 12 for fractionating a part of a sample, collected from waste water containing tetravalent selenium and hexavalent selenium into tetravalent selenium and hexavalent selenium; a selenium reducing part 19 for supplying a part of another sample to a solution, which contains an organic reducing agent 14; an acid 16 and a photocatalyst 17 to be irradiated with ultraviolet rays 18 for reducing hexavalent selenium and tetravalent selenium to metal selenium and hydrogen selenide; a selenium hydrogenating part 24 for reducing tetravalent selenium or metal selenium to hydrogen selenide by an acid 21 and a reducing agent 23; and a selenium analyzing part 25 for analyzing hydrogen selenide, that is reduced in the selenium hydrogenating part 24 for measuring the concentration of tetravalent selenium and the concentration of total selenium.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供能够快速和准确地测量废水中四价硒和六价硒的浓度的硒分析仪,并提供硒分数测定方法。 硒分析仪10具有硒分离部12,用于将从四价硒和六价硒的废水中收集的一部分样品分馏成四价硒和六价硒; 用于将另一个样品的一部分供给到含有有机还原剂14的溶液中的硒还原部分19; 用于将六价硒和四价硒还原成金属硒和硒化氢的紫外线18照射的酸16和光催化剂17; 通过酸21和还原剂23将四价硒或金属硒还原成硒化氢的硒氢化部分24; 以及用于分析硒化氢的硒分析部件25,其中硒氢化部分24用于测量四价硒的浓度和总硒的浓度。 版权所有(C)2008,JPO&INPIT